Holding jig for cantilever type probe card

Abstract

The utility model relates to the technical field of probe card jigs, and particularly discloses a cantilever type probe card placing jig which comprises a jig base and a transverse conveying track, and the jig base is used for storing a cantilever type probe card body; a support is arranged on the jig base, the cantilever type probe card body is located on the upper side of the support, and a support is arranged on the support. The support is driven by the driving mechanism to have a horizontal state and a vertical state, the cantilever type probe card body is located on the upper side of the support and moves along with the support after being fixed by the clamping unit, the support is in the horizontal state and the vertical state, and the cantilever type probe card body on the support is also in the horizontal state and the vertical state along with the cantilever type probe card body. The cantilever type probe card body is provided with two feeding modes, the two feeding modes are respectively aligned with a chip fed from the upper side and a chip transported by the transverse transportation track, and the connection between the cantilever type probe card body and the chip transported by the two feeding modes is more convenient.

Description

Technical Field

[0001] The utility model belongs to the technical field of probe card fixtures, and in particular relates to a placement fixture for a cantilever probe card. Background Art

[0002] The probes of a cantilever probe card are cantilever-shaped and usually consist of multiple stacked cantilever beams, making them suitable for a variety of test environments.

[0003] In a Chinese patent publication numbered CN 221506995 U, a cantilever probe card placement fixture is disclosed, which includes a base, a suction cup fixedly connected to the bottom end of the base, an operating table fixed to the top end of the base, a mounting tube fixedly connected to the top end of the operating table, and a clamping mechanism movably connected to the interior of the mounting tube;

[0004] The cantilever probe card can adapt to the measurement of chip wafers in a variety of test environments. During measurement, the cantilever probe needs to be in direct contact with the solder pads or bumps in the chip. However, the feeding direction and feeding method of the chip during measurement are different. It usually adopts two feeding methods: one is to use a robot to feed the top of the chip to the horizontally placed cantilever probe card; the other is to transport the chip to the side of the cantilever probe card through the transport track (space needs to be reserved on the top of the cantilever probe card for disassembly and assembly of the cantilever probe card. In order to avoid interference and obstruction, the top of the cantilever probe card is usually not installed with a track, and the track is mostly installed on the side). The above-mentioned existing devices are mostly only suitable for the first feeding method. When the second feeding method is adopted, the chip and the cantilever probe card are perpendicular to each other, and the two are not convenient to connect; therefore, the present application proposes a cantilever probe card placement fixture. Utility Model Content

[0005] The purpose of the present invention is to provide a cantilever probe card placement fixture to solve the problems raised by the above-mentioned background technology.

[0006] To achieve the above-mentioned object, the present invention provides the following technical solutions: a cantilever probe card placement fixture, comprising a fixture base and a transverse transport track, wherein the fixture base is used to store the cantilever probe card body;

[0007] The fixture base is provided with a bracket, the cantilever probe card body is located on the upper side of the bracket, the bracket is provided with a support, the support is rotatably connected to the mounting base through an adjustment rod, the mounting base is provided on the fixture base, the adjustment rod is inserted into the support, the adjustment rod is connected to a driving mechanism for driving the rotation thereof, the driving mechanism drives the bracket to rotate through the adjustment rod and the support, so that the bracket has two states: horizontal state and vertical state;

[0008] The bracket is provided with a clamping unit for clamping and releasing the cantilever probe card body.

[0009] Preferably, there are two clamping units, and the two clamping units are respectively located on both sides of the cantilever probe card body. The two clamping units are respectively connected to two output ends of a bidirectional telescopic rod, and the bidirectional telescopic rod is provided on the bracket.

[0010] Preferably, the clamping unit includes a lower clamping plate and an upper clamping plate, and the lower clamping plate and the upper clamping plate are respectively located on the lower side and the upper side of the cantilever probe card body. Two lower clamping plates and two upper clamping plates are provided in a single clamping unit. A single lower clamping plate and an upper clamping plate form a group, and the two groups of lower clamping plates are respectively located at the front and rear ends of the cantilever probe card body.

[0011] Preferably, a guide rod is inserted into the lower clamping plate, the guide rod passes through the upper clamping plate, the lower clamping plate is connected to the inclined plate, a slide groove is provided in the inclined plate, a connecting rod is inserted into the slide groove, the connecting rod is provided on the upper clamping plate, and the top of the inclined plate is connected to the top plate.

[0012] Preferably, two adjacent top plates are connected by a horizontal plate, a connecting plate is provided at the middle position of the horizontal plate, the other end of the connecting plate is connected to the push-pull plate, the lower end surface of the push-pull plate is fitted with the upper end surface of the clamping bracket, and a guide groove is provided at the position of the clamping bracket directly below the push-pull plate, and a guide block with a T-shaped cross section is slidably installed in the guide groove.

[0013] Preferably, the guide block is connected to the push-pull plate, a push-pull frame is provided on the top of the push-pull plate, a horizontal groove is provided in the push-pull frame, a vertical rod is inserted into the horizontal groove, the vertical rod is installed at a non-center position of the circular plate, the circular plate is connected to a power motor for driving its forward and reverse rotation, and the power motor is connected to the clamping bracket through a motor bracket.

[0014] Preferably, a bottom plate is mounted on the bracket, the cantilever probe card body is located on the upper side of the bottom plate, and the size of the bottom plate is smaller than that of the cantilever probe card body.

[0015] Compared with the prior art, the beneficial effects of the present invention are:

[0016] 1. Driven by the driving mechanism, the bracket of the utility model has two states: horizontal and vertical. The cantilever probe card body is located on the upper side of the bracket. After being fixed by the clamping unit, it moves together with the bracket. The bracket is in the horizontal and vertical states, and the cantilever probe card body thereon is also in the horizontal and vertical states, respectively aligned with the chips fed from the upper side and the chips transported via the horizontal transport track. For the chips transported by the two feeding methods, it is more convenient to connect them with the cantilever probe card body.

[0017] 2. When the clamping unit of the present invention is started, the power motor therein is turned on, which can drive the circular plate and the vertical rod to rotate. In the process of the vertical rod moving along the horizontal groove, it can drive the push-pull frame to move toward the cantilever probe card body or away from the cantilever probe card body. The push-pull plate moves toward the side close to the cantilever probe card body, and presses the inclined plate downward through the connecting plate and other components. In the process of the inclined plate pressing down, the upper clamping plate can be squeezed by the connecting rod to move it downward along the guide rod to clamp the cantilever probe card body located between the lower clamping plate and the upper clamping plate. Conversely, the push-pull plate moves toward the direction away from the cantilever probe card body, and the upper clamping plate moves up to loosen the cantilever probe card body. After the cantilever probe card body is clamped, its position is stable and not easy to loosen. When it is converted to a vertical state, the cantilever probe card body is not easy to slip. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of a placement fixture for a cantilever probe card in the present invention.

[0019] Figure 2 For this utility model Figure 1 Schematic diagram of the structure at point A.

[0020] Figure 3 For this utility model Figure 1 Top view of .

[0021] Figure 4 It is a structural schematic diagram of the clamping unit in the utility model.

[0022] Figure 5 For this utility model Figure 4 Schematic diagram of the structure at point B.

[0023] In the figure: 1. Fixture base; 2. Cantilever probe card body; 3. Horizontal transport track;

[0024] 5. Clamping unit; 501. Lower clamping plate; 502. Upper clamping plate; 503. Guide rod; 504. Inclined plate; 505. Top plate; 506. Connecting plate; 507. Push-pull plate; 508. Push-pull frame; 509. Circular plate; 510. Power motor; 511. Guide block;

[0025] 6. Two-way telescopic rod; 7. Support; 8. Adjustment rod; 9. Base plate. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0027] Reference Figure 1-Figure 5 A cantilever probe card placement fixture includes a fixture base 1 and a horizontal transport track 3. The fixture base 1 is used to store a cantilever probe card body 2. The types of probe cards mainly include cantilever probe cards, vertical probe cards, blade probe cards, thin-film probe cards and micro-electromechanical system (MEMS) probe cards. Among them, the probe of the cantilever probe card is cantilever-shaped and usually consists of multiple stacked cantilever beams. It is suitable for a variety of test environments. The cantilever probe card body 2 is set on the fixture base 1, which directly contacts the bonding pads or bumps on the chip to derive chip signals, and then cooperates with peripheral test instruments and software to control the measurement of the wafer.

[0028] However, the chip feeding methods are different, such as Figure 1 As shown, chips can be fed from the top by a robot or transported via the transverse transport track 3. In these two methods, the cantilever probe card body 2 must be positioned horizontally or vertically, respectively. To enable the cantilever probe card body 2 to connect with chips transported in these two ways and measure wafers, a bracket is provided on the fixture base 1. The cantilever probe card body 2 is located on the upper side of the bracket. The bracket is provided with a support 7, which is rotatably connected to the mounting base via an adjustment rod 8. The mounting base is provided on the fixture base 1. The adjustment rod 8 is inserted into the support 7, which is connected to a drive mechanism for driving its rotation. The drive mechanism drives the bracket to rotate via the adjustment rod 8 and the support 7, allowing the bracket to have two states: horizontal and vertical. The cantilever probe card body 2 is located on the upper side of the bracket. After being fixed by the clamping unit 5, it moves with the bracket. The bracket is in the horizontal and vertical states, and the cantilever probe card body 2 on it is also horizontal and vertical, aligning with the chips fed from the top and the chips transported via the transverse transport track 3, respectively.

[0029] Furthermore, the bracket is provided with a clamping unit 5 for clamping and loosening the cantilever probe card body 2. Two clamping units 5 are provided, and the two clamping units 5 are respectively located on both sides of the cantilever probe card body 2. The two clamping units 5 are respectively connected to the two output ends of the bidirectional telescopic rod 6, which is provided on the bracket.

[0030] The bidirectional telescopic rod 6 can drive the two clamping units 5 to move closer to or farther from each other, so that the clamping units 5 can clamp and fix cantilever probe card bodies 2 of different lengths.

[0031] Specifically, the clamping unit 5 includes a lower clamping plate 501 and an upper clamping plate 502. The lower clamping plate 501 and the upper clamping plate 502 are respectively located at the lower side and the upper side of the cantilever probe card body 2. Two lower clamping plates 501 and two upper clamping plates 502 are provided in a single clamping unit 5. A single lower clamping plate 501 and an upper clamping plate 502 form a group. The two groups of lower clamping plates 501 are respectively located at the front and rear ends of the cantilever probe card body 2. A guide rod 503 is inserted into the lower clamping plate 501. The guide rod 503 passes through the upper clamping plate 502. The lower clamping plate 501 is connected to the inclined plate 504. A sliding groove is provided in the inclined plate 504. A connecting rod is inserted into the sliding groove. The connecting rod is provided on the upper clamping plate 502. The top of the inclined plate 504 is connected to the top plate 505.

[0032] More specifically, two adjacent top plates 505 are connected by a transverse plate, a connecting plate 506 is provided at the middle position of the transverse plate, the other end of the connecting plate 506 is connected to the push-pull plate 507, the lower end surface of the push-pull plate 507 is in contact with the upper end surface of the clamping bracket, and the clamping bracket is provided with a guide groove at a position just below the push-pull plate 507, a guide block 511 with a T-shaped cross section is slidably installed in the guide groove, the guide block 511 is connected to the push-pull plate 507, a push-pull frame 508 is provided on the top of the push-pull plate 507, and the push-pull frame 508 is provided on the top of the push-pull plate 507. 08 is provided with a transverse groove, into which a vertical rod is inserted. The vertical rod is installed at a non-center position of the circular plate 509. The circular plate 509 is connected to a power motor 510 for driving its forward and reverse rotation. The power motor 510 is connected to a clamping bracket through a motor bracket. A bottom plate 9 is installed on the bracket. The cantilever probe card body 2 is located on the upper side of the bottom plate 9. The size of the bottom plate 9 is smaller than the size of the cantilever probe card body 2. In this way, the lower clamping plate 501 and the upper clamping plate 502 on both sides can have sufficient space to contact the cantilever probe card body 2.

[0033] When the power motor 510 is started, it can drive the circular plate 509 and the vertical rod to rotate. During the movement of the vertical rod along the horizontal groove, it can drive the push-pull frame 508 to move toward the cantilever probe card body 2 or away from the cantilever probe card body 2. The push-pull frame 508 moves synchronously with the push-pull plate 507. It can push the inclined plate 504 to rotate around the connection point on the lower clamping plate 501 through the connecting plate 506. The push-pull plate 507 moves toward the side close to the cantilever probe card body 2 and presses the inclined plate 504 to flip downward through the connecting plate 506 and other components. During the downward pressure of the inclined plate 504, the upper clamping plate 502 can be squeezed through the connecting rod, allowing it to move downward along the guide rod 503, clamping the cantilever probe card body 2 located between the lower clamping plate 501 and the upper clamping plate 502. Conversely, the push-pull plate 507 moves in the direction away from the cantilever probe card body 2, and the upper clamping plate 502 moves upward, which can loosen the cantilever probe card body 2.

[0034] Working principle:

[0035] The cantilever probe card body 2 is placed on the upper side of the bracket in the fixture base 1. During the process, the cantilever probe card body 2 needs to be located between the lower clamping plate 501 and the upper clamping plate 502. Then, the power motor 510 inside the clamping unit 5 is started to clamp the cantilever probe card body 2.

[0036] Then, according to the loading direction of the chip, the adjustment rod 8 is rotated by the driving mechanism to allow the bracket to switch between the horizontal and vertical states. The cantilever probe card body 2 parallel to the bracket is in the horizontal and vertical states respectively, and is aligned and connected with the chip fed from the top or the chip transported via the horizontal transport track 3 to measure its wafer.

[0037] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A cantilever probe card placement fixture, comprising a fixture base (1) and a transverse transport track (3), characterized in that: The fixture base (1) is used for storing the cantilever probe card body (2); The fixture base (1) is provided with a bracket, the cantilever probe card body (2) is located on the upper side of the bracket, a support (7) is provided on the bracket, the support (7) is rotatably connected to the mounting base via an adjusting rod (8), the mounting base is provided on the fixture base (1), the adjusting rod (8) is inserted into the support (7), the adjusting rod (8) is connected to a driving mechanism for driving the rotation thereof, and the driving mechanism drives the bracket to rotate via the adjusting rod (8) and the support (7), so that the bracket has two states: a horizontal state and a vertical state; The bracket is provided with a clamping unit (5) for clamping and releasing the cantilever probe card body (2).

2. The cantilever probe card placement fixture according to claim 1, characterized in that: Two clamping units (5) are provided, and the two clamping units (5) are respectively located on both sides of the cantilever probe card body (2). The two clamping units (5) are respectively connected to the two output ends of the bidirectional telescopic rod (6), and the bidirectional telescopic rod (6) is provided on the bracket.

3. The cantilever probe card placement fixture according to claim 1, characterized in that: The clamping unit (5) includes a lower clamping plate (501) and an upper clamping plate (502). The lower clamping plate (501) and the upper clamping plate (502) are respectively located at the lower side and the upper side of the cantilever probe card body (2). Two lower clamping plates (501) and two upper clamping plates (502) are provided in a single clamping unit (5). A single lower clamping plate (501) and an upper clamping plate (502) form a group. The two groups of lower clamping plates (501) are respectively located at the front and rear ends of the cantilever probe card body (2).

4. The cantilever probe card placement jig according to claim 3, characterized in that: The lower clamping plate (501) is inserted with a guide rod (503), the guide rod (503) passes through the upper clamping plate (502), the lower clamping plate (501) is connected to the inclined plate (504), a sliding groove is provided in the inclined plate (504), a connecting rod is inserted in the sliding groove, the connecting rod is provided on the upper clamping plate (502), and the top of the inclined plate (504) is connected to the top plate (505).

5. The cantilever probe card placement jig according to claim 4, characterized in that: Two adjacent top plates (505) are connected by a transverse plate, a connecting plate (506) is provided at the middle position of the transverse plate, the other end of the connecting plate (506) is connected to the push-pull plate (507), the lower end surface of the push-pull plate (507) is in contact with the upper end surface of the clamping bracket, and the clamping bracket is provided with a guide groove at a position directly below the push-pull plate (507), and a guide block (511) with a T-shaped cross section is slidably installed in the guide groove.

6. The cantilever probe card placement jig according to claim 5, characterized in that: The guide block (511) is connected to the push-pull plate (507), and a push-pull frame (508) is provided on the top of the push-pull plate (507). A horizontal groove is provided in the push-pull frame (508), and a vertical rod is inserted into the horizontal groove. The vertical rod is installed at a non-center position of the circular plate (509). The circular plate (509) is connected to a power motor (510) for driving it to rotate forward and reverse. The power motor (510) is connected to the clamping bracket through a motor bracket.

7. The cantilever probe card placement jig according to claim 1, characterized in that: A base plate (9) is mounted on the bracket, the cantilever probe card body (2) is located on the upper side of the base plate (9), and the size of the base plate (9) is smaller than that of the cantilever probe card body (2).

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