Magnet moving structure and magnetron sputtering device

Abstract

The utility model discloses a magnet moving structure and a magnetron sputtering device, and belongs to the technical field of magnetron sputtering. The magnet moving structure comprises a first moving assembly and a second moving assembly. The first moving assembly comprises a first base, a first driving part, a first transmission part and an output plate, and the first driving part is used for driving the first transmission part to move so that the first transmission part can drive the output plate to move at a constant speed along the X axis; the second moving assembly comprises a second base, a second driving part, a second transmission part and a supporting plate, the supporting plate is used for bearing the magnet, the second base is detachably connected to the output plate, and the second driving part is used for driving the second transmission part to move so that the second transmission part can drive the supporting plate to move at the constant speed along the Y axis. According to the magnet moving structure, the utilization rate and the service life of the magnetron sputtering target material can be ensured to be relatively high, and uniform etching of different areas of the magnetron sputtering target material is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of magnetron sputtering, in particular to a magnet moving structure and a magnetron sputtering device. Background Art

[0002] Magnetron sputtering, a key process in thin-film deposition, is widely used in semiconductor manufacturing, optoelectronic device production, and solar cell manufacturing. However, the current magnetron sputtering process is prone to uneven magnetic field distribution on the target surface, leading to overconsumption in some areas of the target and underutilization in others. This results in low target utilization and uneven etching across different target regions.

[0003] In view of the above problems, a magnet moving structure and a magnetron sputtering device are urgently needed to solve the above problems. Utility Model Content

[0004] The purpose of the utility model is to propose a magnet moving structure and a magnetron sputtering device to ensure uniform distribution of the magnetic field on the surface of the magnetron sputtering target, so that the utilization rate and service life of the magnetron sputtering target are high, and to ensure uniform etching of different areas of the magnetron sputtering target.

[0005] To achieve this purpose, the present invention adopts the following technical solutions:

[0006] A magnet moving structure is used to move the magnet along the X axis and the Y axis respectively. The magnet is located on the back of the magnetron sputtering target. The magnet moving structure includes:

[0007] A first moving assembly includes a first base, a first driving member, a first transmission member, and an output plate, wherein the first driving member and the first transmission member are respectively connected to the first base, the first driving member is drivingly connected to one end of the first transmission member, and the other end of the first transmission member is drivingly connected to the output plate, and the first driving member is used to drive the first transmission member to move, so that the first transmission member drives the output plate to move at a uniform speed along the X-axis;

[0008] The second moving assembly is located above the first moving assembly. The second moving assembly includes a second base, a second driving member, a second transmission member and a support plate. The support plate is used to carry the magnet. The second driving member and the second transmission member are respectively connected to the second base. The second base is detachably connected to the output plate. The second driving member is drivingly connected to one end of the second transmission member, and the other end of the second transmission member is drivingly connected to the support plate. The second driving member is used to drive the second transmission member to move, so that the second transmission member drives the support plate to move at a uniform speed along the Y-axis.

[0009] As an optional solution, a plurality of clamping grooves are arranged at intervals on the support plate, one clamping groove is used to clamp one magnet, and the arrangement shape of each clamping groove on the support plate matches the shape of the magnetron sputtering target.

[0010] As an optional solution, the first base includes:

[0011] Two first support seats, the two first support seats are arranged opposite to each other along the X-axis, the fixed end of the first driving member is arranged on any one of the first support seats, and the first transmission member is connected between the two first support seats;

[0012] Two first connecting plates are arranged opposite to each other and spaced apart along the Y axis, and opposite ends of the first connecting plate along the X axis are respectively connected to the two first supporting seats.

[0013] As an optional solution, the first transmission member includes:

[0014] a first threaded rod extending along the X-axis, wherein opposite ends of the first threaded rod along the X-axis are rotatably connected to the two first support seats, the first threaded rod being spaced above the first connecting plates and located between the two first connecting plates;

[0015] The first moving block is threadedly sleeved on the first threaded rod. The first moving block is connected to the output plate. The rotation of the first threaded rod can drive the first moving block to move along the X-axis, thereby driving the output plate to move at a uniform speed along the X-axis.

[0016] As an optional solution, the first moving component further includes:

[0017] a guide rod, parallel to and spaced apart from the first threaded rod, wherein opposite ends of the guide rod along the X-axis are respectively connected to the two first support seats;

[0018] Guide blocks: at least two guide blocks are provided on the guide rod, the guide blocks can slide along the X-axis along the guide rod, and the guide blocks are connected to the output plate.

[0019] As an optional solution, at least two guide rods are provided, and each guide rod is located on two opposite sides of the first threaded rod along the Y axis.

[0020] As an optional solution, the second base includes:

[0021] Two second support bases, the two second support bases are arranged opposite to each other along the Y axis, the fixed end of the second driving member is arranged on any one of the second support bases, and the second transmission member is connected between the two second support bases;

[0022] Two second connecting plates are arranged opposite to each other and spaced apart along the X axis, opposite ends of the second connecting plates along the Y axis are respectively connected to the two second supporting seats, and both second connecting plates can be detachably connected to the output plate.

[0023] As an optional solution, the second transmission member includes:

[0024] a second threaded rod extending along the Y-axis, wherein opposite ends of the second threaded rod along the Y-axis are rotatably connected to the two second support seats, the second threaded rod is spaced apart and located above the second connecting plates, and the second threaded rod is located between the two second connecting plates;

[0025] The second moving block is threadedly sleeved on the second threaded rod. The second moving block is connected to the support plate. The rotation of the second threaded rod can drive the second moving block to move along the Y axis, thereby driving the support plate to move at a uniform speed along the Y axis.

[0026] As an optional solution, the second moving component further includes:

[0027] a sliding rod, parallel to and spaced apart from the second threaded rod, wherein opposite ends of the sliding rod along the Y axis are respectively connected to the two second support seats;

[0028] Slide blocks, at least two of which are provided on the slide bar, the slide blocks can slide along the Y axis along the slide bar, and the slide blocks are connected to the support plate.

[0029] A magnetron sputtering device comprises a magnet, a magnetron sputtering target, a substrate and the magnet moving structure as described above, wherein the magnet moving structure is located on the back side of the magnetron sputtering target, and the substrate is located on the front side of the magnetron sputtering target.

[0030] The beneficial effects of the utility model are:

[0031] The magnet moving structure of the present invention is provided with a first moving assembly and a second moving assembly that cooperate with each other, so that the first driving member of the first moving assembly drives the first transmission member to move, so that the first transmission member drives the output plate to move along the X-axis, thereby driving the entire second moving assembly to move along the X-axis through the output plate, thereby driving the magnet carried on the support plate to move at a uniform speed along the X-axis; and the second driving member of the second moving assembly drives the second transmission member to move, so that the second transmission member drives the support plate to move along the Y-axis, thereby driving the magnet carried thereon to move at a uniform speed along the Y-axis through the support plate, thereby achieving uniform speed movement of the magnet along the X-axis and the Y-axis respectively; the magnets that move at a uniform speed and continuously can accurately control the moving position of the magnetic field on the surface of the magnetron sputtering target, ensure the uniform distribution of the magnetic field on the surface of the magnetron sputtering target, ensure that different areas of the magnetron sputtering target can be uniformly exposed to the magnetic field, thereby avoiding the problem that some areas of the magnetron sputtering target are consumed too quickly while other areas are underused, thereby ensuring that the utilization rate and service life of the magnetron sputtering target are high.

[0032] The magnetron sputtering device in the present invention, since it includes the above-mentioned magnet moving structure, can ensure the uniform distribution of the magnetic field on the surface of the magnetron sputtering target, so that the utilization rate of the magnetron sputtering target is high, thereby ensuring uniform etching of different areas of the magnetron sputtering target. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 This is a schematic structural diagram of a magnet moving structure (with magnets placed thereon) provided by the present invention;

[0034] Figure 2 This is a schematic diagram of the assembly structure between the first moving assembly and the second moving assembly (excluding the support plate) provided by the present invention;

[0035] Figure 3 This is a top view of the magnet moving structure (with magnets placed) provided by the present invention;

[0036] Figure 4 yes Figure 1 Schematic diagram of the local enlarged structure at A in the middle;

[0037] Figure 5 yes Figure 1 Schematic diagram of the local enlarged structure at point B in the middle.

[0038] Description of reference numerals:

[0039] 10-magnet;

[0040] 1-first moving assembly; 111-first support base; 112-first connecting plate; 12-first driving member; 13-first transmission member; 131-first threaded rod; 132-first moving block; 14-output plate; 15-guide rod; 16-guide block; 17-coupling;

[0041] 2-second moving assembly; 211-second supporting seat; 212-second connecting plate; 22-second driving member; 23-second transmission member; 231-second threaded rod; 232-second moving block; 24-support plate; 25-sliding rod; 26-sliding block. DETAILED DESCRIPTION

[0042] All features disclosed in this specification, or all steps in the disclosed methods or processes, except mutually exclusive features and / or steps, can be combined in any manner.

[0043] Any feature disclosed in this specification, unless otherwise stated, may be replaced by an equivalent or similar alternative feature. That is, unless otherwise stated, each feature is merely an example of a set of equivalent or similar features. Throughout this specification, like reference numerals refer to like elements.

[0044] In order to make the technical problems solved by the present invention, the technical solutions adopted and the technical effects achieved more clear, the technical solutions of the present invention are further explained below with reference to the accompanying drawings and through specific implementation methods.

[0045] At present, during the magnetron sputtering process, uneven magnetic field distribution on the surface of the magnetron sputtering target is prone to occur, resulting in excessive consumption of some areas of the magnetron sputtering target and insufficient use of other areas, resulting in low utilization of the magnetron sputtering target and uneven etching of different areas of the magnetron sputtering target.

[0046] To this end, this embodiment proposes a magnet moving structure and a magnetron sputtering device including the magnet moving structure. The magnetron sputtering device also includes a magnet, a magnetron sputtering target, and a substrate. The magnet moving structure is used to carry the magnet and move the magnet along the X-axis and Y-axis, respectively. The magnet placed on the magnet moving structure is located on the back of the magnetron sputtering target, and the substrate is spaced apart and located on the front of the magnetron sputtering target, so as to form a thin film on the substrate by magnetron sputtering the magnetron sputtering target. Here, the working principle of the magnetron sputtering device can refer to the working principle of the magnetron sputtering device in the prior art, and the substrate, magnet, and magnetron sputtering target are all common structures in existing magnetron sputtering devices.

[0047] Specifically, if Figures 1 to 3As shown, the magnet moving structure includes a first moving component 1 and a second moving component 2; wherein, the first moving component 1 includes a first base, a first driving member 12, a first transmission member 13 and an output plate 14, the first driving member 12 and the first transmission member 13 are respectively connected to the first base, the first driving member 12 is drivingly connected to one end of the first transmission member 13, and the other end of the first transmission member 13 is drivingly connected to the output plate 14, the first driving member 12 is used to drive the first transmission member 13 to move, so that the first transmission member 13 drives the output plate 14 to move at a uniform speed along the X-axis; the second moving component 2 is located at the first Above the moving assembly 1, the second moving assembly 2 includes a second base, a second driving member 22, a second transmission member 23 and a support plate 24. The support plate 24 is used to carry the magnet 10. The second driving member 22 and the second transmission member 23 are respectively connected to the second base, and the second base is detachably connected to the output plate 14. The second driving member 22 is drivingly connected to one end of the second transmission member 23, and the other end of the second transmission member 23 is drivingly connected to the support plate 24. The second driving member 22 is used to drive the second transmission member 23 to move, so that the second transmission member 23 drives the support plate 24 to move at a uniform speed along the Y-axis.

[0048] Compared with the prior art, the magnet moving structure of this embodiment is provided with a first moving assembly 1 and a second moving assembly 2 that cooperate with each other; by making the first driving member 12 of the first moving assembly 1 drive the first transmission member 13 to move, so that the first transmission member 13 drives the output plate 14 to move along the X-axis, thereby being able to drive the entire second moving assembly 2 to move along the X-axis through the output plate 14, so as to drive the magnet 10 carried by the support plate 24 to move at a uniform speed along the X-axis; and making the second driving member 22 of the second moving assembly 2 drive the second transmission member 23 to move, so that the second transmission member 23 drives the support plate 24 to move along the Y-axis. The axis moves, thereby being able to drive the magnet 10 carried thereon to move at a uniform speed along the Y axis through the support plate 24, so as to realize the uniform speed movement of the magnet 10 on the X axis and the Y axis respectively; the magnet 10 that moves at a uniform speed and continuously can accurately control the moving position of the magnetic field on the surface of the magnetron sputtering target, ensure the uniform distribution of the magnetic field on the surface of the magnetron sputtering target, ensure that different areas of the magnetron sputtering target can be uniformly exposed to the magnetic field, so as to avoid the problem that some areas of the magnetron sputtering target are consumed too quickly while other areas are underused, thereby ensuring that the utilization rate and service life of the magnetron sputtering target are high.

[0049] The magnetron sputtering device in this embodiment, since it includes the above-mentioned magnet moving structure, can ensure the uniform distribution of the magnetic field on the surface of the magnetron sputtering target, so that the utilization rate of the magnetron sputtering target is high, thereby ensuring uniform etching of different areas of the magnetron sputtering target.

[0050] Furthermore, by providing two relatively independent components, the first movable component 1 and the second movable component 2, and making the second base of the second movable component 2 detachably connected to the output plate 14 of the first movable component 1, the first movable component 1 and the second movable component 2 can form a modular structure independently, ensuring that the first movable component 1 and the second movable component 2 are relatively independent while ensuring the connection relationship, thereby making the disassembly, assembly, maintenance and upgrading of the first movable component 1 and the second movable component 2 relatively simple and convenient, thereby making the magnet moving structure have high flexibility and adaptability; and, when one of the first movable component 1 and the second movable component 2 is damaged, it is only necessary to replace the damaged component, which effectively reduces the maintenance cost of the magnet moving structure and makes the cost of the entire magnetron sputtering device lower.

[0051] Furthermore, a plurality of snap-in grooves are arranged at intervals on the support plate 24, and a snap-in groove is used to snap-in a magnet 10, so that the magnet 10 can be fixed on the support plate 24 in a limited manner, and the magnet 10 can be ensured not to shake or even fall off the support plate 24 during the movement of the support plate 24; and the magnet 10 can be directly removed from the snap-in groove under the action of external force, making the disassembly and assembly of the magnet 10 relatively simple and convenient.

[0052] Specifically, the arrangement shape of each clamping groove on the support plate 24 matches the shape of the magnetron sputtering target, so that the arrangement position of each magnet 10 on the support plate 24 can be flexibly adjusted according to the actual sputtering requirements, thereby better ensuring that different areas of the magnetron sputtering target can be evenly exposed to the magnetic field to improve the sputtering efficiency. In this embodiment, three magnets 10 are fixed to the upper limit of the support plate 24, and the three magnets 10 are arranged side by side along the Y axis. Here, there is no limitation on the number of magnets 10 carried by the support plate 24 and the specific arrangement method.

[0053] The structure of the first moving component 1 is described in detail below:

[0054] Furthermore, if Figures 2 to 4 As shown, the first base includes two first support bases 111 and two first connecting plates 112; the two first support bases 111 are arranged opposite each other along the X-axis, the fixed end of the first driving member 12 is disposed on either of the first support bases 111, and the first transmission member 13 is connected between the two first support bases 111; the two first connecting plates 112 are arranged opposite each other and spaced apart along the Y-axis, and the opposite ends of the first connecting plates 112 along the X-axis are respectively connected to the two first support bases 111. In this embodiment, the first driving member 12 can be specifically a servo motor.

[0055] By connecting the two first support bases 111 and the two first connecting plates 112 to form the first square-shaped base, the structure of the first base is simplified and lightweight, facilitating a lightweight design of the first base. Furthermore, the square-shaped first base is ensured to have good structural strength and stability, thereby ensuring stable support for the first transmission member 13, the first driving member 12, and the second moving assembly 2. In this embodiment, the first support bases 111 and the first connecting plates 112 are both made of profiles with good structural strength.

[0056] Furthermore, if Figures 2 to 4 As shown, the first transmission member 13 includes a first threaded rod 131 and a first moving block 132; wherein, the first threaded rod 131 extends along the X-axis, and the opposite ends of the first threaded rod 131 along the X-axis are respectively rotatably connected to the two first support seats 111, and the first threaded rod 131 is spaced above the first connecting plate 112, and the first threaded rod 131 is located between the two first connecting plates 112; the first moving block 132 is threadedly sleeved on the first threaded rod 131, and the first moving block 132 is connected to the output plate 14; the rotation of the first threaded rod 131 can drive the first moving block 132 to move linearly along the X-axis, thereby driving the output plate 14 to move at a uniform speed along the X-axis.

[0057] like Figure 4 As shown, the first threaded rod 131 is spaced above the first connecting plate 112 to avoid interference with the rotation of the first threaded rod 131 by the first connecting plate 112, thereby ensuring smooth rotation of the first threaded rod 131; and the first threaded rod 131 is located between the two first connecting plates 112, so that the two first connecting plates 112 can better support and balance the first threaded rod 131 located therebetween, thereby avoiding the problem of deflection of the first threaded rod 131 during rotation, thereby ensuring the smoothness and reliability of the rotation of the first threaded rod 131.

[0058] Furthermore, by providing a first threaded rod 131 and a first moving block 132 that cooperate with each other, the displacement distance and speed of the output plate 14 along the X-axis can be controlled by precisely controlling the rotation angle and rotation speed of the first threaded rod 131, thereby ensuring that the magnet 10 moves in a suitable position and at a relatively uniform speed along the X-axis, thereby better ensuring a uniform distribution of the magnetic field on the surface of the magnetron sputtering target. The first threaded rod 131 is connected to the output shaft of the first driver 12 via a coupling 17, ensuring good coaxiality between the output shaft of the first driver 12 and the first threaded rod 131.

[0059] Furthermore, if Figure 2 and Figure 4As shown, the first moving assembly 1 further includes a guide rod 15 and a guide block 16; wherein, the guide rod 15 is parallel to the first threaded rod 131 and is spaced apart to ensure that the guide rod 15 and the first threaded rod 131 do not affect each other, and the opposite ends of the guide rod 15 along the X-axis are respectively connected to the two first support seats 111; at least two guide blocks 16 are provided on the guide rod 15, and the guide blocks 16 can slide along the X-axis along the guide rod 15, and the guide blocks 16 are connected to the output plate 14.

[0060] By providing at least two guide blocks 16 on the guide rod 15, each guide block 16 can simultaneously slide along the guide rod 15 driven by the output plate 14, effectively guiding the movement of the output plate 14 along the X-axis, thereby ensuring the guidance and reliability of the movement of the output plate 14 along the X-axis. In this embodiment, two guide blocks 16 are provided on the guide rod 15. The number of guide blocks 16 provided is not specifically limited.

[0061] Furthermore, if Figure 2 and Figure 4 As shown, at least two guide rods 15 are provided, each located on opposite sides of the first threaded rod 131 along the Y-axis. That is, a guide rod 15 is provided on opposite sides of the first threaded rod 131. This allows each guide rod 15 to better guide and balance the first threaded rod 131 located between them, preventing the first threaded rod 131 from deflecting during rotation and further ensuring the smooth and reliable rotation of the first threaded rod 131. In this embodiment, two guide rods 15 are provided, each located on opposite sides of the first threaded rod 131 along the Y-axis. The specific number of guide rods 15 is not limited herein.

[0062] The structure of the second moving component 2 is described in detail below:

[0063] Specifically, if Figure 2 、 Figure 3 and Figure 5 As shown, the second base includes two second support bases 211 and two second connecting plates 212; the two second support bases 211 are arranged opposite each other along the Y-axis, the fixed end of the second driving member 22 is disposed on either of the second support bases 211, and the second transmission member 23 is connected between the two second support bases 211; the two second connecting plates 212 are arranged opposite each other and spaced apart along the X-axis, and the opposite ends of the second connecting plates 212 along the Y-axis are respectively connected to the two second support bases 211. Both second connecting plates 212 are detachably connected to the output plate 14 to achieve a detachable connection between the first moving assembly 1 and the second moving assembly 2. In this embodiment, the second driving member 22 can specifically be a servo motor.

[0064] By connecting the two second support bases 211 and the two second connecting plates 212 to form a square-shaped second base, the removable connection between the output plate 14 and the second base is facilitated, and the second base has a simpler structure and lighter weight, which facilitates a lightweight design of the second base. Furthermore, the square-shaped second base ensures good structural strength and stability, thereby ensuring stable support for the second transmission member 23, the second driving member 22, the support plate 24, and the magnet 10. In this embodiment, the second support bases 211 and the second connecting plates 212 are both made of profiles with good structural strength.

[0065] Furthermore, if Figure 2 、 Figure 3 and Figure 5 As shown, the second transmission member 23 includes a second threaded rod 231 and a second movable block 232; wherein the second threaded rod 231 extends along the Y-axis, and the second threaded rod 231 is rotatably connected to the two second support seats 211 at opposite ends along the Y-axis, and the second threaded rod 231 is spaced above the second connecting plate 212, and the second threaded rod 231 is located between the two second connecting plates 212; the second movable block 232 is threadedly sleeved on the second threaded rod 231, and the second movable block 232 is connected to the support plate 24; the rotation of the second threaded rod 231 can drive the second movable block 232 to move along the Y-axis, thereby driving the support plate 24 to move at a uniform speed along the Y-axis. The second threaded rod 231 is connected to the output shaft of the second driving member 22 by a coupling 17 to ensure good coaxiality between the output shaft of the second driving member 22 and the second threaded rod 231.

[0066] like Figure 5 As shown, by spacing the second threaded rod 231 above the second connecting plate 212, it is possible to avoid the second connecting plate 212 interfering with the rotation of the second threaded rod 231, thereby ensuring the smooth rotation of the second threaded rod 231; and, the second threaded rod 231 is located between the two second connecting plates 212, so that the two second connecting plates 212 can better support and balance the second threaded rod 231 located in the middle, thereby avoiding the problem of deflection of the second threaded rod 231 during rotation, thereby ensuring the stability and reliability of the rotation of the second threaded rod 231; and, by arranging the second threaded rod 231 and the second moving block 232 that cooperate with each other, it is possible to ensure that the moving position of the magnet 10 on the Y-axis is more appropriate and the moving speed is more uniform.

[0067] Furthermore, if Figure 2 and Figure 5As shown, the second moving assembly 2 also includes a slide bar 25 and a slider 26. The slide bar 25 is parallel to the second threaded rod 231 and spaced apart to ensure that the slide bar 25 and the second threaded rod 231 do not interfere with each other. The slide bar 25 is connected to the two second support seats 211 at opposite ends along the Y-axis. The slide bar 25 is provided with at least two sliders 26, which can slide along the slide bar 25 along the Y-axis. The sliders 26 are connected to the support plate 24 so that the multiple sliders 26 on the slide bar 25 ensure good guidance and reliability for the movement of the support plate 24 along the Y-axis. In this embodiment, two sliders 26 are provided on the slide bar 25. The number of sliders 26 provided is not specifically limited.

[0068] Specifically, if Figure 2 and Figure 5 As shown, at least two slide rods 25 are provided, each located on opposite sides of the second threaded rod 231 along the X-axis. That is, a slide rod 25 is provided on opposite sides of the second threaded rod 231. This allows each slide rod 25 to effectively guide and balance the second threaded rod 231 located between them, preventing deflection of the second threaded rod 231 during rotation and further ensuring smooth and reliable rotation of the second threaded rod 231. In this embodiment, two slide rods 25 are provided, each located on opposite sides of the second threaded rod 231 along the X-axis. The specific number of slide rods 25 is not limited herein.

[0069] The magnet moving structure in this embodiment, by setting a first threaded rod 131, a guide block 16, a second threaded rod 231 and a slider 26 that cooperate with each other, enables the magnet 10 on the support plate 24 to move at a uniform speed along the X-axis and the Y-axis respectively, and can accurately control the moving position of the magnetic field on the surface of the magnetron sputtering target, ensure the uniform distribution of the magnetic field on the surface of the magnetron sputtering target, and thus ensure that the utilization rate and service life of the magnetron sputtering target are high, and ensure uniform etching of different areas of the magnetron sputtering target.

[0070] The magnet moving structure in this embodiment is configured with a first moving component 1 and a second moving component 2 having a simple structure and good supporting strength, and the first moving component 1 and the second moving component 2 have good independence, which is conducive to separate maintenance and upgrading of the first moving component 1 and the second moving component 2, so that the maintenance cost is low; and since the first moving component 1 and the second moving component 2 have a simple structure and a light weight, it is conducive to the lightweight design of the entire magnet moving structure and reduces production costs.

[0071] The above contents are only preferred embodiments of the present invention. For ordinary technicians in this field, according to the concept of the present invention, there may be changes in the specific implementation methods and application scope. The content of this specification should not be understood as limiting the present invention.

Claims

1. A magnet moving structure, characterized in that: The device is used to move a magnet (10) along an X-axis and a Y-axis respectively, wherein the magnet (10) is located on the back side of a magnetron sputtering target, and the magnet moving structure comprises: A first moving assembly (1) comprises a first base, a first driving member (12), a first transmission member (13) and an output plate (14), wherein the first driving member (12) and the first transmission member (13) are respectively connected to the first base, the first driving member (12) is drivingly connected to one end of the first transmission member (13), and the other end of the first transmission member (13) is drivingly connected to the output plate (14), and the first driving member (12) is used to drive the first transmission member (13) to move, so that the first transmission member (13) drives the output plate (14) to move at a uniform speed along the X-axis; The second moving assembly (2) is located above the first moving assembly (1). The second moving assembly (2) includes a second base, a second driving member (22), a second transmission member (23) and a support plate (24). The support plate (24) is used to carry the magnet (10). The second driving member (22) and the second transmission member (23) are respectively connected to the second base. The second base is detachably connected to the output plate (14). The second driving member (22) is drivingly connected to one end of the second transmission member (23). The other end of the second transmission member (23) is drivingly connected to the support plate (24). The second driving member (22) is used to drive the second transmission member (23) to move, so that the second transmission member (23) drives the support plate (24) to move at a uniform speed along the Y axis.

2. The magnet moving structure according to claim 1, wherein: A plurality of clamping grooves are arranged at intervals on the support plate (24), one of the clamping grooves is used to clamp one of the magnets (10), and the arrangement shape of each of the clamping grooves on the support plate (24) matches the shape of the magnetron sputtering target.

3. The magnet moving structure according to claim 1, wherein: The first base comprises: Two first support seats (111), the two first support seats (111) are arranged opposite to each other along the X-axis, the fixed end of the first driving member (12) is arranged on any one of the first support seats (111), and the first transmission member (13) is connected between the two first support seats (111); Two first connecting plates (112), the two first connecting plates (112) are arranged opposite to each other and spaced apart along the Y axis, and the opposite ends of the first connecting plates (112) along the X axis are respectively connected to the two first supporting seats (111).

4. The magnet moving structure according to claim 3, wherein: The first transmission member (13) comprises: a first threaded rod (131) extending along the X-axis, wherein opposite ends of the first threaded rod (131) along the X-axis are rotatably connected to the two first support seats (111), the first threaded rod (131) is spaced above the first connecting plate (112), and the first threaded rod (131) is located between the two first connecting plates (112); A first moving block (132) is threadedly sleeved on the first threaded rod (131). The first moving block (132) is connected to the output plate (14). The first threaded rod (131) rotates to drive the first moving block (132) to move along the X-axis, thereby driving the output plate (14) to move at a uniform speed along the X-axis.

5. The magnet moving structure according to claim 4, wherein: The first moving component (1) further comprises: A guide rod (15) is arranged parallel to and spaced apart from the first threaded rod (131), and opposite ends of the guide rod (15) along the X-axis are respectively connected to the two first support seats (111); Guide blocks (16), at least two guide blocks (16) are provided on the guide rod (15), the guide blocks (16) can slide along the X axis along the guide rod (15), and the guide blocks (16) are connected to the output plate (14).

6. The magnet moving structure according to claim 5, wherein: At least two guide rods (15) are provided, and each guide rod (15) is located on two opposite sides of the first threaded rod (131) along the Y axis.

7. The magnet moving structure according to any one of claims 1 to 6, characterized in that: The second base comprises: Two second support seats (211), the two second support seats (211) are arranged opposite to each other along the Y axis, the fixed end of the second driving member (22) is arranged on any one of the second support seats (211), and the second transmission member (23) is connected between the two second support seats (211); Two second connecting plates (212), the two second connecting plates (212) are arranged opposite to each other and spaced apart along the X-axis, the opposite ends of the second connecting plates (212) along the Y-axis are respectively connected to the two second supporting seats (211), and the two second connecting plates (212) can be detachably connected to the output plate (14).

8. The magnet moving structure according to claim 7, wherein: The second transmission member (23) comprises: a second threaded rod (231) extending along the Y axis, wherein the second threaded rod (231) is rotatably connected to the two second support seats (211) at opposite ends along the Y axis, and the second threaded rod (231) is spaced apart and located above the second connecting plates (212), and the second threaded rod (231) is located between the two second connecting plates (212); The second moving block (232) is threadedly sleeved on the second threaded rod (231). The second moving block (232) is connected to the support plate (24). The rotation of the second threaded rod (231) can drive the second moving block (232) to move along the Y axis, thereby driving the support plate (24) to move at a uniform speed along the Y axis.

9. The magnet moving structure according to claim 8, wherein: The second moving component (2) further comprises: a sliding rod (25) parallel to and spaced apart from the second threaded rod (231), wherein opposite ends of the sliding rod (25) along the Y axis are respectively connected to the two second support seats (211); Slide blocks (26), at least two of the slide blocks (26) are provided on the slide bar (25), the slide blocks (26) can slide along the Y axis along the slide bar (25), and the slide blocks (26) are connected to the support plate (24).

10. Magnetron sputtering device, characterized in that, It comprises a magnet (10), a magnetron sputtering target, a substrate and a magnet moving structure as described in any one of claims 1 to 9, wherein the magnet moving structure is located on the back side of the magnetron sputtering target, and the substrate is spaced and located on the front side of the magnetron sputtering target.

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