Waste chemical cooling device and wet cleaning equipment

Abstract

The utility model relates to a waste chemical cooling device and wet cleaning equipment, a first cooling container receives and preliminarily cools waste liquid discharged by a wet cleaning machine, and a first concentration detector detects the concentration of the waste liquid in the first cooling container; when the first concentration detector detects that the waste liquid concentration of the first cooling container is in a first preset range, the first switch assembly is used for communicating the first cooling container with the second cooling container, and the second cooling container correspondingly receives and cools the waste liquid discharged by the first cooling container and discharges the waste liquid to the first factory affair pipeline; when the first concentration detector detects that the concentration of the waste liquid in the first cooling container is within a second preset range, the first switch assembly is used for communicating the first cooling container with the third cooling container, and the third cooling container correspondingly receives and cools the waste liquid discharged by the first cooling container and discharges the waste liquid to the second factory affair pipeline. Therefore, accurate discharge can be realized according to different concentrations, and safety risks and hidden dangers are greatly reduced.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a waste chemical cooling device and wet cleaning equipment. Background Art

[0002] The wet cleaning process, a key substrate cleaning process, effectively removes contaminants from the substrate surface, such as particles, organic matter, and metal ions, ensuring substrate cleanliness before entering related processes. High-temperature chemicals are used in wet cleaning processes and are typically discharged through exhaust pipes. However, these waste chemicals are typically not able to withstand high temperatures, so they must be cooled by a cooling device before being discharged.

[0003] Most cooling devices in related technologies are water-cooled cooling devices, that is, cooling water is circulated inside the device to reduce the temperature of the waste chemicals to a temperature that the discharge pipeline can withstand before discharge.

[0004] However, when abnormal conditions cause wastewater concentrations that do not meet discharge requirements to be discharged into the discharge pipeline, risks and accidents may occur. For example, in a high-temperature sulfuric acid machine, the cooling tank used to cool H2SO4 may discharge a large amount of H2O or H2O2 due to abnormalities. The cooling tank will mistake the H2O or H2O2 for high-concentration H2SO4 and discharge it into the concentrated H2SO4 discharge pipeline for plant services. At this time, the H2O or H2O2 discharged from the cooling tank will react with the concentrated H2SO4 discharged elsewhere in the concentrated H2SO4 discharge pipeline, releasing a large amount of heat, which can pose significant safety risks and hidden dangers to plant services systems. For example, when the cooling device needs to be washed with water after replacing parts, the concentration of the waste liquid during washing is significantly lower than that when the cooling device is working normally. Therefore, the discharge pipeline needs to be manually switched from high concentration to low concentration. This switching process is relatively complicated and requires manpower to complete. If some mistakes occur during the operation, the waste liquid may be discharged incorrectly, which will cause huge safety risks and hidden dangers to the plant system. Utility Model Content

[0005] Based on this, it is necessary to overcome the defects of the existing technology and provide a waste chemical cooling device and wet cleaning equipment, which can detect the concentration of waste chemicals in the waste liquid, so that the waste liquid can be accurately discharged according to different concentrations, greatly reducing safety risks and hidden dangers.

[0006] A waste chemical cooling device, comprising:

[0007] a first cooling container, the first cooling container being connected to a waste liquid discharge portion of the wet cleaning machine, and the first cooling container being used to receive and cool the waste liquid discharged from the wet cleaning machine;

[0008] a first concentration detector, configured to detect the concentration of the waste liquid in the first cooling container;

[0009] a first switch assembly;

[0010] a second cooling container, the second cooling container being connected to the first cooling container via the first switch assembly, the second cooling container being further configured to be connected to the first plant service pipeline; and

[0011] a third cooling container, the third cooling container being connected to the first cooling container via the first switch assembly, and the third cooling container being further connected to the second plant service pipeline;

[0012] In which, when the first concentration detector detects that the waste liquid concentration of the first cooling container is within a first preset range, the first switch assembly is used to connect the first cooling container with the second cooling container, and the second cooling container is used to receive and cool the waste liquid discharged from the first cooling container, and discharge the waste liquid to the first plant pipeline; when the first concentration detector detects that the waste liquid concentration of the first cooling container is within a second preset range, the first switch assembly is used to connect the first cooling container with the third cooling container, and the third cooling container is used to receive and cool the waste liquid discharged from the first cooling container, and discharge the waste liquid to the second plant pipeline.

[0013] In one embodiment, the waste chemical cooling device also includes a second concentration detector, a third concentration detector, a second switch assembly and a third switch assembly; the second concentration detector is used to detect the waste liquid concentration of the second cooling container, and the second cooling container is used to be connected to the first plant pipeline through the second switch assembly. When the second concentration detector detects that the waste liquid concentration of the second cooling container is within the first preset range, the second switch assembly is used to connect the second cooling container with the first plant pipeline; the third concentration detector is used to detect the waste liquid concentration of the third cooling container, and the third cooling container is used to be connected to the second plant pipeline through the third switch assembly. When the third concentration detector detects that the waste liquid concentration of the third cooling container is within the second preset range, the third switch assembly is used to connect the third cooling container with the second plant pipeline.

[0014] In one embodiment, the waste chemical cooling device also includes a controller and an alarm, and the alarm, the second concentration detector and the third concentration detector are all electrically connected to the controller; the controller is used to control the alarm to sound an alarm when it is determined that the waste liquid concentration of the second cooling container is lower than the first preset range, and to control the alarm to sound an alarm when it is determined that the waste liquid concentration of the third cooling container is within the first preset range.

[0015] In one embodiment, the waste chemical cooling device also includes a fourth switch assembly; the third cooling container is connected to the fourth switch assembly; when the first concentration detector detects that the waste liquid concentration of the first cooling container is in a third preset range, the first switch assembly is also used to connect the first cooling container with the third cooling container, and the fourth switch assembly is used to connect the third cooling container with the diluent; wherein, the first preset range is higher than the third preset range, and the third preset range is higher than the second preset range.

[0016] In one embodiment, the waste chemical cooling device further includes a controller, and the first concentration detector, the second concentration detector, the third concentration detector, the first switch component, the second switch component, the third switch component and the fourth switch component are all electrically connected to the controller.

[0017] In one embodiment, the waste chemical cooling device also includes a first temperature sensor, a second temperature sensor and a third temperature sensor; the first temperature sensor, the second temperature sensor and the third temperature sensor are all electrically connected to the controller; the first temperature sensor is used to sense the waste liquid temperature inside the first cooling container, the second temperature sensor is used to sense the waste liquid temperature inside the second cooling container, and the third temperature sensor is used to sense the waste liquid temperature inside the third cooling container; the controller is used to control the first concentration detector to detect the concentration when it is judged that the waste liquid temperature inside the first cooling container is lower than the preset temperature value, control the second concentration detector to detect the concentration when it is judged that the waste liquid temperature inside the second cooling container is lower than the preset temperature value, and control the third concentration detector to detect the concentration when it is judged that the waste liquid temperature inside the third cooling container is lower than the preset temperature value.

[0018] In one embodiment, the waste chemical cooling device further includes a first liquid level detection component, a second liquid level detection component, and a third liquid level detection component; the first liquid level detection component, the second liquid level detection component, and the third liquid level detection component are all electrically connected to the controller; the first liquid level detection component is used to detect the liquid level of the waste liquid inside the first cooling container, the second liquid level detection component is used to detect the liquid level of the waste liquid inside the second cooling container, and the third liquid level detection component is used to detect the liquid level of the waste liquid inside the third cooling container; the controller is used to control the first concentration detector to detect the concentration when it is determined that the waste liquid level inside the first cooling container rises to a first target value, and to control the first switch component to be closed when it drops to a second target value; the controller is also used to control the second concentration detector to detect the concentration when it is determined that the waste liquid level inside the second cooling container rises to a third target value, and to control the first switch component to be closed when it drops to a fourth target value; the controller is also used to control the third concentration detector to detect the concentration when it is determined that the waste liquid level inside the third cooling container rises to a fifth target value, and to control the third switch component to be closed when it drops to a sixth target value.

[0019] In one embodiment, there are at least two first cooling containers, at least two first switch assemblies, and each first switch assembly is correspondingly provided to each first cooling container.

[0020] In one embodiment, the first concentration detector is set to one, and the first concentration detector can detect the waste liquid concentration inside any first cooling container; or, the first concentration detector is set to at least two, and each first concentration detector is used to detect the waste liquid concentration inside each first cooling container.

[0021] A wet cleaning equipment comprises the waste chemical cooling device and a wet cleaning machine, wherein the waste liquid discharge portion of the wet cleaning machine is connected to the first cooling container.

[0022] The above-mentioned waste chemical cooling device, when in use, the first cooling container receives and preliminarily cools the waste liquid discharged from the wet cleaning machine, the first concentration detector detects the concentration of the waste liquid in the first cooling container, when the first concentration detector detects that the concentration of the waste liquid in the first cooling container is within a first preset range, the first switch component is used to connect the first cooling container with the second cooling container, the second cooling container correspondingly receives and cools the waste liquid discharged from the first cooling container, and discharges the waste liquid to the first plant service pipeline; when the first concentration detector detects that the concentration of the waste liquid in the first cooling container is within a second preset range, the first switch component is used to connect the first cooling container with the third cooling container, the third cooling container correspondingly receives and cools the waste liquid discharged from the first cooling container, and discharges the waste liquid to the second plant service pipeline. It can be seen that the concentration of waste chemicals in the waste liquid can be detected, so that the waste liquid can be transported to the second cooling container and the third cooling container according to different concentration ranges, and after being cooled by the second cooling container and the third cooling container, it is discharged to the first plant service pipeline and the second plant service pipeline respectively, that is, it can be accurately discharged according to different concentrations, greatly reducing safety risks and hidden dangers. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is a structural diagram of a waste chemical cooling device according to an embodiment of the present application.

[0024] Figure 2 This is a structural diagram of a waste chemical cooling device according to another embodiment of the present application.

[0025] Figure 3 This is a structural diagram of a waste chemical cooling device according to another embodiment of the present application.

[0026] 11. First cooling container; 12. Second cooling container; 13. Third cooling container; 21. First concentration detector; 22. Second concentration detector; 23. Third concentration detector; 30. First switch assembly; 31. First connecting pipe; 32. First switch valve; 40. Second switch assembly; 41. Second connecting pipe; 42. Second switch valve; 50. Third switch assembly; 51. Third connecting pipe; 52. Third switch valve; 60. Fourth switch assembly Components; 61, liquid infusion pipe; 62, fourth switch valve; 71, first liquid level detection component; 711, first liquid level gauge; 712, second liquid level gauge; 72, second liquid level detection component; 721, third liquid level gauge; 722, fourth liquid level gauge; 73, third liquid level detection component; 731, fifth liquid level gauge; 732, sixth liquid level gauge; 81, liquid inlet pipe; 82, liquid inlet valve; 91, main pipe; 92, branch pipe; 93, fifth switch valve; 94, suction pump. DETAILED DESCRIPTION

[0027] To make the above-mentioned objects, features, and advantages of the present application more clearly understood, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar improvements without violating the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0028] As described in the background, prior art techniques can cause risks and accidents when wastewater with concentrations that do not meet discharge requirements is discharged into the discharge pipeline due to abnormal conditions. The inventors have discovered that this problem arises because the discharge pipeline has certain requirements for the concentration of waste chemicals in the wastewater. Water-cooled cooling devices can discharge both high- and low-concentration wastewater, but they are unable to identify waste chemicals in the wastewater, let alone detect and determine the concentration of waste chemicals in the wastewater. Therefore, when the water-cooled cooling device discharges wastewater with abnormal concentrations into the discharge pipeline in its normal mode, it is highly likely to pose significant safety risks and hidden dangers to the plant's systems.

[0029] Based on the above reasons, the present application provides a waste chemical cooling device and wet cleaning equipment, which can detect the concentration of waste chemicals in waste liquid, so that the waste liquid can be accurately discharged according to different concentrations, greatly reducing safety risks and hidden dangers.

[0030] See Figure 1 , Figure 1A schematic structural diagram of a waste chemical cooling device in one embodiment of the present application is shown. An embodiment of the present application provides a waste chemical cooling device, which includes: a first cooling container 11, a first concentration detector 21, a first switch component 30, a second cooling container 12, and a third cooling container 13. The first cooling container 11 is used to communicate with the waste liquid discharge part of the wet cleaning machine, and the first cooling container 11 is used to receive and cool the waste liquid discharged from the wet cleaning machine. The first concentration detector 21 is used to detect the waste liquid concentration of the first cooling container 11. The second cooling container 12 is connected to the first cooling container 11 through the first switch component 30, and the second cooling container 12 is also used to be connected to the first plant pipeline. The third cooling container 13 is connected to the first cooling container 11 through the first switch component 30, and the third cooling container 13 is also used to be connected to the second plant pipeline. In which, when the first concentration detector 21 detects that the waste liquid concentration of the first cooling container 11 is in the first preset range, the first switch assembly 30 is used to connect the first cooling container 11 with the second cooling container 12, and the second cooling container 12 is used to receive and cool the waste liquid discharged from the first cooling container 11, and discharge the waste liquid to the first plant pipeline; when the first concentration detector 21 detects that the waste liquid concentration of the first cooling container 11 is in the second preset range, the first switch assembly 30 is used to connect the first cooling container 11 with the third cooling container 13, and the third cooling container 13 is used to receive and cool the waste liquid discharged from the first cooling container 11, and discharge the waste liquid to the second plant pipeline.

[0031] It should be noted that the first cooling container 11, the second cooling container 12, and the third cooling container 13 in this embodiment can each be independently provided, and all refer to cooling containers having both water cooling and waste liquid storage functions. Specifically, the cooling container includes a container body and a cooling device disposed on the container body. Optionally, the container body includes, but is not limited to, a water tank, a can, a bucket, etc., and the cooling device includes, but is not limited to, a circulating water cooling pipe, a semiconductor refrigerator, or a cooling fan, etc., as long as the cooling device can cool the waste liquid within the container body.

[0032] When the above-mentioned waste chemical cooling device is in use, the first cooling container 11 receives and preliminarily cools the waste liquid discharged from the wet cleaning machine, and the first concentration detector 21 detects the waste liquid concentration of the first cooling container 11. When the first concentration detector 21 detects that the waste liquid concentration of the first cooling container 11 is within a first preset range, the first switch component 30 is used to connect the first cooling container 11 with the second cooling container 12, and the second cooling container 12 correspondingly receives and cools the waste liquid discharged from the first cooling container 11, and discharges the waste liquid to the first plant pipeline; when the first concentration detector 21 detects that the waste liquid concentration of the first cooling container 11 is within a second preset range, the first switch component 30 is used to connect the first cooling container 11 with the third cooling container 13, and the third cooling container 13 correspondingly receives and cools the waste liquid discharged from the first cooling container 11, and discharges the waste liquid to the second plant pipeline. It can be seen from this that the concentration of waste chemicals in the waste liquid can be detected, so that the waste liquid can be transported to the second cooling container 12 and the third cooling container 13 according to different concentration ranges, and after cooling in the second cooling container 12 and the third cooling container 13, it is discharged to the first plant pipeline and the second plant pipeline respectively, that is, it can be accurately discharged according to different concentrations, greatly reducing safety risks and hidden dangers.

[0033] See also Figure 1In one embodiment, the waste chemical cooling device further includes a second concentration detector 22, a third concentration detector 23, a second switch assembly 40, and a third switch assembly 50. The second concentration detector 22 is used to detect the concentration of the waste liquid in the second cooling container 12. The second cooling container 12 is used to connect to the first utility pipeline via the second switch assembly 40. When the second concentration detector 22 detects that the concentration of the waste liquid in the second cooling container 12 is within a first preset range, the second switch assembly 40 is used to connect the second cooling container 12 to the first utility pipeline. The third concentration detector 23 is used to detect the concentration of the waste liquid in the third cooling container 13. The third cooling container 13 is used to connect to the second utility pipeline via the third switch assembly 50. When the third concentration detector 23 detects that the concentration of the waste liquid in the third cooling container 13 is within a second preset range, the third switch assembly 50 is used to connect the third cooling container 13 to the second utility pipeline. In this way, the second concentration detector 22 detects the waste liquid concentration of the second cooling container 12, and further confirms whether the waste liquid concentration of the second cooling container 12 is within the first preset range. When the waste liquid concentration of the second cooling container 12 is within the first preset range, the waste liquid is discharged to the first plant pipeline, thereby improving accuracy, avoiding safety hazards caused by abnormalities in the first concentration detector 21 or abnormalities in the valve group, and determining whether the first concentration detector 21 is working normally; the third concentration detector 23 detects the waste liquid concentration of the third cooling container 13, and further confirms whether the waste liquid concentration of the third cooling container 13 is within the second preset range. When the waste liquid concentration of the third cooling container 13 is within the second preset range, the waste liquid is discharged to the second plant pipeline, thereby improving accuracy, avoiding safety hazards caused by abnormalities in the first concentration detector 21 or abnormalities in the valve group, and determining whether the first concentration detector 21 is working normally.

[0034] In one embodiment, the waste chemical cooling device further includes a controller and an alarm. The alarm, the second concentration detector 22, and the third concentration detector 23 are all electrically connected to the controller. The controller is configured to control the alarm to sound an alarm when it determines that the waste liquid concentration in the second cooling container 12 is lower than a first preset range, and to control the alarm to sound an alarm when it determines that the waste liquid concentration in the third cooling container 13 is within the first preset range. Thus, when the controller determines that the waste liquid concentration in the second cooling container 12 is lower than the first preset range, the alarm is controlled to sound an alarm, thereby promptly reminding the staff to detect the cause of the abnormality and perform maintenance, while also causing the wet cleaning machine to stop discharging waste liquid, which can greatly reduce safety risks and hidden dangers. Furthermore, when the controller determines that the waste liquid concentration in the third cooling container 13 is within the first preset range, the alarm is controlled to sound an alarm, thereby promptly reminding the staff to detect the cause of the abnormality and perform maintenance, while also causing the wet cleaning machine to stop discharging waste liquid, which can greatly reduce safety risks and hidden dangers.

[0035] Please refer to Figure 1 , in one embodiment, the waste chemical cooling device further includes a fourth switch component 60. The third cooling container 13 is connected to the fourth switch component 60. When the first concentration detector 21 detects that the waste liquid concentration in the first cooling container 11 is within the third preset range, the first switch component 30 is further configured to connect the first cooling container 11 to the third cooling container 13, and the fourth switch component 60 is configured to connect the third cooling container 13 to the diluent. Among them, the first preset range is higher than the third preset range, and the third preset range is higher than the second preset range. Thus, when the waste liquid concentration in the first cooling container 11 detected by the first concentration detector 21 is within the third preset range, the first cooling container 11 is connected to the third cooling container 13 through the first switch component 30, so that the waste liquid inside the first cooling container 11 enters the third cooling container 13 through the first switch component 30. In addition, the fourth switch component 60 connects the third cooling container 13 to the diluent, and the diluent enters the third cooling container 13 through the fourth switch component 60 to dilute the waste liquid inside the third cooling container 13 until the waste liquid concentration inside the third cooling container 13 is reduced from the third preset range to the second preset range. Discharging the waste liquid within the second preset range to the second plant pipeline can reduce safety risks and potential hazards.

[0036] Optionally, the diluent includes but is not limited to water.

[0037] It should be noted that the first preset range, the second preset range, and the third preset range can each be flexibly adjusted and set according to actual needs and are not limited herein. Specifically, the waste liquid in the first preset range refers to high-concentration waste liquid, the third preset range is lower than the first preset range, the waste liquid in the third preset range refers to medium-concentration waste liquid, the second preset range is lower than the third preset range, and the waste liquid in the second preset range refers to low-concentration waste liquid. For example, according to the waste liquid concentration ≥ A is set as the first preset range, the waste liquid concentration ≥ B and < A are respectively set as the third preset range, and the waste liquid concentration < B is set as the second preset range, so as to distinguish the first preset range, the second preset range, and the third preset range according to A and B, and the specific values of A and B can be set according to actual needs.

[0038] In one embodiment, the waste chemical cooling device further includes a controller. The first concentration detector 21, the second concentration detector 22, the third concentration detector 23, the first switch assembly 30, the second switch assembly 40, the third switch assembly 50, and the fourth switch assembly 60 are all electrically connected to the controller. This allows the controller to control the operation of the first switch assembly 30 based on the waste liquid concentration detected by the first concentration detector 21, the operation of the second switch assembly 40 based on the waste liquid concentration detected by the second concentration detector 22, and the operation of the third switch assembly 50 based on the waste liquid concentration detected by the third concentration detector 23, resulting in a high degree of automation.

[0039] Of course, as some optional solutions, there is no need to set up a controller. The staff can manually control the operation of the first switch component 30, the second switch component 40 and the third switch component 50 respectively based on the waste liquid concentration detected by the first concentration detector 21, the second concentration detector 22 and the third concentration detector 23.

[0040] In one embodiment, the waste chemical cooling device further includes a first temperature sensor, a second temperature sensor, and a third temperature sensor. The first temperature sensor, the second temperature sensor, and the third temperature sensor are all electrically connected to a controller. The first temperature sensor is used to sense the temperature of the waste liquid within the first cooling container 11, the second temperature sensor is used to sense the temperature of the waste liquid within the second cooling container 12, and the third temperature sensor is used to sense the temperature of the waste liquid within the third cooling container 13. The controller is used to control the first concentration detector 21 to detect the concentration when it determines that the temperature of the waste liquid within the first cooling container 11 is below a preset temperature value; control the second concentration detector 22 to detect the concentration when it determines that the temperature of the waste liquid within the second cooling container 12 is below a preset temperature value; and control the third concentration detector 23 to detect the concentration when it determines that the temperature of the waste liquid within the third cooling container 13 is below a preset temperature value. In this way, the first concentration detector 21, the second concentration detector 22, and the third concentration detector 23 all achieve high accuracy in detecting the concentration of the waste liquid when the temperature is below the preset temperature value, resulting in accurate detection results, thereby avoiding the problem of inaccurate concentration detection results when the temperature of the waste liquid is higher. When it is determined that the temperature of the waste liquid is higher than the preset temperature value, the first concentration detector 21, the second concentration detector 22 and the third concentration detector 23 do not perform detection, and the concentration of the waste liquid is detected when the waste liquid is cooled to below the preset temperature value.

[0041] Among them, the preset temperature value can be flexibly adjusted and set according to actual needs and is not limited here.

[0042] See also Figure 1In some embodiments, the waste chemical cooling device further includes a first liquid level detection assembly 71, a second liquid level detection assembly 72, and a third liquid level detection assembly 73. The first liquid level detection assembly 71, the second liquid level detection assembly 72, and the third liquid level detection assembly 73 are all electrically connected to the controller. The first liquid level detection assembly 71 is used to detect the liquid level of the waste liquid in the first cooling container 11, the second liquid level detection assembly 72 is used to detect the liquid level of the waste liquid in the second cooling container 12, and the third liquid level detection assembly 73 is used to detect the liquid level of the waste liquid in the third cooling container 13.

[0043] The controller is configured to control the first concentration detector 21 to detect the concentration when it determines that the waste liquid level within the first cooling container 11 has risen to a first target value, and to control the first switch assembly 30 to close when it has fallen to a second target value. This allows the first cooler to cool the incoming waste liquid as the liquid level rises to the first target value after the waste liquid from the wet cleaning machine enters the first cooling container 11. When the liquid level rises to the first target value, the amount of waste liquid within the first cooling container 11 is relatively high. The first concentration detector 21 detects the waste liquid concentration. After the waste liquid concentration is detected, the controller controls the first switch assembly 30 to operate, discharging the waste liquid into the second cooling container 12 or the third cooling container 13 based on the waste liquid concentration. Furthermore, when the waste liquid level within the first cooling container 11 falls to the second target value, the amount of waste liquid within the first cooling container 11 is relatively low. The controller controls the first switch assembly 30 to close, preventing the first cooling container 11 from discharging waste liquid.

[0044] In addition, the controller is also used to control the second concentration detector 22 to detect the concentration when it is determined that the waste liquid level inside the second cooling container 12 has risen to the third target value, and to control the first switch component 30 to close when it has dropped to the fourth target value. In this way, after the waste liquid from the first cooling container 11 enters the second cooling container 12, the second cooler has a longer time to cool the incoming waste liquid during the process of the liquid level rising to the third target value. When the liquid level rises to the third target value, there is a lot of waste liquid inside the second cooling container 12. The second concentration detector 22 detects the waste liquid concentration. After the waste liquid concentration detection is completed, the controller controls the second switch component 40 to operate so that the waste liquid is discharged into the first plant service pipeline. In addition, when the waste liquid level inside the second cooling container 12 drops to the fourth target value, there is less waste liquid inside the second cooling container 12. The controller controls the second switch component 40 to close, controlling the second cooling container 12 to stop discharging waste liquid.

[0045] In addition, the controller is further configured to control the third concentration detector 23 to detect the concentration when it determines that the waste liquid level within the third cooling container 13 has risen to a fifth target value, and to control the third switch assembly 50 to close when it has fallen to a sixth target value. This allows the third cooler to cool the incoming waste liquid as the waste liquid level from the first cooling container 11 rises to the fifth target value. When the liquid level rises to the fifth target value, indicating that there is a high level of waste liquid within the third cooling container 13, the third concentration detector 23 detects the waste liquid concentration. After the waste liquid concentration detection is complete, the controller controls the third switch assembly 50 to operate, causing the waste liquid to be discharged into the second utility pipeline. Furthermore, when the waste liquid level within the third cooling container 13 falls to the sixth target value, indicating that there is a low level of waste liquid within the third cooling container 13, the controller controls the third switch assembly 50 to close, preventing the third cooling container 13 from discharging waste liquid.

[0046] See also Figure 1 Specifically, the first liquid level detection component 71 includes a first liquid level gauge 711 provided at the top of the first cooling container 11 and a second liquid level gauge 712 provided at the bottom of the first cooling container 11. The first liquid level gauge 711 can sense whether the waste liquid level inside the first cooling container 11 has reached a first target value, and the second liquid level gauge 712 can sense whether the waste liquid level inside the first cooling container 11 has reached a second target value. The second liquid level detection component 72 includes a third liquid level gauge 721 provided at the top of the second cooling container 12 and a fourth liquid level gauge 722 provided at the bottom of the second cooling container 12. The third liquid level gauge 721 can sense whether the waste liquid level inside the second cooling container 12 has reached a third target value, and the fourth liquid level gauge 722 can sense whether the waste liquid level inside the second cooling container 12 has reached a fourth target value. The third liquid level detection component 73 includes a fifth liquid level gauge 731 arranged at the top of the third cooling container 13 and a sixth liquid level gauge 732 arranged at the bottom of the third cooling container 13. The fifth liquid level gauge 731 can sense whether the waste liquid level inside the third cooling container 13 reaches the fifth target value, and the sixth liquid level gauge 732 can sense whether the waste liquid level inside the third cooling container 13 reaches the sixth target value.

[0047] See also Figure 2 or Figure 3In some embodiments, there are at least two first cooling containers 11 and at least two first switch assemblies 30. Each first switch assembly 30 is provided corresponding to each first cooling container 11. In this way, when one of the first cooling containers 11 is full of waste liquid, for example, when the liquid level of the waste liquid reaches a first target value, the waste liquid can be received by another first cooling container 11. At the same time, the first cooling container 11 that has already received waste liquid can discharge the waste liquid inside into the second cooling container 12 or the third cooling container 13, thereby achieving higher working efficiency.

[0048] In some embodiments, see Figure 3 The first concentration detector 21 can be set as one, and the first concentration detector 21 can detect the waste liquid concentration inside any first cooling container 11. In this way, sharing one first concentration detector 21 can simplify the structure and reduce costs.

[0049] Of course, see Figure 2 The number of first concentration detectors 21 may be at least two, and each first concentration detector 21 is used to detect the waste liquid concentration inside each first cooling container 11 .

[0050] See also Figures 1 to 3 As shown in either figure, in one embodiment, a liquid inlet pipe 81 is provided at the top of the first cooling vessel 11. Liquid inlet pipe 81 is connected to the waste liquid discharge unit of the wet cleaning machine. Liquid inlet valve 82 is provided on liquid inlet pipe 81. When liquid inlet valve 82 is opened, the waste liquid discharge unit of the wet cleaning machine flows waste liquid through liquid inlet pipe 81 into the interior of the first cooling vessel 11.

[0051] See also Figure 1 In addition, the first switch assembly 30 includes two first connecting pipes 31 and two first switch valves 32. The first cooling container 11 is connected to the second cooling container 12 and the third cooling container 13 respectively through the two first connecting pipes 31. The two first switch valves 32 are respectively arranged on the two first connecting pipes 31. The two first switch valves 32 are respectively used to control the first cooling container 11 to be connected with the second cooling container 12 or with the third cooling container 13. When the two first switch valves 32 are closed, the first cooling container 11 does not discharge waste liquid. Among them, the first switch valve 32 is, for example, a control valve, which is specifically electrically connected to the controller.

[0052] In addition, the second switch assembly 40 includes a second connecting pipe 41 and a second switch valve 42 disposed on the second connecting pipe 41. The second connecting pipe 41 is connected to the first utility pipeline. When the second switch valve 42 is opened, the waste liquid inside the second cooling container 12 is discharged externally through the first utility pipeline. Optionally, the second switch valve 42 is, for example, a control valve, specifically electrically connected to the controller.

[0053] Furthermore, the third switch assembly 50 includes a third connecting pipe 51 and a third switch valve 52 disposed on the third connecting pipe 51. The third connecting pipe 51 is connected to the second utility pipeline. When the third switch valve 52 is opened, waste liquid within the third cooling container 13 is discharged through the second utility pipeline. Optionally, the third switch valve 52 is, for example, a control valve electrically connected to the controller.

[0054] In addition, the fourth switch assembly 60 includes a liquid infusion tube 61 and a fourth switch valve 62 provided on the liquid infusion tube 61. The liquid infusion tube 61 is used to receive the diluent. When the fourth switch valve 62 is opened, the diluent enters the third cooling container 13 through the liquid infusion tube 61.

[0055] See also Figure 3 In some embodiments, when there are at least two first cooling containers 11 and at least two first cooling containers 11 share the same first concentration detector 21, the waste chemical cooling device further includes a main pipe 91, multiple pairs of branch pipes 92, at least four fifth on-off valves 93, and a suction pump 94. Each pair of branch pipes 92 includes two branch pipes 92. Each pair of branch pipes 92 is provided corresponding to each first cooling container 11. For any pair of branch pipes 92, one end of the two branch pipes 92 is connected to the first cooling container 11, and the other ends of the two branch pipes 92 are respectively connected to the opposite ends of the main pipe 91. Each branch pipe 92 is provided with a fifth on-off valve 93. The first concentration detector 21 and the suction pump 94 are provided on the main pipe 91. When testing the waste liquid concentration of one of the first coolers, the fifth on-off valves 93 on each branch pipe 92 corresponding to the first cooling container 11 are opened, while all other fifth on-off valves 93 remain closed. The suction pump 94 performs suction operation, thereby sucking the waste liquid inside the first cooling container 11 into the first concentration detector 21, where the concentration of the waste liquid is tested. After the first concentration detector 21 completes the detection of the waste liquid concentration, the waste liquid is returned to the first cooling container 11.

[0056] See also Figures 1 to 3 In one embodiment, the present application provides a wet cleaning device, which includes the waste chemical cooling device of any of the above embodiments, and also includes a wet cleaning machine, and the waste liquid discharge part of the wet cleaning machine is connected to the first cooling container 11.

[0057] When the above-mentioned wet cleaning equipment is in use, the first cooling container 11 receives and preliminarily cools the waste liquid discharged from the wet cleaning machine, and the first concentration detector 21 detects the concentration of the waste liquid in the first cooling container 11. When the first concentration detector 21 detects that the concentration of the waste liquid in the first cooling container 11 is within a first preset range, the first switch component 30 is used to connect the first cooling container 11 with the second cooling container 12, and the second cooling container 12 correspondingly receives and cools the waste liquid discharged from the first cooling container 11, and discharges the waste liquid to the first plant pipeline; when the first concentration detector 21 detects that the concentration of the waste liquid in the first cooling container 11 is within a second preset range, the first switch component 30 is used to connect the first cooling container 11 with the third cooling container 13, and the third cooling container 13 correspondingly receives and cools the waste liquid discharged from the first cooling container 11, and discharges the waste liquid to the second plant pipeline. It can be seen from this that the concentration of waste chemicals in the waste liquid can be detected, so that the waste liquid can be transported to the second cooling container 12 and the third cooling container 13 according to different concentration ranges, and after cooling in the second cooling container 12 and the third cooling container 13, it is discharged to the first plant pipeline and the second plant pipeline respectively, that is, it can be accurately discharged according to different concentrations, greatly reducing safety risks and hidden dangers.

[0058] In the description of this application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application.

[0059] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of technical features indicated. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include at least one of such features. In the description of this application, if the term "plurality" appears, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0060] In this application, unless otherwise specified or limited, the terms "mounted," "connected," "connected," "fixed," etc., should be interpreted broadly. For example, these terms may refer to fixed connections, removable connections, or integration; mechanical connections or electrical connections; direct connections or indirect connections through an intermediary; and internal communication between two components or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0061] In this application, unless otherwise expressly specified or limited, if a first feature is described as being "above" or "below" a second feature, or similar descriptions, this may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, when a first feature is described as being "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is described as being "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0062] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only embodiment.

[0063] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0064] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, and these modifications and improvements fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.

Claims

1. A waste chemical cooling device, characterized in that: The waste chemical cooling device comprises: a first cooling container, the first cooling container being connected to a waste liquid discharge portion of the wet cleaning machine, and the first cooling container being used to receive and cool the waste liquid discharged from the wet cleaning machine; a first concentration detector, configured to detect the concentration of the waste liquid in the first cooling container; a first switch assembly; a second cooling container, the second cooling container being connected to the first cooling container via the first switch assembly, the second cooling container being further configured to be connected to the first plant service pipeline; and a third cooling container, the third cooling container being connected to the first cooling container via the first switch assembly, and the third cooling container being further connected to the second plant service pipeline; In which, when the first concentration detector detects that the waste liquid concentration of the first cooling container is within a first preset range, the first switch assembly is used to connect the first cooling container with the second cooling container, and the second cooling container is used to receive and cool the waste liquid discharged from the first cooling container, and discharge the waste liquid to the first plant pipeline; when the first concentration detector detects that the waste liquid concentration of the first cooling container is within a second preset range, the first switch assembly is used to connect the first cooling container with the third cooling container, and the third cooling container is used to receive and cool the waste liquid discharged from the first cooling container, and discharge the waste liquid to the second plant pipeline.

2. The waste chemical cooling device according to claim 1, characterized in that: The waste chemical cooling device also includes a second concentration detector, a third concentration detector, a second switch assembly and a third switch assembly; the second concentration detector is used to detect the waste liquid concentration of the second cooling container, and the second cooling container is used to be connected to the first plant pipeline through the second switch assembly. When the second concentration detector detects that the waste liquid concentration of the second cooling container is within the first preset range, the second switch assembly is used to connect the second cooling container with the first plant pipeline; the third concentration detector is used to detect the waste liquid concentration of the third cooling container, and the third cooling container is used to be connected to the second plant pipeline through the third switch assembly. When the third concentration detector detects that the waste liquid concentration of the third cooling container is within the second preset range, the third switch assembly is used to connect the third cooling container with the second plant pipeline.

3. The waste chemical cooling device according to claim 2, characterized in that: The waste chemical cooling device also includes a controller and an alarm, and the alarm, the second concentration detector and the third concentration detector are all electrically connected to the controller; the controller is used to control the alarm to sound an alarm when it is determined that the waste liquid concentration of the second cooling container is lower than the first preset range, and to control the alarm to sound an alarm when it is determined that the waste liquid concentration of the third cooling container is within the first preset range.

4. The waste chemical cooling device according to claim 2, characterized in that: The waste chemical cooling device also includes a fourth switch assembly; the third cooling container is connected to the fourth switch assembly; when the first concentration detector detects that the waste liquid concentration of the first cooling container is in a third preset range, the first switch assembly is also used to connect the first cooling container with the third cooling container, and the fourth switch assembly is used to connect the third cooling container with the diluent; wherein, the first preset range is higher than the third preset range, and the third preset range is higher than the second preset range.

5. The waste chemical cooling device according to claim 4, characterized in that: The waste chemical cooling device further includes a controller, and the first concentration detector, the second concentration detector, the third concentration detector, the first switch component, the second switch component, the third switch component, and the fourth switch component are all electrically connected to the controller.

6. The waste chemical cooling device according to claim 5, characterized in that: The waste chemical cooling device also includes a first temperature sensor, a second temperature sensor and a third temperature sensor; the first temperature sensor, the second temperature sensor and the third temperature sensor are all electrically connected to the controller; the first temperature sensor is used to sense the waste liquid temperature inside the first cooling container, the second temperature sensor is used to sense the waste liquid temperature inside the second cooling container, and the third temperature sensor is used to sense the waste liquid temperature inside the third cooling container; the controller is used to control the first concentration detector to detect the concentration when it is judged that the waste liquid temperature inside the first cooling container is lower than the preset temperature value, control the second concentration detector to detect the concentration when it is judged that the waste liquid temperature inside the second cooling container is lower than the preset temperature value, and control the third concentration detector to detect the concentration when it is judged that the waste liquid temperature inside the third cooling container is lower than the preset temperature value.

7. The waste chemical cooling device according to claim 5, characterized in that: The waste chemical cooling device further includes a first liquid level detection component, a second liquid level detection component, and a third liquid level detection component; the first liquid level detection component, the second liquid level detection component, and the third liquid level detection component are all electrically connected to the controller; the first liquid level detection component is used to detect the liquid level of the waste liquid inside the first cooling container, the second liquid level detection component is used to detect the liquid level of the waste liquid inside the second cooling container, and the third liquid level detection component is used to detect the liquid level of the waste liquid inside the third cooling container; the controller is used to control the first concentration detector to detect the concentration when it is determined that the waste liquid level inside the first cooling container rises to a first target value, and to control the first switch component to be closed when it drops to a second target value; the controller is also used to control the second concentration detector to detect the concentration when it is determined that the waste liquid level inside the second cooling container rises to a third target value, and to control the first switch component to be closed when it drops to a fourth target value; the controller is also used to control the third concentration detector to detect the concentration when it is determined that the waste liquid level inside the third cooling container rises to a fifth target value, and to control the third switch component to be closed when it drops to a sixth target value.

8. The waste chemical cooling device according to claim 1, characterized in that: There are at least two first cooling containers, and at least two first switch assemblies, and each first switch assembly is correspondingly arranged to each first cooling container.

9. The waste chemical cooling device according to claim 8, characterized in that: The first concentration detector is set to one, and the first concentration detector can detect the waste liquid concentration inside any first cooling container; or, the first concentration detector is set to at least two, and each first concentration detector is used to detect the waste liquid concentration inside each first cooling container.

10. A wet cleaning device, characterized in that: The wet cleaning equipment includes the waste chemical cooling device according to any one of claims 1 to 9, and further includes a wet cleaning machine, wherein the waste liquid discharge part of the wet cleaning machine is connected to the first cooling container.

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