Sealing structure, furnace body assembly and machining equipment

Abstract

The utility model provides a sealing structure, a furnace body assembly and processing equipment, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problems of high cost and high assembly difficulty caused by a large number of used sealing rings of the processing equipment. The sealing structure comprises a fixing assembly which is provided with a second opening, and the second opening is configured to allow the furnace tube to pass through; the sealing flange is connected with the fixing assembly, a first gap is formed between the sealing flange and the outer side wall of the furnace tube, a second gap is formed between the sealing flange and the end face of the end, provided with the furnace opening, of the furnace tube, and the first gap is communicated with the second gap; and the sealing piece comprises an anti-collision section and a sealing section which are connected with each other, the anti-collision section is located in the second gap, and the sealing section is located in the first gap. Through the structure, the furnace tube and the sealing flange can be prevented from being collided and damaged by only using one sealing piece, the sealing structure and the furnace tube are sealed, the cost and the weight of processing equipment are reduced, and the equipment risk point and the equipment assembly difficulty are reduced.

Description

Technical Field

[0001] The present application relates to the field of semiconductor or photovoltaic material processing, and in particular to a sealing structure, a furnace assembly, and processing equipment. Background Art

[0002] Semiconductor or photovoltaic materials are widely used in industries such as electronics and new energy. Semiconductor or photovoltaic materials usually need to undergo chemical treatment before they can be applied to products. Chemical vapor deposition (CVD) technology is one of the treatment methods. CVD technology is currently widely used in semiconductor or photovoltaic material processing. Common processing equipment includes plasma enhanced chemical vapor deposition (PECVD) equipment, low pressure chemical vapor deposition (LPCVD) equipment, atmospheric pressure chemical vapor deposition (APCVD), etc. In addition to CVD technology, there are also diffusion processes, such as phosphorus diffusion and boron diffusion. Gas diffusion can be used to process semiconductor or photovoltaic materials. There are currently many related equipment in the industry, and corresponding equipment can be selected for processing according to specific processing needs.

[0003] The processing of semiconductor or photovoltaic materials typically involves feeding sheet materials into the furnace tubes of processing equipment, where they react under certain temperature and pressure conditions. During the processing of semiconductor or photovoltaic materials, the furnace tubes remain sealed at all times, typically with flanges and sealing rings installed at the furnace opening and furnace tail. Traditional processing equipment typically uses a sealing structure consisting of two transition flanges, a water-cooled flange, and three sealing rings to seal the furnace opening and furnace tail. Two of the three sealing rings are used to seal the gaps between the two transition flanges and the furnace tubes, thereby sealing the sealing structure against the furnace tubes. The other sealing ring is used to prevent collision between the furnace tubes and the water-cooled flanges. Due to the large number of sealing rings used, the processing equipment is expensive, heavy, has many risk points, and is difficult to assemble. Utility Model Content

[0004] In order to solve the above technical problems, the present application is proposed. The embodiments of the present application provide a sealing structure, a furnace assembly and a processing device.

[0005] In the first aspect, an embodiment of the present application provides a sealing structure, which is applied to a furnace body assembly, the furnace body assembly including a furnace tube, the furnace tube having two end faces and an outer side wall connected between the two end faces, and at least one end face having a furnace opening; wherein the sealing structure includes: a fixing assembly, the fixing assembly having a second opening extending along the extension direction of the furnace tube, and the second opening is configured for the furnace tube to pass through; a sealing flange, which is sleeved on one end of the furnace tube having the furnace opening and is connected to the fixing assembly, wherein the sealing flange has a first opening extending along the extension direction of the furnace tube, the one end of the furnace tube having the furnace opening extends into the first opening, the first opening is connected with the furnace opening, a first gap is provided between the sealing flange and the outer side wall of the furnace tube, a second gap is provided between the sealing flange and the end face of the one end of the furnace tube having the furnace opening, and the first gap is connected with the second gap; a sealing member, the sealing member includes an anti-collision section and a sealing section connected to each other, the anti-collision section is located in the second gap, and the sealing section is located in the first gap.

[0006] In some embodiments, the fixing assembly includes: a fixing plate having a second opening; and at least one support member, wherein a first end of each support member is connected to the fixing plate, and a second end of each support member is connected to the sealing flange.

[0007] In some embodiments, the first end of the support member has a stud extending along the extension direction of the furnace tube, the fixing plate has a first threaded portion extending along the extension direction of the furnace tube, and the stud is threadedly connected to the first threaded portion.

[0008] In some embodiments, there are multiple supporting members, and the multiple supporting members are arranged around the second opening.

[0009] In some embodiments, the second end of the support member also has a second threaded portion extending along the extension direction of the furnace tube, and the sealing flange has a countersunk hole extending along the extension direction of the furnace tube and passing through the sealing flange; wherein the sealing structure also includes: a first threaded member, one end of the first threaded member is located in the countersunk hole, and the other end of the first threaded member is threadedly connected to the second threaded portion.

[0010] In some embodiments, the sealing structure further includes: a protective plate, one side of the protective plate is connected to the fixing plate, the other side of the protective plate is connected to the sealing flange, and the protective plate is configured to shield the end of the furnace tube having the furnace opening.

[0011] In a second aspect, an embodiment of the present application provides a furnace body assembly, comprising: a furnace chamber having a storage space, the furnace chamber being configured to provide heat; a furnace pipe passing through the storage space, the furnace pipe having a reaction chamber, two end faces and an outer side wall connected between the two end faces, the reaction chamber being configured to accommodate products, and each end face having a furnace opening; two sealing structures according to any one of the above-mentioned first aspects, the two sealing structures being a first sealing structure and a second sealing structure, wherein the furnace pipe passes through the second opening of the fixing assembly of the two sealing structures, the sealing flange of the first sealing structure is sleeved on one end of the furnace pipe and connected to the fixing assembly of the first sealing structure, one end of the furnace pipe extends into the first opening of the sealing flange of the first sealing structure, the first opening of the sealing flange of the first sealing structure is communicated with the furnace opening of the end face of one end of the furnace pipe, the sealing flange of the second sealing structure is sleeved on the other end of the furnace pipe and connected to the fixing assembly of the second sealing structure, the other end of the furnace pipe extends into the first opening of the sealing flange of the second sealing structure, the first opening of the sealing flange of the second sealing structure is communicated with the furnace opening of the end face of the other end of the furnace pipe; a furnace door being configured to cover the first opening of the first sealing structure; and a tail end cover being configured to cover the first opening of the second sealing structure.

[0012] In some embodiments, the furnace body assembly further includes: two support assemblies, the two support assemblies are respectively connected to the two sealing structures, and the two support assemblies are respectively in contact with the bottoms of both ends of the furnace tube, and the two support assemblies are configured to support and adjust the heights of both ends of the furnace tube.

[0013] In some embodiments, the support assembly includes: a support block, which contacts the bottom of the end of the furnace tube and is configured to support the end of the furnace tube; an adjustment block, which is arranged below the support block and connected to the sealing structure, and the adjustment block has at least one third threaded portion extending in a vertical direction; at least one second screw member, each second screw member is threadedly connected to a third threaded portion and abuts against the lower surface of the support block.

[0014] In some embodiments, the support block also has at least one fourth threaded portion extending in the vertical direction, and the adjustment block also has at least one through hole extending in the vertical direction; wherein, the support assembly also includes: at least one third screw connector, each third screw connector passes through a through hole and is threadedly connected to the fourth threaded portion; at least one first nut, located below the adjustment block, each first nut is threadedly connected to a third screw connector, and is configured to support the adjustment block.

[0015] In a third aspect, an embodiment of the present application provides a processing device, comprising: a frame; a furnace body assembly according to any one of the second aspects above, wherein two fixed components of the sealing structure of the furnace body assembly are connected to the frame and configured to process the product; a boat pusher device, arranged on the frame, configured to carry the product and transport the product to the furnace body assembly; a gas source cabinet, arranged on the frame, connected to the furnace body assembly, and configured to provide process gas to the furnace body assembly.

[0016] The sealing structure, furnace body assembly, and processing equipment proposed in the embodiments of the present application can use only one seal to prevent the furnace tube and the sealing flange from colliding and being damaged, and to seal the sealing structure and the furnace tube, thereby reducing the cost and weight of the processing equipment, and reducing the risk points of the equipment and the difficulty of equipment assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above and other purposes, features, and advantages of the present application will become more apparent through a more detailed description of the embodiments of the present application in conjunction with the accompanying drawings. The accompanying drawings are intended to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the drawings, the same reference numerals generally represent the same components or steps.

[0018] Figure 1 Shown is a schematic structural diagram of a traditional furnace assembly provided by an exemplary embodiment of the present application.

[0019] Figure 2 An exemplary embodiment of the present application is shown. Figure 1 A partial enlarged view of the furnace assembly in area A is shown.

[0020] Figure 3 Shown is a front view of a furnace assembly provided by an exemplary embodiment of the present application.

[0021] Figure 4 An exemplary embodiment of the present application is shown. Figure 3 The cross-sectional view of the furnace assembly shown in the MM direction.

[0022] Figure 5 An exemplary embodiment of the present application is shown. Figure 4 A partial enlarged view of the furnace assembly in area B is shown.

[0023] Figure 6 Shown is a schematic structural diagram of a furnace assembly provided by an exemplary embodiment of the present application.

[0024] Figure 7 An exemplary embodiment of the present application is shown. Figure 6 The cross-sectional view of the furnace assembly shown is taken along the NN direction.

[0025] Figure 8 Shown is a schematic structural diagram of a support assembly provided by an exemplary embodiment of the present application.

[0026] Figure 9 Shown is a schematic structural diagram of a processing device provided by an exemplary embodiment of the present application.

[0027] Reference numerals:

[0028] 100, traditional furnace body assembly; 101, furnace tube; 102, sealing structure; 1021, water-cooling flange; 1022, transition flange; 1023, sealing ring; 1024, fixing plate; 103, furnace door; 104, tail cover; 200, sealing structure; 201, fixing assembly; 2011, fixing plate; 20111, second opening; 2012, support member; 20121, stud; 202, sealing flange; 2021, countersunk hole; 2022, first opening; 2023, first gap; 2024, second gap; 203, sealing member; 2031, anti-collision section; 2 032. Sealing section; 204. First screw connection; 205. Protective plate; 300. Furnace tube; 301. First end face; 302. Second end face; 303. Outer wall; 400. Furnace body assembly; 401. Furnace chamber; 402. Furnace door; 403. Tail end cover; 404. Support assembly; 4041. Support block; 4042. Adjustment block; 4043. Second screw connection; 4044. Fourth screw connection; 4045. Third screw connection; 4046. First nut; 4047. Second nut; 500. Processing equipment; 600. Frame; 700. Boat pusher; 800. Gas source cabinet. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0030] Application Overview

[0031] Figure 1 FIG. 1 is a schematic structural diagram of a conventional furnace assembly provided by an exemplary embodiment of the present application. Figure 2 An exemplary embodiment of the present application is shown. Figure 1 The figure shows a partial enlarged view of the furnace body assembly in area A, wherein the conventional furnace body assembly is a partial structure of the conventional processing equipment mentioned above.

[0032] For example, Figure 1 and Figure 2 As shown, a conventional furnace assembly 100 includes a furnace tube 101, two sealing structures 102, a furnace door 103, and a rear end cover 104. The two sealing structures 102 are disposed at either end of a furnace tube 105, each having an opening. The furnace door 103 and rear end cover 104 are used to seal the openings of the two sealing structures 102, respectively. Each sealing structure 102 includes a water-cooling flange 1021, two transition flanges 1022, three sealing rings 1023, and a fixing plate 1024. The fixing plate 1024 has an opening through which the furnace tube 101 passes. The first transition flange 1022 is connected to the mounting plate 1024, the second transition flange 1022 is connected to the first transition flange 1022, and the water-cooling flange 1021 is connected to the second transition flange 1022. A first sealing ring 1023 is disposed between the first transition flange 1022 and the outer wall of the furnace tube 101 to seal the gap between the first transition flange 1022 and the outer wall of the furnace tube 101. A second sealing ring 1023 is disposed between the second transition flange 1022 and the outer wall of the furnace tube 101 to seal the gap between the second transition flange 1022 and the outer wall of the furnace tube 101. A third sealing ring 1023 is disposed between the water-cooling flange 1021 and the end face of the furnace tube 101 to prevent the furnace tube 101 from directly colliding with the water-cooling flange 1021 and causing damage.

[0033] Therefore, in order to simultaneously achieve anti-collision protection of the furnace tube 101 and sealing between the sealing structure 102 and the furnace tube 101, the traditional furnace body assembly 100 uses more sealing rings 1023, which makes the traditional furnace body assembly 100 high in cost, heavy in weight, with more equipment risk points and more difficulty in equipment assembly.

[0034] In view of this, the present application proposes a sealing structure, a furnace body assembly and a processing equipment, which can use only one seal to prevent the furnace tube and the sealing flange from colliding and being damaged, and to seal the sealing structure and the furnace tube, thereby reducing the cost and weight of the processing equipment, and reducing the risk points of the equipment and the difficulty of equipment assembly.

[0035] Exemplary devices

[0036] Figure 3 FIG. 1 is a front view of a furnace assembly provided by an exemplary embodiment of the present application. Figure 4 An exemplary embodiment of the present application is shown. Figure 3 The cross-sectional view of the furnace assembly shown in the MM direction, Figure 3 and Figure 4 The furnace 401 is hidden in the middle. Figure 5 An exemplary embodiment of the present application is shown. Figure 4 A partial enlarged view of the furnace assembly in area B is shown.

[0037] The embodiment of the present application provides a sealing structure 200, such as Figures 3 to 5 As shown, the furnace assembly 400 is applied to the furnace assembly 400, which includes a furnace tube 300 having two end surfaces and a Figure 4 The outer wall 303 between the first end face 301 and the second end face 302 of the furnace tube 300 is formed, and at least one end face has a furnace opening. The sealing structure 200 includes a fixing assembly 201, a sealing flange 202, and a sealing member 203. The fixing assembly 201 has a second opening 20111 extending along the extension direction of the furnace tube 300. The second opening 20111 is configured to allow the furnace tube 300 to pass through. The sealing flange 202 is sleeved onto the end of the furnace tube 300 with the furnace opening and connected to the fixing assembly 201. The sealing flange 202 has a first opening 2022 extending along the extension direction of the furnace tube 300. The end of the furnace tube 300 with the furnace opening extends into the first opening 2022, communicating with the furnace opening. A first gap 2023 is defined between the sealing flange 202 and the outer wall 303 of the furnace tube 300. A second gap 2024 is defined between the sealing flange 202 and the end surface of the furnace tube 300 with the furnace opening, communicating with the first gap 2023 and the second gap 2024. The sealing element 203 includes an interconnected anti-collision section 2031 and a sealing section 2032. The anti-collision section 2031 is located in the second gap 2024, and the sealing section 2032 is located in the first gap 2023.

[0038] The seal 203 is illustratively a bidirectional sealing ring, and the furnace tube 300 is illustratively a quartz tube. The anti-collision section 2031 of the seal 203 provides a buffering effect, preventing direct contact between the furnace tube 300 and the sealing flange 202, thereby reducing the risk of damage to the furnace tube 300. Either the first end surface 301 or the second end surface 302 has a furnace opening, or both the first end surface 301 and the second end surface 302 have a furnace opening.

[0039] In the above embodiment, only one seal 203 can be used to prevent the furnace tube 300 from colliding with the sealing flange 202 and to seal the sealing structure 200 and the furnace tube 300, thereby reducing the cost and weight of the furnace body assembly 400, and reducing the equipment risk points and the difficulty of equipment assembly.

[0040] In some embodiments, as Figure 5As shown, the fixing assembly 201 includes a fixing plate 2011 and at least one support member 2012. The fixing plate 2011 has a second opening 20111. The first end of each support member 2012 is connected to the fixing plate 2011, and the second end of each support member 2012 is connected to the sealing flange 202. The fixing plate 2011 can be fixed to the frame. This structure, compared to the conventional furnace assembly 100, uses the support members 2012 to support the sealing flange 202, eliminating the need for a transition flange 1022. This saves costs. Furthermore, the elimination of the transition flange 1022 reduces the number of materials required, thereby reducing material risks.

[0041] In some embodiments, as Figure 5 As shown, the first end of the support member 2012 has a stud 20121 extending in the direction of extension of the furnace tube 300. The fixing plate 2011 has a first threaded portion extending in the direction of extension of the furnace tube 300, and the stud is threadedly connected to the first threaded portion. For example, the fixing plate 2011 has a first threaded hole extending in the direction of extension of the furnace tube 300, and the first threaded portion serves as the thread of the first threaded hole. By rotating the stud 20121 and adjusting the threaded connection position between the stud 20121 and the first threaded portion, the position of the sealing flange 202 in the direction of extension of the furnace tube 300 can be adjusted, thereby allowing the sealing structure 200 to adapt to furnace tubes 300 of different sizes. Since furnace tubes 300 may have dimensional errors during processing, this structure allows the sealing structure 200 to adapt to furnace tubes 300 with such errors, thereby improving the compatibility of the sealing structure 200.

[0042] In some embodiments, there are multiple support members 2012, and the multiple support members 2012 are arranged around the second opening 20111. Furthermore, the multiple support members 2012 can be evenly arranged around the second opening 20111. With this structure, the multiple support members 2012 can firmly fix the sealing flange 202.

[0043] In some embodiments, as Figure 5 As shown, the second end of the support member 2012 further includes a second threaded portion extending in the direction in which the furnace tube 300 extends. For example, the second end of the support member 2012 further includes a second threaded hole extending in the direction in which the furnace tube 300 extends, and the second threaded portion is a thread within the second threaded hole. The sealing flange 202 includes a countersunk hole 2021 extending in the direction in which the furnace tube 300 extends and penetrating the sealing flange 202. The sealing structure 200 also includes a first threaded connector 204, one end of which is positioned within the countersunk hole 2021 and the other end of which is threadedly engaged with the second threaded portion. The first threaded connector 204 may be a screw or a bolt. This structure provides a secure connection between the sealing flange 202 and the support member 2012.

[0044] In some embodiments, as Figure 5 As shown, the sealing structure 200 further includes a protective plate 205. One side of the protective plate 205 is connected to the fixing plate 2011, and the other side of the protective plate 205 is connected to the sealing flange 202. The protective plate 205 is configured to shield the end of the furnace tube 300 with the furnace opening. Typically, the middle section between the two ends of the furnace tube 300 is disposed within the furnace chamber 401, while the two ends of the furnace tube 300 are exposed to the outside. By providing the protective plate 205, the end of the furnace tube 300 with the furnace opening can be protected.

[0045] Figure 6 FIG. 1 is a schematic structural diagram of a furnace assembly provided by an exemplary embodiment of the present application. Figure 7 An exemplary embodiment of the present application is shown. Figure 6 The cross-sectional view of the furnace assembly shown in the NN direction, Figure 6 and Figure 7 The sealing structure 200, the furnace door 402 and the tail end cover 403 are omitted.

[0046] Based on the same concept, Figures 3 to 7 As shown, the present embodiment further provides a furnace assembly 400, comprising a furnace chamber 401, a furnace tube 300, two sealing structures 200 described in the above embodiments, a furnace door 402, and a tail end cover 403. The furnace chamber 401 has a storage space configured to provide heat. The furnace tube 300 passes through the storage space and has a reaction chamber, two end faces, and an outer sidewall 303 connecting the two end faces. The reaction chamber is configured to accommodate the product, and each end face has a furnace opening. The two sealing structures 200 are respectively a first sealing structure and a second sealing structure. The furnace tube 300 passes through the second opening 20111 of the fixing assembly 201 of the two sealing structures 200. The sealing flange 202 of the first sealing structure is sleeved on one end of the furnace tube 300 and connected to the fixing assembly 201 of the first sealing structure. One end of the furnace tube 300 extends into the first opening 2022 of the sealing flange 202 of the first sealing structure. The first opening 2022 of the sealing flange 202 of the first sealing structure communicates with the furnace opening at the end face of one end of the furnace tube 300. The sealing flange 202 of the second sealing structure is sleeved on the other end of the furnace tube 300 and connected to the fixing assembly 201 of the second sealing structure. The other end of the furnace tube 300 extends into the first opening 2022 of the sealing flange 202 of the second sealing structure. The first opening 2022 of the sealing flange 202 of the second sealing structure communicates with the furnace opening at the end face of the other end of the furnace tube 300. The furnace door 402 is configured to cover the first opening 2022 of the first sealing structure. The tail cover 403 is configured to cover the first opening 2022 of the second sealing structure 200 .

[0047] The sealing member 203 of the sealing structure 200 can be respectively arranged at both ends of the furnace tube 300 in the manner described in the aforementioned embodiment. Specifically, for the first sealing structure, a first gap 2023 is defined between the sealing flange 202 and the outer side wall 303 of the furnace tube 300, and a second gap 2024 is defined between the sealing flange 202 and the first end face 301 of the furnace tube 300. The first gap 2023 is connected to the second gap 2024. The sealing member 203 includes an anti-collision section 2031 and a sealing section 2032 connected to each other. The anti-collision section 2031 is located in the second gap 2024, and the sealing section 2032 is located in the first gap 2023. ; and, for the second sealing structure, there is a first gap 2023 between the sealing flange 202 and the outer side wall 303 of the furnace tube 300, and a second gap 2024 is provided between the sealing flange 202 and the second end face 302 of the furnace tube 300. The first gap 2023 is connected to the second gap 2024, and the sealing member 203 includes an anti-collision section 2031 and a sealing section 2032 that are interconnected. The anti-collision section 2031 is located in the second gap 2024, and the sealing section 2032 is located in the first gap 2023.

[0048] Figure 8 Shown is a schematic structural diagram of a support assembly provided by an exemplary embodiment of the present application.

[0049] In some embodiments, as Figure 3 、 Figure 6 、 Figure 7 and Figure 8 As shown, the furnace body assembly 400 further includes two support assemblies 404, which are respectively connected to the two sealing structures 200, and the two support assemblies 404 are respectively in contact with the bottoms of both ends of the furnace tube 300, and the two support assemblies 404 are configured to support and adjust the heights of both ends of the furnace tube 300.

[0050] During assembly of the furnace body assembly 400, the furnace tube 300 is aligned with the bottom inner wall of the storage space of the furnace chamber 401. In practice, to ensure uniform heating of the furnace tube 300, it is typically necessary to align the fixing plate 2011, the furnace tube 300, and the furnace chamber 401. Conventional furnace body assemblies 100 typically employ two methods for aligning the furnace tube 101 with the furnace chamber. First, multiple layers of insulation are placed under the bottom of the furnace tube 101 to elevate the furnace tube 101 until it is concentric with the furnace chamber. However, this method is difficult to achieve precise concentricity between the furnace tube 101 and the furnace chamber 401, and is relatively complex and difficult to operate. Second, after the sealing structure 102 is installed on the furnace tube 101, the furnace tube 101 and the fixed plate 1024 are concentric. The fixed plate 1024 is used to support the furnace tube 101. The height of the fixed plate 1024 can be adjusted to make the fixed plate 1024 concentric with the furnace chamber, thereby making the fixed plate 1024, the furnace tube 101 and the furnace chamber concentric. However, the furnace tube 101 is usually made of quartz, and the fixed plate 1024 is usually made of stainless steel. In this way, the fixed plate 1024 drives the furnace tube 101 to rise, which is easy to damage the furnace tube 101. In addition, since the furnace tube 101 is equipped with structures such as the water-cooling flange 1021 and the transition flange 1022, it is difficult to observe whether the fixed plate 1024 is concentric with the furnace chamber. Therefore, this method makes it difficult to make the furnace tube 101 and the furnace chamber accurately concentric.

[0051] In the embodiment of the present application, the size of the second opening 20111 is larger than the outer diameter of the furnace tube 300. The fixing plate 2011 can be adjusted to be concentric with the furnace chamber 401 first, and then the furnace tube 300 can be passed through the accommodating space and the fixing plate 2011. The furnace tube 300 can then be adjusted to be concentric with the furnace chamber 401 by adjusting the support assembly 404. Finally, the support member 2012, the sealing flange 202, the sealing member 203, and other structures can be installed on the fixing plate 2011. Since the support member 2012, the sealing flange 202, the sealing member 203, and other structures are not installed when the fixing plate 2011 and the furnace chamber 401 are adjusted to be concentric, it is possible to intuitively see whether the fixing plate 2011 is concentric with the furnace chamber 401. This allows the fixing plate 2011 and the furnace chamber 401 to be precisely concentric. The furnace tube 101 and the furnace chamber 401 can then be adjusted to be concentric by the support assembly 404. This allows the fixing plate 2011, the furnace tube 300, and the furnace chamber 401 to be precisely concentric.

[0052] In some embodiments, as Figure 8 As shown, the support assembly 404 includes a support block 4041, an adjustment block 4042, and at least one second screw member 4043. The support block 4041 contacts the bottom of the end of the furnace tube 300 and is configured to support the end of the furnace tube 300. The adjustment block 4042 is disposed below the support block 4041 and connected to the sealing structure 200. The adjustment block 4042 has at least one third threaded portion extending in a vertical direction. Each second screw member 4043 is threadedly connected to one of the third threaded portions and abuts against the lower surface of the support block 4041.

[0053] Specifically, the adjusting block 4042 has at least one third threaded hole extending in the vertical direction, and the third threaded portion is a thread in the third threaded hole. The adjusting block 4042 can be connected to the fixed plate 2011. The support assembly 404 can also include a fourth screw connector 4044. The adjusting block 4042 can be connected to the sealing structure 200 via the fourth screw connector 4044, which can be a screw or a bolt. The second screw connector 4043 can be a screw or a bolt. By adjusting the screw connection position of the second screw connector 4043 and the third threaded portion, that is, adjusting the height of the second screw connector 4043, the height of the support block 4041 can be adjusted, thereby adjusting the height of the furnace tube 300. Through this structure, the height of the furnace tube 300 can be accurately adjusted, so that the furnace tube 300, the fixing plate 2011 and the furnace 401 are precisely concentric, ensuring that the support 2012, the sealing flange 202, the sealing member 203 and other structures can be smoothly assembled with the furnace tube 300. This method simplifies the assembly steps, reduces the assembly difficulty, saves assembly adjustment time, and saves labor costs.

[0054] In some embodiments, the support assembly 404 further includes a second nut 4047, which is threadedly connected to the second screw member 4043. By providing the second nut 4047, the adjustment block 4042 can be firmly supported, thereby improving structural stability.

[0055] In some embodiments, the support block 4041 further includes at least one fourth threaded portion extending vertically, and the adjustment block 4042 further includes at least one through-hole extending vertically. The support assembly 404 also includes at least one third screw connector 4045 and at least one first nut 4046. Each third screw connector 4045 passes through a through-hole and is threadedly engaged with the fourth threaded portion. At least one first nut 4046 is located below the adjustment block 4042, and each first nut 4046 is threadedly engaged with a third screw connector 4045, configured to support the adjustment block 4042.

[0056] Specifically, the support block 4041 may have at least one fourth threaded hole extending in a vertical direction, and the fourth threaded portion may be a thread within the fourth threaded hole. The third threaded member 4045 may be a screw or a bolt. This structure can securely connect the adjustment block 4042 and the support block 4041.

[0057] Figure 9 Shown is a schematic structural diagram of a processing device provided by an exemplary embodiment of the present application.

[0058] Based on the same concept, Figure 9As shown, an embodiment of the present application further provides a processing device 500, which includes: a frame 600, a furnace body assembly 400 of any of the above embodiments, a boat pusher device 700 and a gas source cabinet 800. The fixing components 201 of the two sealing structures 200 of the furnace body assembly 400 are connected to the frame 600 and are configured to process the product. The boat pusher device 700 is provided on the frame 600, is configured to carry the product, and transports the product to the furnace body assembly 400. The gas source cabinet 800 is provided on the frame 600, is connected to the furnace body assembly 400, and is configured to provide process gas to the furnace body assembly 400.

[0059] The basic principles of the present application have been described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, and effects mentioned in this application are merely illustrative and not restrictive, and it should not be assumed that these advantages, strengths, and effects are required of each embodiment of this application. In addition, the specific details disclosed above are merely illustrative and facilitating understanding, and are not restrictive. The above details do not limit this application to necessarily being implemented using the above specific details.

[0060] The block diagrams of the devices, devices, equipment, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As will be appreciated by those skilled in the art, these devices, devices, equipment, and systems can be connected, arranged, or configured in any manner. Words such as "include," "comprise," "have," and the like are open-ended words, meaning "including but not limited to," and can be used interchangeably therewith. The words "or" and "and" used herein refer to the words "and / or" and can be used interchangeably therewith, unless the context clearly indicates otherwise. The word "such as" used herein refers to the phrase "such as but not limited to," and can be used interchangeably therewith.

[0061] It should also be noted that in the apparatus, device, and method of the present application, each component or each step can be decomposed and / or recombined, and such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0062] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0063] The above description has been provided for the purpose of illustration and description. Furthermore, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although a number of example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A sealing structure, characterized in that: Applicable to a furnace body assembly, the furnace body assembly includes a furnace tube, the furnace tube has two end surfaces and an outer side wall connected between the two end surfaces, at least one of the end surfaces has a furnace opening; Wherein, the sealing structure includes: a fixing assembly having a second opening extending along an extending direction of the furnace tube, wherein the second opening is configured to allow the furnace tube to pass through; a sealing flange, sleeved on the end of the furnace tube having the furnace opening and connected to the fixing assembly, wherein the sealing flange has a first opening extending along the extension direction of the furnace tube, the end of the furnace tube having the furnace opening extends into the first opening, the first opening is communicated with the furnace opening, a first gap is defined between the sealing flange and the outer side wall of the furnace tube, a second gap is defined between the sealing flange and the end surface of the end of the furnace tube having the furnace opening, and the first gap is communicated with the second gap; The sealing member includes an anti-collision section and a sealing section connected to each other, the anti-collision section is located in the second gap, and the sealing section is located in the first gap.

2. The sealing structure according to claim 1, wherein: The fixing assembly includes: a fixed plate having the second opening; At least one support member, a first end of each support member is connected to the fixing plate, and a second end of each support member is connected to the sealing flange.

3. The sealing structure according to claim 2, characterized in that: The first end of the support member has a stud extending along the extending direction of the furnace tube, the fixing plate has a first threaded portion extending along the extending direction of the furnace tube, and the stud is threadedly connected to the first threaded portion.

4. The sealing structure according to claim 2 or 3, characterized in that: There are multiple supporting members, and the multiple supporting members are arranged around the second opening.

5. The sealing structure according to claim 2 or 3, characterized in that: The second end of the support member further comprises a second threaded portion extending along the extension direction of the furnace tube, and the sealing flange comprises a countersunk hole extending along the extension direction of the furnace tube and penetrating the sealing flange; Wherein, the sealing structure further includes: A first screw connection member, one end of which is located in the countersunk hole, and the other end of which is screwed to the second threaded portion.

6. The sealing structure according to claim 2 or 3, characterized in that: Also includes: A protective plate, one side of which is connected to the fixing plate, and the other side of which is connected to the sealing flange, wherein the protective plate is configured to shield an end of the furnace tube having the furnace opening.

7. A furnace assembly, characterized in that: include: a furnace having a receiving space and configured to provide heat; a furnace tube passing through the accommodation space, the furnace tube having a reaction chamber, two end faces, and an outer sidewall connected between the two end faces, the reaction chamber being configured to accommodate a product, and each end face having a furnace opening; Two sealing structures according to any one of claims 1 to 6, the two sealing structures being a first sealing structure and a second sealing structure respectively, wherein the furnace pipe passes through the second openings of the fixing assemblies of the two sealing structures, the sealing flange of the first sealing structure is sleeved on one end of the furnace pipe and connected to the fixing assembly of the first sealing structure, one end of the furnace pipe extends into the first opening of the sealing flange of the first sealing structure, the first opening of the sealing flange of the first sealing structure is communicated with the furnace opening of the end face of one end of the furnace pipe, the sealing flange of the second sealing structure is sleeved on the other end of the furnace pipe and connected to the fixing assembly of the second sealing structure, the other end of the furnace pipe extends into the first opening of the sealing flange of the second sealing structure, the first opening of the sealing flange of the second sealing structure is communicated with the furnace opening of the end face of the other end of the furnace pipe; a furnace door configured to cover the first opening of the first sealing structure; The tail end cover is configured to cover the first opening of the second sealing structure.

8. The furnace assembly according to claim 7, wherein: Also includes: Two support assemblies are respectively connected to the two sealing structures and are in contact with the bottoms of both ends of the furnace tube. The two support assemblies are configured to support and adjust the heights of both ends of the furnace tube.

9. The furnace assembly according to claim 8, wherein: The support assembly comprises: a support block in contact with a bottom of the end portion of the furnace tube and configured to support the end portion of the furnace tube; an adjusting block, disposed below the supporting block and connected to the sealing structure, the adjusting block having at least one third threaded portion extending in a vertical direction; At least one second screw connection member, each of which is screwed to one of the third threaded portions and abuts against the lower surface of the support block.

10. The furnace assembly according to claim 9, characterized in that The support block further has at least one fourth threaded portion extending in the vertical direction, and the adjustment block further has at least one through hole extending in the vertical direction; Wherein, the support assembly further includes: at least one third screw connection member, each of the third screw connection members passing through one of the through holes and being screwed together with the fourth threaded portion; At least one first nut is located below the adjusting block, and each of the first nut is threadedly connected to one of the third threaded members and is configured to support the adjusting block.

11. A processing equipment, characterized in that, include: frame; The furnace assembly according to any one of claims 7 to 10, wherein the fixing assemblies of the two sealing structures of the furnace assembly are connected to the frame and are configured to process products; a boat pushing device, disposed on the frame, configured to carry the product and transport the product to the furnace assembly; The gas source cabinet is arranged on the frame, communicated with the furnace assembly, and configured to provide process gas to the furnace assembly.

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