Balanced cylinder supporting structure of five-axis ultra-precise air floating motion platform

Abstract

The utility model belongs to the technical field of protection and application of ultra-precise air-floating motion platforms, and particularly discloses a balance cylinder supporting structure of a five-axis ultra-precise air-floating motion platform. Comprising a marble base table, a transition supporting part, a cross beam, a set of vertical sliding rails, a set of motor installation vertical sliding tables, a vertical supporting plate, an upper transition connecting block, a vertical hydraulic cylinder, a locking pressing plate, a locking bolt, a lower transition connecting block and the like. The balance air cylinder supporting structure of the five-axis ultra-precise air floating motion platform has the advantages that the whole balance air cylinder supporting structure is reasonably arranged, the working space of the five-axis ultra-precise air floating motion platform is not occupied, meanwhile, a Z-axis vertical power motor can be vertically supported, positioned and protected, and potential safety hazards caused after power failure are prevented; the vertical hydraulic cylinder, the pressure sensor and the PLC which are used in a combined mode can detect the working state of the vertical hydraulic cylinder in real time and correspondingly control the vertical hydraulic cylinder, and the situation that due to the fact that the vertical hydraulic cylinder goes wrong, anti-falling protection cannot be safely completed is prevented.

Description

Technical Field

[0001] The utility model belongs to the technical field of protection application of ultra-precision air-floating motion platforms, and in particular relates to a balancing cylinder support structure of a five-axis ultra-precision air-floating motion platform. Background Art

[0002] During the operation of the five-axis ultra-precision air-floating motion platform, corresponding protection structure design is required for the Z-axis vertical power motors (Z1, Z2).

[0003] In actual work, there is a possibility of power outage. If there is no corresponding protective structure design, it may cause damage to the marble pedestal at the least, and even cause vertical impact damage to the power motor, materials, etc. at the worst.

[0004] Therefore, based on the above problems, the present invention provides a balancing cylinder support structure for a five-axis ultra-precision air-floating motion platform. Utility Model Content

[0005] Purpose of the utility model: The purpose of this utility model is to provide a balancing cylinder support structure for a five-axis ultra-precision air-floating motion platform. The balancing cylinder support structure is arranged on the crossbeam to prevent the Z-axis vertical power motor from falling due to power failure, thereby playing a safety protection function.

[0006] Technical solution: The utility model is a balancing cylinder support structure of a five-axis ultra-precision air-floating motion platform, which includes a marble base, a transition support part, a crossbeam, a group of vertical slide rails and a group of motor-mounted vertical slides. The outer walls on both sides of the motor-mounted vertical slide are respectively provided with vertical support plates, and the end faces of one end of the vertical support plates are respectively provided with upper transition connecting blocks. The outer walls at both ends of the same side of the crossbeam and on both sides of the vertical slide rails are respectively provided with vertical hydraulic cylinders. The vertical hydraulic cylinders are respectively installed on the outer wall surfaces at both ends of the same side of the crossbeam through locking pressure and locking bolts, and one end of the vertical hydraulic cylinder is respectively provided with a lower transition connecting block.

[0007] In the present technical solution, the balance cylinder support structure of the five-axis ultra-precision air-floating motion platform also includes a PLC controller arranged on the crossbeam, and pressure sensor mounting grooves respectively arranged in the end faces of one end of the vertical support plate, and pressure sensors respectively arranged in the pressure sensor mounting grooves; wherein, the vertical hydraulic cylinder and the pressure sensor are respectively connected to the PLC controller, and the upper transition connection block is located on the surface of the pressure sensor.

[0008] In the technical solution, the vertical support plate is configured as an inverted L-shaped structure, and the vertical support plate and the motor mounting vertical slide are an integrated structure or a detachable structure fixed by bolts.

[0009] In the technical solution of the present invention, the upper transition connection block and the lower transition connection block are abutted or fixedly connected.

[0010] Compared with the existing technology, the beneficial effects of the balance cylinder support structure of the five-axis ultra-precision air floating motion platform of the utility model are: 1. The overall layout is reasonably designed, which does not occupy the working space of the five-axis ultra-precision air floating motion platform, and at the same time can provide vertical support and positioning protection for the Z-axis vertical power motor to prevent safety hazards after power failure; 2. The vertical hydraulic cylinder, pressure sensor, and PLC controller used in combination can perform real-time detection of the working status of the vertical hydraulic cylinder and corresponding control of the vertical hydraulic cylinder to prevent problems with the vertical hydraulic cylinder and the inability to safely complete anti-fall protection. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0012] Figure 1 This is a schematic diagram of the main structure of a balancing cylinder support structure of a five-axis ultra-precision air-floating motion platform of the present invention;

[0013] Figure 2 This is a structural diagram of the locking pressure plate and locking bolt of the utility model in a fixed state;

[0014] Figure 3 This is a structural diagram of the vertical support plate, upper transition connection block, pressure sensor installation slot and pressure sensor of the utility model;

[0015] Among them, the serial numbers in the figure are as follows: 100-marble base, 101-transition support part, 102-crossbeam, 103-pressure sensor, 104-vertical slide rail, 105-motor installation vertical slide, 106-PLC controller, 107-vertical hydraulic cylinder, 108-lower transition connection block, 109-vertical support plate, 110-upper transition connection block, 111-locking pressure plate, 112-locking bolt. DETAILED DESCRIPTION

[0016] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0017] In the description of the present invention, it should be noted that the terms "top", "bottom", "one side", "the other side", "front", "back", "middle", "inside", "top", "

[0018] The orientation or positional relationship indicated by "first", "second" and "third" are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention; the terms "first", "second" and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance; in addition, unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be a communication between the internal parts of two elements. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0019] Example 1

[0020] like Figure 1 and Figure 2 The balanced cylinder support structure of a five-axis ultra-precision air-floating motion platform shown in the figure includes a marble base 100, a transition support portion 101, a crossbeam 102, a set of vertical slide rails 104 and a set of motor-mounted vertical slides 105.

[0021] The outer walls of both sides of the motor mounting vertical slide 105 are respectively provided with vertical support plates 109.

[0022] One end surface of the vertical support plate 109 is provided with an upper transition connection block 110.

[0023] Vertical hydraulic cylinders 107 (explosion-proof type) are respectively provided on the outer walls of both ends of the same side of the crossbeam 102 and on both sides of the vertical slide rail 104.

[0024] The vertical hydraulic cylinder 107 is fixed to the outer wall surface of both ends of the same side of the beam 102 through the locking pressure plate 111 and the locking bolt 112.

[0025] One end of the vertical hydraulic cylinder 107 is respectively provided with a lower transition connection block 108 .

[0026] The working principle is:

[0027] The vertical hydraulic cylinder 107 remains in an extended state, and at this time the lower transition connection block 108 always maintains an extended support force on the vertical support plate 109 through the upper transition connection block 110;

[0028] When a power outage occurs and the motor mounting vertical slide 105 falls up and down on the vertical slide rail 104 , the vertical support plates 109 on both sides of the motor mounting vertical slide 105 ensure timely balanced support protection through the upper transition connection block 110 , the lower transition connection block 108 , and the vertical hydraulic cylinder 107 .

[0029] Example 2

[0030] Based on the first embodiment, Figure 3 The balancing cylinder support structure of the five-axis ultra-precision air-floating motion platform shown in the figure also includes a PLC controller 106 disposed on the crossbeam 102, and pressure sensor mounting grooves 113 respectively disposed in the end surfaces of one end of the vertical support plate 109, and pressure sensors 103 (explosion-proof type) respectively disposed in the pressure sensor mounting grooves 113;

[0031] The vertical hydraulic cylinder 107 and the pressure sensor 103 are respectively connected to the PLC controller 106 , and the upper transition connection block 110 is located on the surface of the pressure sensor 103 .

[0032] In the balanced support state, when any vertical hydraulic cylinder 107 has a problem causing the support form to change, the pressure sensor 103 feeds back the corresponding pressure signal to the PLC controller 106, and the PLC controller 106 (PLC controller 106 with a display screen) gives a corresponding text prompt and tries to start and control the vertical hydraulic cylinder 107 to perform corresponding balanced support.

[0033] The PLC controller 106 presets a safe range of pressure.

[0034] In addition, the vertical support plate 109 is preferably configured as an inverted L-shaped structure, and the vertical support plate 109 and the motor mounting vertical slide 105 are an integrated structure or a detachable structure fixed by bolts to meet installation and use requirements in different scenarios.

[0035] In addition, preferably, the upper transition connection block 110 and the lower transition connection block 108 are abutted or fixedly connected to each other to meet the installation and use requirements in different scenarios. At the same time, the upper transition connection block 110 and the lower transition connection block 108 are hard components.

[0036] The balancing cylinder support structure of the five-axis ultra-precision air-floating motion platform of this utility model, including the marble base 100, transition support portion 101, crossbeam 102, pressure sensor 103, a set of vertical slide rails 104, a set of motor-mounted vertical slides 105, PLC controller 106, and vertical hydraulic cylinder 107, are all conventional components and will not be described in detail in this application.

[0037] It should be noted that, in this document, terms such as "comprises," "includes," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, article, or apparatus comprising a series of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of other identical elements in the process, method, article, or apparatus comprising the element.

[0038] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the present invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be encompassed within the present invention. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

Claims

1. A balancing cylinder support structure for a five-axis ultra-precision air-floating motion platform, comprising a marble base (100), a transition support portion (101), a crossbeam (102), a set of vertical slide rails (104) and a set of motor-mounted vertical slides (105), characterized in that: The outer walls of both sides of the motor mounting vertical slide (105) are respectively provided with vertical support plates (109). An upper transition connection block (110) is provided on one end surface of the vertical support plate (109). Vertical hydraulic cylinders (107) are respectively provided on the outer walls of both ends of the same side of the crossbeam (102) and on both sides of the vertical slide rail (104). The vertical hydraulic cylinder (107) is fixed to the outer wall surfaces of both ends of the same side of the crossbeam (102) through locking pressure plates (111) and locking bolts (112). One end of each of the vertical hydraulic cylinders (107) is provided with a lower transition connection block (108).

2. The balancing cylinder support structure of a five-axis ultra-precision air-floating motion platform according to claim 1, characterized in that: The balancing cylinder support structure of the five-axis ultra-precision air-floating motion platform further includes a PLC controller (106) arranged on the crossbeam (102), and pressure sensor mounting grooves (113) respectively arranged in the end surface of one end of the vertical support plate (109), and pressure sensors (103) respectively arranged in the pressure sensor mounting grooves (113); The vertical hydraulic cylinder (107) and the pressure sensor (103) are respectively connected to the PLC controller (106), and the upper transition connection block (110) is located on the surface of the pressure sensor (103).

3. The balancing cylinder support structure of the five-axis ultra-precision air-floating motion platform according to claim 1 is characterized in that: The vertical support plate (109) is configured as an inverted L-shaped structure, and the vertical support plate (109) and the motor mounting vertical slide (105) are an integrated structure or a detachable structure fixed by bolts.

4. The balancing cylinder support structure of a five-axis ultra-precision air-floating motion platform according to claim 1 is characterized in that: The upper transition connection block (110) and the lower transition connection block (108) are abutted or fixedly connected.

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