Vacuum furnace valve structure
By designing a vacuum furnace valve structure with a movable connecting column and a hood-shaped flange joint, the problems of complex structure and easy leakage of traditional vacuum furnace valves are solved, and efficient sealing and low-cost maintenance are achieved.
Patent Information
- Application Number
- CN202423023108.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-09
- Publication Date
- 2025-09-23
- Estimated Expiration
- 2034-12-09
AI Technical Summary
The high valves of traditional vacuum furnaces are complex in structure, expensive and prone to leakage, which affects the vacuum performance and has high overall replacement and maintenance costs.
A vacuum furnace valve structure was designed, which adopted a vertically movable connecting column and a hood-shaped flange joint, combined with a sealing flange and a reducing shaft to achieve adaptive sealing. Each component was independently dispersed and easy to disassemble and assemble separately.
It reduces leak points, lowers maintenance costs, and improves sealing performance and equipment maintainability.
Smart Images
Figure CN223375128U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of vacuum furnaces, and in particular to a valve structure of a vacuum furnace. Background Art
[0002] A vacuum furnace uses a vacuum system (composed of a vacuum pump, vacuum measuring device, vacuum valve and other components carefully assembled) to discharge some of the substances in the furnace cavity, making the pressure in the furnace cavity less than one standard atmospheric pressure, thereby achieving a vacuum state in the furnace cavity.
[0003] A vacuum furnace generally consists of a main unit, a furnace chamber, an electric heating device, a sealed furnace shell, a vacuum system, a power supply system, and a temperature control system. Traditional vacuum systems primarily consist of a connecting pipe installed on the furnace shell and communicating with the furnace chamber. A high-pressure valve is installed at the end of the connecting pipe, with a filter installed between the high-pressure valve and the connecting pipe. The lower end of the high-pressure valve is connected to a vacuum pump, and a pre-evacuation valve is connected to the side. The exhaust port of the pre-evacuation valve is connected to a Roots pump via an air pipe, and a fore-stage valve is installed between the vacuum pump exhaust port and the air pipe.
[0004] In the above, the high valve is a separate high-pressure vacuum valve, which is expensive and has a complex structure. It needs to be replaced as a whole after damage, and it has many leakage points, which affects the vacuum performance of the vacuum furnace.
[0005] To this end, the present application provides a vacuum furnace valve structure to reduce leakage points and lower costs. Utility Model Content
[0006] The purpose of this application is to solve the problems existing in the prior art and to propose a vacuum furnace valve structure.
[0007] In order to achieve the above objectives, this application adopts the following technical solutions:
[0008] A vacuum furnace valve structure includes a valve body installed on the furnace shell, the valve body is provided with a vertically movable connecting column, the lower end of the connecting column is provided with a hemispherical connecting head, the connecting head is provided with a hood-shaped flange joint, and the lower end surface of the flange joint is connected to a sealing flange corresponding to the vacuum pump exhaust port.
[0009] Preferably, a reducing shaft is provided between the connecting column and the connecting head, and the diameter of the reducing shaft is smaller than the diameters of the connecting column and the connecting head.
[0010] Preferably, the upper end of the sealing flange is provided with a sinking groove corresponding to the connecting head, and the lower end of the flange joint is connected to the periphery of the sinking groove port.
[0011] Preferably, the flange joint and the sealing flange are fixedly connected by fasteners.
[0012] Preferably, a sealing ring is embedded at the lower end of the sealing flange near the outer edge surface.
[0013] Preferably, a cylinder is fastened to the upper end of the valve body via a fastener, an extension shaft of the cylinder is inserted into the valve body, and an end of the extension shaft is detachably connected to the connecting column.
[0014] Preferably, the lower end of the extension shaft is rectangular, the upper end of the connecting column is provided with a rectangular hole, the lower end of the extension shaft is inserted into the rectangular hole, the connecting column is provided with a threaded hole within the range of the rectangular hole, and the extension shaft is provided with a socket corresponding to the threaded hole, and bolts are installed in both the threaded hole and the socket.
[0015] Preferably, a shaft seal is sleeved on the extension shaft, and the shaft seal is fastened to the top wall inside the valve body.
[0016] Compared with the prior art, this application provides a vacuum furnace valve structure with the following beneficial effects:
[0017] 1. The flange joint has a cylindrical cavity inside, which matches the dimensions of the connector head, leaving clearance for the connector head to move freely. This allows the sealing flange to adjust itself even if the vacuum pump's exhaust port and valve body connection is not level or tilted. This ensures that even if the sealing surface between the vacuum pump's exhaust port and valve body is not level, the sealing performance can be maintained, thereby reducing leaks.
[0018] 2. Compared with the integral structure of vacuum valves, the components of this device are relatively independent and dispersed. In case of damage, they can be disassembled and assembled separately without replacing the entire device, thus reducing maintenance costs.
[0019] Other advantages, objectives and features of the present application will be described in part in the following description; and in part, will be apparent to those skilled in the art based on an examination of the following; or, may be taught from the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] Figure 1 This is a three-dimensional schematic diagram of the present application.
[0021] Figure 2 This is a schematic cross-sectional view of the valve body of this application.
[0022] Figure 3 For this application Figure 2 A partial schematic diagram of point A.
[0023] In the figure: 1. furnace shell; 2. connecting pipe; 3. valve body; 4. connecting column; 5. connecting head; 6. flange joint; 7. sealing flange; 8. cylinder; 9. extension shaft; 10. sealing ring; 11. shaft seal; 12. vacuum pump; 13. pre-evacuation valve; 14. fore-stage valve; 15. Roots pump; 16. reducing shaft; 17. cavity. DETAILED DESCRIPTION
[0024] The following will be combined with the appended examples of the present application Figure 1-3 , the technical solutions in the embodiments of the present application are described clearly and completely. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments.
[0025] Example 1. In order to solve the problems existing in the prior art, this embodiment provides a vacuum furnace valve structure, including a valve body 3 installed on the furnace shell 1, the valve body 3 is provided with a vertically movable connecting column 4, the lower end of the connecting column 4 is provided with a hemispherical connecting head 5, the connecting head 5 is provided with a cover-shaped flange joint 6, and the lower end face of the flange joint 6 is connected to a sealing flange 7 corresponding to the exhaust port of the vacuum pump 12.
[0026] Principle details of this embodiment:
[0027] A vacuum furnace valve structure includes a connecting pipe 2 that passes through a furnace shell 1 and communicates with a furnace cavity 17. A valve body 3 is detachably mounted on the end of the connecting pipe 2 located outside the furnace shell 1. A filter is provided between the valve body 3 and the end of the connecting pipe 2. A vacuum pump 12 is connected to the lower end of the valve body 3. A pre-evacuation valve 13 is connected to the side of the valve body 3. The exhaust port of the pre-evacuation valve 13 is connected to an air pipe, which is connected to a Roots pump 15. A fore-valve 14 is provided between the exhaust port of the vacuum pump 12 and the air pipe.
[0028] The valve body 3 is equipped with a vertically movable connecting column 4, with a hemispherical connector 5 at its lower end. A hood-shaped flange joint 6 is mounted over the connector 5. The flange joint 6 defines a cylindrical cavity 17, which is sized to fit the connector 5, allowing for fluid flow. The lower end of the flange joint 6 is connected to a sealing flange 7 that corresponds to the vacuum port of the vacuum pump 12.
[0029] According to the above technical solution:
[0030] When the vacuum furnace is operating at high vacuum, connecting column 4 moves upward to the top of its travel, separating the sealing flange 7 from the connection between the vacuum pump 12's exhaust port and valve body 3. Pre-evacuation valve 13 closes, and fore-valve 14 and Roots pump 15 open. Gas from the vacuum furnace chamber enters valve body 3 through connecting pipe 2, then into vacuum pump 12, and then through the fore-valve and Roots pump 15 to achieve high vacuum.
[0031] When the vacuum furnace is used in a low vacuum state, the connecting column 4 descends, so that the sealing flange 7 firmly contacts the connection between the vacuum pump 12's exhaust port and the valve body 3. The pre-exhaust valve 13 opens, the fore valve 14 closes, and the Roots pump 15 opens. At this time, the gas in the furnace enters the valve body 3, and then passes through the pre-exhaust valve 13, the pipeline, and the Roots pump 15 to achieve low vacuum treatment.
[0032] The state transition between high vacuum and low vacuum is the rise and fall of the connecting column 4. After the connecting column 4 rises, the hemispherical horizontal end face of the connector 5 abuts against the top wall of the cavity 17 of the flange joint 6, thereby driving the sealing flange 7 to rise vertically. When the connecting column 4 descends, when the sealing flange 7 abuts against the connection between the vacuum pump 12's exhaust port and the valve body 3, the connector 5 descends in the cavity 17, so that the hemispherical horizontal end face of the connector 5 separates from the top wall of the cavity 17 until the connector 5 abuts against the end face of the sealing flange 7. In this way, even if the connection between the vacuum pump 12's exhaust port and the valve body 3 is not horizontal and is in an inclined state, the sealing flange 7 can still be adaptively adjusted when the connector 5 and the flange joint 6 are in a movable state. Even if the sealing surface at the connection between the vacuum pump 12's exhaust port and the valve body 3 is not horizontal, the sealing performance can be well maintained, thereby reducing the number of leaks.
[0033] Compared with the integral structure of vacuum valves, the components of this device are relatively independent and dispersed. In case of damage, they can be disassembled and assembled separately without replacing the entire device, thus reducing maintenance costs.
[0034] Embodiment 2, in a further embodiment of this solution, a reducing shaft 16 is provided between the connecting column 4 and the connecting head 5. The diameter of the reducing shaft 16 is smaller than that of the connecting column 4 and the connecting head 5. Steps are formed at the connection between the reducing shaft 16 and the horizontal end faces of the connecting column 4 and the connecting head 5. When in high vacuum operation, the top wall of the cavity 17 of the flange joint 6 abuts against the step at the connection between the reducing shaft 16 and the horizontal end faces of the connecting head 5 and rises with the connecting column 4. When in low vacuum operation, the step at the connection between the connecting column 4 and the reducing shaft 16 abuts against the upper end face of the flange joint 6 and presses the sealing flange 7, so that the sealing flange 7 is firmly fitted with the connection between the vacuum pump 12's exhaust port and the valve body 3. The reducing shaft 16 limits the spatial range of the connecting head 5 moving up and down in the cavity 17 of the flange joint 6, thereby reducing the influence of air flow on the suspended state of the sealing flange 7 during vacuum extraction; at the same time, the step at the connection between the connecting column 4 and the reducing shaft 16 rests on the upper end surface of the flange joint 6 to press the sealing flange 7, and can also expand the contact area of the sealing flange 7 when pressed downward, changing the point contact at the hemispherical end of the connecting head 5 into surface contact, and the increased contact area can not only increase the downward pressure stability of the sealing flange 7, but also make the downward pressure load more balanced, avoiding stress concentration and causing the contact point to be concave and deformed.
[0035] In a further embodiment of this solution, the upper end of the sealing flange 7 is provided with a sinking groove corresponding to the connector 5, and the lower end of the flange joint 6 is connected to the periphery of the sinking groove end. The connection point is defined to provide an assembly axis basis.
[0036] Embodiment 4, in a further embodiment of this solution, the flange joint 6 and the sealing flange 7 are fixedly connected by fastening members.
[0037] Principle details of this embodiment:
[0038] The flange joint 6 has a plurality of through holes in an annular array on its end face, and the upper end face of the sealing flange 7 has threaded holes corresponding to the through holes. The threaded holes do not penetrate the sealing flange 7. Screws are passed through the through holes and then screwed into the threaded holes, thereby achieving a detachable connection between the flange joint 6 and the sealing flange 7. If damaged, they can be replaced separately.
[0039] Embodiment 5, in a further embodiment of this solution, a sealing ring 10 is embedded at the lower end of the sealing flange 7 near the outer edge surface.
[0040] Principle details of this embodiment:
[0041] The lower end surface of the sealing flange 7 is provided with an embedding groove near the outer edge surface. The cross-section of the embedding groove is trapezoidal. A sealing ring 10 is embedded in the trapezoidal embedding groove and leaks out from the lower end surface of the sealing flange 7.
[0042] When in use, the sealing flange 7 presses down the sealing ring 10 and firmly presses against the periphery of the connection between the valve body 3 and the vacuum pump 12 exhaust port. Through the elastic deformation of the sealing ring 10, even if the sealing surface is uneven, a good sealing effect can be achieved, further reducing the leakage points.
[0043] Example 6, in a further embodiment of the present invention, a cylinder 8 is fastened to the upper end of the valve body 3 via fasteners, an extension shaft 9 of the cylinder 8 is inserted into the valve body 3, and the end of the extension shaft 9 is detachably connected to the connecting column 4.
[0044] Principle details of this embodiment:
[0045] The upper end surface of the valve body 3 is provided with a through-mounting hole, and the cylinder 8 is fixed to the valve body 3 by fasteners. The extension shaft 9 of the cylinder 8 extends into the interior of the valve body 3 through the mounting hole, and the lower end of the extension shaft 9 is detachably connected to the connecting column 4. The connecting column 4 is raised and lowered by the cylinder 8.
[0046] In a further embodiment of this solution, the lower end of the extension shaft 9 is rectangular, the upper end of the connecting column 4 is provided with a rectangular hole, the lower end of the extension shaft 9 is inserted into the rectangular hole, the connecting column 4 is provided with a threaded hole within the rectangular hole, and the extension shaft 9 is provided with a socket corresponding to the threaded hole. Bolts are installed in both the threaded hole and the socket, thereby achieving a detachable connection between the extension shaft 9 and the connecting column 4.
[0047] Embodiment 8, in a further embodiment of this solution, a shaft seal 11 is provided on the extension shaft 9 and is fastened to the top wall of the valve body 3. The shaft seal 11 includes a dust ring and a sealing ring 10, which seals the extension shaft 9 and the mounting hole to prevent air leakage.
[0048] The above is only a preferred specific implementation method of the present application, but the scope of protection of the present application is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes based on the technical solution and application concept of the present application within the technical scope disclosed in the present application, and they should be covered by the scope of protection of the present application.
[0049] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and features of different embodiments or examples without contradiction.
[0050] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.
Claims
1. A vacuum furnace valve structure, characterized in that: The invention comprises a valve body (3) mounted on a furnace shell (1), wherein the valve body (3) is provided with a vertically movable connecting column (4), a hemispherical connecting head (5) is provided at the lower end of the connecting column (4), a cover-shaped flange joint (6) is sleeved on the connecting head (5), and a sealing flange (7) corresponding to the exhaust port of a vacuum pump (12) is connected to the lower end surface of the flange joint (6).
2. A vacuum furnace valve structure according to claim 1, characterized in that: A reducing shaft (16) is provided between the connecting column (4) and the connecting head (5), and the diameter of the reducing shaft (16) is smaller than the diameters of the connecting column (4) and the connecting head (5).
3. The vacuum furnace valve structure according to claim 1, characterized in that: The upper end of the sealing flange (7) is provided with a sinking groove corresponding to the connector (5), and the lower end of the flange joint (6) is connected to the periphery of the sinking groove port.
4. A vacuum furnace valve structure according to claim 3, characterized in that: The flange joint (6) and the sealing flange (7) are fixedly connected by fastening with fasteners.
5. The vacuum furnace valve structure according to claim 1, characterized in that: A sealing ring (10) is embedded in the lower end of the sealing flange (7) near the outer edge surface.
6. The vacuum furnace valve structure according to claim 1, characterized in that: The upper end of the valve body (3) is fastened with a cylinder (8) via a fastener, an extension shaft (9) of the cylinder (8) is inserted into the valve body (3), and the end of the extension shaft (9) is detachably connected to the connecting column (4).
7. A vacuum furnace valve structure according to claim 6, characterized in that: The lower end of the extension shaft (9) is rectangular, the upper end of the connecting column (4) is provided with a rectangular hole, the lower end of the extension shaft (9) is inserted into the rectangular hole, the connecting column (4) is provided with a threaded hole within the range of the rectangular hole, the extension shaft (9) is provided with a socket corresponding to the threaded hole, and a bolt is installed in both the threaded hole and the socket.
8. The vacuum furnace valve structure according to claim 6, characterized in that: A shaft seal (11) is sleeved on the extension shaft (9), and the shaft seal (11) is fastened to the top wall inside the valve body (3).