Pickling etching waste liquid recycling device

Abstract

The utility model relates to a cyclic recycling device, in particular to a cyclic recycling device for pickling etching waste liquid, which comprises a base, a console, an electrolytic tank, a regeneration tank, a waste liquid tank, a liquid medicine tank, a first pump and the like, the top of the base is fixedly connected with an electrolytic tank and a regeneration tank, one side, far away from the electrolytic tank and the regeneration tank, of the base is fixedly connected with a waste liquid tank and a liquid medicine tank, a first pump mounted at the top of the base is arranged between the electrolytic tank and the waste liquid tank, and a second pump and a third pump mounted at the top of the base are arranged between the regeneration tank and the liquid medicine tank. According to the utility model, the console is matched with various sensors (such as a liquid level control switch, an air pressure sensor, a pressure sensor and the like) for use, so that the automatic control of the waste liquid treatment process is realized, the manual intervention is reduced, and the working efficiency and the accuracy are improved.

Description

Technical Field

[0001] The utility model relates to a recycling and regeneration device, in particular to a recycling and regeneration device for pickling and etching waste liquid. Background Art

[0002] Acid etching is a critical process in semiconductor manufacturing and electronic component production, used to precisely remove specific areas of a material's surface to create circuit patterns. This process generates wastewater containing high concentrations of copper ions and other chemical components. For environmental protection and resource recovery purposes, this wastewater is typically sent to a recycling system to extract valuable copper materials.

[0003] Traditional pickling and etching recycling systems rely heavily on manual operation by on-site personnel to manage equipment operation. Manual operation cannot meet certain equipment control requirements for timely, accurate, and efficient operation. Furthermore, on-site equipment requires 24 / 7 operator supervision, which consumes a significant amount of staff time and results in extremely low efficiency.

[0004] Therefore, it is necessary to design a pickling and etching waste liquid recycling and utilization device. Utility Model Content

[0005] In order to overcome the shortcomings of low automation and high labor cost of traditional recycling devices, the technical problem to be solved is: to provide a recycling and regeneration device for pickling and etching waste liquid.

[0006] The technical solution of the utility model is: a pickling and etching waste liquid recycling and utilization device, comprising a base, a control console, an electrolytic cell, a regeneration cell, a waste liquid tank, a medicine tank, a first pump, a connecting pipe, a second pump and a third pump, the top of the base is fixedly connected to the electrolytic cell and the regeneration cell, the side of the base away from the electrolytic cell and the regeneration cell is fixedly connected to the waste liquid tank and the medicine tank, the first pump installed on the top of the base is arranged between the electrolytic cell and the waste liquid tank, the second pump and the third pump installed on the top of the base are arranged between the regeneration cell and the medicine tank, the first pump is connected to the electrolytic cell and the waste liquid tank through the connecting pipe, the third pump is connected to the regeneration cell and the medicine tank through the connecting pipe, the second pump is connected to the electrolytic cell and the regeneration cell through the connecting pipe, and a control console for controlling the operation of the first pump, the second pump and the third pump is installed on the base.

[0007] As a preferred technical solution of the present invention, an air processing unit is installed at the base near the regeneration tank, and the air processing unit is connected to the electrolytic cell and the regeneration tank through an air pipe.

[0008] As a preferred technical solution of the present invention, an air pressure sensor for sensing the air pressure inside the air pipe is installed on the air pipe, and the air pressure sensor is electrically connected to the control console.

[0009] As an optimal technical solution of the present invention, pressure sensors are installed at the bottom of the waste liquid tank and the medicine tank, and alarm lights are installed on the base near the waste liquid tank and the medicine tank respectively. The pressure sensors and the alarm lights are electrically connected to the console.

[0010] As a preferred technical solution of the present invention, a liquid level control switch is installed inside the electrolytic cell, and the liquid level control switch is electrically connected to the control console.

[0011] As a preferred technical solution of the present invention, a chlorine alarm for detecting chlorine concentration is installed on one side of the electrolytic cell and the regeneration cell. The two chlorine alarms are respectively communicated with the inside of the electrolytic cell and the regeneration cell.

[0012] As a preferred technical solution of the present invention, the tops of the electrolytic cell and the regeneration cell are rotatably connected with sealing covers for sealing the electrolytic cell and the regeneration cell respectively.

[0013] As a preferred technical solution of the present invention, an air pump is installed on one side of the regeneration tank, and the air pump is connected to the inside of the regeneration tank through an air blowing pipe.

[0014] The utility model has the following advantages: 1. The utility model realizes the automatic control of the waste liquid treatment process through the coordinated use of the control console and various sensors (such as liquid level control switch, air pressure sensor, pressure sensor, etc.), reduces manual intervention, and improves work efficiency and accuracy.

[0015] 2. The utility model effectively prevents the leakage of harmful gases in the electrolytic cell and the regeneration cell through the design and use of the air handler, thereby ensuring the personal safety of workers. At the same time, the alarm functions of the air pressure sensor and the chlorine alarm further enhance the safety performance of the device.

[0016] 3. The design of pressure sensors and alarm lights at the bottom of the waste liquid tank and medicine tank can monitor the liquid inventory in real time and issue reminders when the inventory is insufficient, ensuring the continuity and efficiency of work. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model.

[0018] Figure 2 It is a schematic diagram of the three-dimensional structure of the first pump, the second pump and the third pump of the utility model.

[0019] Figure 3 This is a schematic diagram of the three-dimensional structure of the air handler and air pressure sensor of the utility model.

[0020] Figure 4 It is a three-dimensional structural diagram of the pressure sensor and warning light of the utility model.

[0021] Figure 5 It is a three-dimensional structural cross-sectional view of the electrolytic cell of the utility model.

[0022] Figure 6 This is a sectional view of the three-dimensional structure of the regeneration pool of the utility model.

[0023] The markings in the figure are: 1-base, 2-control console, 3-electrolytic cell, 4-regeneration cell, 5-sealing cover, 6-waste liquid tank, 7-chemical solution tank, 8-first pump, 9-connecting pipe, 10-second pump, 11-third pump, 12-gas pipe, 13-air handler, 14-air pressure sensor, 15-pressure sensor, 16-alarm light, 17-liquid level control switch, 18-chlorine alarm, 19-air pump, 20-air blowpipe. DETAILED DESCRIPTION

[0024] Reference herein to an embodiment means that a particular feature, structure, or characteristic described in connection with the embodiment may be included in at least one embodiment of the present invention. The appearance of such a phrase in various places in the specification does not necessarily refer to the same embodiment, nor does it constitute an independent or alternative embodiment that is mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0025] Example: Pickling and etching waste liquid recycling and utilization device, such as Figure 1 and Figure 2As shown, it includes a base 1, a console 2, an electrolytic cell 3, a regeneration cell 4, a waste liquid tank 6, a medicine tank 7, a first pump 8, a connecting pipe 9, a second pump 10 and a third pump 11. The top of the base 1 is fixedly connected to the electrolytic cell 3 and the regeneration cell 4. The waste liquid tank 6 and the medicine tank 7 are fixedly connected to the side of the base 1 away from the electrolytic cell 3 and the regeneration cell 4. A first pump 8 installed on the top of the base 1 is provided between the electrolytic cell 3 and the waste liquid tank 6. A second pump 10 and a third pump 11 installed on the top of the base 1 are provided between the regeneration cell 4 and the medicine tank 7. The first pump 8 is connected to the electrolytic cell 3 and the waste liquid tank 6 through the connecting pipe 9. The third pump 11 is connected to the regeneration cell 4 and the medicine tank 7 through the connecting pipe 9. The second pump 10 is connected to the electrolytic cell 3 and the regeneration cell 4 through the connecting pipe 9. The base 1 is equipped with a control panel for controlling the first pump 8, the second pump 10 and the third pump 11. The console 2 is operated by the pump 11, and the tops of the electrolytic cell 3 and the regeneration cell 4 are respectively rotatably connected with sealing covers 5 for sealing the electrolytic cell 3 and the regeneration cell 4. Here, a concentration detector is provided inside the electrolytic cell 3, and the concentration detector is electrically connected to the console 2. The console 2 is manually operated to control the first pump 8 to operate. The first pump 8 pumps the waste liquid in the waste liquid tank 6 and transports the waste liquid to the electrolytic cell 3. When the console 2 detects that the acidity of the waste liquid inside the electrolytic cell 3 is lower than the preset value through the concentration detector provided inside the electrolytic cell 3, the console 2 controls the second pump 10 to operate. The second pump 10 pumps the waste liquid inside the electrolytic cell 3 and transports the waste liquid to the regeneration cell 4. After the second pump 10 completes the transport work, the console 2 controls the third pump 11 to start, and the third pump 11 transports the etching solution in the solution tank 7 to the regeneration cell 4.

[0026] like Figure 3 As shown, an air handler 13 is installed near the regeneration tank 4 at the base 1. The air handler 13 is connected to the electrolytic cell 3 and the regeneration tank 4 through the gas pipe 12. A pressure sensor 14 is installed on the gas pipe 12 to sense the air pressure inside the gas pipe 12. The pressure sensor 14 is electrically connected to the console 2. Here, an alarm is installed outside the pressure sensor 14, and the alarm is electrically connected to the console 2. When the electrolytic cell 3 is performing electrolytic processing or the regeneration tank 4 is performing mixing work, the air handler 13 is started, and the air handler 13 pumps the electrolytic cell 3 and the regeneration tank 4 through the gas pipe 12. Chlorine and other harmful gases in the air. After the chlorine and other harmful gases enter the air processing unit 13, the air processing unit 13 will filter and purify the chlorine and other harmful gases and then discharge them, thereby preventing the leakage of harmful gases and ensuring the personal safety of workers. At the same time, the design of the air pressure sensor 14 can monitor the air pressure in the gas pipe 12 in real time. When the air pressure in the gas pipe 12 drops, the air pressure sensor 14 transmits a signal to the console 2. After receiving the signal, the console 2 controls the alarm bell to sound an alarm. At the same time, the console 2 shuts down the device to warn workers to conduct inspections and avoid the risk of harmful gas leakage.

[0027] like Figure 1 and Figure 5 As shown, pressure sensors 15 are installed at the bottom of the waste liquid tank 6 and the medicine tank 7, and alarm lights 16 are installed on the base 1 near the waste liquid tank 6 and the medicine tank 7 respectively. The pressure sensors and the alarm lights are electrically connected to the console. Here, when the pressure sensor 15 at the bottom of the waste liquid tank 6 senses that the weight of the liquid in the waste liquid tank 6 reaches a low value, the pressure sensor 15 sends an electrical signal to the console 2. After receiving the electrical signal, the console 2 controls the first pump 8 to stop running, and then the console 2 controls the alarm light 16 to start. The alarm light 16 continues to emit a conspicuous bright light, thereby reminding workers to replenish waste liquid and ensure the continuity and efficiency of work. The same is true for the medicine tank 7.

[0028] like Figure 5 As shown, a liquid level control switch 17 is installed inside the electrolytic cell 3, and the liquid level control switch 17 is electrically connected to the console 2. Here, after the second pump 10 has transported the waste liquid inside the electrolytic cell 3, the float below the liquid level control switch 17 drops with the waste liquid water level until the float below the liquid level control switch 17 contacts the contact below the liquid level control switch 17, forming a transmission of an electrical signal, so that the liquid level control switch 17 transmits a signal to the console 2 after receiving the electrical signal. After receiving the signal, the console 2 controls the first pump 8 to start. The first pump 8 again pumps the waste liquid in the waste liquid tank 6 and transports the waste liquid into the electrolytic cell 3. When the float above the liquid level control switch 17 rises with the waste liquid water level, the float above the liquid level control switch 17 contacts the contact above the liquid level control switch 17. After receiving the electrical signal, the liquid level control switch 17 transmits a signal to the console 2, so that the console 2 shuts down the first pump 8 after receiving the signal, thereby realizing automatic addition of waste liquid.

[0029] like Figure 2 and Figure 6 As shown, a chlorine alarm 18 for detecting chlorine concentration is installed on one side of the electrolytic cell 3 and the regeneration cell 4. The two chlorine alarms 18 are respectively connected to the inside of the electrolytic cell 3 and the regeneration cell 4. Here, the chlorine alarm 18 can monitor the concentration of chlorine and other harmful gases in the electrolytic cell 3 and the regeneration cell 4 in real time. When it is detected that the concentration of chlorine and other harmful gases in the electrolytic cell 3 and the regeneration cell 4 is too high, the chlorine alarm 18 will sound an alarm to remind workers, and at the same time, the console 2 will shut down the device to prevent the leakage of chlorine and other harmful gases.

[0030] like Figure 6As shown, an air pump 19 is installed on one side of the regeneration tank 4, and the air pump 19 is connected to the inside of the regeneration tank 4 through the air blowing pipe 20. Here, when the regeneration tank 4 performs mixing work, the air pump 19 is started, and the air pump 19 injects air into the regeneration tank 4 through the air blowing pipe 20. When the air floats up from the bottom of the liquid in the regeneration tank 4 due to its own density, continuous irregular bubbles are generated. The bubbles stir the liquid in the regeneration tank 4 during the floating process, thereby accelerating the reaction rate of the liquid in the regeneration tank 4 and improving the working efficiency of the device.

[0031] This device is used to recycle and reuse the waste liquid generated during the operation of the etching machine. When in use, the device is started, and then the console 2 is manually controlled to control the console 2 to control the operation of the first pump 8. The first pump 8 pumps the waste liquid in the waste liquid tank 6 and transports the waste liquid to the electrolytic cell 3. The device then supplies power to the electrolytic cell 3, and the electrolytic cell 3 electrolytically processes the waste liquid inside, thereby precipitating and collecting copper in the waste liquid, thereby recycling the waste liquid. When the console 2 detects that the acidity of the waste liquid inside the electrolytic cell 3 is lower than the preset value through the concentration detector set inside the electrolytic cell 3, the console 2 controls the operation of the second pump 10. The second pump 10 pumps the waste liquid inside the electrolytic cell 3 and transports the waste liquid to the regeneration tank 4. After the second pump 10 has transported the waste liquid inside the electrolytic cell 3, the float below the liquid level control switch 17 drops with the waste liquid water level until the float below the liquid level control switch 17 contacts the contact block below the liquid level control switch 17, forming an electrical signal transmission, so that the liquid level control switch After receiving the electrical signal, 17 transmits a signal to the console 2, causing the console 2 to control the first pump 8 to start. The first pump 8 again pumps the waste liquid in the waste liquid tank 6 and transfers the waste liquid to the electrolytic cell 3. When the float above the liquid level control switch 17 rises with the waste liquid level, the float above the liquid level control switch 17 contacts the contact block above the liquid level control switch 17. The liquid level control switch 17 receives the electrical signal and transmits a signal to the console 2. The console 2 then shuts down the first pump 8, thereby achieving automatic addition of waste liquid. After the second pump 10 completes its transfer operation, the console 2 controls the third pump 11 to start. The third pump 11 transfers the etching solution in the solution tank 7 to the regeneration tank 4. By mixing and reacting with the etching solution and the waste liquid in the regeneration tank 4, new etching agent is generated. The generated etching agent can then be used in the etching process, thereby achieving recycling of the waste liquid.

[0032] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any modifications or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A pickling and etching waste liquid recycling and utilization device, comprising a base (1), an electrolytic cell (3) and a regeneration cell (4), wherein the top of the base (1) is fixedly connected to the electrolytic cell (3) and the regeneration cell (4), and is characterized in that: The apparatus further comprises a control console (2), a waste liquid tank (6), a medicine tank (7), a first pump (8), a connecting pipe (9), a second pump (10) and a third pump (11). The waste liquid tank (6) and the medicine tank (7) are fixedly connected to the side of the base (1) away from the electrolytic cell (3) and the regeneration tank (4). The first pump (8) installed on the top of the base (1) is provided between the electrolytic cell (3) and the waste liquid tank (6). The second pump (9) installed on the top of the base (1) is provided between the regeneration tank (4) and the medicine tank (7). The second pump (10) and the third pump (11) are located on the top, the first pump (8) is connected to the electrolytic cell (3) and the waste liquid tank (6) through the connecting pipe (9), the third pump (11) is connected to the regeneration tank (4) and the medicine tank (7) through the connecting pipe (9), and the second pump (10) is connected to the electrolytic cell (3) and the regeneration tank (4) through the connecting pipe (9). A control console (2) for controlling the operation of the first pump (8), the second pump (10) and the third pump (11) is installed on the base (1).

2. The pickling and etching waste liquid recycling and utilization device according to claim 1, characterized in that: An air processing unit (13) is installed on the base (1) near the regeneration tank (4), and the air processing unit (13) is connected to the electrolytic cell (3) and the regeneration tank (4) through an air pipe (12).

3. The pickling and etching waste liquid recycling and utilization device according to claim 2, characterized in that: An air pressure sensor (14) for sensing the air pressure inside the air supply pipe (12) is installed on the air supply pipe (12), and the air pressure sensor (14) is electrically connected to the control console (2).

4. The pickling and etching waste liquid recycling and utilization device according to claim 3 is characterized in that: Pressure sensors (15) are installed at the bottom of the waste liquid tank (6) and the medicine tank (7), and alarm lights (16) are installed on the base (1) near the waste liquid tank (6) and the medicine tank (7), respectively. The pressure sensor (15) and the alarm light (16) are both electrically connected to the console (2).

5. The pickling and etching waste liquid recycling and utilization device according to claim 4, characterized in that: A liquid level control switch (17) is installed inside the electrolytic cell (3), and the liquid level control switch (17) is electrically connected to the control console (2).

6. The pickling and etching waste liquid recycling and utilization device according to claim 5, characterized in that: A chlorine alarm (18) for detecting chlorine concentration is installed on one side of the electrolytic cell (3) and the regeneration cell (4). The two chlorine alarms (18) are communicated with the inside of the electrolytic cell (3) and the regeneration cell (4) respectively.

7. The pickling and etching waste liquid recycling and utilization device according to claim 6, characterized in that: The tops of the electrolytic cell (3) and the regeneration cell (4) are rotatably connected to sealing covers (5) for sealing the electrolytic cell (3) and the regeneration cell (4).

8. The pickling and etching waste liquid recycling and utilization device according to claim 7, characterized in that: An air pump (19) is installed on one side of the regeneration tank (4), and the air pump (19) is connected to the interior of the regeneration tank (4) through an air blowing pipe (20).

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