Hearth device and RPD coating equipment

Abstract

The utility model discloses a hearth device and RPD coating equipment. The hearth device comprises a mounting plate, a bundle guide device, a main hearth, a cover plate and an adjusting assembly, the beam guider is connected to one side of the mounting plate, the main hearth is connected to the other side, back to the beam guider, of the mounting plate, the cover plate is connected to the side, back to the mounting plate, of the beam guider, and the periphery of the cover plate extends out of the periphery of the beam guider to form a first covering edge; the adjusting assembly is connected with the mounting plate and the first shielding edge, the adjusting assembly is provided with an adjusting end used for adjusting the tightness between the mounting plate and the cover plate, and at least part of the adjusting end is exposed from the side, opposite to the mounting plate, of the first shielding edge. The hearth device disclosed by the utility model can be used for conveniently releasing the locking and fixing of the bundle guide device.

Description

Technical Field

[0001] The utility model relates to the technical field of coating equipment, in particular to a furnace device and RPD coating equipment. Background Art

[0002] The furnace assembly is a core component of RPD (Reactive Plasma Deposition) coating equipment in the photovoltaic industry. The furnace assembly consists of a mounting plate, a main furnace, and a beam guide. The main furnace and beam guide are fixed to opposite sides of the mounting plate. During process adjustments, the beam guide must be unlocked, moved to the desired position, and then re-secured.

[0003] In the prior art, the mounting plate defines an adjustment hole, and the beam guide is locked to the mounting plate using a screw assembly inserted through the adjustment hole. The adjustment end of the screw assembly is located on the underside of the mounting plate, and the operator must reach under the mounting plate to release the screw assembly from locking the beam guide. However, the operating space under the mounting plate is limited, making it inconvenient to release the beam guide when it is necessary to do so. Utility Model Content

[0004] The present invention aims to solve at least one of the technical problems in the prior art. To this end, the present invention provides a furnace device and an RPD coating device, which can facilitate the release of the locking fixation of the beam guide.

[0005] According to a first embodiment of the present invention, a furnace device includes:

[0006] Mounting plate;

[0007] a bundle guide connected to one side of the mounting plate;

[0008] The main furnace is connected to the other side of the mounting plate facing away from the beam guide;

[0009] A cover plate is connected to a side of the bundle guide facing away from the mounting plate, wherein a peripheral edge of the cover plate extends beyond the peripheral side of the bundle guide and forms a first shielding edge;

[0010] The adjusting component is connected to the mounting plate and the first shielding edge. The adjusting component is provided with an adjusting end for adjusting the tightness between the mounting plate and the cover plate. At least part of the adjusting end is exposed from a side of the first shielding edge facing away from the mounting plate.

[0011] The furnace device according to the embodiment of the present invention has at least the following beneficial effects:

[0012] By connecting the adjustment component to the first shielding edge of the mounting plate and the cover plate, and the adjustment end of the adjustment component exposing the side of the first shielding edge facing away from the mounting plate, the operating space where the adjustment end is located is larger. In this way, the operator can conveniently adjust the tightness between the mounting plate and the cover plate through the adjustment end on the side of the first shielding edge facing away from the mounting plate, so that the bundle guide can be locked and fixed on the mounting plate, or the bundle guide can be unlocked from the mounting plate. Even if there are more than three furnace devices arranged in sequence in the coating equipment, the operator can conveniently reach to the side of the first shielding edge facing away from the mounting plate to unlock the lock of the bundle guide.

[0013] According to some embodiments of the present invention, the first edge shield defines a first adjustment hole, the adjustment component is passed through the first adjustment hole, the adjustment component is abutted against the side of the first edge shield facing away from the mounting plate, the first adjustment hole is used to allow the cover plate to adjust its position in a direction parallel to the mounting plate, and the adjustment end is used to adjust the force of the adjustment component against the first edge shield.

[0014] According to some embodiments of the present invention, the adjustment assembly includes a first adjustment member and a baffle, the baffle covers the first adjustment hole, and the baffle is abutted against the side of the first baffle facing away from the mounting plate, the adjustment end is arranged at one end of the first adjustment member, the adjustment end is abutted against the side of the baffle facing away from the first baffle, and the other end of the adjustment end is passed through the baffle and the first adjustment hole and is threadedly connected to the mounting plate.

[0015] According to some embodiments of the present invention, the adjustment assembly also includes an adapter and a connecting member, the two ends of the adapter respectively define a first threaded hole and a second threaded hole, the other end of the first adjustment member is threadedly connected to the first threaded hole, one end of the connecting member is threadedly connected to the second threaded hole, and the other end of the connecting member is threadedly connected to the mounting plate, and the adapter is an insulator.

[0016] According to some embodiments of the present invention, the periphery of the first shielding edge extends toward the mounting plate to form a second shielding edge, and an end of the second shielding edge away from the first shielding edge is spaced apart from the mounting plate.

[0017] According to some embodiments of the present invention, the furnace device further includes a positioning assembly, which is mounted on the mounting plate and is used to position the beam guide.

[0018] According to some embodiments of the present invention, the positioning assembly includes a second adjusting member and a positioning member, the positioning member is abutted against the outer side wall of the beam guide, one of the mounting plate and the positioning member defines a second adjusting hole, the second adjusting member is passed through the second adjusting hole and is threadedly connected to the other of the mounting plate and the positioning member, and the second adjusting member is abutted against the side of the positioning member facing away from the mounting plate, and the second adjusting hole is used to allow the positioning member to adjust its position in a direction parallel to the mounting plate.

[0019] According to some embodiments of the present invention, the positioning member is provided with a curved surface, and the curved surface abuts against the outer side wall of the beam guide.

[0020] According to some embodiments of the present invention, the positioning member includes a first positioning portion and a second positioning portion, the first positioning portion is connected to the second positioning portion, the first positioning portion is abutted against the outer wall of the bundle guide, the second adjustment member is connected to the second positioning portion, and at least one of the first positioning portion and the second positioning portion is an insulator.

[0021] According to an RPD coating device of an embodiment of the first aspect of the present utility model, an RPD coating device includes:

[0022] A furnace arrangement as described above.

[0023] Additional aspects and advantages of the present invention will be given in part in the following description and will become apparent from the following description or learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0025] Figure 1 A top view of the structure of a furnace device provided in one embodiment of the present invention;

[0026] Figure 2 for Figure 1 A cross-sectional view of the furnace device along the AA direction shown;

[0027] Figure 3 for Figure 2 A partial enlarged view of part B;

[0028] Figure 4 for Figure 1 A partial enlarged view of part C;

[0029] Figure 5 for Figure 1 The structural stereogram of the positioning assembly is shown.

[0030] Reference numerals:

[0031] a furnace device 100;

[0032] Mounting plate 10; first through hole 101;

[0033] beam guide 20; second through hole 201;

[0034] Main furnace 30; Pipeline 31;

[0035] Cover plate 40; third through hole 401; first shielding edge 41; first adjustment hole 411; second shielding edge 42;

[0036] Adjustment assembly 50; first adjustment member 51; adjustment end 511; shield 52; adapter 53; first threaded hole 531; second threaded hole 532; connecting member 54;

[0037] a first insulating plate 60;

[0038] a second insulating plate 70;

[0039] Positioning assembly 80 ; second adjusting member 81 ; positioning member 82 ; first positioning portion 821 ; arc surface 8211 ; second positioning portion 822 ; second adjusting hole 8221 ; stop plate 83 . DETAILED DESCRIPTION

[0040] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0041] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., indicating orientations or station relationships, are based on the orientations or station relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0042] In the description of this utility model, "several" means more than one, "plurality" means more than two, "greater than," "less than," and "exceed" are understood to exclude the number itself, while "above," "below," and "within" are understood to include the number itself. The use of the terms "first" and "second" is solely for the purpose of distinguishing technical features and is not to be construed as indicating or implying relative importance, implicitly specifying the number of the indicated technical features, or implicitly specifying the order of the indicated technical features.

[0043] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, and connecting should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0044] In the description of the present invention, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the exemplary expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0045] In the related art, the adjustment end of the screw assembly is located on the lower side of the mounting plate facing away from the bundle guide, resulting in a smaller operating space reserved for the adjustment end. In particular, when the coating equipment has more than three furnace devices arranged in sequence, it is more difficult for the operator to reach the lower side of the mounting plate in the middle position to release the screw assembly from locking the bundle guide.

[0046] In view of this, please see Figure 1 and Figure 2 The present invention provides a furnace device 100 according to an embodiment of the present invention. The furnace device 100 includes a mounting plate 10, a bundle guide 20, a main furnace 30, a cover plate 40, and an adjustment assembly 50. The bundle guide 20 is connected to one side of the mounting plate 10, the main furnace 30 is connected to the other side of the mounting plate 10 facing away from the bundle guide 20, and the cover plate 40 is connected to the side of the bundle guide 20 facing away from the mounting plate 10. The peripheral edge of the cover plate 40 extends beyond the peripheral side of the bundle guide 20 and forms a first shielding edge 41. The adjustment assembly 50 connects the mounting plate 10 and the first shielding edge 41. The adjustment assembly 50 has an adjustment end 511 for adjusting the tightness between the mounting plate 10 and the cover plate 40. At least a portion of the adjustment end 511 is exposed from the side of the first shielding edge 41 facing away from the mounting plate 10.

[0047] The mounting plate 10 and the cover plate 40 are respectively disposed on opposite sides of the bundle guide 20, that is, the mounting plate 10 and the cover plate 40 are respectively clamped on opposite sides of the bundle guide 20. By adjusting the adjustment end 511 and clamping the bundle guide 20 with the mounting plate 10 and the cover plate 40, the bundle guide 20 can be locked and fixed to the mounting plate 10. By adjusting the adjustment end 511 and loosening the mounting plate 10 and the cover plate 40 from the bundle guide 20, the bundle guide 20 can be released from the mounting plate 10, thereby allowing the bundle guide 20 to be adjusted relative to the mounting plate 10.

[0048] In an embodiment of the present invention, the adjustment component 50 is connected to the first shielding edge 41 of the mounting plate 10 and the cover plate 40, and the adjustment end 511 of the adjustment component 50 exposes the side of the first shielding edge 41 facing away from the mounting plate 10, so that the operating space where the adjustment end 511 is located is larger. In this way, the operator can conveniently adjust the tightness between the mounting plate 10 and the cover plate 40 through the adjustment end 511 on the side of the first shielding edge 41 facing away from the mounting plate 10, so that the bundle guide 20 is locked and fixed on the mounting plate 10, or the bundle guide 20 is unlocked from the mounting plate 10. Even if there are more than three furnace devices 100 arranged in sequence in the coating equipment, the operator can conveniently reach to the side of the first shielding edge 41 facing away from the mounting plate 10 to unlock the lock of the bundle guide 20. In addition, the first shielding edge 41 extending from the peripheral side of the bundle guide 20 can play a certain covering role on the peripheral side of the bundle guide 20, reducing the conductive dust deposited on the insulating components on the peripheral side of the bundle guide 20 along the direction of the first shielding edge 41 pointing to the mounting plate 10 during the coating process, thereby protecting the insulating components and avoiding insulation failure of the insulating components due to the deposition of conductive dust.

[0049] The bundle guide 20 is connected to electrical wires and water pipes, which extend from the interior of the bundle guide 20 to the periphery of the bundle guide 20. The water pipes are used to connect to an external coolant to circulate heat through the bundle guide 20 during operation. The electrical wires are used to connect to an external power source to power the bundle guide 20 and the electromagnetic coils disposed therein. The aforementioned insulating component is an insulating structure covering the electrical wires and water pipes on the periphery of the bundle guide 20. This insulating structure insulates the electrical wires and water pipes on the periphery of the bundle guide 20 from the mounting plate 10, preventing electrical conduction between the mounting plate 10 and the bundle guide 20 through the electrical wires and water pipes.

[0050] In this embodiment, the mounting plate 10, beam guide 20, main furnace 30, and cover plate 40 are all made of metal. The mounting plate 10 and beam guide 20 are insulated from each other, and the mounting plate 10 and main furnace 30 are also insulated from each other. The mounting plate 10 defines a first through-hole 101, the beam guide 20 defines a second through-hole 201, and the cover plate 40 defines a third through-hole 401. The first through-hole 101, the second through-hole 201, and the third through-hole 401 are sequentially connected. The main furnace 30 has a pipe 31 extending through the first through-hole 101 and the second through-hole 201. The pipe 31 is used to accommodate the target material.

[0051] The bundle guide 20 and the cover plate 40 may be made of the same metal material to ensure good electrical contact between the bundle guide 20 and the cover plate 40 , for example, oxygen-free copper, which has good electrical conductivity.

[0052] Specifically, the furnace device 100 also includes a first insulating plate 60 and a second insulating plate 70; the first insulating plate 60 is arranged between the mounting plate 10 and the bundle guide 20, and the mounting plate 10 and the bundle guide 20 are respectively against the opposite sides of the first insulating plate 60 to cut off the electrical conduction between the mounting plate 10 and the bundle guide 20; the second insulating plate 70 is arranged between the mounting plate 10 and the main furnace 30, and the mounting plate 10 and the main furnace 30 are respectively against the opposite sides of the second insulating plate 70 to cut off the electrical conduction between the mounting plate 10 and the main furnace 30.

[0053] Optionally, the first insulating plate 60 and the second insulating plate 70 are both annular structures, and the through-hole portions of the annular structures are connected to the first through-hole 101 , the second through-hole 201 and the third through-hole 401 .

[0054] Optionally, the first insulating plate 60 and the second insulating plate 70 are made of Teflon or ceramic.

[0055] When coating the workpiece to be coated, each workpiece to be coated can be conveyed by the conveying mechanism and passed over the furnace device 100 in turn; the plasma generator of the coating equipment emits an electron beam to the furnace device 100, and the electron beam emitted by the plasma generator will first fall on the side of the cover plate 40 facing away from the beam guide 20 to form a loop. After the electron beam stabilizes, the loop is switched to the main furnace 30, so that the electron beam falls on the target material placed in the pipe 31 and burns the target for coating, so that the target material is heated and evaporates and diffuses upward to the side where the workpiece to be coated is located, and adheres to the surface of the workpiece to be coated, thereby achieving coating of the workpiece to be coated.

[0056] Please combine Figure 3 In some embodiments, the first baffle 41 defines a first adjustment hole 411. The adjustment assembly 50 is disposed in the first adjustment hole 411. The adjustment assembly 50 abuts against the side of the first baffle 41 facing away from the mounting plate 10. The first adjustment hole 411 allows the cover plate 40 to be adjusted in a direction parallel to the mounting plate 10. The adjustment end 511 is used to adjust the force applied by the adjustment assembly 50 against the first baffle 41, thereby adjusting the tension between the mounting plate 10 and the cover plate 40. By adjusting the adjustment end 511 and pressing the adjustment assembly 50 against the first baffle 41, the cover plate 40 can be pressed against the bundle guide 20 toward the mounting plate 10, thereby locking and fixing the bundle guide 20 to the mounting plate 10. By adjusting the adjustment end 511 and releasing the pressure of the adjustment assembly 50 against the first baffle 41, the cover plate 40 can be released from the pressure of the bundle guide 20, thereby releasing the bundle guide 20 from the mounting plate 10.

[0057] In this embodiment, after the adjustment component 50 removes the pressing force on the first shielding edge 41, the cover plate 40 can drive the bundle guide 20 to adjust its position relative to the mounting plate 10 within the range allowed by the first adjustment hole 411, and the adjustment component 50 can always be in the same position relative to the mounting plate 10 in the first adjustment hole 411. After completing the position adjustment of the bundle guide 20, the adjustment component 50 only needs to be pressed against the first shielding edge 41 through the adjustment end 511 to achieve locking and fixing of the bundle guide 20. The adjustment component 50 does not need to be readjusted according to the position of the cover plate 40 after movement, which simplifies the adjustment steps and improves the convenience of adjustment.

[0058] In some embodiments, the adjustment assembly 50 includes a first adjustment member 51 and a shield 52. The shield 52 covers the first adjustment hole 411, and the shield 52 abuts against the side of the first shielding edge 41 facing away from the mounting plate 10. The shield 52 can prevent conductive dust from falling through the first adjustment hole 411 to the surrounding side of the bundle guide 20; the adjustment end 511 is provided at one end of the first adjustment member 51, and the adjustment end 511 abuts against the side of the shield 52 facing away from the first shielding edge 41. The other end of the first adjustment member 51 is passed through the shield 52 and the first adjustment hole 411 and is threadedly connected to the mounting plate 10. In this way, through By rotating the adjusting end 511 and making the adjusting end 511 press against the shield 52, the adjusting end 511 can transmit the pressing force of the bundle guide 20 against the mounting plate 10 to the bundle guide 20 through the cover plate 40, so that the bundle guide 20 can be locked and fixed on the mounting plate 10. By reversing the adjusting end 511 and removing the pressing force of the adjusting end 511 on the shield 52, the pressing force of the cover plate 40 that makes the bundle guide 20 press against the mounting plate 10 can be removed, thereby releasing the locking fixation of the bundle guide 20 from the mounting plate 10.

[0059] In this embodiment, the tightness between the mounting plate 10 and the cover plate 40 can be adjusted simply by rotating the adjusting end 511 , which has a simple structure and is easy to adjust.

[0060] Among them, the aperture of the first adjustment hole 411 is larger than the outer diameter of the adjustment component 50 part located inside the first adjustment hole 411, so as to allow the cover plate 40 to adjust its position in a direction parallel to the mounting plate 10; the cross-section of the baffle 52 is larger than the cross-section of the first adjustment hole 411, and whenever the cover plate 40 moves relative to the baffle 52 in a direction parallel to the mounting plate 10, the baffle 52 can always cover the first adjustment hole 411 to avoid a gap between the baffle 52 and the first adjustment hole 411.

[0061] Among them, the first adjusting member 51 can be a first screw, the nut of the first screw is located on the side of the baffle 52 facing away from the mounting plate 10 and is against the baffle 52, the screw rod of the first screw is passed through the baffle 52 and the first adjusting hole 411 and is threadedly connected to the mounting plate 10; the adjusting end 511 is the nut of the first screw.

[0062] In this embodiment, the shield 52 and the first adjusting member 51 are separate structures, the shield 52 is provided with a through hole, and the other end of the first adjusting member 51 is passed through the through hole. In other embodiments, the shield 52 and the first adjusting member 51 can also be an integrated structure.

[0063] In some other embodiments, one end of the first adjusting member 51 extends out from the side of the baffle 52 facing away from the mounting plate 10, and the other end of the first adjusting member 51 is passed through the first adjusting hole 411 and connected to the mounting plate 10. The end of the first adjusting member 51 extending out from the baffle 52 facing away from the mounting plate 10 is clamped with a snap ring, and the snap ring is abutted against the side of the baffle 52 facing away from the mounting plate 10. By disassembling / installing the snap ring, the force of the adjusting assembly 50 against the first baffle 41 can be removed, or a force against the mounting plate 10 can be applied to the first baffle 41.

[0064] In some other embodiments, the first adjustment hole 411 and the shield 52 can be omitted, the first adjustment member 51 is passed through the first shielding edge 41 and is threadedly connected to the mounting plate 10, the adjustment end 511 is abutted against the side of the first shielding edge 41 facing away from the mounting plate 10, a plurality of threaded holes are defined on the mounting plate 10, and the end of the first adjustment member 51 away from the adjustment end 511 is threadedly connected to the threaded hole on the mounting plate 10. After the bundle guide 20 moves to a preset position each time, the mounting plate 10 has a threaded hole corresponding to the first adjustment member 51 in the axial direction of the first adjustment member 51 for threaded connection of the first adjustment member 51.

[0065] In some other embodiments, the first adjustment hole 411 may be omitted, and the adjustment assembly 50 is disposed on the circumferential outer side of the first edge shielding 41 and connects the mounting plate 10 and the first edge shielding 41 .

[0066] In some embodiments, the adjustment assembly 50 further includes an adapter 53 and a connector 54. The adapter 53 defines a first threaded hole 531 and a second threaded hole 532 at both ends, respectively. The other end of the first adjustment member 51 is threadedly connected to the first threaded hole 531, and one end of the connector 54 is threadedly connected to the second threaded hole 532. The other end of the connector 54 is threadedly connected to the mounting plate 10. The other end of the first adjustment member 51 is connected to the mounting plate 10 via the adapter 53 and connector 54. The adapter 53 is an insulator. By isolating the electrical connection between the first adjustment member 51 and the connector 54, electrical conduction between the mounting plate 10 and the cover plate 40 through the adjustment assembly 50 can be prevented.

[0067] By making the adapter 53 an insulator, the first adjusting member 51, the baffle 52 and the connecting member 54 can be supported by metal materials. The connection strength between the first adjusting member 51 and the baffle 52 made of metal and the cover plate 40 is better, and the connection strength between the connecting member 54 made of metal and the mounting plate 10 is better, so as to ensure a stable connection between the adjusting component 50 and the mounting plate 10 and the cover plate 40.

[0068] Optionally, the adapter 53 is made of ceramic.

[0069] In some other embodiments, the adapter 53 and the connector 54 may be omitted, and the other end of the first adjusting member 51 is directly threadedly connected to the mounting plate 10. At least one of the first adjusting member 51 and the shield 52 is an insulator.

[0070] Optionally, there are two groups of adjustment components 50, the first edge shield 41 defines two first adjustment holes 411, and the two groups of adjustment components 50 are respectively passed through the two first adjustment holes 411. Each group of adjustment components 50 is connected to the mounting plate 10 and the first edge shield 41, and the two groups of adjustment components 50 jointly realize the locking and fixation of the bundle guide 20.

[0071] In some other embodiments, the number of adjustment components 50 can be selected according to actual needs, as long as the adjustment components 50 can fix the beam guide 20 .

[0072] In some embodiments, the periphery of the first shielding edge 41 extends toward the mounting plate 10 to form a second shielding edge 42, so that the second shielding edge 42 is arranged around the circumference of the bundle guide 20, reducing the conductive dust deposited on the insulating components on the circumference of the bundle guide 20 along the direction of the second shielding edge 42 pointing to the bundle guide 20 during the coating process. Combined with the first shielding edge 41, it can better cover the circumference of the bundle guide 20, further avoid the conductive dust from being deposited on the circumference of the bundle guide 20 during the coating process, and strengthen the protection of the insulating components; the second shielding edge 42 is spaced apart from the mounting plate 10 at one end away from the first shielding edge 41 to prevent electrical conduction between the mounting plate 10 and the cover plate 40 through the second shielding edge 42, thereby ensuring the insulation between the mounting plate 10 and the cover plate 40.

[0073] After the position adjustment of the beam guide 20 is completed, the operator may accidentally move the beam guide 20 during the process of re-locking and fixing the beam guide 20, causing the adjusted position of the beam guide 20 to be misaligned, affecting the subsequent coating process. Therefore, please refer to Figure 1 and Figure 4In some embodiments, the furnace apparatus 100 further includes a positioning assembly 80 mounted on the mounting plate 10. The positioning assembly 80 is used to position the beam guide 20 to prevent the beam guide 20 from shifting relative to the mounting plate 10. After adjusting the position of the beam guide 20, the operator can use the positioning assembly 80 to position the beam guide 20 so that the beam guide 20 remains in the same position before being locked and fixed. This prevents the beam guide 20 from being misaligned due to accidental movement during the re-locking process.

[0074] Please also refer to Figure 5 In some embodiments, the positioning assembly 80 includes a second adjustment member 81 and a positioning member 82. The positioning member 82 abuts against the outer side wall of the bundle guide 20 to limit the movement of the bundle guide 20 in a direction parallel to the mounting plate 10. One of the mounting plate 10 and the positioning member 82 defines a second adjustment hole 8221. The second adjustment member 81 is disposed in the second adjustment hole 8221 and is threadedly connected to the other of the mounting plate 10 and the positioning member 82. The second adjustment member 81 abuts against the side of the positioning member 82 facing away from the mounting plate 10. The second adjustment hole 8221 is used to allow the positioning member 82 to be adjusted in a direction parallel to the mounting plate 10. By rotating the second adjustment member 81, the positioning member 82 can be locked and fixed to the mounting plate 10, or the positioning member 82 can be unlocked from the mounting plate 10.

[0075] Before adjusting the position of the bundle guide 20, the second adjusting member 81 can be rotated to remove the pressing force of the second adjusting member 81 on the positioning member 82, so that the positioning member 82 is released from the locking fixation with the mounting plate 10, and the positioning member 82 can be separated from the outer wall of the bundle guide 20, thereby allowing the position of the bundle guide 20 to be adjusted; after completing the position adjustment of the bundle guide 20, the position of the positioning member 82 relative to the bundle guide 20 can be adjusted within the range allowed by the second adjusting hole 8221, so that the position of the positioning member 82 is re-matched with the adjusted position of the bundle guide 20 and abuts against the outer wall of the bundle guide 20, and then by reversing the second adjusting member 81, the second adjusting member 81 presses against the side of the positioning member 82 facing away from the mounting plate 10, so that the positioning member 82 is locked and fixed to the mounting plate 10, thereby achieving the positioning of the bundle guide 20.

[0076] In some embodiments, the second adjustment hole 8221 is defined in the positioning member 82 , and the second adjustment member 81 is passed through the second adjustment hole 8221 and is threadedly connected to the mounting plate 10 .

[0077] Among them, the second adjusting member 81 can be a second screw, and a stop plate 83 is provided on the side of the positioning member 82 facing away from the mounting plate 10. The nut of the second screw is located on the side of the stop plate 83 facing away from the mounting plate 10 and is against the stop plate 83. The screw rod of the second screw is passed through the stop plate 83 and the second adjustment hole 8221 and is threadedly connected to the mounting plate 10.

[0078] Among them, the second adjustment hole 8221 can be a waist hole.

[0079] In some other embodiments, the second adjustment hole 8221 is limited to the mounting plate 10, the second adjustment member 81 can be a bolt, and a stop plate is provided on the side of the mounting plate 10 facing away from the positioning member 82. The screw of the bolt passes through the positioning member 82, the second adjustment hole 8221 and the stop plate, and the nut of the bolt is located on the side of the positioning member 82 facing away from the mounting plate 10 and is against the positioning member 82. The part of the screw that passes through the stop plate on the side facing away from the mounting plate 10 is threadedly connected with a nut, and the stop plate is tightly pressed between the mounting plate 10 and the nut.

[0080] The diameter of the second adjustment hole 8221 is larger than the outer diameter of the second adjustment member 81 located inside the second adjustment hole 8221 , so as to allow the positioning member 82 to adjust its position in a direction parallel to the mounting plate 10 .

[0081] In some embodiments, the positioning member 82 is provided with an arc surface 8211, which abuts against the outer wall of the bundle guide 20. In this way, even if the relative position of the bundle guide 20 and the positioning member 82 changes to a certain extent, the arc surface 8211 can correspond to the outer wall of the bundle guide 20 to perform good abutment, thereby ensuring the abutment between the positioning member 82 and the outer wall of the bundle guide 20.

[0082] The centerline of the arc surface 8211 is parallel to the centerline of the annular beam guide 20. The outer wall of the annular beam guide 20 is also an arc surface 8211. The arc surface 8211 of the positioning member 82 can be in tangential contact with the arc surface 8211 of the beam guide 20, thereby achieving good interference.

[0083] In some embodiments, the positioning member 82 includes a first positioning portion 821 and a second positioning portion 822. The first positioning portion 821 is connected to the second positioning portion 822, and the first positioning portion 821 abuts against the outer wall of the bundle guide 20. The second adjustment member 81 is connected to the second positioning portion 822. At least one of the first positioning portion 821 and the second positioning portion 822 is an insulator. By using the insulator to isolate the electrical connection between the first positioning portion 821 and the second positioning portion 822, electrical conduction between the mounting plate 10 and the cover plate 40 through the positioning assembly 80 can be prevented.

[0084] The arc surface 8211 is provided at an end of the first positioning portion 821 away from the second positioning portion 822 , and the second adjustment hole 8221 is defined in the second positioning portion 822 .

[0085] Optionally, there are three groups of positioning assemblies 80, which are spaced apart along the circumference of the bundle guide 20. The positioning members 82 of the three groups of positioning assemblies 80 are all against the outer wall of the bundle guide 20, and the three groups of positioning assemblies 80 jointly realize the locking and fixation of the bundle guide 20.

[0086] In some other embodiments, the number of positioning components 80 can be selected according to actual needs, as long as the positioning components 80 can achieve the positioning of the beam guide 20.

[0087] An embodiment of the present invention further provides an RPD coating device, which includes the furnace device 100 as described above.

[0088] It should be noted that the RPD coating equipment provided in the embodiment of the present invention only shows the part related to the technical problem to be solved by the embodiment of the present invention. It can be understood that the RPD coating equipment provided in the embodiment of the present invention also includes other structures for realizing the functions of the RPD coating equipment, including but not limited to a plasma generator for generating and emitting a plasma beam.

[0089] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Various modifications can be made within the scope of knowledge possessed by a person skilled in the art without departing from the spirit of the present invention. In addition, the embodiments of the present invention and the features of the embodiments can be combined with each other unless there is a conflict.

Claims

1. A furnace device, characterized in that: include: Mounting plate; a bundle guide connected to one side of the mounting plate; A main furnace connected to the other side of the mounting plate facing away from the beam guide; a cover plate connected to a side of the bundle guide facing away from the mounting plate, wherein a peripheral edge of the cover plate extends beyond the peripheral side of the bundle guide and forms a first shielding edge; An adjustment component is connected to the mounting plate and the first shielding edge, and the adjustment component is provided with an adjustment end for adjusting the tightness between the mounting plate and the cover plate, and at least part of the adjustment end is exposed from the side of the first shielding edge facing away from the mounting plate.

2. The furnace device according to claim 1, characterized in that The first edge shield defines a first adjustment hole, the adjustment component is passed through the first adjustment hole, the adjustment component is abutted against the side of the first edge shield facing away from the mounting plate, the first adjustment hole is used to allow the cover plate to adjust its position in a direction parallel to the mounting plate, and the adjustment end is used to adjust the force of the adjustment component against the first edge shield.

3. The furnace device according to claim 2, characterized in that The adjustment assembly includes a first adjustment member and a baffle, the baffle covers the first adjustment hole, and the baffle is abutted against the side of the first baffle facing away from the mounting plate, the adjustment end is arranged at one end of the first adjustment member, the adjustment end is abutted against the side of the baffle facing away from the first baffle, and the other end of the adjustment end is passed through the baffle and the first adjustment hole and is threadedly connected to the mounting plate.

4. The furnace device according to claim 3, characterized in that The adjustment assembly also includes an adapter and a connecting member, the two ends of the adapter respectively define a first threaded hole and a second threaded hole, the other end of the first adjustment member is threadedly connected to the first threaded hole, one end of the connecting member is threadedly connected to the second threaded hole, and the other end of the connecting member is threadedly connected to the mounting plate, and the adapter is an insulator.

5. The furnace device according to claim 1, characterized in that The periphery of the first shielding edge extends toward the mounting plate to form a second shielding edge, and an end of the second shielding edge away from the first shielding edge is spaced apart from the mounting plate.

6. The furnace device according to claim 1, characterized in that It also includes a positioning component, which is installed on the mounting plate and is used to position the beam guide.

7. The furnace device according to claim 6, characterized in that The positioning assembly includes a second adjusting member and a positioning member, the positioning member abuts against the outer side wall of the bundle guide, the mounting plate and one of the positioning member define a second adjusting hole, the second adjusting member is passed through the second adjusting hole and is threadedly connected to the other of the mounting plate and the positioning member, and the second adjusting member abuts against the side of the positioning member facing away from the mounting plate, and the second adjusting hole is used to allow the positioning member to adjust its position in a direction parallel to the mounting plate.

8. The furnace device according to claim 7, characterized in that The positioning member is provided with a curved surface, and the curved surface abuts against the outer side wall of the bundle guide.

9. The furnace device according to claim 7, characterized in that: The positioning member includes a first positioning portion and a second positioning portion, the first positioning portion is connected to the second positioning portion, the first positioning portion is against the outer wall of the bundle guide, the second adjustment member is connected to the second positioning portion, and at least one of the first positioning portion and the second positioning portion is an insulator.

10. An RPD coating device, characterized in that: include: A furnace device according to any one of claims 1 to 9.

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