Liquid supplementing control device for mixing system
By using flow-adjustable pneumatic valves and return pipes in the chemical mixing system, combined with PLC control, the problems of high cost and long time in chemical mixing in the existing technology are solved, and a high-precision and fast rehydration process is achieved.
Patent Information
- Application Number
- CN202422102123.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-28
- Publication Date
- 2025-09-26
- Estimated Expiration
- 2034-08-28
AI Technical Summary
The existing technology has problems in the chemical mixing process such as high cost, low flow rate and long mixing time, which are particularly obvious when mixing large quantities of liquids.
Pneumatic valves with different flow rates are used for precise regulation. Combined with chemical return pipes and nitrogen replenishment pipes, efficient mixing of chemicals and pure water is achieved, and the rehydration process is optimized through the PLC control program.
It achieves high-precision liquid replenishment control, shortens mixing time, and reduces equipment costs, while having the advantage of small space occupation.
Smart Images
Figure CN223381517U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of chemical mixing and adding equipment, in particular to a liquid replenishing control device for a mixing system. Background Art
[0002] The manufacturing processes for products in the semiconductor, display panel, and new energy industries are becoming increasingly standardized, necessitating the extensive use of chemicals. Mixed acid solutions such as HF100:1, HF10:1, and TAMH2.38% are all examples, and their usage is increasing year by year. Precision control is crucial in the chemical mixing process. Currently, metering pumps and dosing tanks are commonly used to control the amount of chemical added. However, these two control methods pose challenges for large-volume mixing, including high costs, low flow rates, and long mixing times. Utility Model Content
[0003] In order to solve the above problems, the present invention provides a liquid replenishment control device for a mixing system, and the specific technical solution is as follows:
[0004] A liquid replenishment control device for a mixing system, comprising:
[0005] A box body, wherein the upper end of the box body is respectively provided with a first internal thread joint, a second internal thread joint, a third internal thread joint and a fourth internal thread joint, and the bottom end of the box body is respectively provided with a first through-plate joint, a second through-plate joint, a third through-plate joint and a fourth through-plate joint;
[0006] a chemical rehydration pipeline, wherein the upper end of the chemical rehydration pipeline passes through the first female connector and communicates with the outside, and the lower end of the chemical rehydration pipeline is connected to the first plate-piercing connector. The chemical rehydration pipeline is provided with a first manual valve, a first three-way connector, a first pneumatic valve, and a second three-way connector, from top to bottom. The first pneumatic valve is connected in parallel with the second pneumatic valve via the first and second three-way connectors.
[0007] a pure water replenishment pipeline, wherein the upper end of the pure water replenishment pipeline passes through the second female joint and communicates with the outside, and the lower end of the pure water replenishment pipeline is connected to the second plate-piercing joint; the pure water replenishment pipeline is provided with a second manual valve, a third three-way joint, a third pneumatic valve, and a fourth three-way joint in sequence from top to bottom; the third pneumatic valve is connected in parallel with the fourth pneumatic valve via the third and fourth three-way joints;
[0008] a chemical return pipe, the upper end of which passes through the third female connector and communicates with the outside, and the lower end of which is connected to the third through-plate connector;
[0009] A nitrogen replenishing pipeline, the upper end of which passes through the fourth internal thread joint and is connected to the outside, and the lower end of which is connected to the fourth through-plate joint.
[0010] In a preferred implementation, the lower end of the box body is further provided with a drain port, a drain pipe is installed at the drain port, a liquid level sensor and a drain hand valve are provided on the drain pipe, and a plug is provided at the lower end of the drain pipe.
[0011] In a preferred implementation, the lower ends of the first, second, third and fourth penetration joints are all connected to a corrugated hose, and the corrugated hose is also connected to a liquid storage tank.
[0012] In a preferred implementation, the flow rate of the first pneumatic valve is greater than the flow rate of the second pneumatic valve, and the flow rate of the third pneumatic valve is greater than the flow rate of the fourth pneumatic valve.
[0013] In a preferred implementation, the chemical return pipe and the nitrogen replenishment pipe are both fixed inside the box through a pipe bracket.
[0014] In a preferred implementation, a door is provided on the front of the box body, and the door is connected to the box body through a plurality of spring buckles.
[0015] Beneficial effects of the utility model:
[0016] This new device uses pneumatic valves with varying flow rates to precisely control the amount of added chemicals. The added chemicals and pure water are then circulated back to the liquid storage tank via a chemical return line for thorough mixing. A nitrogen supply line regulates the air pressure during both the replenishment and withdrawal processes. This new device not only achieves high replenishment accuracy and shortens mixing time, but also takes up minimal space and is inexpensive. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 It is a schematic diagram of the overall structure of the utility model.
[0018] Figure 2 It is a schematic diagram of the internal structure of the utility model.
[0019] Figure 3 This is a schematic flow chart of the working principle of the present utility model.
[0020] In the figure: 1. Box; 101. First female connector; 102. Second female connector; 103. Third female connector; 104. Fourth female connector; 105. First through-plate connector; 106. Second through-plate connector; 107. Third through-plate connector; 108. Fourth through-plate connector; 2. Chemical refill pipe; 201. First manual valve; 202. First three-way connector; 203. First pneumatic valve; 204. Second three-way connector; 2 05. Second pneumatic valve; 3. Pure water replenishment pipeline; 301. Second manual valve; 302. Third three-way connector; 303. Third pneumatic valve; 304. Fourth three-way connector; 305. Fourth pneumatic valve; 4. Chemical return pipeline; 5. Nitrogen replenishment pipeline; 6. Drain pipeline; 601. Liquid level sensor; 602. Drain manual valve; 603. Plug; 7. Corrugated hose; 8. Pipeline bracket; 9. Chamber door; 10. Spring buckle. DETAILED DESCRIPTION
[0021] The following will be combined with the present invention Figures 1 to 2 The technical solutions in the embodiments of the present invention are clearly and completely described. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort shall fall within the scope of protection of the present invention.
[0022] like Figure 1 and Figure 2 As shown, a liquid replenishment control device for a mixing system includes:
[0023] The box body 1 has a first internal thread joint 101, a second internal thread joint 102, a third internal thread joint 103, and a fourth internal thread joint 104 at its upper end, and a first through-plate joint 105, a second through-plate joint 106, a third through-plate joint 107, and a fourth through-plate joint 108 at its lower end;
[0024] A chemical rehydration pipeline 2, the upper end of which passes through the first female connector 101 and communicates with the outside, and the lower end of which is connected to the first through-plate connector 105. The chemical rehydration pipeline 2 is provided with a first manual valve 201, a first three-way connector 202, a first pneumatic valve 203, and a second three-way connector 204, from top to bottom. The first pneumatic valve 203 is connected in parallel to the second pneumatic valve 205 via the first three-way connector 202 and the second three-way connector 204.
[0025] A pure water replenishment pipe 3, the upper end of which passes through the second female connector 102 and communicates with the outside, and the lower end of which is connected to the second through-plate connector 106. A second manual valve 301, a third three-way connector 302, a third pneumatic valve 303, and a fourth three-way connector 304 are sequentially provided on the pure water replenishment pipe 3 from top to bottom. The third pneumatic valve 303 is connected in parallel with the fourth pneumatic valve 305 via the third three-way connector 302 and the fourth three-way connector 304.
[0026] A chemical return pipe 4, the upper end of which passes through the third internal threaded joint 103 and communicates with the outside, and the lower end of which is connected to the third through-plate joint 107;
[0027] The nitrogen replenishing pipe 5 , the upper end of the nitrogen replenishing pipe 5 passes through the fourth internal thread joint 104 to communicate with the outside, and the lower end of the nitrogen replenishing pipe 5 is connected to the fourth plate-penetrating joint 108 .
[0028] In a preferred implementation, the lower end of the box body 1 is also provided with a drain port, and a drain pipe 6 is installed at the drain port. The drain pipe 6 is provided with a liquid level sensor 601 and a drain manual valve 602. The lower end of the drain pipe 6 is provided with a plug 603, which can detect whether there is leakage in the box body 1. At the same time, the plug 603 can prevent the drain manual valve 602 from being forgotten to be closed or leaking internally, causing chemical leakage.
[0029] In a preferred implementation, the lower ends of the first through-plate joint 105, the second through-plate joint 106, the third through-plate joint 107 and the fourth through-plate joint 108 are all connected to the corrugated hose 7, and the corrugated hose 7 is also connected to the liquid storage tank. The corrugated hose 7 is a soft connection and does not affect the metering accuracy of the liquid storage tank.
[0030] In a preferred implementation, the flow rate of the first pneumatic valve 203 is greater than the flow rate of the second pneumatic valve 205, and the flow rate of the third pneumatic valve 303 is greater than the flow rate of the fourth pneumatic valve 305. By switching valves with different flow rates, the mixing time can be reduced and the accuracy of chemical rehydration can be improved.
[0031] In a preferred implementation, the chemical return pipe 4 and the nitrogen supplement pipe 5 are both fixed inside the box 1 through a pipe bracket 8, which effectively prevents the pipes from shaking when chemicals and gas pass through.
[0032] In a preferred implementation, a door 9 is provided on the front of the box body 1 , and the door 9 is connected to the box body 1 via a plurality of spring buckles 10 , which makes it convenient and quick to open.
[0033] Working principle:
[0034] First, when the chemical replenishment pipeline 2 releases chemical liquid, the first manual valve 201 is in the normally open state, and the PLC control program controls the first pneumatic valve 203 to open, and the chemical enters the liquid storage tank through the chemical replenishment pipeline 2. The liquid storage tank is placed on the electronic scale. When the liquid storage tank is about to reach the set weight, the PLC control program controls the first pneumatic valve 203 to close and the second pneumatic valve 205 to open. At this time, the chemical enters the liquid storage tank through the second pneumatic valve 205 with a small flow rate. When the set weight is reached, the chemical addition is completed, and the PLC control program controls the second pneumatic valve 205 to close, ending this chemical replenishment; secondly, pure water is replenished through the pure water replenishment pipeline 3, and the second manual valve 301 is in the normally open state. The PLC control program controls the third pneumatic valve 303 to open. When the pure water replenishment is about to reach the set weight, the PLC control program controls the third pneumatic valve 303 to close and the fourth pneumatic valve 305 to open. When the pure water continues to replenish to the set weight, the PLC control program controls the fourth pneumatic valve 305 to close, ending this pure water replenishment; finally, Figure 3 As shown, the added chemicals and pure water flow back into the liquid storage tank through the chemical return pipe 4 for thorough mixing. Throughout the rehydration process, the PLC control program controls the nitrogen replenishment pipe 5 to regulate the internal air pressure. This utility model not only has high rehydration accuracy and short mixing time, but also takes up little space and is inexpensive.
[0035] The above is only a preferred embodiment of the present invention, and its description is relatively specific and detailed, but it cannot be understood as a limitation on the scope of the utility model patent. It should be pointed out that several improvements and modifications can be made without departing from the concept of the present invention, and these all fall within the scope of protection of the present invention.
Claims
1. A liquid replenishment control device for a mixing system, characterized in that: include: A box body, wherein the upper end of the box body is respectively provided with a first internal thread joint, a second internal thread joint, a third internal thread joint and a fourth internal thread joint, and the bottom end of the box body is respectively provided with a first through-plate joint, a second through-plate joint, a third through-plate joint and a fourth through-plate joint; a chemical rehydration pipeline, wherein the upper end of the chemical rehydration pipeline passes through the first female connector and communicates with the outside, and the lower end of the chemical rehydration pipeline is connected to the first plate-piercing connector. The chemical rehydration pipeline is provided with a first manual valve, a first three-way connector, a first pneumatic valve, and a second three-way connector, from top to bottom. The first pneumatic valve is connected in parallel with the second pneumatic valve via the first and second three-way connectors. a pure water replenishment pipeline, wherein the upper end of the pure water replenishment pipeline passes through the second female joint and communicates with the outside, and the lower end of the pure water replenishment pipeline is connected to the second plate-piercing joint; the pure water replenishment pipeline is provided with a second manual valve, a third three-way joint, a third pneumatic valve, and a fourth three-way joint in sequence from top to bottom; the third pneumatic valve is connected in parallel with the fourth pneumatic valve via the third and fourth three-way joints; a chemical return pipe, the upper end of which passes through the third female connector and communicates with the outside, and the lower end of which is connected to the third through-plate connector; A nitrogen replenishing pipeline, the upper end of which passes through the fourth internal thread joint and is connected to the outside, and the lower end of which is connected to the fourth through-plate joint.
2. The liquid replenishment control device for a mixing system according to claim 1, characterized in that: The lower end of the box body is also provided with a drain port, a drain pipe is installed at the drain port, a liquid level sensor and a drain hand valve are provided on the drain pipe, and a plug is provided at the lower end of the drain pipe.
3. The liquid replenishment control device for a mixing system according to claim 1, characterized in that: The lower ends of the first through-plate joint, the second through-plate joint, the third through-plate joint and the fourth through-plate joint are all connected to the corrugated hose, and the corrugated hose is also connected to the liquid storage tank.
4. The liquid replenishment control device for a mixing system according to claim 1, characterized in that: The flow rate of the first pneumatic valve is greater than the flow rate of the second pneumatic valve, and the flow rate of the third pneumatic valve is greater than the flow rate of the fourth pneumatic valve.
5. The liquid replenishment control device for a mixing system according to claim 1, characterized in that: The chemical return pipeline and the nitrogen supplement pipeline are both fixed inside the box through pipeline brackets.
6. The liquid replenishment control device for a mixing system according to claim 1, characterized in that: A box door is provided on the front of the box body, and the box door is connected to the box body through a plurality of spring buckles.