Cavity assembly and reaction furnace
By using protective parts to accommodate the heating elements in the reactor and designing a partitioned heating structure, the problems of low heating efficiency and impurity contamination are solved, achieving a more efficient and uniform heating effect and a lower contamination risk.
Patent Information
- Application Number
- CN202422852290.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-21
- Publication Date
- 2025-09-23
- Estimated Expiration
- 2034-11-21
AI Technical Summary
The heating efficiency of the existing reaction furnace is low, and impurities generated by the heating element at high temperature will contaminate the chamber and the product in the chamber.
The protective part in the cavity assembly is used to accommodate the heating element to prevent the heating element from being directly exposed to the chamber. The design of multiple heating elements and leads is used to achieve zoned heating, and the heating efficiency and sealing are improved through sealing parts and thermal insulation cotton.
The heating efficiency of the reactor is improved, impurities generated by the heating element at high temperature are avoided from contaminating the chamber and products, and the heating uniformity and heat utilization rate are enhanced.
Smart Images
Figure CN223376292U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the fields of photovoltaic and semiconductor technology, and in particular to a cavity assembly and a reactor. Background Art
[0002] Semiconductor and photovoltaic materials are widely used in industries such as electronics and new energy, and they typically require several processing steps, such as texturing, diffusion, oxidation, etching, coating, screen printing, and sintering. Some of these processes, such as diffusion, oxidation, and coating, require specific reactors and high temperatures.
[0003] At present, the industry mostly uses heating wires to heat the reactor, but the heating efficiency is not high. Utility Model Content
[0004] In view of this, an embodiment of the present application provides a cavity assembly and a reactor, which solves the problem of low heating efficiency of the reactor.
[0005] In a first aspect, an embodiment of the present application provides a cavity assembly, comprising: a cavity having a chamber; at least one heating element disposed in the chamber; and at least one protective element at least partially disposed in the chamber, the protective element having an accommodating space, the accommodating space being configured to accommodate the heating element to prevent the heating element from being exposed to the chamber.
[0006] In combination with the first aspect, in certain implementations of the first aspect, the cavity has an axis extending along a first direction; wherein, there are multiple protective members, multiple protective members extend along the first direction, and are arranged at circumferential intervals along the axis of the cavity; wherein, there are multiple heating members, and the accommodating space of each protective member accommodates at least one heating member.
[0007] In combination with the first aspect, in certain implementations of the first aspect, the plurality of protective members are evenly distributed along the circumference of the axis of the cavity.
[0008] In combination with the first aspect, in certain implementations of the first aspect, the accommodating space of each of the protective members accommodates a plurality of the heating members, and the plurality of the heating members in each of the protective members are arranged in sequence along the first direction; wherein, the cavity assembly further comprises: a plurality of leads, arranged in the accommodating space to prevent the leads from being exposed to the chamber; wherein, the heating member comprises a first through hole extending along the first direction, and the first ends of the plurality of leads are all connected to a power source; wherein, the second ends of some of the leads are electrically connected to the first heating member; the second ends of another part of the leads can pass through the first through hole of the preceding heating member and be electrically connected to a subsequent heating member, so that the plurality of heating members are energized respectively through the plurality of leads, so that the plurality of heating members generate heat respectively.
[0009] In combination with the first aspect, in certain implementations of the first aspect, the cavity assembly further includes: a plurality of castings, disposed at both ends of the heating element, configured to fix the two ends of the heating element to the protective element and to fix the lead to prevent the lead from contacting the preceding heating element; wherein the material of the casting is an insulating material.
[0010] In combination with the first aspect, in certain implementations of the first aspect, the material of the protective member includes any one of the following materials: metal, ceramic, and glass.
[0011] In combination with the first aspect, in certain implementations of the first aspect, each end of the cavity has at least one opening, and the opening connects the chamber with the outside world; the cavity assembly also includes: a first sealing member, having a plurality of second through holes arranged at circumferential intervals along the axis of the cavity, and the first ends of the plurality of protective members respectively pass through the second through holes and are sealed with the first sealing member; a connecting member, sealed with the second ends of the plurality of protective members; a first flange, sealingly connecting the first sealing member and the first end of the cavity to close the opening at the first end of the cavity; a second flange, sealingly connecting the connecting member and the second end of the cavity, and exposing the opening at the second end of the cavity.
[0012] In combination with the first aspect, in certain implementations of the first aspect, the cavity assembly further includes: thermal insulation cotton, which is arranged between the cavity and the protective element and is configured to reduce the loss of heat generated by the heating element.
[0013] In combination with the first aspect, in certain implementations of the first aspect, the cavity assembly further includes: a plurality of second seals, respectively arranged between the first flange and the first seal, between the first flange and the first end of the cavity, between the second flange and the connecting member, and between the second flange and the second end of the cavity.
[0014] In a second aspect, an embodiment of the present application provides a reaction furnace, comprising: the cavity assembly described in the first aspect, the cavity assembly having at least one opening connecting the chamber of the cavity assembly with the outside world, the opening being configured for allowing products to enter and exit the chamber; and at least one furnace door configured to open or close at least one of the openings of the cavity assembly.
[0015] The heating element of the chamber assembly provided in the embodiments of the present application is disposed within the chamber, and the heating element can directly heat the interior of the chamber, thereby improving the heating efficiency of the reactor having the chamber. However, if the heating element were placed directly within the chamber, impurities generated by the heating element at high temperatures would contaminate the chamber and the products therein. The use of a protective element to house the heating element prevents the heating element from being exposed to the chamber, thereby preventing impurities generated by the heating element at high temperatures from contaminating the chamber and the products therein. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] The above and other purposes, features, and advantages of the present application will become more apparent through a more detailed description of the embodiments of the present application in conjunction with the accompanying drawings. The accompanying drawings are intended to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the drawings, the same reference numerals generally represent the same components or steps.
[0017] Figure 1 Shown is a schematic structural diagram of a cavity assembly provided in one embodiment of the present application.
[0018] Figure 2 Shown is a schematic structural diagram of a heating element, a protective element, a first sealing element and a connecting element provided in one embodiment of the present application.
[0019] Figure 3 The following is an example of an embodiment of the present application. Figure 2 A partial enlarged view of area A.
[0020] Figure 4 Shown is a perspective view of a heating element, a protective element and a lead provided in one embodiment of the present application.
[0021] Figure 5 Shown is a cross-sectional view of a cavity assembly provided in one embodiment of the present application.
[0022] Figure 6 Shown Figure 5 A partial enlarged view of the cavity assembly in area B is shown.
[0023] Figure 7 Shown Figure 6 A partial enlarged view of area D.
[0024] Figure 8 Shown Figure 5 A partial enlarged view of the cavity assembly in area C is shown.
[0025] Figure 9 Shown is a schematic structural diagram of a reactor provided in one embodiment of the present application.
[0026] Reference numerals:
[0027] 1. Reactor; 10. Cavity assembly; 100. Cavity; 101. Chamber; 102. Opening; 1001. Axis of the cavity; 110. First end of the cavity; 120. Second end of the cavity; 200. Heating element; 201. First through-hole; 300. Protective element; 301. First end of the protective element; 302. Second end of the protective element; 3001. Accommodating space; 400. Lead; 401. First end of the lead; 402. Second end of the lead; 500. Casting element; 600. First sealing element; 601. Second through-hole; 700. Connecting element; 800. First flange; 900. Second flange; 1000. Insulation cotton; 1100. Second sealing element; 1200. First locking element; 1300. Second locking element; 20. Furnace door; 2. Power supply. DETAILED DESCRIPTION
[0028] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.
[0029] Figure 1 Shown is a schematic structural diagram of a cavity assembly provided in one embodiment of the present application. Figure 2 Shown is a schematic structural diagram of a heating element, a protective element, a first sealing element and a connecting element provided in one embodiment of the present application. Figure 3 The following is an example of an embodiment of the present application. Figure 2 A partial enlarged view of area A. Figure 4 Shown is a perspective view of a heating element, a protective element and a lead provided in one embodiment of the present application. Figure 5 FIG. 1 is a cross-sectional view of a cavity assembly provided in one embodiment of the present application. Figures 1 to 5As shown, the chamber assembly 10 includes a chamber 100, at least one heating element 200, and at least one protective element 300. The chamber 100 has a chamber 101, and the at least one heating element 200 is disposed in the chamber 101. The at least one protective element 300 is at least partially disposed in the chamber 101, and the protective element 300 has a receiving space 3001. The receiving space 3001 is configured to receive the heating element 200 to prevent the heating element 200 from being exposed to the chamber 101.
[0030] The heating element 200 of the chamber assembly 10 is disposed inside the chamber 101. The heating element 200 can directly heat the interior of the chamber 100, thereby improving the heating efficiency of the reactor 1 having the chamber 100. However, if the heating element 200 is placed directly inside the chamber 101, impurities generated by the heating element 200 at high temperatures may contaminate the chamber 101 and the products therein. The protective member 300 is used to accommodate the heating element 200, thereby preventing the heating element 200 from being exposed to the chamber 101 and preventing impurities generated by the heating element 200 at high temperatures from contaminating the chamber 101 and the products therein.
[0031] For example, the cross-sectional shape of the cavity 100 can be circular, rectangular, other polygonal or irregular shapes. For example, the cross-sectional shape of the protection member 300 can be circular, rectangular, other polygonal or irregular shapes.
[0032] For example, the cavity 100 and the protective member 300 may be an integrated structure or a split structure. When the protective member 300 and the cavity 100 are split structures, the protective member 300 may be fixedly connected to the inner wall of the cavity 100 .
[0033] Illustratively, the heating element 200 may be a heating wire or a heating tube.
[0034] For example, when the heating element 200 is a heating wire, the shape of the heating wire may be spiral, straight, curved, or any other shape.
[0035] In some embodiments, as Figure 1 、 Figure 2 、 Figure 4 and Figure 5 As shown, the cavity 100 has an axis 1001 extending along a first direction X1. A plurality of protective members 300 are provided, extending along the first direction X1 and spaced apart circumferentially about the cavity axis 1001. A plurality of heating elements 200 are provided, with each protective member 300 having a receiving space 3001 therein for accommodating at least one heating element 200.
[0036] The chamber 101 is heated simultaneously by using a plurality of heating elements 200 to further improve the heating efficiency of the heating elements 200 .
[0037] Illustratively, the accommodating space 3001 of each protective member 300 can accommodate a plurality of heating members 200 to further improve the heating efficiency of the heating members 200 .
[0038] In some embodiments, the plurality of protection members 300 are evenly distributed along the circumference of the axis 1001 of the cavity to improve the heating uniformity of the heating member 200 .
[0039] In some embodiments, as Figures 4 to 7 As shown, the accommodation space 3001 of each protective member 300 accommodates a plurality of heating elements 200, and the plurality of heating elements 200 in each protective member 300 are arranged in sequence along the first direction X1. The cavity assembly 10 also includes a plurality of leads 400, which are arranged in the accommodation space 3001 to prevent the leads 400 from being exposed to the chamber 101. The heating element 200 includes a first through hole 201 extending along the first direction X1, and the first ends 401 of the plurality of leads are all connected to the power supply 2. The second ends 402 of some of the leads are electrically connected to the first heating element 200, and the second ends 402 of another part of the leads can pass through the first through hole 201 of the preceding heating element 200 and be electrically connected to a subsequent heating element 200, so that the plurality of heating elements 200 are energized through the plurality of leads 400 respectively, so that the plurality of heating elements 200 generate heat respectively.
[0040] By using the plurality of lead wires 400 to energize the plurality of heating elements 200 respectively, the plurality of heating elements 200 generate heat respectively, so that the plurality of heating elements 200 heat the chamber 101 in different zones.
[0041] For example, the heating element 200 close to the power source 2 is used as the first heating element 200, and the second end 402 of a lead is electrically connected to the first heating element 200. Figure 4 As shown, the heating element 200 adjacent to the first heating element 200 along the first direction X1 serves as the second heating element 200. The second end 402 of another lead wire can pass through the first through-hole 201 of the first heating element 200 to electrically connect to the second heating element 200. The heating element 200 adjacent to the second heating element 200 along the first direction X1 serves as the third heating element 200. The second end 402 of yet another lead wire can pass through the first through-hole 201 of the first heating element 200 and the first through-hole 201 of the second heating element 200 to electrically connect to the third heating element 200. Similarly, each lead wire 400 can connect a power source to a heating element 200.
[0042] For example, with respect to the first heating element 200 and the second heating element 200, the first heating element 200 is the preceding heating element 200, and the second heating element 200 is the succeeding heating element 200; with respect to the second heating element 200 and the third heating element 200, the second heating element 200 is the preceding heating element 200, and the third heating element 200 is the succeeding heating element 200; and so on.
[0043] In some embodiments, the cavity assembly 10 further includes a plurality of castings 500, which are disposed at both ends of the heating element 200 and are configured to fix both ends of the heating element 200 to the protective element 300 and to fix the lead 400 to prevent the lead 400 from contacting the preceding heating element 200. The material of the casting 500 is an insulating material, thereby preventing the lead 400 from being electrically connected to the preceding heating element 200.
[0044] For example, the material of the casting 500 may be sintered silicate, concrete, etc.
[0045] In some embodiments, the material of the protective member 300 includes any one of the following materials: metal, ceramic, and glass. These materials have high thermal conductivity and are less likely to generate impurities at high temperatures.
[0046] Exemplarily, the metal material may be various types of stainless steel, for example, 304 stainless steel, 316 stainless steel, etc. Exemplarily, the metal material may also be iron, etc.
[0047] For example, the protective member 300 made of stainless steel is less likely to generate impurities at high temperatures, and can prevent the chamber 101 and the product in the chamber 101 from being contaminated.
[0048] For example, at different temperatures, the thermal conductivity of the protective member 300 made of different materials varies. For example, at temperatures between 200°C and 300°C, the thermal conductivity of the protective member 300 made of glass is better. At temperatures between 700°C and 800°C, the thermal conductivity of the protective member 300 made of metal is better.
[0049] Exemplarily, an insulating layer can be made on the inner wall of the protective member 300 close to the accommodating space 3001, and a sleeve can be installed on the heating member 200. Exemplarily, the material of the sleeve is a flame retardant material. Exemplarily, the flame retardant material can be high silica, magnesium hydroxide, etc., to further improve safety.
[0050] For example, paraffin wax may be poured between the heating element 200 and the protective element 300 . The paraffin wax melts under high temperature conditions, so that the heating element 200 is exposed in the accommodating space 3001 , so that the heating element 200 can heat the protective element 300 .
[0051] In some embodiments, as Figure 1 、 Figure 2 、 Figure 5 、 Figure 6 and Figure 8 As shown, each end of the cavity 100 has at least one opening 102, and the opening 102 connects the cavity 101 with the outside world. The cavity assembly 10 also includes a first sealing member 600, a connecting member 700, a first flange 800, and a second flange 900. The first sealing member 600 has a plurality of second through-holes 601 circumferentially spaced along the cavity axis 1001. The first ends of the plurality of protective members 300 each pass through the second through-holes 601 and are sealedly connected to the first sealing member 600. In other words, the first end 301 of each protective member passes through the second through-hole 601 and is sealedly connected to the first sealing member 600. The connecting member 700 is sealedly connected to the second end of each of the plurality of protective members 300. In other words, the connecting member 700 is sealedly connected to the second end 302 of each protective member. The first flange 800 is sealingly connected to the first sealing member 600 and the first end 110 of the cavity to close the opening 102 located at the first end 110 of the cavity. The second flange 900 seals and connects the connector 700 and the second end 120 of the cavity, and exposes the opening 102 at the second end 120 of the cavity.
[0052] The above structure can seal the cavity 100 to form a vacuum chamber 101 .
[0053] Illustratively, the first flange 800 is locked to the first sealing member 600 via a first locking member 1200. Illustratively, the first locking member 1200 may be a screw, a bolt, or other structures with a locking function.
[0054] Illustratively, the second flange 900 is locked to the connecting member 700 via the second locking member 1300. Illustratively, the second locking member 1300 may be a screw, a bolt, or other structures with a locking function.
[0055] In some embodiments, the cavity assembly 10 further includes thermal insulation cotton 1000 , which is disposed between the cavity 100 and the protective element 300 and is configured to reduce the loss of heat generated by the heating element 200 .
[0056] The chamber 101 is insulated with heat-insulating cotton 1000 to reduce the loss of heat in the chamber 101, improve the utilization rate of heat, and save energy and protect the environment.
[0057] For example, the cavity 100 is made of metal and is insulated with heat insulation cotton 1000 to prevent the heat in the cavity 101 from dissipating into the cavity 100, thereby preventing the outside of the cavity 100 from being hot and causing burns. For example, the cavity 100 can be made of stainless steel.
[0058] In some embodiments, the cavity assembly 10 also includes multiple second seals 1100, which are respectively arranged between the first flange 800 and the first seal 600, between the first flange 800 and the first end 110 of the cavity, between the second flange 900 and the connecting member 700, and between the second flange 900 and the second end 120 of the cavity, thereby further improving the sealing of the cavity 100.
[0059] Illustratively, the second sealing member 1100 may be a sealing ring, a rubber gasket, or the like.
[0060] Figure 9 The figure shows the structure of the reactor provided by one embodiment of the present application. Figure 9 As shown, the reaction furnace 1 includes the chamber assembly 10 mentioned in the above embodiment and at least one furnace door 20. The chamber assembly 10 has at least one opening 102 connecting the chamber 101 of the chamber assembly 10 with the outside world. The opening 102 is configured to allow products to enter and exit the chamber 101. The at least one furnace door 20 is configured to open or close the at least one opening 102 of the chamber assembly 10.
[0061] Since the reaction furnace 1 includes the cavity assembly 10 , all technical features and technical effects of the reaction furnace 1 including the cavity assembly 10 are not described in detail here.
[0062] In the various embodiments of the present disclosure, unless otherwise specified, the connection may be in the form of a detachable connection using bolts and nuts, screws, snaps, magnets, etc. In some connections, if there is no particular requirement for a detachable connection, a non-detachable connection may be achieved by welding, bonding, etc.
[0063] The basic principles of the present application have been described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, and effects mentioned in this application are merely illustrative and not restrictive, and it should not be assumed that these advantages, strengths, and effects are required of each embodiment of this application. In addition, the specific details disclosed above are merely illustrative and facilitating understanding, and are not restrictive. The above details do not limit this application to necessarily being implemented using the above specific details.
[0064] The block diagrams of the devices, devices, equipment, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As will be appreciated by those skilled in the art, these devices, devices, equipment, and systems can be connected, arranged, or configured in any manner. Words such as "include," "comprise," "have," and the like are open-ended words, meaning "including but not limited to," and can be used interchangeably therewith. The words "or" and "and" used herein refer to the words "and / or" and can be used interchangeably therewith, unless the context clearly indicates otherwise. The word "such as" used herein refers to the phrase "such as but not limited to," and can be used interchangeably therewith.
[0065] It should also be noted that in the apparatus, device, and method of the present application, each component or each step can be decomposed and / or recombined, and such decomposition and / or recombination should be regarded as equivalent solutions of the present application.
[0066] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.
[0067] The above description has been provided for the purpose of illustration and description. Furthermore, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although a number of example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.
Claims
1. A cavity assembly, characterized in that: include: a cavity having a chamber; at least one heating element disposed in the chamber; At least one protection member is at least partially disposed in the chamber, and the protection member has an accommodating space configured to accommodate the heating member to prevent the heating member from being exposed to the chamber.
2. The cavity assembly according to claim 1, characterized in that The cavity has an axis extending along a first direction; There are multiple protective members, and the multiple protective members extend along the first direction and are arranged at intervals along the circumferential direction of the axis of the cavity. There are multiple heating elements, and the accommodation space of each protective element accommodates at least one heating element.
3. The cavity assembly according to claim 2, characterized in that: The plurality of protection members are evenly distributed along the circumferential direction of the axis of the cavity.
4. The cavity assembly according to claim 2, characterized in that: The accommodating space of each of the protective members accommodates a plurality of the heating members, and the plurality of the heating members in each of the protective members are sequentially spaced along the first direction; Wherein, the cavity assembly further includes: a plurality of leads disposed in the accommodation space to prevent the leads from being exposed to the cavity; Wherein, the heating element comprises a first through hole extending along the first direction, and the first ends of the plurality of lead wires are all connected to a power source; Among them, the second ends of some of the leads are electrically connected to the first heating element; the second ends of another part of the leads can pass through the first through hole of the preceding heating element and be electrically connected to a subsequent heating element, so that multiple heating elements can be energized through multiple leads respectively, so that multiple heating elements can generate heat respectively.
5. The cavity assembly according to claim 4, characterized in that: Also includes: a plurality of casting parts, provided at both ends of the heating element, configured to fix the two ends of the heating element to the protective member and fix the lead wire to prevent the lead wire from contacting the preceding heating element; Wherein, the material of the casting part is insulating material.
6. The cavity assembly according to claim 5, characterized in that: The material of the protective member includes any one of the following materials: metal, ceramic, and glass.
7. The cavity assembly according to any one of claims 2 to 6, characterized in that: The two ends of the cavity each have at least one opening, and the opening connects the cavity with the outside world; The cavity assembly further includes: a first sealing member having a plurality of second through holes spaced circumferentially along the axis of the cavity, wherein the first ends of the plurality of protective members pass through the second through holes and are sealedly connected to the first sealing member; a connecting member, sealedly connected to the second ends of each of the plurality of protective members; a first flange sealingly connecting the first sealing member and the first end of the cavity to close the opening at the first end of the cavity; The second flange seals and connects the connecting member and the second end of the cavity, and exposes the opening at the second end of the cavity.
8. The cavity assembly according to claim 7, characterized in that: Also includes: The heat-insulating cotton is arranged between the cavity and the protective element and is configured to reduce the loss of heat generated by the heating element.
9. The cavity assembly according to claim 7, characterized in that: Also includes: A plurality of second sealing members are respectively arranged between the first flange and the first sealing member, between the first flange and the first end of the cavity, between the second flange and the connecting member, and between the second flange and the second end of the cavity.
10. A reactor, characterized in that: include: The cavity assembly according to any one of claims 1 to 9, wherein the cavity assembly has at least one opening connecting the cavity of the cavity assembly with the outside, the opening being configured to allow a product to enter and exit the cavity; At least one furnace door is configured to open or close at least one of the openings of the cavity assembly.