Light source device and laser processing equipment

Abstract

The utility model discloses a light source device and laser processing equipment. The light source device comprises a laser module, a guide module, a correction module and a convergence module. The laser module comprises M first laser chips and a fast axis compression assembly; m first light spots corresponding to the M paths of first laser are sequentially arranged at intervals in the slow axis direction of the first light spots; the guide module is arranged on a light path where the M paths of first laser emitted by the fast axis compression assembly are located, and is used for generating M paths of second laser; the M second light spots corresponding to the M paths of second laser are sequentially spaced in the fast axis direction of the second light spots. The correction module is arranged on a light path where the M paths of second laser are located. The convergence module is arranged on the light path where the M paths of second laser corrected by the correction module are located and used for generating specified laser. By arranging the guide module and the correction module, the size of the convergence light spot corresponding to the specified laser can be reduced, the optical power density of the specified laser is improved, and the machining efficiency of the laser machining equipment is improved.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority to Chinese patent application number 202410463255.5, filed with the Patent Office of China on April 16, 2024, entitled “Light Source Device and Laser Processing Equipment,” the entire contents of which are incorporated herein by reference. Technical Field

[0003] The present application relates to the field of optical imaging technology, and more specifically, to a light source device and laser processing equipment. Background Art

[0004] In existing fiber-coupled semiconductor lasers (FCSL), in order to facilitate the assembly and debugging of multiple laser chips, multiple laser chips are usually packaged on the same substrate.

[0005] To reduce the size of laser packaging, researchers typically use an array packaging method that lines up multiple laser chips in a row. Specifically, the laser chips are spaced apart along their slow axis, so that the multiple light spots formed by the multiple laser chips are aligned in a row along the slow axis.

[0006] However, after the laser light generated by the aforementioned laser chip is collimated by a collimating lens, the spot length along the slow axis becomes smaller and the divergence angle becomes larger. Subsequently, after the laser light is converged by a focusing lens, the convergent spot formed at the focus of the focusing lens becomes longer along the slow axis and has a smaller divergence angle. This, in turn, reduces the optical power density of the laser light at the focus, thereby reducing the processing efficiency of laser processing equipment equipped with this laser. Utility Model Content

[0007] Embodiments of the present application provide a light source device and laser processing equipment.

[0008] According to a first aspect of the present application, embodiments of the present application provide a light source device comprising a laser module, a guiding module, a correction module, and a focusing module. The laser module comprises M first laser chips and a fast-axis compression assembly. Each first laser chip is configured to generate a first laser beam, with M first light spots corresponding to the M first laser beams being sequentially spaced along the slow axis of the first light spot, where M is a positive integer greater than 1. The fast-axis compression assembly is disposed in the optical path of the M first laser beams and is configured to reduce the lengths of the M first light spots along the fast axis of the first light spot. The fast axis of the first light spot is perpendicular to the slow axis of the first light spot. The guiding module is disposed in the optical path of the M first laser beams emitted through the fast-axis compression assembly and is configured to guide the M first laser beams to generate M second laser beams. The M second light spots corresponding to the M second laser beams are sequentially spaced along the fast axis of the second light spot, where M is a positive integer greater than 1. The correction module is disposed in the optical path of the M second laser beams and is configured to correct the M second laser beams to increase the lengths of the second light spots along the slow axis of the second light spot. The converging module is arranged on the optical path of the M second laser beams corrected by the correction module, and is used for converging the corrected M second laser beams to generate designated laser beams.

[0009] In some possible embodiments, the laser module further includes a substrate and M collimating lenses; M first laser chips are arranged on the substrate in sequence along the slow axis direction of the first light spot; the M collimating lenses are located between the M first laser chips and the fast axis compression assembly, and the M collimating lenses are arranged one by one on the optical path where the M first lasers are located, for collimating the first lasers; the fast axis compression assembly is arranged on the optical path where the M first lasers are emitted through the M collimating lenses.

[0010] In some possible embodiments, the fast axis compression assembly includes a first meniscus cylindrical lens, which is arranged on the optical path of the M-path first lasers; the first meniscus cylindrical lens has a first concave surface and a first convex surface opposite to each other, and the M-path first lasers are incident through the first convex surface and emitted through the first concave surface, so as to reduce the length of the M first light spots in the fast axis direction of the first light spots.

[0011] In some possible embodiments, the fast-axis compression component includes a positive cylindrical mirror and a negative cylindrical mirror, which are sequentially arranged on the optical path of the M-path first lasers; wherein the M-path first lasers are incident on the positive cylindrical mirror through the convex cylindrical surface of the positive cylindrical mirror, and after propagating to the negative cylindrical mirror, are emitted through the concave cylindrical surface of the negative cylindrical mirror, so as to reduce the length of the M first light spots in the fast-axis direction of the first light spots.

[0012] In some possible embodiments, the guiding module includes a guiding unit and a reflecting unit. The guiding unit is arranged on the optical path of M first lasers emitted through the fast axis compression component, and is used to translate the M first lasers along the fast axis direction of the first light spot to generate M third lasers; the projections of the M third light spots along the slow axis direction of the first light spot do not overlap with each other; the reflecting unit is arranged on the optical path of the M third lasers, and is used to reflect the M third lasers to generate M second lasers.

[0013] In some possible embodiments, the reflection unit includes M reflection elements, which are arranged one by one on the optical paths of the M third lasers, and are used to respectively reflect the corresponding third lasers; the distances between the M reflection elements and the designated plane are equal, and the designated plane is parallel to the fast axis direction of the first light spot and parallel to the slow axis direction of the first light spot.

[0014] In some possible embodiments, the guiding unit includes M-1 flat light-transmitting elements, and the M-1 flat light-transmitting elements are arranged one by one on the optical path of the M-1 first lasers emitted through the fast-axis compression component; the angle between the incident surface of the flat light-transmitting element and the designated plane is a designated angle, at least some of the designated angles are different, and the designated angle is not 0; the designated plane is parallel to the fast axis direction of the first light spot, and parallel to the slow axis direction of the first light spot.

[0015] In some possible embodiments, the guiding unit includes M-1 rhombic prisms, which are arranged one-to-one on the optical path of the M-1 first lasers; the rhombic prisms include adjacent first reflecting surfaces, incident surfaces, and second reflecting surfaces, and the incident surface is perpendicular to the incident direction of the first laser; the distance between the first reflecting surface and the second reflecting surface in the fast axis direction of the first light spot is a specified distance, and at least some of the specified distances are different.

[0016] In some possible embodiments, the laser module is further configured to generate N fourth laser beams; the N fourth light spots corresponding to the N fourth laser beams are sequentially spaced apart from each other along the slow axis direction of the first light spot; the M first laser beams include a first sub-laser, the N fourth laser beams include a second sub-laser, and N is a positive integer greater than or equal to 1; the guiding unit includes a guiding member, which is arranged on the optical path where the first sub-laser and the second sub-laser are located, and is configured to translate the first sub-laser along the fast axis direction of the first light spot to generate a third sub-laser, and translate the second sub-laser along the fast axis direction of the first light spot to generate a fourth sub-laser; the projections of the two sub-light spots corresponding to the third sub-laser and the fourth sub-laser along the slow axis direction of the first light spot coincide with each other; the reflecting unit includes a reflecting member, which is arranged on the optical path where the third sub-laser is located, and is configured to reflect the third sub-laser toward one side of the fourth sub-laser; the guiding module also includes a light combining component, which is arranged on the optical path where the fourth sub-laser and the third sub-laser reflected by the reflecting member are located, and is configured to combine the third sub-laser and the fourth sub-laser to generate a second laser beam.

[0017] Among them, in some possible embodiments, the polarization states of the first sub-laser and the second sub-laser are both first linear polarization states, and the light combining component includes a half-wave plate and a polarization light combiner; the half-wave plate is arranged on the optical path where the third sub-laser is located, and the half-wave plate is used to convert the polarization state of the third sub-laser into a second linear polarization state, and the second linear polarization state is orthogonal to the first linear polarization state; the polarization light combiner is arranged on the optical path where the fourth sub-laser and the third sub-laser reflected by the reflector are located, and is used to reflect the light of the first linear polarization state and transmit the light of the second linear polarization state; or the half-wave plate is arranged on the optical path where the fourth sub-laser is located, and the half-wave plate is used to convert the polarization state of the fourth sub-laser into a second linear polarization state, and the second linear polarization state is orthogonal to the first linear polarization state; the polarization light combiner is arranged on the optical path where the fourth sub-laser and the third sub-laser reflected by the reflector are located, and is used to reflect the light of the second linear polarization state and transmit the light of the first linear polarization state.

[0018] In some possible embodiments, M is equal to N, and the M first lasers and N fourth lasers are divided into M first laser groups in total, each first laser group includes a first sub-laser and a second sub-laser; the number of guide members is M-1; the M-1 guide members are arranged one-to-one on the optical path where the M-1 first laser groups are located, for generating M-1 second laser groups, each second laser group includes a third sub-laser and a fourth sub-laser; wherein, the projections of the M-1 sub-light spots corresponding to the M-1 third sub-lasers along the slow axis direction of the first light spot do not overlap, and the projections of the M-1 sub-light spots corresponding to the M-1 fourth sub-lasers along the slow axis direction of the first light spot do not overlap.

[0019] Among them, in some possible embodiments, the correction module includes a negative cylindrical lens and a positive cylindrical lens, which are sequentially arranged on the optical path of the M-way second laser. The negative cylindrical lens is used to expand the length of the second light spot in the slow axis direction of the second light spot; the positive cylindrical lens is used to collimate the second laser in the slow axis direction of the second light spot; or the correction module includes a second meniscus cylindrical lens, which has a second concave surface and a second convex surface opposite to each other, and the M-way second laser is incident through the second concave surface and emitted through the second convex surface.

[0020] In some possible embodiments, after correction by the correction module, the length of the second light spot in the slow axis direction of the second light spot is the first length, and the total length of the M second light spots in the fast axis direction of the second light spot is the second length; the ratio of the first length to the second length is greater than or equal to 0.95 and less than or equal to 1.

[0021] In some possible embodiments, the laser module includes a substrate, 2*M second laser chips and a polarization combining component; each second laser chip is used to generate a fifth laser; the 2*M second laser chips are divided into two rows, and the two rows of second laser chips are arranged on the substrate at intervals along the fast axis direction of the first light spot; the number of second laser chips in each row is M, and the M second laser chips are arranged on the substrate in sequence at intervals along the slow axis direction of the first light spot; the 2*M second laser chips are divided into M columns, and the polarization combining component is arranged on the optical path where the 2*M fifth lasers are located, and is used to polarization combine the two fifth lasers generated by the second laser chips in each column to generate M first lasers.

[0022] According to a second aspect of the present application, embodiments of the present application further provide a laser processing device comprising the aforementioned light source device and an optical fiber. The light source device is configured to generate a specific laser beam. The optical fiber comprises an input end and an output end, the input end being positioned at the focal point of the converging module. The specific laser beam is coupled into the optical fiber via the input end and then output via the output end.

[0023] The present application provides a light source device and laser processing equipment. The light source device may include a laser module, a guide module, a correction module, and a convergence module. The guide module can transform M first light spots that are sequentially spaced along the slow axis direction of a first light spot into M second light spots that are sequentially spaced along the fast axis direction of a second light spot. The correction module can extend the length of the second light spot along the slow axis direction. Based on the principle of constant optical etendue, as the spot length of the second light spot along the slow axis direction increases, the divergence angle along the slow axis direction decreases.

[0024] Finally, after the M-way second laser is converged by the converging module, the divergence angle of the converging spot formed at the focus of the converging module in the slow axis direction becomes larger and the spot length becomes smaller, so that the overall spot size of the converging spot becomes smaller, which can increase the optical power density of the specified laser at the focus, thereby improving the processing efficiency of the laser processing equipment equipped with the light source device.

[0025] It should be noted that the guiding module changes the arrangement of the light spots; that is, the shapes and areas of the first and second light spots are roughly the same. Therefore, when the fast-axis compression assembly reduces the lengths of the M first light spots along their fast axes, the lengths of the second light spots along their fast axes are also reduced, reducing the total length of the M second light spots along their fast axes. Therefore, by incorporating the fast-axis compression assembly into the laser module of this embodiment, the hardware size of the subsequent correction module and convergence module can be reduced, lowering the hardware cost of the light source device and facilitating a miniaturized design of the light source device. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without creative work.

[0027] Figure 1 This is a structural diagram of a light source device provided in an embodiment of the present application.

[0028] Figure 2 yes Figure 1 The schematic diagram of the structure of the laser module in the light source device shown.

[0029] Figure 3 yes Figure 2 A schematic diagram of the structure of the fast axis compression component in the laser module shown.

[0030] Figure 4 yes Figure 1 Schematic diagram of the arrangement of the first light spots in the light source device shown.

[0031] Figure 5 yes Figure 2 Another structural schematic diagram of the fast axis compression component in the laser module is shown.

[0032] Figure 6 yes Figure 1 Another structural schematic diagram of the laser module in the light source device shown.

[0033] Figure 7 yes Figure 6 Schematic diagram of the setup of the polarization light combining component in the laser module shown.

[0034] Figure 8 yes Figure 1 Schematic diagram of the arrangement of light spots in the light source device shown.

[0035] Figure 9 yes Figure 1 Schematic diagram of the structure of the guiding unit in the light source device shown.

[0036] Figure 10 yes Figure 1 Another structural schematic diagram of the guiding unit in the light source device is shown.

[0037] Figure 11 This is another structural schematic diagram of the light source device provided in an embodiment of the present application.

[0038] Figure 12 yes Figure 11 The schematic diagram of the structure of the light combining component in the light source device shown is shown.

[0039] Figure 13 yes Figure 11 Schematic diagram of the arrangement of light spots in the light source device shown.

[0040] Figure 14 yes Figure 1 A structural schematic diagram of a correction module in a light source device is shown.

[0041] Figure 15 yes Figure 14 Another structural schematic diagram of the correction module in the light source device is shown.

[0042] Figure 16 It is a structural schematic diagram of the laser processing equipment provided in an embodiment of the present application. DETAILED DESCRIPTION

[0043] In order to enable those skilled in the art to better understand the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

[0044] The present invention provides a light source device 100 for generating a specific laser beam. The light source device 100 can be used in laser processing equipment as a laser generator in the laser processing equipment. Specifically, the laser processing equipment can be a laser engraver, laser cutter, etc.

[0045] See also Figures 1 to 3 The light source device 100 may include a laser module 10, a guiding module 30, a correction module 50, and a converging module 70. The laser module 10 may include M first laser chips 140 and a fast-axis compression assembly 170, wherein each first laser chip 140 is used to generate a first laser L1, and the M first light spots S1 corresponding to the M first lasers L1 are sequentially spaced along the slow axis direction X1 of the first light spot S1, where M is a positive integer greater than 1. For example, M can be equal to 2, 3, 4, 5, and so on. Specifically, the first light spot S1 in the present application is roughly elliptical, and the "slow axis direction X1 of the first light spot S1" is the direction of the short axis of the ellipse corresponding to the first light spot S1.

[0046] The fast-axis compression assembly 170 is disposed on the optical path of the M first laser beams L1 and is used to reduce the length of the M first light spots S1 along the fast-axis direction Y1 of the first light spots S1. The fast-axis direction Y1 of the first light spots S1 is perpendicular to the slow-axis direction X1 of the first light spots S1. Specifically, the "fast-axis direction of the first light spots S1" refers to the direction of the major axis of the ellipse corresponding to the first light spots S1.

[0047] The guiding module 30 is disposed on the optical path of the M first laser beams L1 emitted through the fast-axis compression assembly 170. It is used to guide the M first laser beams L1 to generate M second laser beams L2. The M second light spots S2 corresponding to the M second laser beams L2 are sequentially spaced along the fast-axis direction Y2 of the second light spot S2, where M is a positive integer greater than 1 and less than or equal to M. For example, M can be 2, 3, 4, 5, and so on. Specifically, the second light spot S2 in this application is generally elliptical in shape, and the "fast-axis direction Y2 of the second light spot S2" refers to the direction of the major axis of the ellipse corresponding to the second light spot S2.

[0048] The phrase "guiding the first laser light L1" here can be understood as performing optical operations such as translating the optical axis of the first laser light L1 or reflecting the first laser light L1. Therefore, the guiding module 30 in this embodiment guides M paths of first laser light L1 to transform M first light spots S1, which are sequentially spaced along the slow axis direction X1 of the first light spot S1, into M second light spots S2, which are sequentially spaced along the fast axis direction Y2 of the second light spot S2.

[0049] The correction module 50 is disposed on the optical path of the M second laser beams L2. It is used to correct the M second laser beams L2 to increase the length of the second light spot S2 along the slow axis direction X2 of the second light spot S2. Specifically, the "slow axis direction X2 of the second light spot S2" refers to the direction of the short axis of the ellipse corresponding to the second light spot S2. That is, the slow axis direction X2 of the second light spot S2 is perpendicular to the fast axis direction Y2 of the second light spot S2. Based on the principle of constant optical etendue, it can be seen that when the spot length of the second light spot S2 along the slow axis direction X2 increases after correction by the correction module 50, the divergence angle along the slow axis direction X2 will decrease.

[0050] The converging module 70 is disposed on the optical path of the M channels of second laser light L2 corrected by the correction module 50. It is used to converge the M channels of corrected second laser light L2 to produce the designated laser light LD. Due to the beam expansion effect of the correction module 50 and the converging effect of the converging module 70, the convergent light spot formed by the designated laser light LD at the focal point of the converging module 70 has a larger divergence angle in the slow axis direction X2 of the second light spot S2 and a smaller spot length, thereby reducing the overall spot size of the convergent light spot. This can increase the optical power density of the designated laser light LD at the focal point, thereby improving the processing efficiency of laser processing equipment equipped with the light source device 100.

[0051] It should be noted that the guide module 30 changes the arrangement of the light spots. In other words, the shapes and areas of the first light spots S1 and the second light spots S2 are approximately the same. Therefore, when the fast-axis compression assembly 170 reduces the length of the M first light spots S1 along the fast-axis direction Y1 of the first light spot S1, the length of the second light spot S2 along the fast-axis direction Y2 of the second light spot S2 is also reduced, thereby reducing the total length of the M second light spots S2 along the fast-axis direction Y2 of the second light spot S2. Therefore, by providing the fast-axis compression assembly 170, the laser module 10 in this embodiment can reduce the hardware size of the subsequent correction module 50 and the convergence module 70, reduce the hardware cost of the light source device 100, and facilitate the miniaturization of the light source device 100.

[0052] The specific implementation of each module in the light source device 100 is introduced below.

[0053] In this embodiment, the laser module 10 is used to generate M first laser beams L1. Figure 2 and Figure 3In some possible embodiments, the laser module 10 may include a substrate 120, M first laser chips 140, and a fast-axis compression assembly 170. The M first laser chips 140 are packaged on the substrate 120. Specifically, the substrate 120 may be a substrate dedicated to laser chips, and the first laser chips 140 may be edge-emitting laser chips (EEL).

[0054] In some possible embodiments, the M first laser chips 140 can be mounted on the substrate 120 using a surface mount device (SMD) process to improve the integration of the laser module 10 and facilitate installation and optical path debugging of the laser module 10. In addition, the substrate 120 can provide good heat dissipation for the first laser chips 140 to ensure the operating efficiency of the laser module 10. In other possible embodiments, the M first laser chips 140 can also be fixed to the substrate 120 using a transistor outline (TO) package, which is not limited in this embodiment.

[0055] exist Figure 2 In the embodiment shown, M first laser chips 140 can be sequentially spaced apart on the substrate 120 along the slow axis direction X1 of the first light spot S1. Each first laser chip 140 is used to generate one path of first laser light L1, so that the M first light spots S1 corresponding to the M paths of first laser light L1 are also sequentially spaced apart along the slow axis direction X1 of the first light spot S1. Specifically, Figure 2 In the illustrated embodiment, M is equal to four, and the four first laser chips 140 can be arranged on the substrate 120 in a substantially straight line and at equal intervals. That is, the four first laser chips 140 are arranged in a 1*4 array.

[0056] exist Figure 2 In the illustrated embodiment, the laser module 10 may further include M collimating lenses 160, which are located between the M first laser chips 140 and the fast-axis compression assembly 170. The M collimating lenses 160 are disposed one-to-one in the optical paths of the M first lasers L1, and are used to collimate the first lasers L1 so that the first lasers L1 are incident on the fast-axis compression assembly 170 and the subsequent guide module 30 as substantially parallel light. Specifically, the M collimating lenses 160 may be disposed on the surface of the substrate 120. For example, the M collimating lenses 160 may be attached to the surface of the substrate 120, or embedded in the surface of the substrate 120, to improve the overall integration of the laser module 10 and enable the M first lasers L1 to be emitted from the laser module 10 as parallel light.

[0057] exist Figure 3In the illustrated embodiment, a fast-axis compression assembly 170 is disposed on the optical path of the M first laser beams L1 emitted through the M collimating lenses 160. The fast-axis compression assembly 170 is used to reduce the length of the first light spot S1 along the fast-axis direction Y1 of the first light spot S1. Because the fast-axis compression assembly 170 compresses the first light spot S1 along the fast-axis direction Y1, the length of the second light spot S2 along the fast-axis direction Y2 is also reduced, resulting in a total reduction in the length of the M second light spots S2 along the fast-axis direction Y2.

[0058] Of course, if the first laser light L1 generated by the first laser chips 140 has good collimation, the M collimating lenses 160 may not be provided between the M first laser chips 140 and the fast-axis compression assembly 170. In this case, the M paths of first laser light L1 generated by the M first laser chips 140 are directly incident on the fast-axis compression assembly 170. In this case, the fast-axis compression assembly 170 is directly provided on the optical path of the M paths of first laser light L1 generated by the M first laser chips 140.

[0059] See also Figure 4 , Figure 4 The arrangement diagram of the first light spot S1 provided in this embodiment, wherein the value of M is 4. Specifically, Figure 4 Part (a1) is a schematic diagram of the arrangement of M first light spots S1 emitted through M collimating lenses 160; Figure 4 Part (a2) is a schematic diagram of the arrangement of the M first light spots S1 emitted through the fast axis compression assembly 170.

[0060] Please refer again Figure 3 In some possible embodiments, the fast-axis compression assembly 170 may include a first meniscus lens 180. The first meniscus lens 180 is disposed on the optical path of the M first laser beams L1. The extension direction of the first meniscus lens 180 is parallel to the slow-axis direction X1 of the first light spot S1. Specifically, the first meniscus lens 180 has a first concave surface 1810 and a first convex surface 1830 that are opposite to each other. The first laser beam L1 is incident through the first convex surface 1830 and is emitted through the first concave surface 1810, thereby reducing the length of the first light spot S1 along the fast-axis direction Y1 of the first light spot S1. In other words, the first convex surface 1830 is disposed toward the M first laser chips 140, and the first concave surface 1810 is disposed toward the guiding module 30. Specifically, the first convex surface 1830 may be a convex cylindrical surface, and the first concave surface 1810 may be a concave cylindrical surface.

[0061] Since the first meniscus cylindrical lens 180 is in an elongated shape, only one first meniscus cylindrical lens 180 is required on the optical path of the M first laser beams L1 to compress the M first light spots S1 , thereby saving the hardware cost of the laser module 10 .

[0062] See also Figure 5 In other possible embodiments, the fast-axis compression assembly 170 may include a positive cylindrical mirror 1720 and a negative cylindrical mirror 1740, which are sequentially arranged on the optical paths of the M first laser beams L1. The M first laser beams L1 are incident upon the positive cylindrical mirror 1720 via the convex surface of the positive cylindrical mirror 1720. After propagating to the negative cylindrical mirror 1740, they are emitted via the concave surface of the negative cylindrical mirror 1740, thereby reducing the length of the first light spot S1 along the fast axis direction Y1 of the first light spot S1. In other words, the convex surface of the positive cylindrical mirror 1720 is positioned toward the M first laser chips 140, while the concave surface of the negative cylindrical mirror 1740 is positioned toward the guiding module 30.

[0063] Specifically, the positive cylindrical mirror 1720 can be a cylindrical lens with a positive optical focal length, and the negative cylindrical mirror 1740 can be a cylindrical lens with a negative optical focal length. The positive cylindrical mirror 1720 and the negative cylindrical mirror 1740 are respectively in the shape of long strips, and the extension directions of the positive cylindrical mirror 1720 and the negative cylindrical mirror 1740 are respectively parallel to the slow axis direction X1 of the first light spot S1. This embodiment does not limit the specific structure of the positive cylindrical mirror 1720 and the negative cylindrical mirror 1740.

[0064] It's not hard to find here. Figure 5 The positive cylindrical mirror 1720 and the negative cylindrical mirror 1740 in the embodiment shown can be replaced by Figure 3 The first meniscus cylindrical lens 180 in the embodiment shown reduces the processing difficulty and hardware cost of the fast axis compression assembly 170. Figure 3 The first meniscus cylindrical lens 180 in the embodiment shown can also replace Figure 5 The positive cylindrical mirror 1720 and the negative cylindrical mirror 1740 in the illustrated embodiment enable the fast axis compression assembly 170 to be provided with only one optical device, thereby reducing the difficulty of debugging the optical path and also making the overall optical path structure of the laser module 10 more compact, thereby realizing a miniaturized design of the light source device 100.

[0065] See also Figure 6 and Figure 7In other possible embodiments, the laser module 10 may include a substrate 120, 2*M second laser chips 130, a polarization light combining assembly 150, and a fast-axis compression assembly 170. The 2*M second laser chips 130 are packaged on the substrate 120. Specifically, the substrate 120 may be a substrate dedicated to laser chips, and the second laser chips 130 may be edge-emitting laser chips (EEL). In some possible embodiments, the 2*M second laser chips 130 may be packaged on the substrate 120 using a surface-mounted device (SMD) process or a to-be-mounted (TO) process to improve the integration of the laser module 10 and facilitate installation and optical path debugging of the laser module 10.

[0066] exist Figure 6 In the embodiment shown, 2*M second laser chips 130 are divided into two rows, and the two rows of second laser chips 130 are spaced apart on the substrate 120 along the fast axis direction Y1 of the first light spot S1. The number of second laser chips 130 in each row is M, and the M second laser chips 130 are sequentially spaced apart on the substrate 120 along the slow axis direction X1 of the first light spot S1. Each second laser chip 130 is used to generate a fifth laser L5. Specifically, Figure 6 In the illustrated embodiment, M is equal to four, and the eight second laser chips are arranged in two rows and four columns. That is, the eight first laser chips 140 are arranged in a 2*4 array.

[0067] exist Figure 6 In the illustrated embodiment, the laser module 10 may further include 2*M collimating lenses 160, which are disposed one-to-one in the optical path of the 2*M fifth laser beams L5. These collimating lenses 160 are used to collimate the fifth laser beams L5 so that the fifth laser beams L5 are emitted as substantially parallel light. Specifically, the 2*M collimating lenses 160 may be disposed on the surface of the substrate 120. For example, the 2*M collimating lenses 160 may be attached to the surface of the substrate 120, or embedded in the surface of the substrate 120, to improve the overall integration of the laser module 10 and enable the 2*M fifth laser beams L5 to be emitted from the laser module 10 as parallel light.

[0068] See also Figure 7 The polarization combining assembly 150 is disposed in the optical path of the 2*M fifth laser beams L5. It is configured to polarization-combine the two fifth laser beams L5 generated by each column of the second laser chips 130 to generate M first laser beams L1. In other words, the polarization combining assembly 150 is configured to polarization-combine the 2*M fifth laser beams L5 into M first laser beams L1, where the two fifth laser beams L5 in each column are combined into one first laser beam L1. This embodiment utilizes an optical path structure where two fifth laser beams L5 are combined into one first laser beam L1, which can increase the optical power density of the first laser beam L1 and thereby improve the processing efficiency of the laser processing equipment.

[0069] As an embodiment, the two paths of the fifth laser L5 in each column can be light of the same linear polarization state (for example, P light). The polarization combining assembly 150 may include a two-wave plate 1510, a polarization combining plate 1530, and a reflector 1550, wherein the two-wave plate 1510 is arranged on the optical path where one of the fifth lasers L5 is located, and is used to convert the linear polarization state of the fifth laser L5, for example, converting the P light into the S light. At this time, the two paths of the fifth laser L5 become one path of P light and the other path of S light. The reflector 1550 is used to reflect one of the light rays, for example, the reflector 1550 is arranged on the optical path where the S light is located, and is used to reflect the S light toward the side of the P light. The polarization combining plate 1530 is arranged on the optical path where the P light and the reflected S light are located, and is used to reflect the P light and transmit the S light to synthesize a first laser L1; alternatively, the polarization combining plate 1530 can also be used to transmit the P light and reflect the S light to synthesize a first laser L1.

[0070] Specifically, R&D personnel can adjust the specific implementation method of the polarization light combining component 150 according to the actual application scenario of the light source device 100. For example, R&D personnel can adjust the specific placement positions of the polarization light combining plate 1530 and the reflector 1550 according to the emission direction and emission position of the first laser L1, and adjust the transmittance and reflection characteristics of the polarization light combining plate 1530, etc. This embodiment does not limit the specific implementation method of the polarization light combining component 150.

[0071] exist Figure 7 In the embodiment shown, the fast axis compression component 170 is disposed on the optical path of the M paths of the first laser light L1 emitted from the polarization light combining component 150, so as to reduce the length of the first light spot S1 in the fast axis direction Y1 of the first light spot S1. In some possible embodiments, the fast axis compression component 170 may include: Figure 3 The first meniscus cylindrical lens 180 in the illustrated embodiment is arranged on the optical path of the M-path first laser L1 emitted through the polarization light combining component 150, and the extension direction of the first meniscus cylindrical lens 180 is parallel to the slow axis direction X1 of the first light spot S1. Specifically, the first meniscus cylindrical lens 180 has a first concave surface 1810 and a first convex surface 1830 opposite to each other, and the first laser L1 is incident through the first convex surface 1830 and emitted through the first concave surface 1810. That is, the first convex surface 1830 is arranged toward the polarization light combining component 150, and the first concave surface 1810 is arranged toward the guiding module 30. The first meniscus cylindrical lens 180 can be used to reduce the length of the first light spot S1 in the fast axis direction Y1 of the first light spot S1, so as to reduce the hardware size of the subsequent correction module 50 and the converging module 70, and reduce the hardware cost of the light source device 100.

[0072] Of course, in some other possible embodiments, the fast axis compression assembly 170 may include Figure 3 In the illustrated embodiment, the positive cylindrical mirror 1720 and the negative cylindrical mirror 1740 are sequentially arranged on the optical path of the M paths of the first laser light L1 emitted through the polarization light combining component 150 .

[0073] In this embodiment, the guiding module 30 is disposed on the optical path of the M first laser beams L1 emitted from the fast axis compression assembly 170, and is used to guide the M first laser beams L1 to generate M second laser beams L2. Figure 1 The guiding module 30 may include a guiding unit 320 and a reflecting unit 340. The guiding unit 320 is disposed on the optical path of the M first laser beams L1 and is configured to translate the M first laser beams L1 along the fast axis direction Y1 of the first light spot S1 to generate M third laser beams L3. The projections of the M third light spots S3 along the slow axis direction X1 of the first light spot S1 do not overlap.

[0074] It is not difficult to understand here that "translating the first laser L1" refers to translating the optical axis of the first laser L1. Therefore, the third laser L3 emitted after the translation is parallel to the first laser L1, and the shape and area of ​​the first light spot S1 and the third light spot S3 are approximately the same. In addition, because the M first light spots S1 are arranged in sequence along the slow axis direction X1 of the first light spot S1, the projections of the M third light spots S3 obtained by translating the M first light spots S1 along the fast axis direction Y1 of the first light spot S1 do not overlap with each other. In other words, the projections of the M third light spots S3 in the present application along the slow axis direction X1 and the fast axis direction Y1 of the first light spot S1 do not overlap with each other.

[0075] See also Figure 8 , Figure 8 for Figure 1 Schematic diagram of the arrangement of the first light spot S1, the second light spot S2 and the third light spot S3 in the corresponding light source device 100. Wherein, M is 4, Figure 8 Part (a) is a schematic diagram of the arrangement of the first light spot S1; part (b) is a schematic diagram of the arrangement of the third light spot S3; part (c) is a schematic diagram of the arrangement of the second light spot S2; and part (d) is a schematic diagram of the arrangement of the second light spot S2 after being enlarged by the correction module 50. Figure 8 It is not difficult to find that Figure 1 The guiding module 30 in the illustrated embodiment functions to translate the M first light spots S1 in the fast axis direction Y1 of the first light spot S1 so that the M third light spots S3 are spaced apart in both the slow axis direction X1 and the fast axis direction Y1 of the first light spot S1.

[0076] It is not difficult to understand here that Figure 8The M first light spots S1 shown in part (a) are the light spots compressed by the fast axis compression component 170, that is, corresponding to Figure 4 Because the fast-axis compression assembly 170 reduces the length of the first light spot S1 along the fast-axis direction Y1 of the first light spot S1, the translation distance of the first light spot S1 along the fast-axis direction Y1 under the action of the guiding module 30 can be shortened, further reducing the hardware implementation difficulty and hardware cost of the guiding module 30.

[0077] See also Figure 9 In some possible embodiments, the guiding unit 320 may include M-1 flat-panel light-transmitting elements 3210, each of which is disposed in a one-to-one correspondence along the optical paths of the M-1 first laser beams L1 emitted from the fast-axis compression assembly 170. In other words, if a path of the first laser beam L1 is not provided with a flat-panel light-transmitting element 3210, the first laser beam L1 will not be translated, thereby reducing the hardware cost of the guiding unit 320. Specifically, the flat-panel light-transmitting element 3210 is used to translate the corresponding path of the first laser beam L1 along the fast-axis direction Y1 of the first light spot S1 to generate a corresponding path of the third laser beam L3. A path of the first laser beam L1 that is not provided with a flat-panel light-transmitting element 3210 can be directly considered as the third laser beam L3. Of course, the number of flat-panel light-transmitting elements 3210 may also be M, with the M flat-panel light-transmitting elements 3210 disposed in a one-to-one correspondence along the optical paths of the M paths of the first laser beam L1.

[0078] exist Figure 9 In the illustrated embodiment, the angle between the light incident surface 3212 of the flat light-transmitting member 3210 and the designated plane P is a designated angle A1. At least some of these designated angles A1 vary and are not zero. The designated plane P is parallel to the fast-axis direction Y1 of the first light spot S1 and parallel to the slow-axis direction X1 of the first light spot S1. Because at least some of these designated angles A1 vary, at least some of the flat light-transmitting member 3210 in this embodiment have varying degrees of inclination relative to the designated plane P. This results in varying amounts of offset of the first laser light L1 by the flat light-transmitting member 3210 along the fast-axis direction Y1.

[0079] Here, "at least some of the designated angles A1 are different" can mean that the M-1 designated angles A1 corresponding to the M-1 flat-plate light-transmitting elements 3210 are all different. Alternatively, the designated angles A1 corresponding to some of the M-1 flat-plate light-transmitting elements 3210 are different, while the designated angles A1 corresponding to another portion of the flat-plate light-transmitting elements 3210 are the same. Specifically, among the M-1 flat-plate light-transmitting elements 3210, there can be two axially symmetrical flat-plate light-transmitting elements 3210. In this case, the designated angles A1 corresponding to the two flat-plate light-transmitting elements 3210 are the same, but one of the flat-plate light-transmitting elements 3210 is used to offset the corresponding first laser light L1 in the positive direction of the fast-axis direction Y1, while the other flat-plate light-transmitting element 3210 is used to offset the corresponding first laser light L1 in the negative direction of the fast-axis direction Y1. Specifically, the M-1 flat light-transmitting elements 3210 may be M-1 flat glass sheets of the same size, and the intersection line formed by the light incident surface 3212 of each flat light-transmitting element 3210 and the designated plane P is parallel to the slow axis direction X1.

[0080] See also Figure 10 In other possible embodiments, the guiding unit 320 may include M-1 rhombic prisms 3230, which are arranged one-to-one in the optical paths of the M-1 first laser beams L1. That is, if there is a first laser beam L1 without a rhombic prism 3230, the first laser beam L1 will not be translated, thereby saving the hardware cost of the guiding unit 320. Specifically, the rhombic prism 3230 is used to translate the corresponding first laser beam L1 along the fast axis direction Y1 of the first light spot S1 to generate a corresponding third laser beam L3. The first laser beam L1 without a rhombic prism 3230 can be directly regarded as the third laser beam L3. Of course, the number of rhombic prisms 3230 can also be M, with the M rhombic prisms 3230 arranged one-to-one in the optical paths of the M first laser beams L1.

[0081] exist Figure 10 In the illustrated embodiment, the rhombus prism 3230 may include a first reflective surface 3232, an incident surface 3234, and a second reflective surface 3236 adjacent to each other. The incident surface 3234 is perpendicular to the incident direction of the first laser light L1, and the first reflective surface 3232 and the second reflective surface 3236 are parallel. After the first laser light L1 enters the rhombus prism 3230 via the incident surface 3234, it sequentially passes through the first reflective surface 3232 and the second reflective surface 3236 before exiting. Because the distance between the first reflective surface 3232 and the second reflective surface 3236 in the fast axis direction Y1 of the first light spot S1 is a specified distance D1, at least portions of the specified distance D1 are different. This allows the rhombus prism 3230 to offset the first laser light L1 in the fast axis direction Y1 by different amounts.

[0082] Here, "at least some of the specified distances D1 are different" can mean that the M-1 specified distances D1 corresponding to the M-1 rhombic prisms 3230 are all different. It can also be that the specified distances D1 corresponding to some of the M-1 rhombic prisms 3230 are different, while the specified distances D1 corresponding to another portion of the rhombic prisms 3230 are the same. Specifically, among the M-1 rhombic prisms 3230, there can be two rhombic prisms 3230 arranged axially symmetrically, and the specified distances D1 corresponding to the two rhombic prisms 3230 are the same, but one of the rhombic prisms 3230 is used to offset the corresponding first laser light L1 in the positive direction of the fast axis direction Y1, while the other rhombic prism 3230 is used to offset the corresponding first laser light L1 in the opposite direction of the fast axis direction Y1. Specifically, the intersection formed by the first reflection surface 3232 and the incident surface 3234 of each rhombic prism 3230 is parallel to the slow axis direction X1.

[0083] In yet other possible embodiments, the guiding unit 320 may include both an inclined flat light-transmitting member 3210 and an oblique prism 3230. The total number of flat light-transmitting members 3210 and oblique prisms 3230 is M-1, and each is disposed in a one-to-one correspondence with the optical paths of the M-1 first laser beams L1. Specifically, researchers may adjust the specific implementation of the guiding unit 320 based on actual needs, and this embodiment does not limit this.

[0084] Please refer again Figure 1 The reflecting unit 340 is disposed on the optical path of the M third laser beams L3 and is configured to reflect the M third laser beams L3 to generate M second laser beams L2. Specifically, the reflecting unit 340 may include M reflecting elements 3410, which are disposed one-to-one in the optical path of the M third laser beams L3. Each reflecting element 3410 is configured to reflect a corresponding third laser beam L3 to generate a corresponding second laser beam L2. The reflecting element 3410 may be a mirror or a glass plate with a total reflection film.

[0085] Specifically, the distance H between the M reflectors 3410 and the designated plane P is equal. The designated plane P is parallel to the fast axis direction Y1 of the first light spot S1, and is parallel to the slow axis direction X1 of the first light spot S1. The "distance H" here can be the distance between the geometric center of the light spot at the reflector 3410 and the designated plane P. Since the light spot is roughly elliptical, the geometric center can be the center of the ellipse. Therefore, the M-channel third lasers L3 in this embodiment can be reflected by the reflective unit 340 at the same height, so that the generated M-channel second lasers L2 can be parallel to each other and at the same height, so that the subsequently formed M second light spots S2 can be arranged in a "single" pattern along the fast axis direction Y2 of the second light spot S2.

[0086] See also Figure 11 In other possible embodiments, the laser module 10 is further configured to generate N fourth laser beams L4, where N is a positive integer greater than or equal to 1 (for example, N is 1, 2, 3, etc.). As an implementation method, the laser module 10 may further include N third laser chips (not shown), each of which is configured to generate a corresponding fourth laser beam L4.

[0087] In this embodiment, the N fourth light spots S4 corresponding to the N fourth laser beams L4 and the M first light spots S1 are arranged in sequence along the slow axis direction X1 of the first light spot S1. Specifically, the N fourth light spots S4 and the M first light spots S1 can be arranged alternately. That is, the N third laser chips and the M first laser chips 140 are alternately arranged on the substrate 120 along the slow axis direction X1 of the first light spot S1. Figure 11 In the embodiment shown, M equals N equals 2.

[0088] It should be noted that the first laser chip 140 and the third laser chip are only named for the convenience of explaining the optical path. In the actual laser module 10, the first laser chip 140 and the third laser chip can be the same laser chip. Similarly, the first laser L1 and the fourth laser L4 can be two laser beams with the same properties. For example, Figure 2 In the illustrated embodiment, two of the first laser chips 140 can be regarded as third laser chips.

[0089] In this embodiment, the M channels of first laser light L1 include a first sub-laser L11, and the N channels of fourth laser light L4 include a second sub-laser L12. The polarization states of the first sub-laser L11 and the second sub-laser L12 are both in a first linear polarization state, which can be either a P polarization state or an S polarization state. Specifically, the guiding unit 320 may include a guiding member 3201, and the reflecting unit 340 may include a reflecting member 3410.

[0090] The guide 3201 is disposed on the optical path of the first sub-laser L11 and the second sub-laser L12, and is used to translate the first sub-laser L11 along the fast axis direction Y1 of the first light spot S1 to generate the third sub-laser L41, and to translate the second sub-laser L12 along the fast axis direction Y1 of the first light spot S1 to generate the fourth sub-laser L42. The two sub-spots S5 ( Figure 13 The projections of S51 and S52 along the slow axis direction X1 of the first light spot S1 coincide with each other. The “third sub-laser L41” here can correspond to Figure 1 The third laser L3 in.

[0091] Specifically, the guide 3201 may be Figure 9The flat light-transmitting member 3210 is tilted and is disposed on the optical path of the first sub-laser L11 and the second sub-laser L12. The guide member 3201 may be Figure 10 The rhombus prism 3230 shown is arranged on the optical path of the first sub-laser L11 and the second sub-laser L12. Specifically, the relevant description of the inclined flat light-transmitting member 3210 and the rhombus prism 3230 can be referred to the description in the above embodiment, and will not be repeated here. Since the guide member 3201 is simultaneously arranged on the optical path of the first sub-laser L11 and the second sub-laser L12, it can translate the two light spots corresponding to the first sub-laser L11 and the second sub-laser L12 by the same distance in the fast axis direction Y1 of the first light spot S1 to form two sub-light spots S5. The reflector 3410 is arranged on the optical path of the third sub-laser L41, and is used to reflect the third sub-laser L41 toward one side of the fourth sub-laser L42. Specifically, the relevant description of the reflector 3410 can be referred to the description in the above embodiment, and will not be repeated here.

[0092] exist Figure 11 In the illustrated embodiment, the guiding module 30 may further include a light combining assembly 360, disposed in the optical path of the fourth sub-laser L42 and the third sub-laser L41 reflected by the reflector 3410. The light combining assembly 360 is configured to combine the third sub-laser L41 and the fourth sub-laser L42 to generate a second laser beam L2. This embodiment utilizes an optical path structure that combines the third sub-laser L41 and the fourth sub-laser L42 to form a second laser beam L2. This increases the optical power density of the second laser beam L2, thereby improving the processing efficiency of the laser processing equipment.

[0093] In some possible embodiments, the light combining assembly 360 may include a half-wave plate 3610 and a polarization light combining element 3650. Figure 11 As shown, a half-wave plate 3610 can be disposed in the optical path of the third sub-laser L41. The half-wave plate 3610 is configured to convert the polarization state of the third sub-laser L41 into a second linear polarization state, where the second linear polarization state is orthogonal to the first linear polarization state. Specifically, when the first linear polarization state is a P polarization state, the second linear polarization state can be an S polarization state; and when the first linear polarization state is an S polarization state, the second linear polarization state can be a P polarization state.

[0094] As an embodiment, the half-wave plate 3610 can be disposed on the optical path of the third sub-laser L41 between the guide 3201 and the reflector 3410. As another embodiment, the half-wave plate 3610 can also be disposed on the optical path of the third sub-laser L41 reflected by the reflector 3410.

[0095] The polarization light combiner 3650 is arranged on the optical path of the fourth sub-laser L42 and the third sub-laser L41 reflected by the reflector 3630. It is used to reflect the light of the first linear polarization state and transmit the light of the second linear polarization state to realize polarization light combination of the third sub-laser L41 and the fourth sub-laser L42 to form a second laser L2. Specifically, the polarization light combiner 3650 can be a polarization light combiner that transmits P and reflects S, or a polarization light combiner that transmits S and reflects P. Figure 11 In the illustrated embodiment, when the polarization states of the first sub-laser L11 and the second sub-laser L12 are both P polarization states, the polarization light combiner 3650 is a polarization light combiner that transmits S and reflects P; conversely, when the polarization states of the first sub-laser L11 and the second sub-laser L12 are both S polarization states, the polarization light combiner 3650 is a polarization light combiner that transmits P and reflects S.

[0096] See also Figure 12 In some other possible embodiments, the light combining component 360 may include a half-wave plate 3610 and a polarization light combining component 3650. The half-wave plate 3610 is arranged on the optical path where the fourth sub-laser L42 is located, and the half-wave plate 3610 is used to convert the polarization state of the fourth sub-laser L42 into a second linear polarization state, and the second linear polarization state is orthogonal to the first linear polarization state. The polarization light combining component 3650 is arranged on the optical path where the fourth sub-laser L42 and the third sub-laser L41 reflected by the reflector 3630 are located, and is used to reflect the light of the second linear polarization state and transmit the light of the first linear polarization state, so as to realize polarization combining of the third sub-laser L41 and the fourth sub-laser L42 to form a second laser L2. In Figure 12 In the illustrated embodiment, when the polarization states of the first sub-laser L11 and the second sub-laser L12 are both P polarization states, the polarization light combiner 3650 is a polarization light combiner that transmits P and reflects S; conversely, when the polarization states of the first sub-laser L11 and the second sub-laser L12 are both S polarization states, the polarization light combiner 3650 is a polarization light combiner that transmits S and reflects P.

[0097] In some possible embodiments, M may be equal to N, and the M first lasers L1 and the N fourth lasers L4 are divided into M first laser groups, each of which includes a first sub-laser L11 and a second sub-laser L12. Figure 11 In the example, M is 2, and the number of the first laser groups is two.

[0098] The number of guides 3201 can be M-1, with the M-1 guides 3401 disposed one-to-one in the optical paths of the M-1 first laser groups. These guides are used to generate M-1 second laser groups, each of which includes a third sub-laser L41 and a fourth sub-laser L42. In other words, if a first laser group is not provided with a guide 3201, the two lasers in this first laser group will not shift, thereby reducing the hardware cost of the guide unit 320. Furthermore, the first laser group without a guide 3201 can be directly considered a second laser group. Of course, the number of guides 3201 can be M, with the M guides 3401 disposed one-to-one in the optical paths of the M first laser groups.

[0099] Specifically, the projections of the M-1 sub-spots S51 corresponding to the M-1 third sub-laser L41 along the slow axis direction X1 of the first light spot S1 do not overlap, and the projections of the M-1 sub-spots S52 corresponding to the M-1 fourth sub-laser L42 along the slow axis direction X1 of the first light spot S1 do not overlap.

[0100] See also Figure 13 , Figure 13 for Figure 11 Schematic diagram of the arrangement of the first light spot S1, the second light spot S2, the fourth light spot S4 and the sub-light spot S5 (including S51 and S52) in the corresponding light source device 100. Wherein, M and N are 2, Figure 11 Part (a) is a schematic diagram of the arrangement of the first light spot S1 and the fourth light spot S4; part (b) is a schematic diagram of the arrangement of the sub-light spot S5; part (c) is a schematic diagram of the arrangement of the second light spot S2; and part (d) is a schematic diagram of the arrangement of the second light spot S2 after being enlarged by the correction module 50. It is not difficult to find that Figure 11 In the embodiment shown, the guiding module 30 transforms the M first light spots S1 and the N fourth light spots S4 into M second light spots S2. Figure 1 In the embodiment shown, the total length of the M second light spots S2 in the long axis direction is reduced to Figure 1 The hardware size of the subsequent correction module 50 and the convergence module 70 is reduced to half, thereby reducing the hardware cost of the light source device 100.

[0101] exist Figure 11 In the embodiment shown, the number of light-combining components 360 is M, and the M light-combining components 360 are arranged one-to-one in the optical path of the fourth sub-laser L42 and the third sub-laser L41 reflected by the reflector 3410, and are used to combine the third sub-laser L41 and the fourth sub-laser L42 to generate M paths of second laser L2.

[0102] In some possible embodiments, M may be equal to 2, N may be equal to 1, and one of the first lasers L1 may be regarded as the first sub-laser L11, and one of the fourth lasers L4 may be regarded as the second sub-laser L12, while the remaining first laser L1 may be directly reflected to generate two second light spots S2.

[0103] In this embodiment, the correction module 50 is arranged on the optical path where the M second laser beams L2 are located, and is used to extend the length of the second light spot S2 in the slow axis direction X2 of the second light spot S2. Figure 14 The correction module 50 may include a negative cylindrical lens 520 and a positive cylindrical lens 540. The negative cylindrical lens 520 and the positive cylindrical lens 540 are sequentially arranged on the optical paths of the M second laser beams L2. The extension direction of the negative cylindrical lens 520 is parallel to the fast axis direction Y2 of the second light spot S2. The negative cylindrical lens 520 is used to extend the length of the second light spot S2 along the slow axis direction X2 of the second light spot S2. The positive cylindrical lens 540 is used to collimate the second laser beam L2 along the slow axis direction X2 of the second light spot S2 to reduce the diffusion angle of the second laser beam L2 along the slow axis direction X2.

[0104] See also Figure 15 , the correction module 50 may include a second meniscus cylindrical lens 560, and the extension direction of the second meniscus cylindrical lens 560 is parallel to the fast axis direction Y2 of the second light spot S2. The second meniscus cylindrical lens 560 has a second concave surface 5610 and a second convex surface 5630 opposite to each other, and the M-way second laser L2 is incident through the second concave surface 5610 and emitted through the second convex surface 5630. That is to say, the second concave surface 5610 is set toward the guiding module 30, and the second convex surface is set toward the converging module 70. The second meniscus cylindrical lens 560 in this embodiment can not only expand the length of the second light spot S2 in the slow axis direction X2 of the second light spot S2, but also collimate the second laser L2 in the slow axis direction X2 of the second light spot S2. Therefore, the second meniscus cylindrical lens 560 can be equivalent to Figure 14 The negative cylindrical lens 520 and the positive cylindrical lens 540 in the illustrated embodiment can reduce the difficulty of debugging the optical path and make the overall optical path more compact.

[0105] For details, please refer again to Figure 8 and Figure 13After correction by the correction module 50, the length of the second light spot S2 in the slow axis direction X2 of the second light spot S2 is the first length H1, and the total length of the M second light spots S2 in the fast axis direction Y2 of the second light spot S2 is the second length H2. The ratio of the first length H1 to the second length H2 is greater than or equal to 0.95 and less than or equal to 1. In other words, the length of the overall light spot corresponding to the M second light spots S2 in the fast axis direction Y2 is approximately equal to the length in the slow axis direction X2. This allows the M corrected second laser beams L2, after subsequent convergence by the convergence module 70, to form a converged light spot that approximates a circular light spot, thereby reducing energy loss of the designated laser LD when coupled into the optical fiber.

[0106] In this embodiment, the converging module 70 is disposed on the optical path of the M channels of second laser light L2 corrected by the correction module 50. The converging module 70 is configured to converge the M channels of corrected second laser light L2 to generate the designated laser light LD. Specifically, the converging module 70 may include one or more converging lenses 720. The specific implementation of the converging module 70 is not limited in this embodiment.

[0107] The embodiment of the present application provides a laser processing device 200 equipped with a light source device 100. The laser processing device 200 can be a laser engraver, a laser cutter, etc. Figure 16 The laser processing equipment 200 may include the light source device 100 and the optical fiber 210 mentioned above, wherein the light source device 100 is used to generate a specified laser LD. For the specific implementation method of the light source device 100, please refer to the relevant introduction in the above embodiment and will not be repeated here.

[0108] The optical fiber 210 has an input end 2120 and an output end 2140. The input end 2120 is positioned at the focal point of the converging module 70 in the light source device 100. The designated laser light LD is coupled into the optical fiber 210 via the input end 2120 and then coupled out via the output end 2140. The output end 2140 can be positioned at the light output port of the laser processing device 200 to emit the designated laser light LD to the outside world. Specifically, the optical fiber 210 can be a quartz optical fiber, an all-plastic optical fiber, or the like, which is not specifically limited in this embodiment.

[0109] The embodiment of the present application provides a light source device 100 and a laser processing device 200 equipped with the light source device 100. The light source device 100 may include a laser module 10, a guide module 30, a correction module 50, and a convergence module 70. The laser module 10 may include M first laser chips 140 and a fast-axis compression component 170, wherein each first laser chip 140 is used to generate a first laser L1, and the M first light spots S1 corresponding to the M first lasers L1 are arranged in sequence along the slow axis direction X1 of the first light spot S1. M is a positive integer greater than 1. The fast-axis compression component 170 is arranged on the optical path where the M first lasers L1 are located, and is used to reduce the length of the M first light spots S1 in the fast axis direction Y1 of the first light spot S1. The fast axis direction Y1 of the first light spot S1 is perpendicular to the slow axis direction X1 of the first light spot S1. Specifically, the "fast axis direction of the first light spot S1" is the direction of the long axis of the ellipse corresponding to the first light spot S1.

[0110] The guiding module 30 is disposed on the optical path of the M first laser beams L1 emitted through the fast-axis compression assembly 170. It is used to guide the M first laser beams L1 to generate M second laser beams L2. The M second light spots S2 corresponding to the M second laser beams L2 are sequentially spaced along the fast-axis direction Y2 of the second light spot S2, where M is a positive integer greater than 1. The correction module 50 is disposed on the optical path of the M second laser beams L2. It is used to correct the M second laser beams L2 to increase the length of the second light spot S2 along the slow-axis direction X2 of the second light spot S2. Based on the principle of constant optical etendue, it can be seen that when the spot length of the second light spot S2 along the slow-axis direction X2 increases after correction by the correction module 50, the divergence angle along the slow-axis direction X2 will decrease.

[0111] The converging module 70 is disposed on the optical path of the M channels of second laser light L2 corrected by the correction module 50. It is used to converge the M channels of corrected second laser light L2 to produce the designated laser light LD. Due to the beam expansion effect of the correction module 50 and the converging effect of the converging module 70, the convergent light spot formed by the designated laser light LD at the focal point of the converging module 70 has a larger divergence angle in the slow axis direction X2 of the second light spot S2 and a smaller spot length, thereby reducing the overall spot size of the convergent light spot. This can increase the optical power density of the designated laser light LD at the focal point, thereby improving the processing efficiency of laser processing equipment equipped with the light source device 100.

[0112] It should be noted that the guide module 30 changes the arrangement of the light spots. In other words, the shapes and areas of the first light spots S1 and the second light spots S2 are approximately the same. Therefore, when the fast-axis compression assembly 170 reduces the length of the M first light spots S1 along the fast-axis direction Y1 of the first light spot S1, the length of the second light spot S2 along the fast-axis direction Y2 of the second light spot S2 is also reduced, thereby reducing the total length of the M second light spots S2 along the fast-axis direction Y2 of the second light spot S2. Therefore, by providing the fast-axis compression assembly 170, the laser module 10 in this embodiment can reduce the hardware size of the subsequent correction module 50 and the convergence module 70, reduce the hardware cost of the light source device 100, and facilitate the miniaturization of the light source device 100.

[0113] In the specification of this application, certain words are used to refer to specific components in the specification and claims. Those skilled in the art should understand that hardware manufacturers may use different terms to refer to the same component. The specification and claims do not use the difference in name as a way to distinguish components, but use the difference in function of the components as the criterion for distinction. For example, "including" mentioned throughout the specification and claims is an open term and should be interpreted as "including but not limited to"; "substantially" means that those skilled in the art can solve the technical problem within a certain error range and basically achieve the technical effect.

[0114] In the description of this application, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "inside", etc. indicating directions or positional relationships are based on the directions or positional relationships shown in the accompanying drawings. They are only used to simplify the description for the convenience of describing this application, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they should not be understood as limitations on this application.

[0115] In this application, unless otherwise expressly specified or limited, terms such as "mounted," "connected," "connect," and "fixed" should be interpreted broadly. For example, these terms may refer to fixed, removable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediary; internal communication between two components; or mere surface contact. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0116] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and features of different embodiments or examples without contradiction.

[0117] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of such features. Throughout the description of this application, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0118] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A light source device, characterized in that: include: A laser module comprising M first laser chips and a fast-axis compression assembly; wherein each first laser chip is configured to generate a first laser beam, and M first light spots corresponding to the M first laser beams are sequentially spaced apart along the slow axis direction of the first light spots, where M is a positive integer greater than 1; the fast-axis compression assembly is disposed on the optical path of the M first laser beams, and is configured to reduce the lengths of the M first light spots along the fast axis direction of the first light spots; the fast axis direction of the first light spots is perpendicular to the slow axis direction of the first light spots; a guiding module, disposed on an optical path of the M paths of the first laser beams emitted through the fast axis compression assembly, and configured to guide the M paths of the first laser beams to generate M paths of second laser beams; M second light spots corresponding to the M paths of the second laser beams are sequentially spaced along a fast axis direction of the second light spots, where M is a positive integer greater than 1; a correction module, disposed on an optical path of the M paths of the second laser light, and configured to correct the M paths of the second laser light so as to extend the length of the second light spot in the slow axis direction of the second light spot; and The converging module is provided on the optical path of the M paths of the second laser beams corrected by the correction module, and is used for converging the corrected M paths of the second laser beams to generate designated laser beams.

2. The light source device according to claim 1, wherein The laser module further includes a substrate and M collimating lenses; the M first laser chips are sequentially spaced apart on the substrate along the slow axis direction of the first light spot; The M collimating lenses are located between the M first laser chips and the fast axis compression assembly, and the M collimating lenses are arranged one-to-one in the optical paths of the M first lasers, for collimating the first lasers; The fast axis compression assembly is arranged on the optical paths of the M paths of the first laser light emitted through the M collimating lenses.

3. The light source device according to claim 1, wherein The fast axis compression assembly includes a first meniscus cylindrical lens, which is arranged on the optical path of the M paths where the first lasers are located; The first meniscus cylindrical lens has a first concave surface and a first convex surface opposite to each other, and M first laser beams are incident through the first convex surface and emitted through the first concave surface, so as to reduce the lengths of the M first light spots in the fast axis direction of the first light spots.

4. The light source device according to claim 1, wherein The fast-axis compression assembly includes a positive cylindrical mirror and a negative cylindrical mirror, which are sequentially arranged on the optical path of M paths of the first lasers; wherein the M paths of the first lasers are incident on the positive cylindrical mirror via the convex cylindrical surface of the positive cylindrical mirror, and after propagating to the negative cylindrical mirror, are emitted via the concave cylindrical surface of the negative cylindrical mirror, so as to reduce the lengths of the M first light spots in the fast-axis direction of the first light spots.

5. The light source device according to claim 1, wherein The guiding module includes a guiding unit and a reflecting unit. The guiding unit is disposed on the optical path of M paths of the first laser beams emitted through the fast-axis compression assembly and is configured to translate the M paths of the first laser beams along the fast axis direction of the first light spot to generate M paths of third laser beams. Projections of the M third laser beams along the slow axis direction of the first light spot do not overlap with each other. The reflection unit is disposed on the optical paths of the M paths of the third laser beams, and is configured to reflect the M paths of the third laser beams to generate the M paths of the second laser beams.

6. The light source device according to claim 5, characterized in that The reflecting unit includes M reflecting elements, which are arranged one by one on the optical paths of the M third laser beams, and are used to respectively reflect the corresponding third laser beams; The distances between the M reflective elements and a designated plane are equal, and the designated plane is parallel to the fast axis direction of the first light spot and parallel to the slow axis direction of the first light spot.

7. The light source device according to claim 5, wherein: The guiding unit includes M-1 flat light-transmitting members, and the M-1 flat light-transmitting members are arranged one-to-one on the optical path of the M-1 paths of the first laser beam emitted through the fast axis compression assembly; The angle between the light incident surface of the flat light-transmitting member and the designated plane is a designated angle, at least some of the designated angles are different, and the designated angles are not 0; the designated plane is parallel to the fast axis direction of the first light spot and parallel to the slow axis direction of the first light spot.

8. The light source device according to claim 5, wherein The guiding unit includes M-1 rhombic prisms, and the M-1 rhombic prisms are arranged one-to-one on the optical path where the M-1 first lasers are located; The rhombus prism includes a first reflecting surface, an incident surface, and a second reflecting surface adjacent to each other, wherein the incident surface is perpendicular to the incident direction of the first laser; the distance between the first reflecting surface and the second reflecting surface in the fast axis direction of the first light spot is a specified distance, and at least some of the specified distances are different.

9. The light source device according to claim 5, wherein: The laser module is further configured to generate N fourth laser beams; the N fourth light spots corresponding to the N fourth laser beams and the M first light spots are sequentially spaced apart along the slow axis direction of the first light spots; wherein the M first laser beams include a first sub-laser, the N fourth laser beams include a second sub-laser, and N is a positive integer greater than or equal to 1; The guiding unit includes a guiding member, which is arranged on the optical path of the first sub-laser and the second sub-laser, and is used to translate the first sub-laser along the fast axis direction of the first light spot to generate a third sub-laser, and translate the second sub-laser along the fast axis direction of the first light spot to generate a fourth sub-laser; the projections of the two sub-light spots corresponding to the third sub-laser and the fourth sub-laser along the slow axis direction of the first light spot overlap; The reflecting unit includes a reflecting member, which is arranged on the optical path of the third sub-laser and is used to reflect the third sub-laser toward one side of the fourth sub-laser; The guiding module further includes a light combining component, which is arranged on the optical path of the fourth sub-laser and the third sub-laser reflected by the reflector, and is used to combine the third sub-laser and the fourth sub-laser to generate one path of the second laser.

10. The light source device according to claim 9, wherein The polarization states of the first sub-laser and the second sub-laser are both first linear polarization states, and the light combining component includes a half-wave plate and a polarization light combining element; The half-wave plate is arranged on the optical path where the third sub-laser is located, and the half-wave plate is used to convert the polarization state of the third sub-laser into a second linear polarization state, and the second linear polarization state is orthogonal to the first linear polarization state; the polarization light combiner is arranged on the optical path where the fourth sub-laser and the third sub-laser reflected by the reflector are located, and is used to reflect the light of the first linear polarization state and transmit the light of the second linear polarization state; or The half-wave plate is arranged on the optical path where the fourth sub-laser is located, and the half-wave plate is used to convert the polarization state of the fourth sub-laser into a second linear polarization state, and the second linear polarization state is orthogonal to the first linear polarization state; the polarization combiner is arranged on the optical path where the fourth sub-laser and the third sub-laser reflected by the reflector are located, and is used to reflect the light of the second linear polarization state and transmit the light of the first linear polarization state.

11. The light source device according to claim 9, wherein M is equal to N, M first lasers and N fourth lasers are divided into M first laser groups, each first laser group includes one first sub-laser and one second sub-laser; the number of the guides is M-1; The M-1 guide members are arranged one-to-one in the optical path where the M-1 first laser groups are located, and are used to generate M-1 second laser groups, each second laser group includes one third sub-laser and one fourth sub-laser; wherein, the projections of the M-1 sub-light spots corresponding to the M-1 third sub-lasers along the slow axis direction of the first light spot do not overlap, and the projections of the M-1 sub-light spots corresponding to the M-1 fourth sub-lasers along the slow axis direction of the first light spot do not overlap.

12. The light source device according to any one of claims 1 to 11, characterized in that: The correction module includes a negative cylindrical lens and a positive cylindrical lens, which are sequentially arranged on the optical paths of the M-path second lasers, the negative cylindrical lens is used to expand the length of the second light spot in the slow axis direction of the second light spot; the positive cylindrical lens is used to collimate the second laser in the slow axis direction of the second light spot; or The correction module includes a second meniscus cylindrical lens having a second concave surface and a second convex surface opposite to each other. M paths of the second laser light are incident through the second concave surface and emitted through the second convex surface.

13. The light source device according to any one of claims 1 to 11, characterized in that: After correction by the correction module, the length of the second light spot in the slow axis direction of the second light spot is the first length, and the total length of the M second light spots in the fast axis direction of the second light spot is the second length; A ratio of the first length to the second length is greater than or equal to 0.95 and less than or equal to 1.

14. The light source device according to any one of claims 1 to 11, characterized in that: The laser module includes a substrate, 2*M second laser chips and a polarization light combining component; each second laser chip is used to generate a fifth laser; 2*M second laser chips are divided into two rows, and the two rows of second laser chips are spaced apart on the substrate along the fast axis direction of the first light spot; the number of second laser chips in each row is M, and the M second laser chips are sequentially spaced apart on the substrate along the slow axis direction of the first light spot; The 2*M second laser chips are divided into M columns, and the polarization combining component is arranged on the optical path of the 2*M fifth lasers, and is used to perform polarization combining on the two fifth lasers generated by the second laser chips in each column to generate M first lasers.

15. A laser processing device, characterized in that: include: The light source device according to any one of claims 1 to 14, wherein the light source device is used to generate a specified laser; as well as The optical fiber has a coupling end and a coupling end. The coupling end is arranged at the focus of the converging module. The designated laser is coupled into the optical fiber through the coupling end and then coupled out through the coupling end.

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