Push-pull type wafer processing cylinder mounting structure and wafer processor

Abstract

The utility model discloses a push-pull type wafer processing cylinder installation structure and a wafer processor, the installation structure comprises a rack, a moving seat and a locking assembly, a processing cylinder assembly is fixedly installed on the moving seat, and the processing cylinder assembly is used for processing a wafer in a processing cylinder according to a preset process; the moving seat is installed on the rack in a reciprocating motion mode so as to move the processing cylinder assembly to a working position or an operating position, the working position is located in the rack, and the operating position is located outside the rack; and the locking assembly is used for fixing the moving seat at the working position on the rack. According to the push-pull type wafer processing barrel installation structure, through cooperation of the rack, the moving seat and the locking assembly, the moving seat can be installed on the rack in the mode that the moving seat can move in the first direction in a reciprocating mode, the processing barrel assembly is moved to the working position or the operation position, the locking assembly fixes the moving seat located at the working position to the rack, and when materials need to be taken and placed or maintained, the moving seat can be moved to the working position or the operation position. Operators only need to move and drag the moving seat from the working position to the operation position to carry out subsequent operation, and operation is convenient.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer processing equipment, in particular to a push-pull type wafer processing barrel installation structure and a wafer processing machine. Background Art

[0002] A wafer refers to the silicon wafer used in the manufacture of silicon semiconductor integrated circuits. Due to its round shape, it is called a wafer. Various circuit component structures can be fabricated on the silicon wafer, resulting in electronic components with specific electrical functions. As the size of integrated circuits on semiconductor wafers approaches the micron level, the cleaning requirements during the semiconductor wafer manufacturing process are becoming increasingly stringent. In particular, contamination of semiconductor wafers by dust particles and metals during the manufacturing process can easily damage the internal circuit functions of the wafer, causing short circuits or open circuits, leading to failure of the integrated circuit and affecting the formation of geometric features. Therefore, in addition to eliminating external contamination sources, cleaning is also required during the manufacturing process. Chemical solutions or gases are used to effectively remove impurities such as dust, metal ions, and organic matter remaining on the wafer without damaging the surface and electrical properties of the wafer.

[0003] Wet cleaning is a common wafer cleaning process. After this process is completed, the wafers need to be dried. Wafer handlers are used to dry the wet wafers by rotating and drying them. A vertical wafer spin dryer is a common type of wafer handler. It consists of an outer cylinder, a drive motor, and a cassette rack. The drive motor's shaft extends into the outer cylinder and connects to the cassette rack. The drive motor drives the cassette rack, located within the outer cylinder, to rotate at high speed, thereby drying the wafers on the cassette rack.

[0004] The outer cylinder of the existing vertical wafer dryers is mostly directly installed on the frame of the dryer. When the equipment needs to be unloaded or repaired, the cover of the outer cylinder must be completely disassembled before subsequent operations can be carried out, which obviously causes inconvenience in operation. Utility Model Content

[0005] The purpose of the utility model is to provide a push-pull type wafer processing barrel installation structure and a wafer processing machine, so as to solve the problem of inconvenient operation of conventional vertical wafer drying machines in the prior art.

[0006] To achieve this purpose, the present invention adopts the following technical solutions:

[0007] In a first aspect, a push-pull wafer processing barrel mounting structure is provided, which includes a frame, a movable seat, and a locking assembly, wherein:

[0008] A processing barrel assembly is fixedly mounted on the movable seat, and the processing barrel assembly is configured to process the wafers in the processing barrel of the processing barrel assembly according to a preset process;

[0009] The movable seat is mounted on the frame so as to be reciprocally movable along a first direction to move the processing cylinder assembly to a working position or an operating position, wherein the working position is located inside the frame and the operating position is located outside the frame;

[0010] The locking assembly is configured to fix the moving base in the working position on the frame.

[0011] Furthermore, the locking assembly includes two locking units spaced apart along the second direction, each of the locking units includes a locking piece, a first disassembly assembly and a second disassembly assembly, the locking piece is a "Z"-shaped plate, the upper end of the locking piece can be detachably mounted at a preset position of the movable seat through the first disassembly assembly, and the lower end of the locking piece plate can be detachably mounted at a preset position of the frame through the second disassembly assembly.

[0012] Furthermore, a reinforcement structure is provided in the middle of the locking piece, and the reinforcement structure is a reinforcement rib. The first end of the reinforcement rib is provided in the middle of the locking piece along the height direction, and the second end of the reinforcement rib extends to the lower end of the locking piece.

[0013] Furthermore, the two ends of the bottom of the movable seat are slidably set on the frame through sliding units respectively, and the sliding unit includes a first concave slide rail set at the bottom of the movable seat and a second concave slide rail set on the frame, the concave surfaces of the first concave slide rail and the second concave slide rail are arranged relative to each other, and the first concave slide rail can be slidably set in the concave surface of the second concave slide rail, and the movable seat can be slidably set on the frame through the sliding cooperation of the first concave slide rail and the second concave slide rail.

[0014] Furthermore, the locking assembly includes a locking driver and a locking member, a locking hole is opened on the movable base corresponding to the locking member, a fixed end of the locking driver is mounted on the frame, a driving end of the locking driver is connected to the locking member, and the locking driver is configured to drive the locking member to a high position or a low position when the movable base is located in the working position;

[0015] The locking driving member drives the locking member to a high position to extend the locking member into the locking hole, so that the movable seat is fixed on the frame.

[0016] Furthermore, the push-pull type wafer processing barrel mounting structure also includes a first driving member, the fixed end of the first driving member is mounted on the frame, the driving end of the first driving member is connected to the movable seat, and the first driving member is configured to drive the movable seat to move back and forth along the first direction on the frame.

[0017] In a second aspect, a wafer processing machine is provided, comprising the above-mentioned push-pull type wafer processing barrel installation structure.

[0018] Compared with the prior art, the push-pull type wafer processing barrel installation structure and the wafer processing machine have the following beneficial effects: through the cooperation of the frame, the movable seat and the locking assembly, the movable seat can be installed on the frame to move back and forth along the first direction, and the processing barrel assembly is moved to the working position or the operating position. The locking assembly fixes the movable seat in the working position on the frame. When it is necessary to take out or put materials or perform maintenance, the operator only needs to move the movable seat from the working position to the operating position to perform subsequent operations, which is convenient to operate; by setting up a reinforcement structure, the use strength of the locking member is greatly improved and the service life is increased; by the sliding cooperation of the first concave slide rail and the second concave slide rail, the movable seat can be slidably set on the frame, and the sliding method is simple and easy to implement; by setting up a first driving member, the first driving member drives the movable seat to move back and forth along the first direction on the frame, eliminating manual operation and improving the degree of automation of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate and understand the technical solutions in the embodiments of the present invention, a brief introduction is given below to the background technology of the present invention and the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the contents of the embodiments of the present invention and these drawings without paying any creative work.

[0020] Figure 1 This is a schematic diagram of the three-dimensional structure of the push-pull type wafer processing barrel installation structure provided by an embodiment of the present utility model;

[0021] Figure 2 It is a partial structural diagram of the push-pull type wafer processing barrel installation structure provided by an embodiment of the present utility model. DETAILED DESCRIPTION

[0022] The technical solution of the present invention will be further described below with reference to the accompanying drawings and through specific implementation methods.

[0023] To facilitate understanding of the present invention, a more comprehensive description of the present invention will be provided below with reference to the accompanying drawings. Preferred embodiments of the present invention are shown in the accompanying drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. Rather, the purpose of providing these embodiments is to provide a more thorough and comprehensive understanding of the disclosure of the present invention. It should be noted that when a component is referred to as being "fixed to" another component, it can be directly attached to the other component or there can be a central component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there can be a central component. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only implementation methods. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which the present invention belongs. The terms used herein in the specification of the present invention are for the purpose of describing specific embodiments only and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more of the relevant listed items.

[0024] See also Figure 1 and Figure 2 As shown in the embodiment, a push-pull type wafer processing barrel installation structure includes a frame 1, a movable seat 2 and a locking assembly 3, wherein: a processing barrel assembly 4 is fixedly mounted on the movable seat 2, and the processing barrel assembly 4 is configured to process the wafers in the processing barrel of the processing barrel assembly 4 according to a preset process; the movable seat 2 can be moved along a first direction ( Figure 1 The movable seat 2 is reciprocatingly mounted on the frame 1 (in the X direction) to move the processing cylinder assembly 4 to a working position or an operating position, the working position is located inside the frame 1, and the operating position is located outside the frame 1; the locking assembly 3 is configured to fix the movable seat 2 in the working position on the frame 1.

[0025] It can be seen that through the cooperation of the frame 1, the movable base 2 and the locking assembly 3, the movable base 2 can be installed on the frame 1 to move back and forth along the first direction, and the processing cylinder assembly 4 is moved to the working position or the operating position. The locking assembly 3 fixes the movable base 2 in the working position on the frame 1. When it is necessary to take out or repair materials, the operator only needs to move and drag the movable base 2 from the working position to the operating position to perform subsequent operations, which is convenient to operate.

[0026] As an embodiment, the locking assembly 3 includes two Figure 1The locking units are arranged at intervals (in the Y direction) between the movable base 2 and the movable base 2, each locking unit including a locking member 30, a first disassembly assembly and a second disassembly assembly. The locking member 30 is a "Z"-shaped plate. The upper end of the locking member 30 can be detachably mounted at a preset position of the movable base 2 through the first disassembly assembly, and the lower end of the locking member 30-shaped plate can be detachably mounted at a preset position of the frame 1 through the second disassembly assembly.

[0027] As an embodiment, a reinforcement structure is provided in the middle of the locking member 30, and the reinforcement structure is a reinforcement rib 5. The first end of the reinforcement rib 5 is provided in the middle of the locking member 30 along the height direction, and the second end of the reinforcement rib 5 extends to the lower end of the locking member 30.

[0028] It can be seen that by providing the reinforcement structure, the use strength of the locking member 30 is greatly improved and the service life is increased.

[0029] As an embodiment, the two ends of the bottom of the movable seat 2 are respectively slidably set on the frame 1 through the sliding unit 6. The sliding unit 6 includes a first concave slide rail 60 set at the bottom of the movable seat 2 and a second concave slide rail 61 set on the frame 1. The concave surfaces of the first concave slide rail 60 and the second concave slide rail 61 are arranged relative to each other. The first concave slide rail 60 can be slidably set in the concave surface of the second concave slide rail 61. Through the sliding cooperation of the first concave slide rail 60 and the second concave slide rail 61, the movable seat 2 can be slidably set on the frame 1.

[0030] It can be seen that through the sliding cooperation between the first concave slide rail 60 and the second concave slide rail 61, the movable base 2 can be slidably arranged on the frame 1, and the sliding method is simple and easy to implement.

[0031] Of course, as another embodiment, the locking assembly 3 includes a locking drive and a locking member 30, a locking hole is opened on the corresponding locking member 30 on the movable base 2, the fixed end of the locking drive is installed on the frame 1, and the driving end of the locking drive is connected to the locking member 30, and the locking drive is configured to drive the locking member 30 to a high position or a low position when the movable base 2 is in the working position; the locking drive drives the locking member 30 to a high position to extend the locking member 30 into the locking hole, so that the movable base 2 is fixed on the frame 1.

[0032] As an embodiment, the push-pull type wafer processing barrel mounting structure also includes a first driving member, the fixed end of the first driving member is mounted on the frame 1, the driving end of the first driving member is connected to the movable seat 2, and the first driving member is configured to drive the movable seat 2 to move back and forth along the first direction on the frame 1.

[0033] It can be seen that by providing the first driving member, the first driving member drives the movable base 2 to move back and forth along the first direction on the frame 1, eliminating manual operation and improving the degree of automation of the equipment.

[0034] It should be noted that when materials need to be taken out or repaired, the movable seat 2 can be moved out manually or by a driving member.

[0035] Based on the above-mentioned push-pull type wafer processing barrel installation structure, a wafer processing machine is provided, which includes the above-mentioned push-pull type wafer processing barrel installation structure.

[0036] It should be noted that a wafer processing machine can perform cleaning and drying processes on wafers in a wafer processing barrel.

[0037] When the above-mentioned push-pull type wafer processing barrel installation structure needs to be taken out or repaired: first, the upper end and lower end of the locking member 30 are unlocked on the movable seat 2 and the frame 1 respectively through the first disassembly and assembly component and then the movable seat 2 is moved from the working position to the operating position manually or by the first driving component for subsequent taking out or repair. Finally, the movable seat 2 is moved from the operating position to the working position manually or by the first driving component and the upper end and lower end of the locking member 30 are fixed on the movable seat 2 and the frame 1 respectively by the first disassembly and assembly component, thereby fixing the movable seat 2 on the frame 1.

[0038] The above embodiments merely illustrate the basic principles and features of the present invention. The present invention is not limited to the above embodiments. Various changes and modifications may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and modifications are intended to fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

Claims

1. A push-pull type wafer processing barrel installation structure, characterized in that: The push-pull type wafer processing barrel installation structure includes a frame, a movable seat and a locking assembly, wherein: A processing barrel assembly is fixedly mounted on the movable seat, and the processing barrel assembly is configured to process the wafers in the processing barrel of the processing barrel assembly according to a preset process; The movable seat is mounted on the frame so as to be reciprocally movable along a first direction to move the processing cylinder assembly to a working position or an operating position, wherein the working position is located inside the frame and the operating position is located outside the frame; The locking assembly is configured to fix the moving base in the working position on the frame.

2. The push-pull type wafer processing barrel installation structure according to claim 1, characterized in that: The locking assembly includes two locking units spaced apart along the second direction, each of the locking units includes a locking piece, a first disassembly assembly and a second disassembly assembly, the locking piece is a "Z"-shaped plate, the upper end of the locking piece can be detachably mounted at a preset position of the movable seat through the first disassembly assembly, and the lower end of the locking piece "Z"-shaped plate can be detachably mounted at a preset position of the frame through the second disassembly assembly.

3. The push-pull type wafer processing barrel installation structure according to claim 2, characterized in that: A reinforcement structure is provided in the middle of the locking piece, and the reinforcement structure is a reinforcement rib. The first end of the reinforcement rib is provided in the middle of the locking piece along the height direction, and the second end of the reinforcement rib extends to the lower end of the locking piece.

4. The push-pull type wafer processing barrel installation structure according to claim 1, characterized in that: The two ends of the bottom of the movable seat are slidably arranged on the frame through sliding units respectively, and the sliding unit includes a first concave slide rail arranged at the bottom of the movable seat and a second concave slide rail arranged on the frame, the concave surfaces of the first concave slide rail and the second concave slide rail are arranged opposite to each other, and the first concave slide rail can be slidably arranged in the concave surface of the second concave slide rail, and the movable seat can be slidably arranged on the frame through the sliding cooperation of the first concave slide rail and the second concave slide rail.

5. The push-pull type wafer processing barrel installation structure according to claim 1, characterized in that: The locking assembly includes a locking driver and a locking member. A locking hole is opened on the movable base corresponding to the locking member. The fixed end of the locking driver is mounted on the frame. The driving end of the locking driver is connected to the locking member. The locking driver is configured to drive the locking member to a high position or a low position when the movable base is located in the working position. The locking driving member drives the locking member to a high position to extend the locking member into the locking hole, so that the movable seat is fixed on the frame.

6. The push-pull type wafer processing barrel installation structure according to claim 1, characterized in that: The push-pull wafer processing barrel mounting structure also includes a first driving member, a fixed end of which is mounted on the frame, a driving end of which is connected to the movable seat, and the first driving member is configured to drive the movable seat to reciprocate along a first direction on the frame.

7. A wafer processing machine, characterized in that: The wafer processing machine includes the push-pull type wafer processing barrel installation structure according to any one of claims 1 to 6.

Images