Single crystal furnace towbar structure for improving growth quality of monocrystalline silicon

Abstract

The utility model discloses a single crystal furnace tow bar structure for improving the growth quality of monocrystalline silicon, which comprises a tow bar main body, a tray arranged at the top of the tow bar main body, a tray edge arranged at the outer side of the tray, a lower shaft arranged at the bottom of the tow bar main body, and a protective piece arranged at the bottom of the tray, a water channel is laid in the lower shaft and the tray, a water inlet is formed in the bottom of the lower shaft, a water outlet is formed in the bottom of the water inlet, plug connectors are arranged on the left side and the right side of the upper portion of the lower shaft respectively, and nesting pieces are arranged above the plug connectors; by means of the structure, accurate control over fluid and good sealing of a pipeline can be achieved, the stability and effectiveness of fluid flowing are guaranteed, the stability and durability of the whole structure are guaranteed through the arrangement of the plug connector and the nested part and the nested connection of the lower shaft and the tray, and large mechanical stress and the influence of the external environment can be borne.

Description

Technical Field

[0001] The utility model belongs to the technical field related to the preparation of single crystal silicon materials, and particularly relates to a single crystal furnace drag rod structure for improving the growth quality of single crystal silicon. Background Art

[0002] Single crystal silicon preparation refers to the process of extracting and refining silicon materials from polycrystalline or other forms of silicon through chemical processes, and finally growing high-purity single crystal silicon materials. Single crystal silicon is one of the most important materials in the electronics industry and is widely used in the manufacture of integrated circuits, solar cells and other high-tech products.

[0003] During the process of growing large-diameter silicon single crystals by the Czochralski method, the temperature gradient in the single crystal furnace directly affects the quality of the single crystal growth. Although there are some technologies that optimize the growth of single crystal silicon by adjusting the furnace structure and changing the melting process, how to accurately control the temperature gradient during the single crystal growth process remains an urgent problem to be solved. Utility Model Content

[0004] The purpose of the present utility model is to provide a single crystal furnace drag rod structure that improves the quality of single crystal silicon growth, so as to solve the problem raised in the above background technology that during the process of growing large-diameter silicon single crystals by the Czochralski method, the temperature gradient in the single crystal furnace directly affects the quality of single crystal growth. Although there are some technologies that optimize single crystal silicon growth by adjusting the furnace structure, changing the melting process, etc., how to accurately control the temperature gradient during the single crystal growth process remains a problem that needs to be solved urgently.

[0005] To achieve the above-mentioned object, the present utility model provides the following technical solutions: a single crystal furnace drag rod structure for improving the growth quality of single crystal silicon, comprising a drag rod main body;

[0006] A tray is provided at the top of the tow bar body, a tray edge is provided at the outer side of the tray, and a lower shaft is provided at the bottom of the tow bar body;

[0007] A protective piece is provided at the bottom of the tray, a plug interface is provided at the bottom of the protective piece, and water channels are laid inside the lower shaft and the tray.

[0008] Preferably, a water inlet is provided at the bottom of the lower shaft, a water outlet is provided at the bottom of the water inlet, and the water inlet and the water outlet are connected to the waterway.

[0009] Preferably, plug-in connectors are respectively provided at left and right sides above the lower shaft, and a nesting member is provided above the plug-in connectors, and the lower shaft and the tray are nested and connected via the nesting members.

[0010] Preferably, a rubber opening is provided at the middle position of the top of the lower shaft, and an interface is provided at the bottom position of the protective member, and the rubber opening is plug-connected to the interface.

[0011] Preferably, a protective sleeve is provided at the middle position of the lower shaft, and a fixing groove is provided at the inner position of the lower shaft.

[0012] Preferably, a clamping groove is provided at the middle position of the outer side of the sheath, and the sheath is made of artificial rubber.

[0013] Preferably, the lower shaft and the drag plate are made of aluminum alloy material, and the drag rod body is arranged by combining the lower shaft and the drag plate.

[0014] Compared with the prior art, the present invention provides a single crystal furnace drag rod structure that improves the quality of single crystal silicon growth, and has the following beneficial effects:

[0015] 1. Through the arrangement of protective parts, plug-in interfaces, water channels, water inlets, water outlets, connectors, nested parts and rubber mouths, and through the arrangement of water channels, water inlets and water outlets, as well as the design of protective parts, plug-in interfaces, rubber mouths and other components, precise control of the fluid and good sealing of the pipeline can be achieved, ensuring the stability and effectiveness of the fluid flow. The arrangement of connectors, nested parts and the nested connection between the lower shaft and the tray ensure the stability and durability of the entire structure, and can withstand greater mechanical stress and external environmental influences. The design of detachable connectors, rubber mouths and other components facilitates assembly, disassembly and cleaning, reduces the complexity and time-consuming maintenance process, and improves work efficiency. The arrangement of protective parts effectively protects the bottom structure and water channels of the tray from external damage and pollution, and extends the service life of the entire tray structure.

[0016] 2. Through the setting of the sheath, fixing groove and clamping groove, the sheath is made of artificial rubber, which can effectively protect the lower shaft from external physical damage or chemical erosion, thereby extending the service life of the equipment. Artificial rubber has good elasticity and shock absorption performance, which can reduce the impact of vibration and impact on the lower shaft and its internal fixing groove, thereby improving the stability and reliability of the equipment. The sheath made of artificial rubber usually has good flexibility and plasticity, making the installation and replacement process simpler and faster, reducing the cost and time of maintenance and replacement. At the same time, the setting of the clamping groove can enhance the clamping strength of the single crystal furnace on the drag rod body. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural diagram of the present utility model.

[0018] Figure 2 It is a structural schematic diagram of the cross section of the tow bar main body in the utility model.

[0019] Figure 3It is a structural schematic diagram of the top of the lower shaft in the utility model.

[0020] In the figure: 1. Drag rod body; 2. Sheath; 3. Lower shaft; 4. Plug interface; 5. Plate edge; 6. Drag tray; 7. Protective part; 8. Clamping groove; 9. Water inlet; 10. Water outlet; 11. Waterway; 12. Interface; 13. Rubber mouth; 14. Connector; 15. Nesting part; 16. Fixing groove. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0022] The utility model provides Figure 1-3 A single crystal furnace drag rod structure for improving the growth quality of single crystal silicon is shown, comprising a drag rod body 1;

[0023] A towing plate 6 is provided at the top of the towing handle body 1, a plate edge 5 is provided at the outer side of the towing plate 6, and a lower shaft 3 is provided at the bottom of the towing handle body 1;

[0024] A protective member 7 is provided at the bottom of the tray 6 , a plug interface 4 is provided at the bottom of the protective member 7 , and a water channel 11 is laid inside the lower shaft 3 and the tray 6 .

[0025] A water inlet 9 is provided at the bottom of the lower shaft 3 , and a water outlet 10 is provided at the bottom of the water inlet 9 . The water inlet 9 and the water outlet 10 are connected to a water channel 11 .

[0026] Connectors 14 are respectively provided on the left and right sides above the lower shaft 3 , and nesting pieces 15 are provided above the connectors 14 . The lower shaft 3 and the tray 6 are nested and connected via the nesting pieces 15 .

[0027] A rubber opening 13 is provided at the middle position of the top of the lower shaft 3 , and an interface 12 is provided at the bottom position of the protective member 7 , and the rubber opening 13 is plug-connected to the interface 12 .

[0028] A protective sleeve 2 is provided at the middle position of the lower shaft 3 , and a fixing groove 16 is provided at the inner position of the lower shaft 3 .

[0029] A clamping groove 8 is provided at the middle position of the outer side of the sheath 2, and the sheath 2 is made of artificial rubber.

[0030] The lower shaft 3 and the tray 6 are made of aluminum alloy material, and the tow bar body 1 is assembled by the lower shaft 3 and the tray 6 .

[0031] In this embodiment, specific implementation steps of a single crystal furnace drag rod structure for improving the growth quality of single crystal silicon are provided. A water channel 11 is provided on the lower shaft 3 of the drag rod of the single crystal furnace. Cooling water is introduced into the water channel 11 at a certain flow rate and temperature through a water pump and a valve control device. During the growth of single crystal silicon, the temperature distribution in the single crystal furnace and the growth of single crystal silicon are monitored in real time. According to the monitoring results, the flow rate and temperature of the cooling water are controlled by adjusting the opening of the water pump and the valve, thereby achieving effective regulation of the temperature gradient during the growth of single crystal silicon.

[0032] like Figure 1-3 As shown, a protective member 7 is provided at the bottom of the tray 6, a plug interface 4 is provided at the bottom of the protective member 7, a water channel 11 is laid inside the lower shaft 3 and the tray 6, a water inlet 9 is provided at the bottom of the lower shaft 3, a water outlet 10 is provided at the bottom of the water inlet 9, the water inlet 9 and the water outlet 10 are connected to the water channel 11, plug connectors 14 are provided at the left and right sides above the lower shaft 3 respectively, a nesting member 15 is provided above the plug connector 14, the lower shaft 3 and the tray 6 are nested and connected through the nesting member 15, a rubber port 13 is provided at the middle position of the top of the lower shaft 3, an interface 12 is provided at the bottom of the protective member 7, and the rubber port 13 is plugged and connected to the interface 12.

[0033] Preferably, through the arrangement of the waterway 11, the water inlet 9 and the water outlet 10, and the design of the protective member 7, the plug interface 4, the rubber port 13 and other components, precise control of the fluid and good sealing of the pipeline can be achieved, ensuring the stability and effectiveness of the fluid flow. The arrangement of the connector 14 and the nesting member 15 and the nested connection between the lower shaft 3 and the tray 6 ensure the stability and durability of the entire structure, and can withstand greater mechanical stress and external environmental influences. Through the design of detachable connectors 14, rubber port 13 and other components, assembly, disassembly and cleaning are facilitated, the complexity and time consumption of the maintenance process are reduced, and work efficiency is improved. The arrangement of the protective member 7 effectively protects the bottom structure and waterway of the tray from external damage and pollution, and extends the service life of the entire tray structure.

[0034] like Figure 1 and Figure 2 As shown, a sheath 2 is provided at the middle position of the lower shaft 3, a fixing groove 16 is provided at the inner position of the lower shaft 3, and a clamping groove 8 is provided at the middle position of the outer side of the sheath 2. The sheath 2 is made of artificial rubber.

[0035] Preferably, the sheath 2 is made of artificial rubber, which can effectively protect the lower shaft 3 from external physical damage or chemical erosion, thereby extending the service life of the equipment. The artificial rubber has good elasticity and shock absorption properties, which can reduce the impact of vibration and impact on the lower shaft 3 and its internal fixing groove 16, thereby improving the stability and reliability of the equipment. The sheath made of artificial rubber usually has good flexibility and plasticity, making the installation and replacement process simpler and faster, reducing the cost and time of maintenance and replacement. At the same time, the setting of the clamping groove 8 can enhance the clamping force of the single crystal furnace on the drag rod body 1.

[0036] like Figure 1-3 As shown, the lower shaft 3 and the drag plate 6 are made of aluminum alloy material, and the drag rod body 1 is assembled by the lower shaft 3 and the drag plate 6.

[0037] Optionally, aluminum alloy has a lower density and good strength, making the overall drag rod structure relatively light and easy to install and move. Aluminum alloy has excellent strength and durability in engineering applications, and can withstand the mechanical stress and vibration during the growth of monocrystalline silicon, ensuring stable operation of the equipment. Aluminum alloy has good thermal conductivity, which helps heat dissipation and temperature control, and is crucial for temperature management during the growth of monocrystalline silicon. At the same time, the split structure setting only requires the replacement of some components to reduce maintenance costs.

[0038] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A single crystal furnace drag rod structure for improving the growth quality of single crystal silicon, comprising a drag rod body (1); A towing plate (6) is provided at the top of the towing rod body (1), a plate edge (5) is provided at the outer side of the towing plate (6), and a lower shaft (3) is provided at the bottom of the towing rod body (1); Its characteristics are: A protective member (7) is provided at the bottom of the tray (6), a plug interface (4) is provided at the bottom of the protective member (7), and a water channel (11) is laid inside the lower shaft (3) and the tray (6).

2. The single crystal furnace drag rod structure for improving the quality of single crystal silicon growth according to claim 1, characterized in that: A water inlet (9) is provided at the bottom of the lower shaft (3), a water outlet (10) is provided at the bottom of the water inlet (9), and the water inlet (9) and the water outlet (10) are connected to a waterway (11).

3. The single crystal furnace drag rod structure for improving the quality of single crystal silicon growth according to claim 2, characterized in that: Connectors (14) are respectively provided at the left and right sides above the lower shaft (3), and a nesting piece (15) is provided above the connector (14). The lower shaft (3) and the tray (6) are nested and connected via the nesting piece (15).

4. The single crystal furnace drag rod structure for improving the quality of single crystal silicon growth according to claim 3, characterized in that: A rubber opening (13) is provided at the middle position of the top of the lower shaft (3), and an interface (12) is provided at the bottom position of the protective member (7), and the rubber opening (13) is plug-connected to the interface (12).

5. The single crystal furnace drag rod structure for improving the quality of single crystal silicon growth according to claim 1, characterized in that: A protective sleeve (2) is provided at the middle position of the lower shaft (3), and a fixing groove (16) is provided at the inner position of the lower shaft (3).

6. The single crystal furnace drag rod structure for improving the quality of single crystal silicon growth according to claim 5, characterized in that: A clamping groove (8) is provided at the middle position of the outer side of the sheath (2), and the sheath (2) is made of artificial rubber.

7. The single crystal furnace drag rod structure for improving the quality of single crystal silicon growth according to claim 1, characterized in that: The lower shaft (3) and the drag plate (6) are made of aluminum alloy material, and the drag rod body (1) is assembled by the lower shaft (3) and the drag plate (6).

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