Diaphragm valve with gas leakage detection function

Abstract

The utility model discloses a diaphragm valve with a gas leakage detection function. A first inlet, a first outlet and a valve port are formed in a valve body; the control part is connected to the valve body, a containing cavity, a second inlet and a second outlet are formed in the control part, a piston rod is arranged in the containing cavity in a sliding mode, an elastic piece for driving the piston rod to move towards one side of the valve port is arranged in the containing cavity, a communicating cavity channel is formed in the piston rod and communicates with the second inlet and the lower containing cavity, and the upper containing cavity communicates with the second outlet; the guide sleeve is fixedly clamped between the valve body and the control part, a diaphragm is arranged between the guide sleeve and the valve body in an abutting mode, the middle area of the diaphragm arches upwards, the piston rod drives the diaphragm to block the valve port under the action of the elastic piece, and when gas is introduced into the second inlet, the piston rod moves in the direction of compressing the elastic piece so as to cancel the pressure on the diaphragm. The diaphragm recovers to the initial shape to open the valve port; the control part is provided with a detection interface which is used for being connected with a gas leakage detection device, and the process gas leakage condition can be detected in real time.

Description

Technical Field

[0001] The utility model relates to the technical field of control valves, in particular to a diaphragm valve with a gas leakage detection function. Background Art

[0002] Diaphragm valves with metal diaphragms are commonly used for controlling the flow of process gases used in semiconductor manufacturing. These diaphragms are formed from extremely thin metal plates, such as nickel-cobalt alloys. However, these diaphragms are subject to variations in machining precision. Repeated contact and separation with the valve body to open and close the flow path can cause damage and wear, and sometimes lead to valve leakage. Inhalation of large amounts of process gas can pose a health risk. Therefore, a diaphragm valve with gas leak detection capabilities is needed. Summary of the Invention

[0003] The purpose of the utility model is to provide a diaphragm valve with a gas leakage detection function, which detects process gas leakage in real time through a gas leakage detection device at the detection interface, thereby playing a monitoring role and preventing the life and health of the operator from being affected by gas leakage.

[0004] The above technical purpose of the utility model is achieved through the following technical solutions: a diaphragm valve with gas leakage detection function, comprising

[0005] A valve body, wherein a first inlet, a first outlet and a valve port are provided in the valve body;

[0006] A control part is connected to the valve body, and is provided with a chamber, a second inlet, and a second outlet in the control part. A piston rod is slidably provided in the chamber, and the piston rod seals and separates the chamber into an upper chamber and a lower chamber. An elastic member is provided in the chamber to drive the piston rod to move toward the valve port. A connecting cavity is provided in the piston rod, and the connecting cavity connects the second inlet and the lower chamber, and the connecting cavity is isolated from the upper chamber, and the upper chamber is connected to the second outlet;

[0007] A guide sleeve is fixedly clamped between the valve body and the control portion. A diaphragm for controlling the opening and closing of the valve port is disposed between the guide sleeve and the valve body. The middle region of the diaphragm is arched upward. The piston rod drives the diaphragm to block the valve port under the action of the elastic member. When gas is introduced into the second inlet, the piston rod moves in the direction of the compressed elastic member, thereby removing the pressure on the diaphragm and causing the diaphragm to return to its original shape, thereby opening the valve port.

[0008] A detection interface is provided at a position between the valve body and / or the control part corresponding to the cavity and the valve port, and the detection interface is used to connect a gas leakage detection device.

[0009] Furthermore, an annular groove is provided at the upper end of the valve body, an annular gap is formed between the annular groove and the guide sleeve, a central channel is provided at the center of the guide sleeve, and the guide sleeve is also provided with a connecting hole connecting the central channel and the annular gap.

[0010] Furthermore, a top block is provided in the central channel, the upper end of the top block is abutted against the piston rod extending into the central channel, and the lower end of the top block is abutted against the diaphragm.

[0011] Furthermore, the lower end of the top block is provided with an abutment portion with a larger aperture than the valve hole, and the lower end of the guide sleeve is provided with a limiting groove for accommodating the abutment ring, and a limiting step for limiting the stroke of the abutment portion is formed between the limiting groove and the center channel, and the aperture of the limiting groove is larger than the aperture of the center channel.

[0012] Furthermore, an arc-shaped notch that shrinks from the outside to the inside is provided on the outer side of the guide sleeve corresponding to the limiting groove.

[0013] Furthermore, an annular groove is provided on the outer periphery of the valve body corresponding to the valve port, a first sealing member is embedded in the annular groove, the upper end of the first sealing member extends out of the annular groove, and the diaphragm seals the valve port by abutting against the first sealing member.

[0014] Furthermore, the valve body and the control part are threadedly connected as one body, and a second sealing member is provided between the valve body and the control part.

[0015] Furthermore, the control part includes an upper shell and a lower shell that are detachably connected as one body, a avoidance hole for accommodating the upper part of the piston rod is provided in the upper shell, and a through hole for the lower part of the piston rod to pass through is provided in the lower shell, a third seal is provided between the upper part of the piston rod and the avoidance hole, and a fourth seal is provided between the lower part of the piston rod and the through hole.

[0016] Furthermore, a gas flow channel is provided at the upper end of the annular gap between the control part and the guide sleeve, and the gas flow channel connects the annular gap and the detection interface.

[0017] In summary, the present invention has the following beneficial effects:

[0018] The diaphragm valve of the utility model detects process gas leakage in real time through a gas leakage detection device at a detection interface, thereby playing a monitoring role, preventing the life and health of the operator from being affected by gas leakage, and thus effectively improving safety. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0020] Figure 2 This utility model Figure 1 Enlarged view of point A.

[0021] In the figure: 10, valve body; 11, first inlet; 12, first outlet; 13, valve port; 14, annular gap; 20, control part; 21, cavity; 211, upper cavity; 212, lower cavity; 22, second inlet; 23, second outlet; 24, piston rod; 25, elastic member; 26, connecting cavity; 27, detection interface; 30, guide sleeve; 31, central channel; 32, connecting hole; 33, limiting groove; 40, diaphragm; 50, top block; 51, abutment part; 60, first sealing member; 70, second sealing member; 80, third sealing member; 90, fourth sealing member. DETAILED DESCRIPTION

[0022] The present invention will be further described below with reference to the accompanying drawings.

[0023] like Figure 1-Figure 2 As shown, a diaphragm valve with a gas leakage detection function includes a valve body 10, a control part 20, a guide sleeve 30, and a diaphragm 40. The above constitute the basic structure of the present invention.

[0024] A first inlet 11, a first outlet 12, a valve port 13 and a flow channel are provided in the valve body 10. One end of the flow channel is connected to the first inlet 11, and the other end of the flow channel is connected to the first outlet 12. The flow channel is opened and closed by opening and closing the valve port 13. When the diaphragm valve is in use, its first inlet 11 introduces process gas, such as helium.

[0025] The control part 20 is connected to the valve body 10. The control part 20 is provided with a cavity 21, a second inlet 22 and a second outlet 23. In the present invention, the second inlet 22 and the second outlet 23 are both arranged at the top of the valve body 10. Of course, as an equivalent alternative means, the second inlet 22 and the second outlet 23 can also be arranged at the side end.

[0026] A piston rod 24 is slidably arranged in the cavity 21, and the piston rod 24 seals and separates the cavity 21 into an upper cavity 211 and a lower cavity 212. An elastic member 25 is provided in the cavity 21 to drive the piston rod 24 to move toward the side of the valve port 13. Specifically, the elastic member 25 is arranged between the upper end of the cavity 21 and the piston rod 24. A connecting cavity 26 is provided in the piston rod 24. The connecting cavity 26 connects the second inlet 22 and the lower cavity 212, and the connecting cavity 26 is isolated from the upper cavity 211. The upper cavity 211 is connected to the second outlet 23.

[0027] The guide sleeve 30 is fixedly clamped between the valve body 10 and the control part 20. A diaphragm 40 for controlling the opening and closing of the valve port 13 is provided between the guide sleeve 30 and the valve body 10. The middle area of ​​the diaphragm 40 is arched upward, that is, when the diaphragm 40 is not subjected to pressure, its middle area is arched upward, so that the valve port 13 is in an open state. The piston rod 24 drives the diaphragm 40 to block the valve port 13 under the action of the elastic member 25, that is, the piston rod 24 presses the diaphragm 40 downward under the action of the elastic member 25 so that the diaphragm 40 is firmly pressed against the valve port 13, thereby effectively sealing the valve port 13.

[0028] When gas is introduced into the second inlet 22, the gas is a control gas, such as air, which is introduced into the lower chamber 212 through the connecting channel 26, so that the piston rod 24 moves in the direction of the compression elastic member 25, thereby removing the pressure on the diaphragm 40, and the diaphragm 40 returns to its original shape, thereby opening the valve port 13.

[0029] The valve body 10 and / or the control unit 20 are provided with a detection interface 27 located between the corresponding chamber 21 and the valve port 13. This interface 27 is configured to connect to a gas leak detection device. The diaphragm valve of this invention utilizes the gas leak detection device at the detection interface 27 to detect process gas leaks in real time, thereby providing a monitoring function and preventing potential health and safety hazards to the operator caused by gas leaks.

[0030] In some embodiments, an annular groove is provided at the upper end of the valve body 10, an annular gap 14 is formed between the annular groove and the guide sleeve 30, a central channel 31 is provided at the center of the guide sleeve 30, and the guide sleeve 30 is also provided with a connecting hole 32 connecting the central channel 31 and the annular gap 14, so that when there is a gas leak at the valve port 13, the leaked gas will pass through the central conduction, the connecting hole 32, the annular gap 14 and the detection interface 27, thereby detecting the process gas leakage in real time through the gas leakage detection device at the detection interface 27.

[0031] In some embodiments, a top block 50 is provided in the central channel 31, the upper end of the top block 50 is abutted against the piston rod 24 extending into the central channel 31, and the lower end of the top block 50 is abutted against the diaphragm 40. The area of ​​the lower end surface of the top block 50 is larger than the area of ​​the lower end surface of the piston rod 24, thereby being able to effectively seal the valve port 13.

[0032] In some embodiments, the lower end of the top block 50 is provided with an abutment portion 51 with a larger aperture than the valve hole, and the lower end of the guide sleeve 30 is provided with a limiting groove 33 for accommodating the abutment ring, and a limiting step is formed between the limiting groove 33 and the center channel 31 to limit the travel of the abutment portion 51, and the aperture of the limiting groove 33 is larger than the aperture of the center channel 31.

[0033] In some embodiments, the guide sleeve 30 is provided with an arc-shaped recess that contracts from the outside to the inside on the outer side of the limiting groove 33. Through this arrangement, the diaphragm 40 can arch upward to open the valve port 13 when restoring its shape.

[0034] In some embodiments, the valve body 10 is provided with an annular groove on the outer periphery corresponding to the valve port 13 , and a first sealing member 60 is embedded in the annular groove. The upper end of the first sealing member 60 extends out of the annular groove, and the diaphragm 40 seals the valve port 13 by abutting against the first sealing member 60 .

[0035] In some embodiments, the valve body 10 and the control part 20 are threadedly connected as one body, and a second sealing member 70 is provided between the valve body 10 and the control part 20 .

[0036] In some embodiments, the control unit 20 includes an upper shell and a lower shell that are detachably connected as one body, a avoidance hole for accommodating the upper part of the piston rod 24 is provided in the upper shell, and a through hole for the lower part of the piston rod 24 to pass through is provided in the lower shell, a third seal 80 is provided between the upper part of the piston rod 24 and the avoidance hole, and a fourth seal 90 is provided between the lower part of the piston rod 24 and the through hole.

[0037] In some embodiments, a gas flow channel is provided at the upper end of the control unit 20 and the guide sleeve 30 corresponding to the annular gap 14 , and the gas flow channel connects the annular gap 14 and the detection interface 27 .

[0038] The above description is only a preferred embodiment of the present invention. Therefore, any equivalent changes or modifications made according to the structure, features and principles described in the scope of the present invention patent application are included in the scope of the present invention patent application.

Claims

1. A diaphragm valve with a gas leakage detection function, characterized in that: include A valve body (10), wherein a first inlet (11), a first outlet (12) and a valve port (13) are provided in the valve body (10); A control part (20) is connected to the valve body (10). The control part (20) is provided with a chamber (21), a second inlet (22) and a second outlet (23). A piston rod (24) is slidably provided in the chamber (21). The piston rod (24) seals and separates the chamber (21) into an upper chamber (211) and a lower chamber (212). An elastic member (25) is provided in the chamber (21) for driving the piston rod (24) to move toward the valve port (13). A connecting cavity (26) is provided in the piston rod (24). The connecting cavity (26) connects the second inlet (22) and the lower chamber (212). The connecting cavity (26) is isolated from the upper chamber (211). The upper chamber (211) is connected to the second outlet (23). A guide sleeve (30) is fixedly clamped between the valve body (10) and the control portion (20). A diaphragm (40) for controlling the opening and closing of the valve port (13) is disposed between the guide sleeve (30) and the valve body (10). The middle region of the diaphragm (40) is arched upward. The piston rod (24) drives the diaphragm (40) to block the valve port (13) under the action of the elastic member (25). When gas is introduced into the second inlet (22), the piston rod (24) moves in the direction of compressing the elastic member (25), thereby canceling the pressure on the diaphragm (40). The diaphragm (40) returns to its original shape, thereby opening the valve port (13). A detection interface (27) is provided at a position between the corresponding cavity of the valve body (10) or / and the control part (20) and the valve port (13), and the detection interface (27) is used to connect a gas leakage detection device.

2. The diaphragm valve with gas leakage detection function according to claim 1, characterized in that: An annular groove is provided at the upper end of the valve body (10), an annular gap (14) is formed between the annular groove and the guide sleeve (30), a central channel (31) is provided at the center of the guide sleeve (30), and the guide sleeve (30) is also provided with a connecting hole (32) connecting the central channel (31) and the annular gap (14).

3. The diaphragm valve with gas leakage detection function according to claim 2, characterized in that: A top block (50) is provided in the central channel (31), the upper end of the top block (50) abuts against the piston rod (24) extending into the central channel (31), and the lower end of the top block (50) abuts against the diaphragm (40).

4. The diaphragm valve with gas leakage detection function according to claim 3, characterized in that: The lower end of the top block (50) is provided with an abutting portion (51) having a larger aperture than the valve hole, and the lower end of the guide sleeve (30) is provided with a limiting groove (33) for accommodating the abutting ring, and a limiting step for limiting the travel of the abutting portion (51) is formed between the limiting groove (33) and the central channel (31), and the aperture of the limiting groove (33) is larger than the aperture of the central channel (31).

5. The diaphragm valve with gas leakage detection function according to claim 4, characterized in that: An arc-shaped notch that shrinks from the outside to the inside is formed on the outer side of the guide sleeve (30) corresponding to the limiting groove (33).

6. The diaphragm valve with gas leakage detection function according to claim 1, characterized in that: The valve body (10) is provided with an annular groove on the outer periphery corresponding to the valve port (13), and a first sealing member (60) is embedded in the annular groove. The upper end of the first sealing member (60) extends out of the annular groove, and the diaphragm (40) abuts against the first sealing member (60) to seal the valve port (13).

7. The diaphragm valve with gas leakage detection function according to claim 1, characterized in that: The valve body (10) and the control part (20) are threadedly connected as one body, and a second sealing member (70) is provided between the valve body (10) and the control part (20).

8. The diaphragm valve with gas leakage detection function according to claim 1, characterized in that: The control part (20) comprises an upper shell and a lower shell which are detachably connected as one body, a relief hole for accommodating the upper part of the piston rod (24) is provided in the upper shell, a through hole for the lower part of the piston rod (24) to pass through is provided in the lower shell, a third sealing member (80) is provided between the upper part of the piston rod (24) and the relief hole, and a fourth sealing member (90) is provided between the lower part of the piston rod (24) and the through hole.

9. The diaphragm valve with gas leakage detection function according to claim 2, characterized in that: A gas flow channel is provided at the upper end of the control portion (20) and the guide sleeve (30) corresponding to the annular gap (14), and the gas flow channel communicates with the annular gap (14) and the detection interface (27).

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