Segmented structure of cantilever type probe card

Abstract

The utility model discloses a segmented structure of a cantilever type probe card, relates to the technical field of cantilever type probe cards, and solves the technical problem that the service life of the cantilever type probe card is influenced because the state of a probe inflection point is influenced when a fixed-point rotating bottom plate is arranged on the cantilever type probe card to share stress and the probe range is only limited at a cantilever end. A plurality of supporting blocks are arranged between the probe on the surface of the bottom plate and the fixing plate, namely, the supporting blocks are located at the small-amplitude inclined positions of the cantilever type probe, sliding supporting rods are arranged in the supporting blocks, and rotating adjusting blocks are arranged on the surfaces of the supporting rods, so that the angles of the adjusting blocks can be changed according to the angles of the probe, and the surfaces of the probe are supported; the fixing block is arranged on the sliding supporting rod and can share the force borne by the probe when the probe is pressed, the adjusting block is arranged on the sliding supporting rod, further force unloading can be achieved through the supporting spring, the change angles of the probe on the two sides of the fixing block are made to be smaller, the strength of the force borne by the probe is lower, and the service life of the probe is guaranteed.

Description

Technical Field

[0001] The utility model belongs to the field of probe cards, relates to cantilever probe card technology, and specifically provides a segmented structure of a cantilever probe card. Background Art

[0002] The cantilever probe card is the interface between the chip under test and the test machine in wafer testing. It uses micro-cantilever beam-shaped probes to establish electrical connections with contact points on the chip, thereby testing the chip's electrical performance. This probe card is named for its unique cantilever structure, that is, one end of the probe is fixed, and the other end (the needle tip) is suspended in the air and can move freely within a certain range to adapt to contact points in different positions.

[0003] The reference patent name is: A cantilever probe card with a segmented structure (patent announcement number: CN221595091U). Through the sliding comb teeth and protective structure set at the bottom of the probe and epoxy resin, the probe will contact the comb tooth surface every time it is used. The position of the probe is limited by the comb teeth to prevent the epoxy resin from deforming in a high temperature environment, which will cause the probe position to change. The protective structure can support the probe and disperse the force exerted on the probe by bending.

[0004] However, when implementing the above technical solution, there are the following problems: the above structure is more suitable for cantilever probe cards with the same spacing between probes, and only limits the spacing between probes at the detection position. It has a limited scope of application and will affect the state of the connection position between the probe and the epoxy resin. In the above structure, the comb teeth with fixed shapes are used to ensure that the position of the probe does not change at the suspended probe position, but when the epoxy resin on the probe is deformed, it will also affect the position of the probe between the epoxy resin and the base plate. At this time, limiting the probe position on one side will inevitably cause damage to the probe connection on the epoxy resin surface, affecting the service life of the cantilever probe card.

[0005] To this end, the utility model proposes a segmented structure of a cantilever probe card. Utility Model Content

[0006] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a segmented structure for a cantilever probe card. This segmented structure solves the problem that a fixed-point rotating base plate on a cantilever probe card shares stress while limiting the probe range only at the cantilever end, which affects the state of the probe's inflection point and shortens the service life of the cantilever probe card.

[0007] To achieve the above objectives, according to an embodiment of the first aspect of the present invention, a segmented structure of a cantilever probe card is provided, comprising: a base plate and a probe, wherein a support mechanism is provided between the base plate and the probe, and the support mechanism comprises:

[0008] A plurality of support blocks, each of which is fixedly connected to a side of the bottom plate close to the probe, each of which is arc-shaped, and a side close to the probe is in an arc shape;

[0009] Several support rods, each of which is slidably connected to the inside of the support block, a support spring is fixedly connected between the support block and the support rod, and the surface of each support rod is rotatably connected to an adjustment block; the surface of the adjustment block is slidably connected to a plurality of fitting rods;

[0010] A plurality of support belts are fixedly arranged on the surface of the fitting rod.

[0011] Optionally, a rotating rod is fixedly connected to the interior of the adjustment block, a rotating groove is opened on the surface of the support rod, and the rotating rod is rotatably connected to the rotating groove.

[0012] Optionally, the surface of the rotating rod is slidingly connected to a limiting column, and a limiting shaft is fixedly connected to the side of the limiting column close to the rotating groove. A plurality of limiting grooves are opened on the surface of the support rod, and the plurality of limiting grooves are arranged in a circular array relative to the center of the rotating groove, and the limiting shaft and the limiting grooves are adapted.

[0013] Optionally, a sliding groove is provided on the surface of the rotating rod, and a sliding column is fixedly connected to a side of the limiting column close to the rotating rod, and the sliding column is adapted to the sliding groove.

[0014] Optionally, a fixing groove is provided on the surface of the fitting rod, and two fixing shafts are slidably connected inside the supporting belt. The fixing shafts are adapted to the fixing groove, and fixing springs are fixedly connected between the fixing shafts.

[0015] Optionally, the surface of the fitting rod is rotatably connected with a plurality of movable shafts, the surface of the adjustment block is provided with a plurality of movable grooves, the movable shafts are adapted to the movable grooves; and the length of the movable grooves is the same as the length of the adjustment block.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows: several support blocks are arranged between the probe on the bottom plate surface and the fixed plate, that is, the support block is located at a position where the cantilever probe is slightly tilted, a sliding support rod is arranged inside the support block, and a rotating adjustment block is arranged on the surface of the support rod, so that the angle of the adjustment block can be changed according to the angle of the probe, so that the surface of the probe is supported and the force borne by the probe when it is pressed can be shared, and the adjustment block is arranged on the sliding support rod, and further force unloading can be achieved through the support spring, so that the change angle of the probes on both sides of the fixed block is relatively smaller, and the intensity of the force applied to the probe is lower, thereby avoiding damage to the inflection point of the probe at the fixed block and ensuring the service life of the probe. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural stereogram of the utility model;

[0018] Figure 2 This is a structural stereogram of the support block of the utility model;

[0019] Figure 3 This is a sectional view of the three-dimensional structure of the support spring of the present invention;

[0020] Figure 4 For the utility model Figure 2 A magnified view of the local structure at point A;

[0021] Figure 5 For the utility model Figure 4 A magnified view of the local structure at point C in the middle;

[0022] Figure 6 For the utility model Figure 3 A magnified view of the local structure at point B in the middle;

[0023] Figure 7 For the utility model Figure 6 A magnified view of the local structure at point D in the middle;

[0024] Figure 8 For the utility model Figure 7 Enlarged view of the local structure at point E in the middle.

[0025] In the figure: 1, base plate; 2, probe;

[0026] 31. Support block; 32. Support rod; 33. Support spring; 34. Adjustment block; 35. Fitting rod; 36. Support belt;

[0027] 41. Rotating rod; 42. Rotating slot; 43. Limiting column; 44. Limiting shaft; 45. Limiting slot; 46. Sliding slot; 47. Sliding column;

[0028] 51. Fixed slot; 52. Fixed shaft; 53. Fixed spring;

[0029] 61. Moving shaft; 62. Moving slot. DETAILED DESCRIPTION

[0030] The following will clearly and completely describe the technical solutions of the present invention in conjunction with the embodiments. Obviously, the embodiments described are only a part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0031] like Figure 1-8 As shown, a segmented structure of a cantilever probe card includes a base plate 1 and a probe 2.

[0032] A fixing plate is slidably connected to the side of the bottom plate 1 close to the probe 2, and the fixing plate is fixedly connected to the probe 2.

[0033] A support mechanism is provided between the base plate 1 and the probe 2, and the support mechanism includes:

[0034] Several support blocks 31, each of which is fixedly connected to the side of the bottom plate 1 close to the probe 2. Each of the support blocks 31 is arc-shaped, and the side close to the probe 2 is arc-shaped, but the lengths of the several support blocks 31 are different;

[0035] Several support rods 32 are slidably connected to the inside of the support block 31. A support spring 33 is fixedly connected between the support block 31 and the support rod 32. The surface of each support rod 32 is rotatably connected to an adjustment block 34. The surface of the adjustment block 34 is slidably connected to a plurality of fitting rods 35. The fitting rods 35 are elastic and have a soft surface.

[0036] A plurality of support belts 36, each of which is fixedly mounted on a surface of a fitting rod 35. Two fitting rods 35 form a group, and one fitting rod 35 in a group is fixedly connected to the support belt 36, while the other fitting rod 35 is detachably connected to the support belt 36;

[0037] The segmented structure of the cantilever probe 2 card is provided with several support blocks 31 between the probe 2 and the fixed plate on the surface of the bottom plate 1 during actual application, that is, the support block 31 is located at a position where the cantilever probe 2 is slightly tilted, and a sliding support rod 32 is provided inside the support block 31, and a rotating adjustment block 34 is provided on the surface of the support rod 32, so that the angle of the adjustment block 34 can be changed according to the angle of the probe 2, so that the surface of the probe 2 is supported and the force borne by the probe 2 when it is pressed can be shared, and the adjustment block 34 is provided on the sliding support rod 32, and further force unloading can be achieved through the support spring 33, so that the change angle of the probe 2 on both sides of the fixed block is relatively smaller, and the strength of the force applied to the probe 2 is lower, thereby avoiding damage to the inflection point of the probe 2 at the fixed block and ensuring the service life of the probe 2;

[0038] In some specific embodiments, a rotating rod 41 is fixedly connected to the interior of the adjusting block 34, a rotating groove 42 is opened on the surface of the support rod 32, and the rotating rod 41 is rotatably connected to the rotating groove 42;

[0039] In a further embodiment, the surface of the rotating rod 41 is slidably connected to a limiting post 43, and a limiting shaft 44 is fixedly connected to the side of the limiting post 43 close to the rotating groove 42. A plurality of limiting grooves 45 are opened on the surface of the support rod 32, and the plurality of limiting grooves 45 are arranged in a circular array relative to the center of the rotating groove 42, and the limiting shaft 44 and the limiting grooves 45 are adapted;

[0040] In a further embodiment, a sliding groove 46 is formed on the surface of the rotating rod 41, and a sliding column 47 is fixedly connected to the side of the limiting column 43 close to the rotating rod 41, and the sliding column 47 is adapted to the sliding groove 46;

[0041] The presence of the rotating rod 41 can transform the fixed position of the adjustment block 34 into a fixed position between the rotating rod 41 and the support rod 32. A sliding limit post 43 is provided on the surface of the rotating rod 41 to limit the rotation by the position of the limit post 43, which is easy to operate.

[0042] In some specific embodiments, a fixing groove 51 is formed on the surface of the fitting rod 35, and two fixing shafts 52 are slidably connected inside the supporting belt 36. The fixing shafts 52 are adapted to the fixing groove 51, and a fixing spring 53 is fixedly connected between the fixing shafts 52;

[0043] In some specific embodiments, the surface of the fitting rod 35 is rotatably connected to a plurality of movable shafts 61, and the surface of the adjustment block 34 is provided with a plurality of movable grooves 62, and the movable shafts 61 are adapted to the movable grooves 62; the length of the movable grooves 62 is the same as the length of the adjustment block 34;

[0044] The movable groove 62 passing through the surface of the adjustment block 34 limits the position of the fitting rod 35 on the surface of the adjustment block 34 by the position of the movable groove 62. The movable groove 62 with open ends allows multiple fitting rods 35 to be placed on the surface of the adjustment block 34 as needed, which is convenient for limiting the positions of different numbers of probes 2.

[0045] The working principle of this utility model:

[0046] The probes 2 are fixed on the surface of the base plate 1 with support blocks 31 of different curvatures so that the support rods 32 sliding on the surface of the support blocks 31 can fit all the probes 2 on that side, and the limiting posts 43 are slid to cause the limiting posts 43 to disengage from the limiting grooves 45, and the adjusting block 34 is rotated so that the adjusting block 34 can fit most of the probes 2. After adjustment, the position of the limiting posts 43 is restored, and the position of the fitting rods 35 is adjusted again, and the fixed shaft 52 on the surface of the support belt 36 is pressed, and the support belt 36 is inserted into the fixed groove 51 on the surface of the fitting rod 35 on the other side, so that the support belt 36 fits the probes 2, and the two fitting rods 35 fit the surfaces of the probes 2, and the installation is completed;

[0047] When in use, the probe 2 contacts the chip to be measured, and the probe 2 is squeezed and moved toward the surface of the base plate 1. At this time, the fixed plate will move, and then the probe 2 on the other side of the fixed plate will rotate. When the probe 2 rotates, it prompts the support rod 32 to slide inside the support block 31. Under the continuous action of the support spring 33, the force on the surface of the probe 2 continues to decrease. After the detection is completed, the probe 2 returns to its original position.

[0048] The above embodiments are only used to illustrate the technical method of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical method of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical method of the present invention.

Claims

1. A segmented structure of a cantilever probe card, comprising: A base plate (1) and a probe (2), characterized in that a support mechanism is provided between the base plate (1) and the probe (2), and the support mechanism comprises: A plurality of support blocks (31), each of the support blocks (31) being fixedly connected to a side of the bottom plate (1) close to the probe (2), each of the support blocks (31) being arc-shaped, and the side close to the probe (2) being in an arc shape; A plurality of support rods (32), each of the support rods (32) is slidably connected to the inside of the support block (31), a support spring (33) is fixedly connected between the support block (31) and the support rod (32), and an adjustment block (34) is rotatably connected to the surface of the support rod (32); and a plurality of fitting rods (35) are slidably connected to the surface of the adjustment block (34); A plurality of support belts (36) are fixedly arranged on the surface of the fitting rod (35).

2. The segmented structure of a cantilever probe card according to claim 1, characterized in that: A rotating rod (41) is fixedly connected inside the regulating block (34), a rotating groove (42) is provided on the surface of the supporting rod (32), and the rotating rod (41) is rotatably connected to the rotating groove (42).

3. The segmented structure of a cantilever probe card according to claim 2, characterized in that: The surface of the rotating rod (41) is slidably connected to a limiting column (43), and a limiting shaft (44) is fixedly connected to one side of the limiting column (43) close to the rotating groove (42). A plurality of limiting grooves (45) are provided on the surface of the supporting rod (32), and the plurality of limiting grooves (45) are arranged in a circular array relative to the center of the rotating groove (42), and the limiting shaft (44) and the limiting grooves (45) are adapted.

4. The segmented structure of a cantilever probe card according to claim 3, wherein: A sliding groove (46) is provided on the surface of the rotating rod (41), and a sliding column (47) is fixedly connected to the side of the limiting column (43) close to the rotating rod (41), and the sliding column (47) is adapted to the sliding groove (46).

5. The segmented structure of a cantilever probe card according to claim 1, wherein: A fixing groove (51) is provided on the surface of the fitting rod (35), and two fixing shafts (52) are slidably connected inside the supporting belt (36). The fixing shafts (52) are adapted to the fixing groove (51), and a fixing spring (53) is fixedly connected between the fixing shafts (52).

6. The segmented structure of a cantilever probe card according to claim 1, wherein: The surface of the fitting rod (35) is rotatably connected with a plurality of movable shafts (61), and the surface of the adjustment block (34) is provided with a plurality of movable grooves (62), and the movable shafts (61) are adapted to the movable grooves (62); the length of the movable grooves (62) is the same as that of the adjustment block (34).

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