Self-positioning material suction assembly for straight pulling single crystal

Abstract

The utility model discloses a self-positioning material suction component for czochralski single crystal, which comprises an outer cylinder, an inner cylinder, a material suction pipe, a self-positioning slider and rollers, the inner cylinder is arranged in the outer cylinder, the material suction pipe is arranged in the inner cylinder and extends downwards to the lower part of the outer cylinder, the rollers are arranged at the bottom of an inner cavity of the outer cylinder in an annular array manner, and the self-positioning slider is arranged in the outer cylinder. The self-positioning sliding blocks are arranged on the outer wall of the outer barrel to support the inner barrel in a rolling mode, an annular groove is formed in the inner wall of the outer barrel, the self-positioning sliding blocks are arranged in the annular groove at intervals, arc surfaces corresponding to the inner barrel are arranged on the sides, facing the inner barrel, of the self-positioning sliding blocks, and an inner conical surface is arranged on the side, facing the inner barrel, of the annular groove. A section of outer conical surface corresponding to the inner conical surface is arranged on the side, facing the outer barrel, of the self-positioning sliding block. According to the self-positioning material suction assembly for straight pulling of the single crystal, self-positioning of the inner barrel body in the outer barrel body is carried out, friction and expansion limitation to the bottom of the inner barrel body are reduced, and the risk that the inner barrel body is broken is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of Czochralski single crystals, in particular to a self-positioning material suction component for Czochralski single crystals. Background Art

[0002] In the process of producing single crystal silicon by the Czochralski method, the pulling is mostly carried out by taking out sections and re-throwing them, which causes the impurities in the remaining material in the crucible to gradually accumulate and increase, affecting the quality of the single crystal silicon rod and even causing defects, requiring the remaining material to be sucked out.

[0003] The temperature of the remaining material in the crucible is high, making the suction operation difficult and placing high demands on the quality of the suction tooling. In the prior art, utility model patent application number 2022204330354 discloses an anti-crack suction device for Czochralski single crystals. The remaining material is sucked into an inner tube via a suction pipe, and a gap is provided between the inner and outer tubes as a buffer zone to alleviate the thermal expansion of the inner tube and release stress at the connection between the suction pipe and the inner tube. However, the gap between the inner and outer tubes is relatively small, and the concentricity of the inner and outer tubes is difficult to ensure. As a result, the inner tube easily deviates during the suction process and contacts the inner wall of the outer tube, causing the inner tube sidewall to break during thermal expansion. Furthermore, when the bottom of the inner tube expands due to thermal expansion, friction between the bottom of the outer tube and the bottom of the inner tube is relatively large, posing a risk of breakage and requiring improvement. Utility Model Content

[0004] The purpose of the utility model is to provide a self-positioning material suction component for Czochralski single crystal, which can self-position an inner cylinder in an outer cylinder and reduce the risk of breakage.

[0005] To achieve this purpose, the present invention adopts the following technical solutions:

[0006] A self-positioning suction assembly for Czochralski single crystals comprises: an outer cylinder, an inner cylinder, a suction pipe, a self-positioning slider, and rollers. The inner cylinder is arranged in the outer cylinder, the suction pipe is arranged in the inner cylinder and extends downward to the bottom of the outer cylinder, the rollers are arranged in an annular array at the bottom of the inner cavity of the outer cylinder to provide rolling support for the inner cylinder, an annular groove is provided on the inner wall of the outer cylinder, the self-positioning sliders are arranged at intervals in the annular groove, the self-positioning sliders are provided with an arc surface corresponding to the inner cylinder on the side facing the inner cylinder, the annular groove is provided with an inner conical surface on the side facing the inner cylinder, and the self-positioning sliders are provided with a section of an outer conical surface corresponding to the inner conical surface on the side facing the outer cylinder.

[0007] Wherein, the suction pipe and the inner cylinder adopt an integrated structure.

[0008] Wherein, a through hole corresponding to the suction pipe is provided at the bottom of the outer cylinder.

[0009] Wherein, the diameter of the through hole is larger than the outer diameter of the suction pipe.

[0010] Wherein, the inner diameter of the outer cylinder is larger than the outer diameter of the inner cylinder.

[0011] Wherein, the bottom of the inner cavity of the outer cylinder is provided with a V-shaped groove corresponding to the roller one by one, and the roller is arranged in the V-shaped groove.

[0012] The beneficial effects of the utility model are as follows: a self-positioning suction component for vertically pulled single crystals, which performs self-positioning of the inner cylinder in the outer cylinder through the cooperation of the self-positioning slider and the annular groove, avoids contact between the inner wall of the outer cylinder and the inner cylinder, and adapts to the expansion of the inner cylinder. The roller is used to provide rolling support for the bottom of the inner cylinder, which reduces friction and expansion restriction on the bottom of the inner cylinder, is also beneficial to the heat dissipation of the bottom of the inner cylinder, reduces stress concentration problems, and thus reduces the risk of the inner cylinder breaking. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a structural diagram of the utility model;

[0014] Figure 2 yes Figure 1 Top view of the inner and outer cylinders;

[0015] Figure 3 yes Figure 1 Top view of the self-positioning slider;

[0016] Figure 4 yes Figure 1 A partial enlarged view of part A. DETAILED DESCRIPTION

[0017] The following combination Figures 1 to 4 The technical solution of the present utility model is further illustrated by specific embodiments.

[0018] like Figure 1 The self-positioning suction assembly for vertically pulled single crystals shown includes: an outer cylinder 1, an inner cylinder 2, a suction pipe 3, a self-positioning slider 5 and a roller 4. The inner cylinder 2 is arranged in the outer cylinder 1, and the suction pipe 3 is arranged in the inner cylinder 2 and extends downward to the bottom of the outer cylinder 1. In this embodiment, the suction pipe 3 and the inner cylinder 2 adopt an integrated structure and can be made of quartz or ceramic materials, with high stability and good high-temperature resistance.

[0019] A through hole 11 corresponding to the suction pipe 3 is provided at the bottom of the outer cylinder 1, allowing the suction pipe 3 to extend downward through the through hole 11 and continue into the crucible to absorb the remaining material in the crucible. The diameter of the through hole 11 is larger than the outer diameter of the suction pipe 3 to avoid contact with the suction pipe 3.

[0020] The rollers 4 are arranged in an annular array at the bottom of the inner cavity of the outer cylinder 1 to provide rolling support for the bottom of the inner cylinder 2. In this embodiment, the bottom of the inner cavity of the outer cylinder 1 is provided with V-shaped grooves 6 corresponding to the rollers 4. Figure 2 As shown, the four rollers 4 are respectively arranged in the four V-shaped grooves 6 , and the rollers 4 are positioned by the V-shaped grooves 6 so that the rollers 4 can roll in the V-shaped grooves 6 to provide slight expansion support for the inner cylinder 2 .

[0021] like Figure 1 As shown, the top of the roller 4 is in linear contact with the bottom of the inner cylinder 2, which can not only support the bottom of the inner cylinder 2, but also reduce the friction and expansion restriction on the bottom of the inner cylinder 2, and is also beneficial to the heat dissipation of the bottom of the inner cylinder 2, reducing the stress concentration problem, thereby reducing the risk of the inner cylinder 2 breaking.

[0022] In this embodiment, the inner diameter of the outer cylinder 1 is larger than the outer diameter of the inner cylinder 2, so that a gap is left between the inner wall of the outer cylinder 1 and the outer wall of the inner cylinder 2. Figure 3 and 4 As shown, an annular groove 7 is provided on the inner wall of the outer cylinder 1, and the self-positioning slider 5 is arranged at intervals in the annular groove 7. The side of the self-positioning slider 5 facing the inner cylinder 2 is provided with an arc surface 10 corresponding to the inner cylinder 2, so that the self-positioning slider 5 can fit the outer wall of the inner cylinder 2.

[0023] An inner conical surface 8 is provided on the side of the annular groove 7 facing the inner cylinder 2, and an outer conical surface 9 corresponding to the inner conical surface 8 is provided on the side of the self-positioning slider 5 facing the outer cylinder 1. The self-positioning slider 5 is positioned by the cooperation and friction between the inner conical surface 8 and the outer conical surface 9, thereby suppressing the violent shaking of the inner cylinder 2 in the outer cylinder 1 and avoiding the contact between the inner wall of the outer cylinder 1 and the inner cylinder 2, without affecting the slight expansion of the side wall of the outer cylinder 1 when heated, thereby reducing the problem of the inner cylinder 2 breaking during the suction process.

[0024] The above contents are only preferred embodiments of the present invention. For ordinary technicians in this field, according to the concept of the present invention, there may be changes in the specific implementation methods and application scope. The content of this specification should not be understood as limiting the present invention.

Claims

1. A self-positioning suction assembly for Czochralski single crystal, characterized in that: include: An outer cylinder, an inner cylinder, a suction pipe, a self-positioning slider and a roller, wherein the inner cylinder is arranged in the outer cylinder, the suction pipe is arranged in the inner cylinder and extends downward to the bottom of the outer cylinder, the annular array of rollers is arranged at the bottom of the inner cavity of the outer cylinder to provide rolling support for the inner cylinder, an annular groove is provided on the inner wall of the outer cylinder, the self-positioning sliders are arranged in the annular groove at intervals, the self-positioning slider is provided with an arc surface corresponding to the inner cylinder on the side facing the inner cylinder, an inner conical surface is provided on the side facing the inner cylinder in the annular groove, and a section of an outer conical surface corresponding to the inner conical surface is provided on the side facing the outer cylinder of the self-positioning slider.

2. The self-positioning suction assembly for Czochralski single crystal according to claim 1, characterized in that: The suction pipe and the inner cylinder adopt an integrated structure.

3. The self-positioning suction assembly for Czochralski single crystal according to claim 1, characterized in that: The bottom of the outer cylinder is provided with a through hole corresponding to the suction pipe.

4. The self-positioning suction assembly for Czochralski single crystal according to claim 3, characterized in that: The diameter of the through hole is larger than the outer diameter of the suction pipe.

5. The self-positioning suction assembly for Czochralski single crystal according to claim 1, characterized in that: The inner diameter of the outer cylinder is greater than the outer diameter of the inner cylinder.

6. The self-positioning suction assembly for Czochralski single crystal according to claim 1, characterized in that: The bottom of the inner cavity of the outer cylinder is provided with a V-shaped groove corresponding to the rollers one by one, and the rollers are arranged in the V-shaped groove.

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