Silicon carbide sheet electroplating tool with built-in pressing structure

Abstract

The silicon carbide sheet electroplating tool with the built-in pressing structure comprises a clamp plate, a through hole is formed in the center of the clamp plate, a plurality of base plates are arranged on the inner side wall of the through hole, the base plates are located at the same horizontal height and are lower than an orifice of the through hole, a plurality of limiting pieces are arranged at the edge of the orifice in a penetrating mode, and the limiting pieces are connected with the clamp plate. The limiting piece comprises a head part and a column body part, the lower end face of the head part is a plane, the center of the lower end face of the head part is connected with the upper end face of the column body part, the column body part is arranged in the clamp plate in a penetrating mode, the base plate is used for supporting a sheet to be machined, and the limiting piece is used for pressing the sheet.

Description

Technical Field

[0001] The utility model relates to a silicon carbide sheet electroplating tool with a built-in pressing structure. Background Art

[0002] From automotive manufacturing to aerospace, from electronic packaging to ceramics manufacturing, silicon carbide (SiC) has become an indispensable material due to its exceptional performance. However, the irregular, round flake shape of SiC presents significant challenges in its processing and application. Especially during the critical electroplating process, this irregular shape often leads to uneven distribution of the plating solution across the wafer surface, affecting the uniformity and quality of the coating. This not only reduces the product's aesthetics and service life but can also adversely affect its performance. Utility Model Content

[0003] The purpose of the utility model is to solve the above deficiencies in the prior art and to provide a silicon carbide sheet electroplating tool with a built-in pressing structure.

[0004] A silicon carbide wafer electroplating tool with a built-in pressing structure includes a fixture plate, a through hole is provided at the center of the fixture plate, and multiple pads are provided on the inner side walls of the through hole. The pads are located at the same horizontal height and are lower than the through hole opening. Multiple limit members are passed through the edges of the opening. The limit members include a head and a column part. The lower end face of the head is flat, and the center of the lower end face of the head is connected to the upper end face of the column. The column part is passed through the fixture plate, the pad is used to support the thin sheet to be processed, and the limit member is used to press the thin sheet.

[0005] Furthermore, the fixture plate and the backing plate are integrally formed.

[0006] Furthermore, the fixture plate is made of metal.

[0007] Furthermore, the surface of the fixture plate is coated with Teflon glue, and a plurality of through holes are provided on the surface of the fixture plate.

[0008] Furthermore, the limiting member is a bolt.

[0009] Beneficial Effects: Compared to existing technologies, this new clamp uses a backing plate to support the thin sheet being processed and bolts to limit the upper portion of the sheet, preventing it from shifting during processing. The design of the limiting elements (such as bolts) makes the clamp easy and quick to operate. By adjusting the position and tightening of the limiting elements, it can easily adapt to the processing needs of thin sheets of different sizes and shapes. Small screw holes in the rubberized area allow the Teflon glue to adhere more firmly on both sides to prevent it from falling off. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1This is a schematic diagram of the use of a silicon carbide sheet electroplating tool with a built-in pressing structure;

[0011] Figure 2 is a schematic diagram of the fixture plate;

[0012] In the figure, 1, fixture plate, 2, thin sheet, 3, limiter, 4, pad. DETAILED DESCRIPTION

[0013] In order to deepen the understanding of the present invention, the present invention will be further described in detail below with reference to embodiments and drawings. The embodiments are only used to explain the present invention and do not constitute a limitation on the scope of protection of the present invention.

[0014] like Figure 1 -4, fixture plate 1, sheet 2, limiter 3, pad 4;

[0015] A diversion fixture for irregular silicon carbide slices 2 includes a fixture plate 1, a through hole is provided at the center of the fixture plate 1, and a plurality of pads 4 are provided on the inner side wall of the through hole. The pads 4 are located at the same horizontal height and are lower than the through hole opening. A plurality of limit members 3 are passed through the edge of the opening. The limit members 3 include a head and a column part. The lower end face of the head is flat, and the center of the lower end face of the head is connected to the upper end face of the column. The column part is passed through the fixture plate 1. The pads 4 are used to support the thin slice 2 to be processed, and the limit members 3 are used to press the thin slice 2.

[0016] In this embodiment, the fixture plate 1 and the backing plate 4 are integrally formed.

[0017] In this embodiment, the fixture plate 1 is made of metal.

[0018] In this embodiment, the surface of the fixture plate 1 is coated with Teflon glue, and a plurality of through holes are provided on the surface of the fixture plate 1 .

[0019] In this embodiment, the limiting member 3 is a bolt.

[0020] Working principle: The middle through hole of the fixture plate is slightly larger than the size of the thin sheet. The thin sheet is placed on the pad, and then the bolt is screwed into the fixture plate so that the bottom surface of the bolt head is pressed on the top of the thin sheet to prevent the thin sheet from moving.

[0021] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A silicon carbide sheet electroplating tool with a built-in pressing structure, characterized in that: It includes a fixture plate, a through hole is provided at the center of the fixture plate, and a plurality of pads are provided on the inner side wall of the through hole. The pads are located at the same horizontal height and are lower than the through hole opening. A plurality of limit members are passed through the edge of the opening. The limit members include a head and a column part. The lower end face of the head is a plane, and the center of the lower end face of the head is connected to the upper end face of the column. The column part is passed through the fixture plate, the pad is used to support the thin sheet for processing, and the limit member is used to press the thin sheet.

2. The silicon carbide sheet electroplating tool with a built-in pressing structure according to claim 1, characterized in that: The fixture plate and the backing plate are integrally formed.

3. The silicon carbide sheet electroplating tool with a built-in pressing structure according to claim 2, characterized in that: The fixture plate is made of metal.

4. The silicon carbide sheet electroplating tool with a built-in pressing structure according to claim 3, characterized in that: The surface of the fixture plate is coated with Teflon glue, and a plurality of through holes are provided on the surface of the fixture plate.

5. The silicon carbide sheet electroplating tool with a built-in pressing structure according to claim 1, characterized in that: The limiting member is a bolt.

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