External heating ALD cavity structure

Abstract

The utility model discloses an external heating ALD cavity structure, which comprises a cavity, a cavity upper cover and a heating disc, the cavity upper cover is arranged at the top end of the cavity, the heating disc is fixed at the bottom end of the cavity through bolts, a sealing groove is arranged on the cavity, a sealing ring matched with the sealing groove is arranged at the bottom end of the cavity upper cover, and the cavity upper cover is arranged at the top end of the cavity. The cavity upper cover and the cavity are connected through matching of the sealing groove and the sealing ring, a cavity tray is fixedly arranged in the cavity through a bolt, and the cavity is further provided with a gas pipeline inlet and an exhaust pipeline outlet. The external heating disc is adopted and is in direct contact with the bottom of the cavity, the sealing requirement does not need to be considered, and the influence of copper ion impurities and the like is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of a cavity structure, in particular to an externally heated ALD cavity structure. Background Art

[0002] Currently, most thermal ALD systems place the heating plate inside the chamber, using a radial seal at the cold end to ensure the chamber's tightness. However, this presents a risk of leakage during actual use. Furthermore, the heating plate is often made of copper, and copper ions can affect process results. Aluminum heating plates, however, have lower thermal conductivity than copper plates and are more difficult to weld and maintain. Utility Model Content

[0003] In order to overcome the above-mentioned problems, the purpose of the present invention is to provide an externally heated ALD chamber structure. The external heating plate does not need to consider the sealing requirements and is not affected by copper ion impurities.

[0004] In order to achieve the above purpose, the technical solution adopted by the present invention is: an externally heated ALD chamber structure, including a cavity, a cavity cover and a heating plate, the cavity cover is arranged at the top of the cavity, the heating plate is fixed to the bottom end of the cavity by bolts, a sealing groove is provided on the cavity, and a sealing ring matching the sealing groove is provided at the bottom end of the cavity cover, the cavity cover and the cavity are connected through the cooperation of the sealing groove and the sealing ring, a cavity tray is fixed inside the cavity by bolts, and a gas pipeline inlet and an exhaust pipeline outlet are also provided on the cavity.

[0005] Preferably, a first gas pipeline and an air extraction pipeline are provided inside the cavity, the first gas pipeline is connected to the gas pipeline inlet, and the air extraction pipeline is connected to the air extraction pipeline outlet.

[0006] Preferably, a second gas pipeline connected to the first gas pipeline is provided inside the cavity upper cover, and a gas outlet is provided at the center of the bottom of the cavity upper cover, and the gas outlet is connected to the second gas pipeline.

[0007] Preferably, an air extraction groove is further provided inside the cavity, the air extraction groove is located at the bottom of the cavity tray, and the air extraction pipe is connected to the air extraction groove.

[0008] Preferably, a plurality of air extraction holes are provided on the cavity tray, and the positions of the air extraction holes match the air extraction grooves.

[0009] Preferably, the air extraction holes may be arranged in a circle along the cavity tray.

[0010] The beneficial effects of the utility model are: an external heating plate is used, the heating plate is in direct contact with the bottom of the cavity, there is no need to consider the sealing requirements, and there is no influence of copper ion impurities and the like; heat is radiated from the bottom of the cavity, and the heat distribution is uniform and controllable; the external installation method is more convenient for installation and maintenance. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 Schematic diagram of the structure of this embodiment;

[0012] Figure 2 This is a schematic diagram of the main structure of this embodiment;

[0013] Figure 3 This is a cross-sectional view of the main structure of this embodiment;

[0014] Figure 4 Schematic diagram of the structure of the cavity of this embodiment;

[0015] Figure 5 Schematic diagram of the structure of the cavity tray of this embodiment.

[0016] In the figure: 1. Cavity; 2. Cavity cover; 3. Heating plate; 4. Sealing groove; 5. Sealing ring; 6. Cavity tray; 7. Gas pipe inlet; 8. Exhaust pipe outlet; 9. First gas pipe; 10. Exhaust pipe; 11. Second gas pipe; 12. Gas outlet; 13. Exhaust groove; 14. Exhaust hole. DETAILED DESCRIPTION

[0017] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more precise definition of the protection scope of the present invention.

[0018] See also Figure 1-Figure 5, this embodiment discloses an externally heated ALD chamber structure, including a chamber 1, a chamber cover 2 and a heating plate 3, the chamber cover 2 is arranged at the top of the chamber 1, the heating plate 3 is fixed to the bottom end of the chamber 1 by bolts, the chamber 1 is provided with a sealing groove 4, the bottom end of the chamber cover 2 is provided with a sealing ring 5 that cooperates with the sealing groove 4, the chamber cover 2 and the chamber 1 are sealed by the cooperation of the sealing groove 4 and the sealing ring 5, a chamber tray 6 is fixed inside the chamber 1 by bolts, a gas pipeline inlet 7 and an exhaust pipeline outlet 8 are also provided on the chamber 1, a first gas pipeline 9 and an exhaust pipeline 10 are provided inside the chamber 1, the first The gas pipeline 9 is connected to the gas pipeline inlet 7, and the exhaust pipeline 10 is connected to the exhaust pipeline outlet 8. A second gas pipeline 11 connected to the first gas pipeline 9 is provided inside the cavity upper cover 2. A gas outlet 12 is provided at the center position of the bottom of the cavity upper cover 2. The gas outlet 12 is connected to the second gas pipeline 11. An exhaust groove 13 is also provided inside the cavity 1. The exhaust groove 13 is located at the bottom of the cavity tray 6. The exhaust pipeline 10 is connected to the exhaust groove 13. A number of exhaust holes 14 are provided on the cavity tray 6. The position of the exhaust hole 14 matches the exhaust groove 13. The exhaust holes 14 can be set in a circle along the cavity tray 6.

[0019] During use, the process gas enters from the gas pipe inlet 7 at the bottom left side of the cavity 1, enters the second gas pipe 11 of the cavity cover 2 through the first gas pipe 9 in the cavity 1, and then enters the cavity inside the cavity 1 through the gas outlet 12 at the center of the cavity cover 2. When pumping, the gas pipe outlet 8 is located at the bottom right side of the cavity 1. Considering that the gas pumping line 10 is not at the center of the cavity 1, the gas may not be evenly distributed during pumping, and the flow rate will increase the closer to the pumping port. Therefore, a gas pumping groove 13 is added to the bottom of the cavity 1, and a circle of gas pumping holes 14 are opened on the cavity tray 6 to ensure that the gas in the cavity 1 is pumped as evenly as possible.

[0020] The above implementation methods are only for illustrating the technical concept and features of the utility model. Its purpose is to enable people familiar with this technology to understand the content of the utility model and implement it. It cannot be used to limit the scope of protection of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the scope of protection of the utility model.

Claims

1. An externally heated ALD chamber structure, characterized in that: It includes a cavity, a cavity cover and a heating plate, the cavity cover is arranged at the top end of the cavity, the heating plate is fixed to the bottom end of the cavity by bolts, a sealing groove is provided on the cavity, and a sealing ring matching the sealing groove is provided at the bottom end of the cavity cover. The cavity cover and the cavity are connected through the cooperation of the sealing groove and the sealing ring, a cavity tray is fixed inside the cavity by bolts, and a gas pipeline inlet and an exhaust pipeline outlet are also provided on the cavity.

2. The externally heated ALD chamber structure according to claim 1, characterized in that: A first gas pipeline and an air extraction pipeline are provided inside the cavity. The first gas pipeline is connected to the gas pipeline inlet, and the air extraction pipeline is connected to the air extraction pipeline outlet.

3. The externally heated ALD chamber structure according to claim 2, characterized in that: A second gas pipeline connected to the first gas pipeline is provided inside the cavity upper cover, and a gas outlet is provided at the center of the bottom of the cavity upper cover, and the gas outlet is connected to the second gas pipeline.

4. The externally heated ALD chamber structure according to claim 2, characterized in that: An air extraction groove is further provided inside the cavity, the air extraction groove is located at the bottom of the cavity tray, and the air extraction pipeline is connected to the air extraction groove.

5. The externally heated ALD chamber structure according to claim 4, characterized in that: The cavity tray is provided with a plurality of air extraction holes, and the positions of the air extraction holes match the air extraction grooves.

6. The externally heated ALD chamber structure according to claim 5, characterized in that: The air extraction holes can be arranged in a circle along the cavity tray.

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