Gas distribution disc heating belt convenient to install

Abstract

The utility model discloses a gas distribution disc heating belt convenient to install, which comprises an annular ribbon heater, a heat insulation protective cover is welded at the middle position of one side of the annular ribbon heater, telescopic sliding rods are arranged at two ends of the other side of the annular ribbon heater, and telescopic sliding cylinders fixed with the heat insulation protective cover are connected onto the telescopic sliding rods in a sliding manner. According to the utility model, by installing the telescopic sliding cylinder and the like, when the device is used, a user can utilize the sliding telescopic effect between the telescopic sliding cylinder and the telescopic sliding rod arranged at the opening end of the annular ribbon heater to be matched with the fixed locking effect between the corresponding adjusting screw hole in the telescopic sliding cylinder and the fixed screw hole in the telescopic sliding rod through the screw; the annular ribbon heater can be expanded or contracted, so that the annular ribbon heater can be flexibly deformed according to the actual assembly space in the gas distribution disc, the applicability of the device is improved, and different installation requirements can be met conveniently.

Description

Technical Field

[0001] The utility model relates to the technical field of gas distribution plate structures, in particular to a gas distribution plate heating belt which is easy to install. Background Art

[0002] Gas distribution plates are widely used in various occasions that require precise control of gas distribution, such as plasma processing equipment, air conditioning systems, etc. It can achieve the functions of uniformly distributing gas, adjusting air volume and reducing air supply resistance. The heating belt is one of the most basic structures inside the gas distribution plate. The heating belt can maintain the temperature inside the distribution plate and prevent gas condensation due to low temperature during the distribution process, which is beneficial to improving gas fluidity and distribution effect. However, there are still some defects in the specific use of the gas distribution plate heating belt.

[0003] The heating belt of the gas distribution plate is often directly installed inside the gas distribution plate through parts such as screws or fixing clips. Since the internal space of the distribution plate is smaller than that of the annular electric heating belt, it will be difficult to operate and install accurately. In addition, this type of heating belt often has a fixed shape and is not easy to flexibly deform according to the actual assembly space. This leads to low applicability of the device. To address the above defects, we propose a new type of easy-to-install gas distribution plate heating belt to provide better assembly and installation effects. Utility Model Content

[0004] The purpose of the present utility model is to provide a gas distribution plate heating belt that is easy to install, so as to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solution: a gas distribution plate heating belt that is easy to install, comprising an annular electric heating belt, a heat insulation protective cover welded at the middle position of one side of the annular electric heating belt, and telescopic sliding rods are provided at both ends of the other side of the annular electric heating belt, and the telescopic sliding rod is slidably connected to a telescopic slide fixed to the heat insulation protective cover, and the annular electric heating belt is equipped with a threaded plug for power supply that passes through one side of the heat insulation protective cover, the outside of the annular electric heating belt is connected to a wiring box, the inside of the wiring box is movably connected to a take-up reel, the inside of the take-up reel is wound with a connecting wire installed with the threaded plug for power supply, the outer wall of the take-up reel is provided with a limiting buckle that is clamped with the connecting wire, the middle positions of both ends of the annular electric heating belt are wrapped with high-temperature fireproof and heat-insulating rubber sleeves, the high-temperature fireproof and heat-insulating rubber sleeves are clamped with a pre-installed support, and high-temperature fireproof and heat-insulating rubber balls matching the high-temperature fireproof and heat-insulating rubber sleeves are evenly provided at both ends of the inner wall of the pre-installed support, and assembly screw holes are evenly provided on both sides of the pre-installed support.

[0006] Preferably, the telescopic slide is evenly provided with adjusting screw holes arranged at equal intervals.

[0007] Preferably, one end of the telescopic slide rod is provided with a fixing screw hole matching the adjusting screw hole, and a screw is provided between the fixing screw hole and the adjusting screw hole.

[0008] Preferably, an inspection cover is mounted on the top of the wiring box, making it easy to open the wiring box through the inspection cover for maintenance.

[0009] Preferably, a damping shaft is provided between the middle position of the bottom of the take-up reel and the inner wall of the wiring box.

[0010] Preferably, an operating handle is fixed at the middle position of the top of the wiring box.

[0011] Preferably, a threaded slot for power supply is provided on the connecting wire, and a threaded connection is formed between the threaded slot for power supply and the threaded plug for power supply, so that the connecting wire can be disassembled and maintained on the annular electric heating tape by utilizing the threaded connection between the threaded slot for power supply and the threaded plug for power supply.

[0012] Preferably, a reserved cavity is provided at the middle position of the bottom of the take-up reel, and foam double-sided tape is adhered to the inside of the reserved cavity, so that the take-up reel can be easily adhered and fixed to a suitable position on the gas distribution plate casing through the foam double-sided tape.

[0013] Compared with the prior art, the beneficial effects of the present invention are:

[0014] (1) The gas distribution plate heating belt that is easy to install is equipped with a telescopic slide, etc., so that the device optimizes its own structure. On the one hand, the user can fix the two pre-installed supports in appropriate positions inside the gas distribution plate by assembling the screw holes and screws. Subsequently, the user can use the slot structure formed by the high-temperature fireproof and heat-insulating rubber balls arranged at both ends of the inner wall of the pre-installed support and the clamping effect formed between the high-temperature fireproof and heat-insulating rubber sleeves wrapped at the middle position of the two ends of the annular electric heating belt to achieve flexible clamping or disassembly of the annular electric heating belt on the two pre-installed supports. Furthermore, through the setting of the pre-installed structure, the annular electric heating belt can be quickly installed and disassembled inside the gas distribution plate. This solves the problem of the annular electric heating tape being directly installed inside the gas distribution plate by means of screws or fixing clamps, which is caused by the smaller internal space of the distribution plate than that of the annular electric heating tape and is difficult to install accurately, thereby improving the convenience of operation. On the other hand, the user can utilize the sliding and telescopic effect between the telescopic slide and the telescopic slide rod provided at the open end of the annular electric heating tape, and cooperate with the fixing and locking effect formed by the screws between the corresponding adjusting screw holes on the telescopic slide and the fixing screw holes on the telescopic slide rod to realize the expansion or contraction operation of the annular electric heating tape, which facilitates the flexible deformation of the annular electric heating tape according to the actual assembly space inside the gas distribution plate, thereby improving the applicability of the device and facilitating the satisfaction of different installation requirements.

[0015] (2) The gas distribution plate heating belt that is easy to install optimizes its own performance by installing connecting wires, etc., and a protective heat-insulating shield for covering the threaded plug for power supply is welded in the middle position of one side of the annular electric heating belt, so that the power connection part of the device can be protected. In addition, the user can use the threaded connection between the threaded slot for power supply and the threaded plug for power supply to install the connecting wire on the annular electric heating belt, and can rotate the operating handle to drive the winding reel to rotate and realize the winding and arrangement of the connecting wire, and then clamp the tail end of the connecting wire into the limit buckle on the outer wall of the wiring box, so that the device can wind up the connecting wire and help protect the connecting wire used for power connection;

[0016] (3) The gas distribution plate heating belt that is easy to install is installed with foam double-sided tape, etc., so that when the device is actually used, on the one hand, the user can use the threaded connection between the power-on threaded slot and the power-on threaded plug to disassemble and maintain the connecting wire on the ring-shaped electric belt; on the other hand, the user can stick the foam double-sided tape inside the reserved cavity, and then tear off the release paper on the foam double-sided tape, and then use the foam double-sided tape to stick and fix the wire take-up reel to a suitable position on the gas distribution plate casing. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the top view of the structure of the utility model;

[0018] Figure 2 This is a schematic diagram of the top view of the annular electric heating belt of the utility model in a disassembled state;

[0019] Figure 3 This is a schematic diagram of the structure of the pre-installed support of the utility model in a disassembled state from a top view;

[0020] Figure 4 This is a schematic diagram of a partial cross-sectional structure of a wiring box according to the present invention when viewed from above;

[0021] Figure 5 This is a schematic diagram of the wiring box structure when viewed from above.

[0022] In the figure: 1. Telescopic slide; 2. Adjustment screw hole; 3. Inspection cover; 4. Heat insulation protective cover; 5. Pre-installed support; 6. Threaded slot for power supply; 7. Threaded plug for power supply; 8. Connecting wires; 9. Wiring box; 10. Operating handle; 11. Ring electric heating belt; 12. Fixing screw hole; 13. Telescopic slide; 14. High-temperature fireproof and heat-insulating rubber sleeve; 15. Assembly screw hole; 16. High-temperature fireproof and heat-insulating rubber ball; 17. Limit buckle; 18. Take-up reel; 19. Damping shaft; 20. Foam double-sided tape; 21. Reserved cavity. DETAILED DESCRIPTION

[0023] The following is a clear and complete description of the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0024] See also Figure 1-5 The utility model provides an embodiment of a gas distribution plate heating belt that is easy to install, comprising an annular electric heating belt 11, a heat insulation protective cover 4 is welded at the middle position of one side of the annular electric heating belt 11, and telescopic slide rods 13 are provided at both ends of the other side of the annular electric heating belt 11;

[0025] The telescopic slide rod 13 is slidably connected to a telescopic slide cylinder 1 fixed to the heat insulation shield 4. The annular electric heating tape 11 is equipped with a threaded plug 7 for power supply that passes through one side of the heat insulation shield 4. The outside of the annular electric heating tape 11 is connected to a wiring box 9.

[0026] The wiring box 9 is internally connected to a take-up drum 18, the inside of which is wound a connecting wire 8 installed with the threaded plug 7 for power supply, and the outer wall of the take-up drum 18 is provided with a limit buckle 17 that is engaged with the connecting wire 8;

[0027] The middle positions of both ends of the annular electric heating tape 11 are wrapped with high-temperature fireproof and heat-insulating rubber sleeves 14, and the pre-installed support 5 is clamped on the high-temperature fireproof and heat-insulating rubber sleeves 14. High-temperature fireproof and heat-insulating rubber balls 16 that match the high-temperature fireproof and heat-insulating rubber sleeves 14 are evenly arranged on both ends of the inner wall of the pre-installed support 5. Assembly screw holes 15 are evenly arranged on both sides of the pre-installed support 5;

[0028] During use, the user can fix the two pre-installed supports 5 in appropriate positions inside the gas distribution plate by assembling the screw holes 15 and the screws. Subsequently, the user can utilize the slot structure formed by the high-temperature fireproof and heat-insulating rubber balls 16 arranged at both ends of the inner wall of the pre-installed supports 5 and the clamping effect formed between the high-temperature fireproof and heat-insulating rubber sleeves 14 wrapped at the middle positions of the two ends of the annular electric heating tape 11 to realize the flexible clamping or removal of the annular electric heating tape 11 on the two pre-installed supports 5. Furthermore, through the setting of the pre-installed structure, the annular electric heating tape 11 can be quickly installed and removed inside the gas distribution plate, which solves the problem that the annular electric heating tape 11 is directly installed inside the gas distribution plate by screws or fixing clips and the like because the internal space of the distribution plate is smaller than that of the annular electric heating tape 11 and is difficult to accurately install, thereby improving the convenience of operation.

[0029] The telescopic slide 1 is evenly provided with adjusting screw holes 2 arranged at equal intervals;

[0030] One end of the telescopic slide rod 13 is provided with a fixing screw hole 12 that matches the adjusting screw hole 2, and a screw is provided between the fixing screw hole 12 and the adjusting screw hole 2;

[0031] An inspection cover 3 is mounted on the top of the wiring box 9, making it easy to open the wiring box 9 for maintenance through the inspection cover 3;

[0032] A damping shaft 19 is provided between the middle position of the bottom of the take-up drum 18 and the inner wall of the wiring box 9;

[0033] An operating handle 10 is fixed at the middle position of the top of the wiring box 9;

[0034] The connecting wire 8 is provided with a threaded socket 6 for power supply, and a threaded connection is formed between the threaded socket 6 and the threaded plug 7 for power supply, so that the connecting wire 8 can be disassembled and maintained on the annular electric heating tape 11 by utilizing the threaded connection between the threaded socket 6 and the threaded plug 7;

[0035] A reserved cavity 21 is provided at the middle position of the bottom of the take-up reel 18 , and a foam double-sided adhesive 20 is adhered to the inside of the reserved cavity 21 , making it easy to adhere and fix the take-up reel 18 to a suitable position on the gas distribution plate casing through the foam double-sided adhesive 20 .

[0036] When the embodiment of the present application is in use: the user can fix the two pre-installed supports 5 in appropriate positions inside the gas distribution plate in advance by assembling the screw holes 15 and the screws. Subsequently, the user can use the card slot structure composed of the high-temperature fireproof and heat-insulating rubber balls 16 arranged at both ends of the inner wall of the pre-installed supports 5 and the card connection formed between the high-temperature fireproof and heat-insulating rubber sleeves 14 wrapped at the middle position of the two ends of the annular electric heating tape 11 to achieve flexible card connection or disassembly of the annular electric heating tape 11 on the two pre-installed supports 5, and then through the setting of the pre-installed structure, the annular electric heating tape 11 can be quickly installed inside the gas distribution plate. The quick-disassembly process solves the problem that the annular electric heating tape 11 is directly installed inside the gas distribution plate through screws or fixing clips, which is difficult to install accurately because the internal space of the distribution plate is smaller than that of the annular electric heating tape 11, thereby improving the convenience of operation. At the same time, the user can use the threaded connection between the power-on threaded slot 6 and the power-on threaded plug 7 to disassemble and maintain the connecting wire 8 on the annular electric heating tape 11. In addition, the user can adhere the foam double-sided tape 20 to the inside of the reserved cavity 21, and then tear off the release paper on the foam double-sided tape 20, and then the take-up reel 18 can be placed on the gas distribution plate through the foam double-sided tape 20. The annular electric heating tape 11 can be expanded or contracted by the user by means of the fixing screws 12 between the corresponding adjusting screw holes 2 on the telescopic slide 1 and the fixing screw holes 12 on the telescopic slide 13. This makes it easy to flexibly deform the annular electric heating tape 11 according to the actual assembly space inside the gas distribution plate, thereby improving the applicability of the device and meeting different installation requirements. Secondly, by A protective heat-insulating shield 4 for covering the threaded plug 7 for power supply is welded at the middle position of the side, which can protect the power connection part of the device. In addition, the user can use the threaded connection between the threaded slot 6 for power supply and the threaded plug 7 for power supply to install the connecting wire 8 on the annular electric heating tape 11, and can rotate the operating handle 10 to drive the wire reel 18 to rotate, thereby realizing the winding and arranging of the connecting wire 8, and then clamping the tail end of the connecting wire 8 into the limit buckle 17 on the outer wall of the wiring box 9. This allows the device to wind up the connecting wire 8 and is beneficial to protecting the connecting wire 8 used for power connection.

[0037] Obviously, the embodiments described above are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0038] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, tasks, devices, components and / or combinations thereof.

[0039] It should be noted that the terms "first," "second," and the like in the specification and claims of this application and the accompanying drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein.

[0040] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A gas distribution plate heating belt that is easy to install, characterized in that: The invention comprises an annular electric heating belt (11), a heat-insulating protective cover (4) is welded at the middle position of one side of the annular electric heating belt (11), a telescopic slide rod (13) is provided at both ends of the other side of the annular electric heating belt (11), a telescopic slide cylinder (1) fixed to the heat-insulating protective cover (4) is slidably connected to the telescopic slide rod (13), a threaded plug (7) for power supply which passes through one side of the heat-insulating protective cover (4) is installed on the annular electric heating belt (11), the outside of the annular electric heating belt (11) is connected to a wiring box (9), the inside of the wiring box (9) is movably connected to a take-up drum (18), and the take-up drum (18) is provided with a plurality of screw terminals. A connecting wire (8) is wound inside and installed with a threaded plug (7) for power supply. The outer wall of the take-up drum (18) is provided with a limit buckle (17) that is clamped with the connecting wire (8). The middle position of both ends of the annular electric heating tape (11) is wrapped with a high-temperature fireproof and heat-insulating rubber sleeve (14). A pre-installed support (5) is clamped on the high-temperature fireproof and heat-insulating rubber sleeve (14). Both ends of the inner wall of the pre-installed support (5) are evenly provided with high-temperature fireproof and heat-insulating rubber balls (16) that match the high-temperature fireproof and heat-insulating rubber sleeve (14). Both sides of the pre-installed support (5) are evenly provided with assembly screw holes (15).

2. The gas distribution plate heating belt that is easy to install according to claim 1, characterized in that: The telescopic slide (1) is evenly provided with adjusting screw holes (2) arranged at equal intervals.

3. The gas distribution plate heating belt that is easy to install according to claim 2, characterized in that: One end of the telescopic slide rod (13) is provided with a fixing screw hole (12) that matches the adjusting screw hole (2), and a screw is provided between the fixing screw hole (12) and the adjusting screw hole (2).

4. The gas distribution plate heating belt that is easy to install according to claim 1 is characterized in that: An inspection cover (3) is mounted on the top of the wiring box (9).

5. The gas distribution plate heating belt that is easy to install according to claim 1, characterized in that: A damping shaft (19) is provided between the middle position of the bottom of the take-up drum (18) and the inner wall of the wiring box (9).

6. The gas distribution plate heating belt that is easy to install according to claim 1, characterized in that: An operating handle (10) is fixed at the middle position of the top of the wiring box (9).

7. The gas distribution plate heating belt that is easy to install according to claim 1, characterized in that: The connecting wire (8) is provided with a threaded socket (6) for power supply, and a threaded connection is formed between the threaded socket (6) for power supply and the threaded plug (7) for power supply.

8. The easy-to-install gas distribution plate heating belt according to claim 1, characterized in that: A reserved cavity (21) is provided at the middle position of the bottom of the take-up reel (18), and a foam double-sided adhesive (20) is bonded inside the reserved cavity (21).

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