Scanning probe

Abstract

The utility model discloses a scanning probe. Comprising a displacement detection module and a probe module which are arranged up and down, the probe module is installed at the bottom of the displacement detection module, and the displacement detection module comprises a leaf spring mechanism; a damper is arranged at the center in the leaf spring mechanism; a displacement sensor is arranged on one side of the damper, and the two ends of the damper are connected to the top and the bottom of the leaf spring mechanism respectively. The displacement sensor is mounted on the inner side of the top of the leaf spring mechanism; the probe module is installed on the outer side of the bottom of the leaf spring mechanism. The possibility of parallel displacement is achieved through the arranged leaf spring mechanism, and the displacement amount is recorded and sensed through the arranged displacement sensor; the vibration of the leaf spring mechanism is suppressed through the damper, so that the dynamic characteristic of the scanning probe is improved, the time for recovering balance is saved, and the measurement efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of measurement, in particular to a scanning probe. Background Art

[0002] The parallel leaf spring mechanism has a simple structure, flexible movement, and low cost. Since it can produce micro-displacement, it is often used in linear displacement situations with parallel motion. Therefore, it has become the preferred structure for micro-displacement devices in scanning probes. However, the defect of this mechanism is that the spring leaf will produce elastic deformation under force, generating a component force, which causes vibration. On the one hand, it affects the dynamic characteristics of the scanning probe. On the other hand, it takes a long time for the entire mechanism to recover balance, which limits the application of scanning probes in actual measurement. Summary of the Invention

[0003] In view of this, the present application provides a scanning probe that overcomes the problem that the existing parallel leaf spring mechanism is prone to vibration during use, which affects the performance of the scanning probe. The specific solution is as follows:

[0004] A scanning probe comprises a displacement detection module and a probe module arranged above and below, wherein the probe module is mounted at the bottom of the displacement detection module, and the displacement detection module comprises a leaf spring mechanism;

[0005] A damper is provided at the center of the leaf spring mechanism;

[0006] A displacement sensor is provided on one side of the damper, and both ends of the damper are connected to the top and bottom of the leaf spring mechanism respectively;

[0007] The displacement sensor is installed on the top of the inner side of the leaf spring mechanism;

[0008] The probe module is mounted on the bottom outer side of the leaf spring mechanism.

[0009] Preferably, a displacement sensor bracket is provided outside the displacement sensor;

[0010] The displacement sensor bracket is located in the leaf spring mechanism, the displacement sensor bracket is installed on the top of the leaf spring mechanism, and a gap is set between the bottom of the displacement sensor bracket and the bottom of the leaf spring mechanism;

[0011] The displacement sensor is mounted on the bottom of the displacement sensor bracket.

[0012] Preferably, the leaf spring mechanism comprises at least two leaf springs;

[0013] The two leaf springs are arranged in parallel and are respectively located on opposite sides of the displacement sensor. An upper leaf spring seat and a lower leaf spring seat are respectively provided at both ends of the leaf spring, and the two ends are respectively connected to the upper leaf spring seat and the lower leaf spring seat;

[0014] The displacement sensor is installed below the upper leaf spring seat;

[0015] The two ends of the damper are respectively connected to the upper leaf spring seat and the lower leaf spring seat.

[0016] Preferably, the damper comprises a damping cylinder and a damping rod;

[0017] The open end of the damping cylinder is provided with a cylinder cover, the damping cylinder is filled with damping fluid, and the end of the damping rod extending into the damping cylinder is a ball head;

[0018] The damping cylinder is mounted on the inner side of the bottom of the leaf spring mechanism;

[0019] One end of the damping rod passes through the cylinder cover and extends into the damping cylinder. The other end of the damping rod is provided with a connecting assembly. One end of the connecting assembly is connected to the damping rod, and the other end of the connecting assembly is connected to the top of the leaf spring mechanism.

[0020] Preferably, the connecting assembly includes a jackscrew and a mounting adjustment rod;

[0021] One end of the jack screw is connected to the damping rod, and the other end of the jack screw is connected to the installation adjustment rod;

[0022] One end of the installation adjustment rod facing away from the top screw is connected to the top of the leaf spring mechanism.

[0023] Preferably, a seal is provided between the damping rod and the cylinder head;

[0024] The sealing sleeve is mounted on the cylinder head, and the inner and outer sides of the sealing member respectively abut against the damping rod and the cylinder head.

[0025] Preferably, the outer dimensions of the sealing element gradually increase in a direction away from the damping cylinder.

[0026] Preferably, the probe module includes a fixing seat, a measuring needle seat and a measuring needle arranged in sequence from top to bottom;

[0027] The fixing seat is connected to the outer side of the bottom of the leaf spring mechanism;

[0028] A movable connecting piece is provided between the stylus seat and the fixing seat, and the movable connecting piece connects the stylus seat and the fixing seat respectively;

[0029] The stylus is mounted at the center of the bottom of the stylus holder.

[0030] Preferably, the movable connecting member comprises a magnet and a steel ball group;

[0031] The magnets are respectively installed at the center position of the side of the stylus base opposite to the fixing base, and the magnets installed on the stylus base and the fixing base are magnetically connected;

[0032] The steel ball group is provided with a plurality of balls, and is respectively provided on the peripheral side of the magnet; the steel ball group includes a first steel ball provided on the fixing seat, and a second steel ball provided on the stylus seat;

[0033] The first steel ball is mounted on a side of the fixing base facing the stylus base, and two first steel balls are provided;

[0034] The second steel ball is mounted on a side of the stylus base facing the fixing base, one second steel ball is provided, and the second steel ball is located between two adjacent first steel balls in the same group;

[0035] The second steel balls are respectively in contact with two adjacent first steel balls.

[0036] Compared with the prior art, the present invention has the following advantages:

[0037] The present application realizes the possibility of parallel displacement through the provision of a leaf spring mechanism, and records the induced displacement through the provision of a displacement sensor; the provision of a damper suppresses the vibration of the leaf spring mechanism, thereby improving the dynamic characteristics of the scanning probe and saving the time required to restore balance, thereby improving measurement efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 This is a main view of a scanning probe for this application;

[0039] Figure 2 A cross-sectional schematic diagram of a scanning probe for this application;

[0040] In the picture:

[0041] 1. Leaf spring seat; 2. Leaf spring; 3. Damper; 4. Displacement sensor bracket; 5. Displacement sensor; 6. Fixing seat; 7. Stylus holder; 8. Stylus; 9. Magnet; 10. Steel ball; 3-1. Damping cylinder; 3-2. Cylinder head; 3-3. Damping rod; 3-4. Seal; 3-5. Mounting adjustment rod; 3-6. Nut; 3-7. Jackscrew. DETAILED DESCRIPTION

[0042] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0043] See also Figure 1-2 The utility model provides a scanning probe, comprising a displacement detection module and a probe module arranged up and down, wherein the center lines of the displacement detection module and the probe module are located on the same straight line;

[0044] The displacement detection module includes a leaf spring mechanism, in which a damper 3 and a displacement sensor are provided, and a probe module is connected to the outer side of the bottom of the leaf spring mechanism;

[0045] The center lines of the damper 3 and the leaf spring mechanism coincide with each other, and the top and bottom ends of the damper 3 are connected to the top and bottom of the leaf spring mechanism respectively;

[0046] The displacement sensor 5 is located on one side of the damper 3 , and the displacement sensor 5 is installed below the top of the leaf spring mechanism.

[0047] Furthermore, a displacement sensor bracket 4 is provided outside the displacement sensor 5, and the displacement sensor 5 is installed on the inner side of the bottom of the displacement sensor bracket 4. The displacement sensor bracket 4 is located in the leaf spring mechanism. The displacement sensor 5 is connected to the top of the leaf spring mechanism through the displacement sensor bracket 4. The top of the displacement sensor bracket 4 is connected to the inner side of the top of the leaf spring mechanism, and a gap is set between the bottom of the displacement sensor bracket 4 and the bottom of the leaf spring mechanism.

[0048] Furthermore, the leaf spring mechanism includes at least two leaf springs 2;

[0049] Two leaf springs 2 are arranged vertically and parallel to each other. Leaf spring seats 1 are provided at both ends of the two leaf springs 2, that is, an upper leaf spring seat is provided at the top and a lower leaf spring seat is provided at the bottom. The top and bottom ends of the two leaf springs 2 are respectively connected to the upper leaf spring seat and the lower leaf spring seat to form a frame structure. The displacement sensor bracket 4 is located in the formed frame structure. The top of the displacement sensor bracket 4 is connected to the upper leaf spring seat, and the bottom of the displacement sensor bracket 4 is provided with a gap between it and the lower leaf spring seat.

[0050] The two ends of the damper 3 are connected to the upper leaf spring seat and the lower leaf spring seat respectively.

[0051] Furthermore, the damper 3 includes a damping cylinder 3-1 and a damping rod 3-3;

[0052] The open end of the damping cylinder 3-1 is provided with a cylinder cover, and the damping cylinder 3-1 is filled with damping fluid. The damping cylinder 3-1 is installed on the inner side of the top of the leaf spring mechanism (i.e., the upper leaf spring seat);

[0053] One end of the damping rod 3-3 passes through the cylinder cover 3-2 and extends into the damping cylinder 3-1. The other end of the damping rod 3-3 is provided with a connecting assembly. One end of the connecting assembly is connected to the damping rod, and the other end of the connecting assembly is connected to the top of the leaf spring mechanism (i.e., the top of the lower leaf spring seat).

[0054] Furthermore, the connection assembly includes a top screw 3-7 and a mounting adjustment rod 3-5;

[0055] One end of the top screw 3-7 is connected to the damping rod 3-3, and the other end of the top screw 3-7 is connected to the installation adjustment rod 3-5;

[0056] One end of the installation adjustment rod 3-5 facing away from the top screw is connected to the top of the leaf spring mechanism (i.e., the upper leaf spring seat).

[0057] Furthermore, a seal is provided between the damping rod 3-3 and the cylinder cover 3-2;

[0058] The sealing member 3-4 is sleeved on the cylinder head 3-2, and the inner and outer sides of the sealing member 3-4 abut against the damping rod 3-3 and the cylinder head 3-2 respectively.

[0059] Furthermore, the outer dimensions of the sealing member 3 - 4 gradually increase in a direction away from the damping cylinder 3 - 3 .

[0060] Furthermore, the probe module includes a fixing base 6, a measuring needle base 7 and a measuring needle 8 arranged in sequence from top to bottom;

[0061] The fixing seat 6 is connected to the outer side of the bottom of the leaf spring mechanism;

[0062] A movable connection piece is provided between the stylus seat 7 and the fixing seat 6, and the movable connection piece connects the stylus seat 8 and the fixing seat 6 respectively;

[0063] The stylus 8 is movably mounted at the center of the bottom of the stylus base 7 .

[0064] Furthermore, the movable connecting member includes a magnet 9 and a steel ball group 10;

[0065] The magnets 9 are respectively installed at the center of the side of the stylus base 7 opposite to the fixing base 6, and the magnets installed on the stylus base and the fixing base are magnetically connected;

[0066] The steel ball group is provided with a plurality of balls, and is respectively provided on the peripheral side of the magnet; the steel ball group includes a first steel ball provided on the fixing seat, and a second steel ball provided on the stylus seat;

[0067] The first steel ball is mounted on the side of the fixing base 6 facing the stylus base 7, and two first steel balls are provided;

[0068] The second steel ball is mounted on a side of the stylus base facing the fixing base 6, and one second steel ball is provided. The second steel ball is located between two adjacent first steel balls in the same group;

[0069] The second steel balls respectively abut against two adjacent first steel balls, forming a triangular structure on a vertical plane.

[0070] The magnet includes a first magnet and a second magnet, which are respectively mounted at the center of one side of the probe seat opposite to the fixing seat, with a gap therebetween and magnetically connected.

[0071] It should be noted that:

[0072] In one embodiment of the present application, the displacement sensor 5 is located at the rear side of the damper 3 .

[0073] In one embodiment of the present application, the displacement sensor bracket 4 is a U-shaped structure with its opening facing upward. The two ends of the U-shaped opening are connected to the bottom of the upper leaf spring seat. A gap is provided between the bottom of the U-shaped structure and the lower leaf spring seat, with the two leaf springs positioned just outside the two side walls of the U-shaped structure. During installation, the centerline of the displacement sensor 5 and the centerline of the damper 3 are coplanar.

[0074] Install the adjustment rod as the adjustment bolt;

[0075] The damping fluid is damping oil;

[0076] The leaf spring mechanism is a parallel leaf spring mechanism;

[0077] The seal is a sealing membrane

[0078] In the present application, a stylus 8 is installed on the stylus holder 7, and different styluses can be replaced according to different measurement requirements. A steel ball 10 and a magnet 9 are provided on the stylus holder 7 and the fixing seat 6. The steel ball 10 is positioned, and the suction force of the magnet combines the stylus holder 7 and the fixing seat 6 into one, thereby realizing anti-collision protection and quick replacement functions.

[0079] In this application, a group of leaf spring seats 1 formed by the upper leaf spring seat and the lower leaf spring seat and a group of leaf springs 2 (i.e., two leaf springs arranged in parallel) constitute a parallel leaf spring mechanism as a displacement generating mechanism, the displacement sensor 5 records the induced displacement, and the damper 3 suppresses the vibration of the leaf spring mechanism, thereby improving the dynamic characteristics of the scanning probe.

[0080] In the present application, the damper 3 is composed of a damping cylinder 3-1, a cylinder cover 3-2 arranged at the lever mouth of the damping cylinder 3-1, a damping rod 3-3, a seal 3-4, and an installation adjustment rod 3-5. The damping cylinder 3-1 is fixed on the lower leaf spring seat, and the installation adjustment rod 3-5 is fixed to the upper leaf spring seat by a nut 3-6. The top screw 3-7 connects the damping rod 3-3 and the installation adjustment rod 3-5 into one, thereby realizing the installation of the damper 3 in the parallel leaf spring mechanism and applying it to the scanning probe. During use, when the parallel leaf spring mechanism produces a micro-displacement, the damping rod 3-3 also produces a displacement in the damping cylinder 3-1. The damping cylinder 3-1 is filled with damping oil, and the damping oil has a certain viscosity. When resetting, the damping rod 3-3 is reset in the damping cylinder 3-1 at the same time. The slight friction between the damping rod ball head (the end of the damping rod extending into the damping cylinder) and the damping oil limits the vibration of the parallel leaf spring mechanism, allowing the parallel leaf spring mechanism to quickly reset and balance, thereby improving measurement efficiency. At the same time, the application of the damper avoids the occurrence of vibration and improves the dynamic characteristics of the scanning probe. The application of the damper in this application does not affect the flexibility of the parallel leaf spring and does not increase external force, thereby improving the dynamic characteristics of the scanning probe without changing the original characteristics and performance of the scanning probe.

Claims

1. A scanning probe, comprising a displacement detection module and a probe module arranged above and below, wherein the probe module is mounted at the bottom of the displacement detection module, characterized in that: The displacement detection module includes a leaf spring mechanism; A damper is provided at the center of the leaf spring mechanism; A displacement sensor is provided on one side of the damper, and both ends of the damper are connected to the top and bottom of the leaf spring mechanism respectively; The displacement sensor is installed on the top of the inner side of the leaf spring mechanism; The probe module is mounted on the bottom outer side of the leaf spring mechanism.

2. A scanning probe according to claim 1, characterized in that: A displacement sensor bracket is provided outside the displacement sensor; The displacement sensor bracket is located in the leaf spring mechanism, the displacement sensor bracket is installed on the top of the leaf spring mechanism, and a gap is set between the bottom of the displacement sensor bracket and the bottom of the leaf spring mechanism; The displacement sensor is mounted on the bottom of the displacement sensor bracket.

3. A scanning probe according to claim 1, characterized in that: The leaf spring mechanism includes at least two leaf springs; The two leaf springs are arranged in parallel and are respectively located on opposite sides of the displacement sensor. An upper leaf spring seat and a lower leaf spring seat are respectively provided at both ends of the leaf spring, and the two ends are respectively connected to the upper leaf spring seat and the lower leaf spring seat; The displacement sensor is installed below the upper leaf spring seat; The two ends of the damper are respectively connected to the upper leaf spring seat and the lower leaf spring seat.

4. A scanning probe according to claim 1, characterized in that: The damper comprises a damping cylinder and a damping rod; The open end of the damping cylinder is provided with a cylinder cover, the damping cylinder is filled with damping fluid, and the damping cylinder is installed at the bottom inside the leaf spring mechanism; One end of the damping rod passes through the cylinder cover and extends into the damping cylinder. The other end of the damping rod is provided with a connecting assembly. The end of the damping rod extending into the damping cylinder is a ball head. One end of the connecting assembly is connected to the damping rod, and the other end of the connecting assembly is connected to the top of the leaf spring mechanism.

5. A scanning probe according to claim 4, characterized in that: The connecting assembly includes a jack screw and an installation adjustment rod; One end of the jack screw is connected to the damping rod, and the other end of the jack screw is connected to the installation adjustment rod; One end of the installation adjustment rod facing away from the top screw is connected to the top of the leaf spring mechanism.

6. A scanning probe according to claim 4, characterized in that: A sealing member is provided between the damping rod and the cylinder cover; The sealing sleeve is mounted on the cylinder head, and the inner and outer sides of the sealing member respectively abut against the damping rod and the cylinder head.

7. A scanning probe according to claim 6, characterized in that: The outer dimension of the sealing element gradually increases in a direction facing away from the damping cylinder.

8. The scanning probe according to claim 1, characterized in that: The probe module includes a fixing base, a measuring needle base and a measuring needle arranged in sequence from top to bottom; The fixing seat is connected to the outer side of the bottom of the leaf spring mechanism; A movable connecting piece is provided between the stylus seat and the fixing seat, and the movable connecting piece connects the stylus seat and the fixing seat respectively; The stylus is mounted at the center of the bottom of the stylus holder.

9. A scanning probe according to claim 8, characterized in that: The movable connecting member includes a magnet and a steel ball group; The magnets are respectively installed at the center position of the side of the stylus base opposite to the fixing base, and the magnets installed on the stylus base and the fixing base are magnetically connected; The steel ball group is provided with a plurality of balls, and is respectively provided on the peripheral side of the magnet; the steel ball group includes a first steel ball provided on the fixing seat, and a second steel ball provided on the stylus seat; The first steel ball is mounted on a side of the fixing base facing the stylus base, and two first steel balls are provided; The second steel ball is mounted on a side of the stylus base facing the fixing base, one second steel ball is provided, and the second steel ball is located between two adjacent first steel balls in the same group; The second steel balls are respectively in contact with two adjacent first steel balls.

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