Visual inspection auxiliary support for silicon carbide wafer

Abstract

The utility model discloses a visual inspection auxiliary support for silicon carbide wafers. The visual inspection auxiliary support comprises a base; the supporting rod is vertically arranged, and the bottom end of the supporting rod is connected with the base; the number of the inclined rods is three, the three inclined rods are arranged at intervals in the circumferential direction of the supporting rod, the bottom end of each inclined rod is connected with the top end of the supporting rod, and the top ends of the inclined rods extend upwards in an inclined mode; the number of the flexible sleeves is three, the three flexible sleeves are sleeved on the inclined rod in a one-to-one correspondence mode, and the diameter of a circle where the vertexes of the three flexible sleeves are located is 125mm-140mm. According to the visual inspection auxiliary support for the silicon carbide wafer, when visual inspection is carried out on the wafer, the silicon carbide wafer can be placed on the visual inspection auxiliary support, defects of the edge of the silicon carbide wafer can be observed conveniently, meanwhile, the visual inspection auxiliary support can be compatible with wafers of six inches and eight inches, and visual inspection can be conveniently carried out on the silicon carbide wafers of different sizes by inspectors.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor visual inspection jigs, in particular to a visual inspection auxiliary bracket for silicon carbide wafers. Background Art

[0002] The purpose of visual inspection for silicon carbide wafers is to check the wafer's appearance, thereby reducing the flow of defective products from the previous process into the subsequent process, thereby reducing production capacity and material waste in the subsequent process, and thus achieving the goal of improving efficiency. Visual inspection of silicon carbide wafers is a necessary step in wafer processing. It can reduce production capacity and material waste in the subsequent process, and provide real-time information on the status of the previous process. Major anomalies can be promptly adjusted, and defective products are no longer transferred to the subsequent process, but can be promptly returned to the previous process for rework, thereby better controlling costs.

[0003] However, in the related art, a wafer clamp is directly used to clamp the wafer from the plug for visual inspection, but the defects of silicon carbide wafers are mainly concentrated at the edges. Clamping with a wafer clamp will block part of the edge of the wafer, resulting in low inspection efficiency. In addition, clamping the wafer with a wafer clamp for a long time poses a safety hazard. Utility Model Content

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a visual inspection auxiliary support for silicon carbide wafers. During visual inspection of the wafers, the silicon carbide wafers can be placed on the visual inspection auxiliary support, making it easier to observe defects on the silicon carbide wafer edges. The support is compatible with both six-inch and eight-inch wafers, making it easier for inspectors to perform visual inspections on silicon carbide wafers of different sizes.

[0005] According to the utility model, the visual inspection auxiliary bracket for silicon carbide wafers includes: a base; a support rod, which is vertically arranged and the bottom end of the support rod is connected to the base; an oblique rod, which is three in number and arranged at intervals around the circumference of the support rod, and the bottom end of each of the oblique rods is connected to the top end of the support rod, and the top end of the oblique rod extends obliquely upward; a flexible sleeve, which is three in number and is one-to-one correspondingly sheathed on the oblique rod, the vertices of the three flexible sleeves are at the same height, and the diameter of the circle where the vertices of the three flexible sleeves are located is 125mm-140mm.

[0006] According to the visual inspection auxiliary bracket for silicon carbide wafers of the utility model, by making the diameter of the circle where the vertices of the three flexible sleeves are located be 125mm-140mm, the silicon carbide wafer can be placed on the visual inspection auxiliary bracket when visually inspecting the wafer. This is safe and reliable, and is convenient for observing defects on the edge of the silicon carbide wafer. At the same time, it is compatible with six-inch and eight-inch wafers, making it convenient for inspectors to perform visual inspections on silicon carbide wafers of different sizes.

[0007] In some embodiments of the present invention, the flexible sleeve is a silicone member, the thickness of the top end of the flexible sleeve is 3mm-4mm, and the thickness of the peripheral wall of the flexible sleeve is 1mm-2mm.

[0008] In some embodiments of the present invention, the included angle between each of the inclined rods and the horizontal plane is α, and α satisfies: 40°≤α≤50°.

[0009] In some embodiments of the present invention, the included angle between two adjacent oblique rods in the circumferential direction is β, and β satisfies: 125°≤β≤135°.

[0010] In some embodiments of the present invention, the distance between the vertex of the flexible sleeve and the support rod in the vertical direction is L, and L satisfies: 45mm≤L≤55mm.

[0011] In some embodiments of the present invention, the outer diameter of the flexible sleeve is 5mm-6mm.

[0012] In some embodiments of the present invention, the oblique rod includes a first rod and a second rod, and the first rod is detachably connected to the second rod so that the length of the oblique rod is adjustable.

[0013] In some embodiments of the present invention, the second rod has a first position and a second position relative to the first rod. In the first position, the diameter of the circle where the vertices of the three flexible sleeves are located is 125mm-130mm; in the second position, the diameter of the circle where the vertices of the three flexible sleeves are located is 135mm-140mm.

[0014] In some embodiments of the present invention, the top end of the first rod is provided with an external threaded section, the bottom end of the second rod is provided with an internal threaded hole, and the external threaded section is threadedly connected to the internal threaded hole.

[0015] In some embodiments of the present invention, a chamfered portion is provided at the free end of the flexible sleeve, and the silicon carbide wafer is placed at the chamfered portion.

[0016] Additional aspects and advantages of the present invention will be given in part in the following description and will become apparent from the following description or learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a schematic diagram of a visual inspection auxiliary bracket according to one embodiment of the present utility model;

[0018] Figure 2 yes Figure 1 Schematic diagram of corrosion of the visual inspection auxiliary bracket shown in;

[0019] Figure 3 is a schematic diagram of a visual inspection auxiliary bracket according to another embodiment of the present invention, wherein the second rod is in a first position;

[0020] Figure 4 3 is a schematic diagram of a visual inspection auxiliary bracket according to another embodiment of the present invention, wherein the second rod is in the second position.

[0021] Reference numerals:

[0022] Visual inspection auxiliary bracket 100;

[0023] Base 10;

[0024] Support rod 20;

[0025] Oblique rod 30; first rod 31; external thread section 311; second rod 32; internal thread hole 321; first oblique rod 30a; second oblique rod 30b; third oblique rod 30c;

[0026] Flexible sleeve 40; chamfered portion 41. DETAILED DESCRIPTION

[0027] The following describes in detail embodiments of the present invention, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to explain the present invention, and should not be construed as limiting the present invention.

[0028] The disclosure below provides many different embodiments or examples for realizing different structures of the present invention. In order to simplify the disclosure of the present invention, the components and settings of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. In addition, the present invention may repeat reference numbers and / or letters in different examples. This repetition is for the purpose of simplicity and clarity and does not in itself indicate the relationship between the various embodiments and / or settings discussed. In addition, the present invention provides examples of various specific processes and materials, but a person of ordinary skill in the art will appreciate the applicability of other processes and / or the use of other materials.

[0029] Reference Figure 1 and Figure 2 As shown, the visual inspection auxiliary support 100 for silicon carbide wafers according to the present invention includes: a base 10, a support rod 20, an inclined rod 30 and a flexible sleeve 40.

[0030] Reference Figure 1As shown, the support rod 20 is vertically arranged, and the bottom end of the support rod 20 is connected to the base 10. For example, the bottom end of the support rod 20 can be connected to the base 10 by a thread. There are three inclined rods 30, and the three inclined rods 30 are arranged at intervals around the circumference of the support rod 20. The bottom end of each inclined rod 30 is connected to the top end of the support rod 20, and the top end of the inclined rod 30 extends obliquely upward, wherein the base 10, the support rod 20 and the inclined rod 30 can all be stainless steel parts.

[0031] It can be understood that stainless steel has good mechanical properties, and the diameters of the support rod 20 and the oblique rod 30 can be made smaller while ensuring the structural strength of the base 10, the support rod 20 and the oblique rod 30. For example, in some examples, the diameter of the oblique rod 30 is 4mm-6mm. This not only facilitates the installation and fixation of the base 10, the support rod 20 and the oblique rod 30, but also allows the circumferential spacing between two adjacent oblique rods 30 to be larger, thereby facilitating the suction pen (not shown) to pass through the area between the two oblique rods 30 from the bottom to absorb the chip.

[0032] Reference Figure 1 and Figure 2 As shown, there are three flexible sleeves 40, which are respectively placed on the inclined rod 30. The vertices of the three flexible sleeves 40 are at the same height, and the diameter of the circle where the vertices of the three flexible sleeves 40 are located is 125mm-140mm. In other words, the distances from the vertices of the three flexible sleeves 40 to the horizontal plane are equal, and the diameter of the circle where the vertices of the three flexible sleeves 40 are located can be any value between 125mm-140mm. For example, referring to Figure 2 As shown, the diameter of the circle k where the vertices of the three flexible sleeves 40 are located is 130 mm.

[0033] It can be understood that the diameter of a six-inch silicon carbide wafer is 150 mm, and the diameter of an eight-inch silicon carbide wafer is 200 mm. By making the diameter of the circle where the vertices of the three flexible sleeves 40 are located be 125 mm-140 mm, both the six-inch silicon carbide wafer and the eight-inch silicon carbide wafer can be reliably placed on the visual inspection auxiliary bracket 100, which is safe and reliable, and convenient for observing defects on the edge of the silicon carbide wafer.

[0034] In view of this, according to the visual inspection auxiliary bracket 100 for silicon carbide wafers of the present invention, by making the diameter of the circle where the vertices of the three flexible sleeves 40 are located be 125mm-140mm, the silicon carbide wafer can be placed on the visual inspection auxiliary bracket 100 when visually inspecting the wafer. It is safe and reliable, and convenient for observing defects on the edge of the silicon carbide wafer. At the same time, it is compatible with six-inch and eight-inch wafers, making it convenient for inspectors to perform visual inspections on silicon carbide wafers of different sizes.

[0035] In some embodiments of the present invention, referring to Figure 1 and Figure 2As shown, the flexible sleeve 40 is a silicone member. It can be understood that by making the flexible sleeve 40 a silicone member, when the silicon carbide wafer is placed on the top of the three flexible sleeves 40, the flexible sleeve 40 can be deformed, thereby increasing the contact area between the silicon carbide wafer and the flexible sleeve 40, which is beneficial to prevent the silicon carbide wafer from falling off.

[0036] Reference Figure 1 As shown, the thickness of the top of the flexible sleeve 40 is 3mm-4mm, for example, referring to Figure 1 As shown, the top thickness of the flexible sleeve 40 is t, and t can take any value from 3mm to 4mm. It can be understood that by making the top thickness of the flexible sleeve 40 3mm-4mm, on the one hand, the deformation of the top of the flexible sleeve 40 will not be too large, which is beneficial to ensure the service life of the flexible sleeve 40. On the other hand, the deformation of the top of the flexible sleeve 40 will not be too small, thereby ensuring the contact area between the silicon carbide wafer and the flexible sleeve 40, and ensuring reliable bearing of the silicon carbide wafer.

[0037] Reference Figure 1 As shown, the thickness of the peripheral wall of the flexible sleeve 40 is 1 mm to 2 mm. It is understood that by making the thickness of the peripheral wall of the flexible sleeve 40 1 mm to 2 mm, it is beneficial to reduce the thickness of the flexible sleeve 40 and reduce costs while ensuring a reliable connection between the flexible sleeve 40 and the inclined rod 30.

[0038] In some embodiments of the present invention, referring to Figure 1 As shown, the angle α between each inclined rod 30 and the horizontal plane is α, and α satisfies: 40°≤α≤50°. In other words, the angle α between the inclined rod 30 and the horizontal plane can take any value between 40° and 50°. For example, the angle α between the inclined rod 30 and the horizontal plane can be 41°, 42°, 43°, 44°, 45°, 46°, 47°, 48°, 49° or 50°. It can be understood that by making the angle α between the inclined rod 30 and the horizontal plane between 40° and 50°, it is helpful to ensure that the distance L between the vertex of the flexible sleeve 40 and the support rod 20 is not too small, thereby facilitating the suction pen to pass through the area between the two inclined rods 30 from the bottom to suck up the wafer.

[0039] In some embodiments of the present invention, referring to Figure 1 and Figure 2As shown, the angle β between two adjacent inclined rods 30 in the circumferential direction is β, and β satisfies: 125°≤β≤135°. For example, the inclined rods 30 can be divided into a first inclined rod 30a, a second inclined rod 30b, and a third inclined rod 30c. The angle β between the first inclined rod 30a and the second inclined rod 30b in the circumferential direction is 130°, the angle between the second inclined rod 30b and the third inclined rod 30c in the circumferential direction is 115°, and the angle between the third inclined rod 30c and the first inclined rod 30a in the circumferential direction is 115°. It can be understood that by making the angle β between two adjacent inclined rods 30 in the circumferential direction between 125° and 135°, it is convenient for the suction pen to pass through the area between the two inclined rods 30 from the bottom to suck up the wafer. At the same time, the angles between the three inclined rods 30 in the circumferential direction can be made more uniform, which is conducive to ensuring the reliable placement of the silicon carbide wafer on the visual inspection auxiliary bracket 100, thereby ensuring the reliable placement of the silicon carbide wafer.

[0040] In some embodiments of the present invention, referring to Figure 1 As shown, the vertical distance L between the apex of the flexible sleeve 40 and the support rod 20 satisfies the following: 45 mm ≤ L ≤ 55 mm. For example, L can be 45 mm, 46 mm, 47 mm, 48 mm, 49 mm, 50 mm, 51 mm, 52 mm, 53 mm, 54 mm, or 55 mm. This prevents L from being too small, making it easier for the suction pen to pick up the wafer.

[0041] In some embodiments of the present invention, referring to Figure 1 and Figure 2 As shown, the outer diameter of the flexible sleeve 40 is 5 mm to 6 mm. In other words, the outer diameter of the flexible sleeve 40 can be any value between 5 mm and 6 mm. For example, the outer diameter of the flexible sleeve 40 can be 5 mm, 5.2 mm, 5.3 mm, 5.4 mm, 5.5 mm, 5.6 mm, 5.7 mm, 5.8 mm, or 5.9 mm. It will be understood that by setting the outer diameter of the flexible sleeve 40 to 5 mm to 6 mm, the diameter of the flexible sleeve 40 can be made smaller, thereby facilitating the suction pen to suck up the wafer.

[0042] In some embodiments of the present invention, referring to Figure 3 and Figure 4 As shown, the inclined rod 30 includes a first rod 31 and a second rod 32. The first rod 31 and the second rod 32 are detachably connected to each other so that the length of the inclined rod 30 is adjustable. For example, the first rod 31 and the second rod 32 can be detachably connected by a snap connection, a threaded connection, or a fastener. It will be understood that by making the length of the inclined rod 30 adjustable, the visual inspection auxiliary bracket 100 can be adapted to accommodate silicon carbide wafers of different sizes.

[0043] In some embodiments of the present invention, the second rod 32 has a first position and a second position relative to the first rod 31. Figure 3 As shown, in the first position, the diameter of the circle where the vertices of the three flexible sleeves 40 are located is 125mm-130mm; Figure 4 As shown, in the second position, the diameter of the circle where the vertices of the three flexible sleeves 40 are located is 135mm-140mm. Figure 3 As shown, in the first position, the diameter of the circle where the vertices of the three flexible sleeves 40 are located is 128 mm; Figure 4 As shown, in the second position, the diameter of the circle containing the vertices of the three flexible sleeves 40 is 138 mm. Therefore, when testing a six-inch silicon carbide wafer, the three second rods 32 can be adjusted to the first position, and when testing an eight-inch silicon carbide wafer, the three second rods 32 can be adjusted to the second position, which facilitates reliable support of the wafer.

[0044] In some embodiments of the present invention, referring to Figure 3 and Figure 4 As shown, the top end of the first rod 31 is provided with an externally threaded section 311, and the bottom end of the second rod 32 is provided with an internally threaded hole 321. The externally threaded section 311 and the internally threaded hole 321 are threadedly connected. As can be appreciated, a threaded connection offers the advantages of a simple structure and ease of assembly. The externally threaded section 311 and the internally threaded hole 321 enable a tight connection between the first rod 31 and the second rod 32. Furthermore, this ensures a strong connection between the first and second rods 31 and 32 while also reducing costs.

[0045] In some embodiments of the present invention, referring to Figure 1 As shown, the free end of the flexible sleeve 40 is provided with a chamfered portion 41, and the silicon carbide wafer is placed at the chamfered portion 41. It can be understood that by providing the chamfered portion 41 at the free end of the flexible sleeve 40, the contact area between the silicon carbide wafer and the flexible sleeve 40 can be increased, thereby facilitating the reliable placement of the silicon carbide wafer when the silicon carbide wafer is placed at the chamfered portion 41.

[0046] Other structures and operations of the visual inspection auxiliary bracket 100 for silicon carbide wafers according to the embodiment of the present invention are known to those skilled in the art and will not be described in detail here.

[0047] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation to the present invention.

[0048] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature specified as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of this utility model, "plurality" means two or more, unless otherwise specifically defined.

[0049] In this utility model, unless otherwise expressly specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection, or communication; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. For those skilled in the art, the specific meanings of the above terms in this utility model can be understood according to specific circumstances.

[0050] In the present invention, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0051] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and features of different embodiments or examples without contradiction.

[0052] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and purpose of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A visual inspection auxiliary bracket for silicon carbide wafers, characterized in that: include: base; A support rod, the support rod is vertically arranged, and the bottom end of the support rod is connected to the base; There are three oblique rods, which are arranged at intervals around the circumference of the support rod, the bottom end of each oblique rod is connected to the top end of the support rod, and the top end of the oblique rod extends obliquely upward; There are three flexible sleeves, and the three flexible sleeves are correspondingly arranged on the inclined rod. The vertices of the three flexible sleeves are at the same height. The diameter of the circle where the vertices of the three flexible sleeves are located is 125mm-140mm. The flexible sleeve is a silicone piece. The thickness of the top of the flexible sleeve is 3mm-4mm, and the thickness of the surrounding wall of the flexible sleeve is 1mm-2mm.

2. The visual inspection auxiliary support for silicon carbide wafers according to claim 1, characterized in that: The included angle between each of the inclined rods and the horizontal plane is α, and α satisfies: 40°≤α≤50°.

3. The visual inspection auxiliary support for silicon carbide wafers according to claim 2, characterized in that: The included angle between two adjacent oblique rods in the circumferential direction is β, and β satisfies: 125°≤β≤135°.

4. The visual inspection auxiliary support for silicon carbide wafers according to claim 3, characterized in that: The distance between the vertex of the flexible sleeve and the support rod in the vertical direction is L, and L satisfies: 45mm≤L≤55mm.

5. The visual inspection auxiliary support for silicon carbide wafers according to claim 1, characterized in that: The outer diameter of the flexible sleeve is 5mm-6mm.

6. The visual inspection auxiliary support for silicon carbide wafers according to claim 1, characterized in that: The oblique rod includes a first rod and a second rod, and the first rod is detachably connected to the second rod so that the length of the oblique rod is adjustable.

7. The visual inspection auxiliary support for silicon carbide wafers according to claim 6, characterized in that: The second rod has a first position and a second position relative to the first rod. In the first position, the diameter of the circle where the vertices of the three flexible sleeves are located is 125mm-130mm; in the second position, the diameter of the circle where the vertices of the three flexible sleeves are located is 135mm-140mm.

8. The visual inspection auxiliary support for silicon carbide wafers according to claim 6, characterized in that: The top end of the first rod is provided with an external thread section, the bottom end of the second rod is provided with an internal thread hole, and the external thread section is threadedly connected to the internal thread hole.

9. The visual inspection auxiliary support for silicon carbide wafers according to claim 1, characterized in that: A chamfered portion is provided at the free end of the flexible sleeve, and the silicon carbide wafer is placed at the chamfered portion.

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