Cleaning device for exhaust pipeline of single crystal furnace table

Abstract

The utility model relates to the field of monocrystalline silicon production equipment, in particular to a cleaning device for an exhaust pipeline of a single crystal furnace table. The cleaning device for the exhaust pipeline of the single crystal furnace table comprises a fixing seat for sealing an exhaust port of the exhaust pipeline, a transmission part connected to the fixing seat and a cleaning part connected to the transmission part, the cleaning part is located at the end, away from the fixing seat, of the transmission part, and the transmission part is suitable for driving the cleaning part to move in the preset direction and driving the cleaning part to rotate. And the cleaning piece is used for cleaning the exhaust pipeline. According to the cleaning device for the exhaust pipeline of the single crystal furnace table, the cleaning work of the exhaust pipeline can be completed, and meanwhile, the working safety of an operator during pipeline cleaning is effectively improved.

Description

Technical Field

[0001] The utility model relates to the field of single crystal silicon production equipment, in particular to a single crystal furnace exhaust pipe cleaning device. Background Art

[0002] During the production of single-crystal silicon ingots, molten silicon continuously reacts with the high-purity quartz crucible to produce large amounts of silicon monoxide. Most of this silicon monoxide escapes to the surface of the molten silicon and, driven by inert gas, is discharged from the single-crystal furnace through the exhaust pipe. When the high-temperature gas is discharged into the exhaust pipe, it suddenly cools and adheres to the pipe. After a production cycle, the attached oxides need to be cleaned from the exhaust pipe. Currently, this cleaning method typically involves placing a pipe above the pipe while an operator uses a handheld steel brush to clean the pipe.

[0003] In order to improve the production efficiency of the single crystal furnace, the exhaust duct will not be cleaned after the furnace has cooled down. However, the temperature of the oxide in the exhaust duct is very high, and a flash explosion will occur when it suddenly comes into contact with air during cleaning, affecting the operator's work safety when cleaning the duct. Utility Model Content

[0004] In order to solve the defects of the prior art, the utility model provides a single crystal furnace exhaust duct cleaning device, which can complete the cleaning work of the exhaust duct and effectively improve the working safety of the operator when cleaning the duct.

[0005] In order to solve the above technical problems, the utility model provides a single crystal furnace exhaust duct cleaning device, comprising a fixed seat for closing the exhaust port of the exhaust duct, a transmission member connected to the fixed seat and a cleaning member connected to the transmission member, wherein the cleaning member is located at one end of the transmission member away from the fixed seat, and the transmission member is suitable for driving the cleaning member to move in a predetermined direction and drive the cleaning member to rotate so that the cleaning member cleans the exhaust duct.

[0006] Wherein, a protective cover is provided on a side of the fixing seat facing the transmission member, and the protective cover is arranged around the exhaust pipe.

[0007] Wherein, a plurality of support rods are arranged around the side of the fixing base facing the exhaust pipe, and the protective cover is wrapped around the plurality of support rods;

[0008] A plurality of protective cover fixing bosses are formed on the side surface of the fixing seat, and the number of the protective cover fixing bosses is the same as the number of the support rods.

[0009] The fixing seat is formed with a central hole, the transmission member is provided with a rotating rod, and the rotating rod is rotatably arranged in the central hole through a bearing;

[0010] The first end of the rotating rod is provided with a driving connecting rod, and the driving connecting rod is suitable for being connected to the driving member; the cleaning member is connected to the second end of the rotating rod.

[0011] Wherein, the rotating rod is passed through the central hole, and the driving connecting rod protrudes from a side of the fixing seat away from the cleaning piece.

[0012] A cavity is formed inside the fixing seat, and a dust removal interface is formed outside the fixing seat, wherein the cavity faces the cleaning piece, and the dust removal interface is communicated with the cavity.

[0013] Wherein, the maximum length of the transmission member is equal to the height of the straight wall of the exhaust pipe.

[0014] Wherein, a flexible shaft is provided between the transmission member and the cleaning member, a first end of the flexible shaft is fixedly connected to the transmission member, and a second end of the flexible shaft is fixedly connected to the cleaning member.

[0015] The rotating rod includes a plurality of connecting rods, which are connected end to end in sequence, and the diameters of two adjacent connecting rods gradually decrease along a predetermined direction, wherein the connecting rod with the largest diameter is rotatably connected to the fixing seat.

[0016] Wherein, the fixing seat is provided with a handle ring.

[0017] The implementation of this utility model has the following beneficial effects:

[0018] According to the single crystal furnace exhaust duct cleaning device of this embodiment, when the exhaust duct needs to be cleaned, the fixed seat can be closed and connected to the exhaust port of the exhaust duct, and the transmission member and the cleaning member can be extended into the exhaust duct; then the cleaning member is driven by the transmission member to rotate inside the exhaust duct, so that the cleaning member can be used to grind and clean the inner wall surface of the exhaust duct, thereby completing the cleaning work of the exhaust duct, so as to improve the production efficiency of the single crystal furnace.

[0019] Since the fixed seat is closed and connected to the exhaust port of the exhaust duct, volatiles falling off from the inner wall of the exhaust duct cannot be discharged directly from the exhaust port of the exhaust duct, thereby reducing the pollution to the production workshop when volatiles are discharged, and at the same time avoiding direct contact between operators and volatiles, so as to avoid flash explosion when volatiles are discharged and cause burns to operators, thereby effectively improving the work safety of operators when cleaning the pipeline. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the three-dimensional structure of the single crystal furnace exhaust duct cleaning device of the utility model;

[0021] Figure 2This is one of the three-dimensional structural diagrams of the fixing seat of the utility model;

[0022] Figure 3 This is the second schematic diagram of the three-dimensional structure of the fixing seat of the utility model;

[0023] Figure 4 This is a schematic diagram of the three-dimensional structure of the transmission component of the utility model;

[0024] Figure 5 It is a schematic cross-sectional structural diagram of a transmission member in another embodiment of the present invention. DETAILED DESCRIPTION

[0025] To make the objectives, technical solutions, and advantages of the present invention more clearly apparent, the present invention will be further described in detail below with reference to the accompanying drawings. It is hereby stated that any directional terms such as "up," "down," "left," "right," "front," "back," "inside," and "outside" that appear or will appear in this document are based solely on the accompanying drawings and are not intended to limit the present invention.

[0026] The single crystal furnace exhaust duct cleaning device provided by the utility model can complete the cleaning work of the exhaust duct, improve the production efficiency of the single crystal furnace, and effectively improve the work safety of the operator when cleaning the duct.

[0027] In a specific embodiment of the present invention, Figures 1 to 4 As shown, the single crystal furnace table exhaust duct cleaning device includes a fixed base 1 for sealing the exhaust port of the exhaust duct, a transmission member 2 connected to the fixed base 1, and a cleaning member 3 connected to the transmission member 2. The cleaning member 3 is located at the end of the transmission member 2 away from the fixed base 1. The transmission member 2 is adapted to drive the cleaning member 3 to move in a predetermined direction and to drive the cleaning member 3 to rotate so that the cleaning member 3 cleans the exhaust duct. The predetermined direction of movement of the transmission member 2 is the longitudinal direction of the exhaust duct.

[0028] According to the single crystal furnace exhaust duct cleaning device of this embodiment, when the exhaust duct needs to be cleaned, the fixed seat 1 can be closed and connected to the exhaust port of the exhaust duct, and the transmission member 2 and the cleaning member 3 can be extended into the exhaust duct; then the cleaning member 3 is driven by the transmission member 2 to rotate inside the exhaust duct, so that the cleaning member 3 can be used to grind and clean the inner wall surface of the exhaust duct, thereby completing the cleaning work of the exhaust duct, so as to improve the production efficiency of the single crystal furnace.

[0029] Since the fixing base 1 is closed and connected to the exhaust port of the exhaust duct, the volatiles falling off from the inner wall of the exhaust duct cannot be discharged directly from the exhaust port of the exhaust duct, thereby reducing the pollution to the production workshop when the volatiles are discharged, and at the same time avoiding direct contact between the operators and the volatiles, so as to avoid flash explosion when the volatiles come into contact with the air during discharge and cause burns to the operators, thereby effectively improving the work safety of the operators when cleaning the pipeline.

[0030] Preferably, the cleaning member 3 is a steel brush to ensure the cleaning efficiency of the inner wall of the pipeline while extending the service life of the steel brush.

[0031] It should be noted here that the clearance between the cleaning piece 3 and the inner wall surface of the exhaust pipe is matched so that the cleaning piece 3 can contact the inner wall surface of the exhaust pipe while rotating in the exhaust pipe, thereby ensuring the polishing effect of the cleaning piece 3 on the inner wall surface of the exhaust pipe.

[0032] It should also be noted that the mounting base 1 may be a cover structure. To seal the mounting base 1 to the exhaust port of the exhaust duct, an adjustable clamp may be provided on the side of the mounting base 1 facing the exhaust duct, and a groove may be provided on the outer surface of the mounting base 1 at the exhaust port of the exhaust duct, so that the clamp can be snapped into the groove of the exhaust duct, sealing the side of the mounting base 1 facing the exhaust duct to the exhaust port of the exhaust duct. Furthermore, bosses may be provided on the outer wall of the exhaust duct and the outer wall of the mounting base 1, with threaded holes machined inside the bosses to connect the mounting base 1 to the exhaust port of the exhaust duct via fasteners such as bolts or studs.

[0033] In order to further ensure the closed connection between the fixing seat 1 and the exhaust port of the exhaust pipe, Figure 1 As shown, a protective cover 4 is provided on the side of the mounting base 1 facing the transmission member 2. Protective cover 4 surrounds the exhaust duct, enclosing the exhaust duct with protective cover 4 to form a closed space between the exhaust duct and protective cover 4. This confines volatiles leaking from the connection between the exhaust port and the mounting base 1 within the closed space, further preventing volatiles from leaking and contaminating the environment. Furthermore, when volatiles flash over upon contact with air, protective cover 4 can buffer the exploding oxides, preventing volatiles from splashing and causing burns to operators, further improving safety for operators while cleaning the duct.

[0034] Furthermore, when the cleaning member 3 is used to clean the inner wall of the exhaust duct, floating volatiles may accumulate on the side of the cleaning member 3 facing away from the transmission member 2. When the fixing base 1 drives the cleaning member 3 out of the exhaust duct, since the protective cover 4 is still arranged around the exhaust port of the exhaust duct, the volatiles on the back of the cleaning member 3 can be confined in the enclosed space by the protective cover 4, thereby preventing the residual volatiles from being discharged into the external environment, further ensuring the safety of the duct cleaning operation.

[0035] Preferably, the protective cover 4 is made of a transparent film, one end of the transparent film is connected to the fixing base 1 , and the other end of the transparent film is wrapped around the exhaust pipe to ensure that a closed space can be formed between the exhaust pipe and the fixing base 1 .

[0036] Furthermore, to ensure that the protective cover 4 can confine the volatile substances in the enclosed space, the shape of the protective cover 4 is preferably fitted with the outer contour of the exhaust duct. In this embodiment, to ensure that the shape of the protective cover 4 is fitted with the outer contour of the exhaust duct, as shown in FIG. Figure 2 As shown, the side of the fixing base 1 facing the exhaust pipe is surrounded by multiple support rods 41, and the protective cover 4 is wrapped around the multiple support rods 41. The side of the fixing base 1 is formed with multiple protective cover fixing bosses 42, and the number of protective cover fixing bosses 42 is the same as the number of support rods 41.

[0037] Then, after the installation of the fixing seat 1 is completed and the protective cover 4 needs to be set, the end of the protective cover 4 can be fixed to the protective cover fixing boss 42, and the protective cover 4 can be wrapped around multiple support rods 41, so that the protective cover 4 is wrapped around the outer wall surface of the exhaust duct, and the shape of the protective cover 4 is closely fitted to the outer wall surface of the exhaust duct to ensure that a closed space is formed between the protective cover 4 and the exhaust duct, thereby ensuring the protective cover 4 has a limiting effect on volatile substances in the exhaust duct.

[0038] The fixing base 1 is formed with a central hole 11, and the transmission member 2 is provided with a rotating rod 21, which is rotatably mounted in the central hole 11 via a bearing 22. A driving connecting rod 23 is provided at the first end of the rotating rod 21, which is adapted to connect to the driving member. A cleaning member 3 is connected to the second end of the rotating rod 21. The driving member can then be used to drive the rotating rod 21 to rotate relative to the central hole 11, thereby driving the cleaning member 3 at the second end of the rotating rod 21 to rotate, allowing the cleaning member 3 to polish and clean the inner wall surface of the exhaust duct, completing the exhaust duct cleaning operation.

[0039] Specifically, to facilitate the control of the relative rotation of the rotating rod 21, the rotating rod 21 is inserted into the central hole 11, and the driving connecting rod 23 protrudes from the side of the fixing base 1 facing away from the cleaning member 3. The driving member on the outside of the fixing base 1 can then be used to drive the rotating rod 21 to rotate, completing the exhaust duct cleaning operation while ensuring that the operator does not come into contact with the fixing base 1 or floating objects in the exhaust duct, further ensuring the operator's safety during the operation.

[0040] Preferably, when the driving member is connected to the driving connecting rod 23 protruding from the fixing seat 1, the driving member can be a handheld electric drill gun.

[0041] Furthermore, in another embodiment of the present invention, the first end of the rotating rod 21 may also be located within the center hole 11, and the driving member may be a rotary motor. The housing of the rotary motor is connected to the housing of the fixing base 1 on the side facing away from the cleaning member 3 via fasteners such as bolts or studs. The driving shaft of the rotary motor extends into the center hole 11 and is connected to the driving connecting rod 23, so that the rotary motor drives the rotating rod 21 to rotate, thereby completing the cleaning operation of the exhaust duct. A sealing gasket or other sealing material is provided between the housing of the rotary motor and the housing of the fixing base 1 to seal the housing of the rotary motor with the housing of the fixing base 1, thereby preventing floating objects from leaking from the center hole 11 and further ensuring that the operator does not come into contact with floating objects.

[0042] Among them, Figure 1 and Figure 3 As shown, a cavity 12 is formed inside the fixing base 1, and a dust removal interface 13 is formed outside the fixing base 1, wherein the cavity 12 faces the cleaning member 3, and the dust removal interface 13 is in communication with the cavity 12. In this embodiment, the fixing base 1 can be connected to an external dust removal duct via the dust removal interface 13, so that after volatiles fall off the inner wall surface of the exhaust duct, the external dust removal duct can promptly remove the floating volatiles in the exhaust duct using the dust removal interface 13, and the floating volatiles in the exhaust duct will not be discharged into the workshop environment, further ensuring that the workshop environment is not contaminated by floating objects.

[0043] Among them, the maximum length of the transmission part 2 is equal to the height of the straight wall of the exhaust pipe, so as to ensure that the transmission part 2 can drive the cleaning part 3 to move in the entire exhaust pipe, so that the cleaning part 3 can grind and clean the inner wall surface of the entire exhaust pipe to ensure the cleaning quality and cleaning efficiency of the exhaust pipe by the cleaning device.

[0044] Furthermore, in order to prevent the exhaust gas discharged into the exhaust pipe from flowing back into the single crystal furnace, the connection section between the exhaust pipe and the single crystal furnace is usually an elbow with a certain angle. Figure 1 and Figure 4 As shown, a flexible shaft 24 is provided between the transmission member 2 and the cleaning member 3. The first end of the flexible shaft 24 is fixedly connected to the transmission member 2, and the second end of the flexible shaft 24 is fixedly connected to the cleaning member 3. Furthermore, when the cleaning member 3 is extended into the exhaust duct, the flexible shaft 24 can be adapted to fit the connecting elbow between the exhaust duct and the single crystal furnace table, allowing the cleaning member 3 to polish and clean the inner wall of the connecting elbow, further ensuring the cleaning quality and efficiency of the cleaning device in cleaning the exhaust duct.

[0045] In another embodiment of the present invention, when the cleaning device is fixed to the exhaust duct, in order to facilitate the transmission member 2 to drive the cleaning member 3 to move within the inner wall surface of the exhaust duct, the rotating rod 21 in the transmission member 2 can be set to a length-adjustable structure. Specifically, Figure 5As shown, the rotating rod 21 includes multiple connecting rods 25, which are connected end to end. The diameters of two adjacent connecting rods 25 gradually decrease along a predetermined direction. The connecting rod 25 with the largest diameter is rotatably connected to the fixed base 1. In other words, the rotating rod 21 forms a telescopic rod structure through the multiple connecting rods 25. Furthermore, by moving one portion of the connecting rods 25 relative to another portion of the connecting rods 25, the depth of the rotating rod 21 inserted into the exhaust duct can be adjusted. This allows the cleaning device to clean the inner wall surface of the exhaust duct at a corresponding depth according to the actual cleaning operation, ensuring accurate and efficient cleaning operations.

[0046] Preferably, the rotating rod 21 can adopt an electric telescopic rod structure, and a drive motor and a transmission assembly can be provided in the fixed seat 1. The drive motor drives the transmission assembly to operate to realize automatic adjustment of the length of the rotating rod 21, thereby grinding and cleaning the inner wall surfaces of different depths inside the exhaust pipe.

[0047] Among them, Figure 1 and Figure 3 As shown, the fixing seat 1 is provided with a handle ring 14, so that the position of the fixing seat 1 can be moved and adjusted through the handle ring 14, thereby improving the mobility of the single crystal furnace exhaust duct cleaning device.

[0048] Furthermore, a protective cover is preferably provided on the handle ring 14, and the protective cover is made of heat-insulating and non-slip materials, such as rubber covers, etc., so as to use the protective cover to insulate the handle ring 14, thereby preventing the operator from being burned by high temperature when holding the handle ring 14 and providing good holding stability.

[0049] The above is a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications are also considered to be within the scope of protection of the present invention.

Claims

1. A single crystal furnace exhaust pipe cleaning device, characterized in that: It includes a fixing seat for closing the exhaust port of the exhaust duct, a transmission member connected to the fixing seat, and a cleaning member connected to the transmission member, wherein the cleaning member is located at one end of the transmission member away from the fixing seat, and the transmission member is suitable for driving the cleaning member to move in a predetermined direction and drive the cleaning member to rotate so that the cleaning member cleans the exhaust duct.

2. The single crystal furnace exhaust duct cleaning device according to claim 1 is characterized in that: A protective cover is provided on a side of the fixing seat facing the transmission member, and the protective cover is arranged around the exhaust pipe.

3. The single crystal furnace exhaust duct cleaning device according to claim 2, characterized in that: A plurality of support rods are provided around a side of the fixing base facing the exhaust duct, and the protective cover is wrapped around the plurality of support rods; A plurality of protective cover fixing bosses are formed on the side surface of the fixing seat, and the number of the protective cover fixing bosses is the same as the number of the support rods.

4. The single crystal furnace exhaust duct cleaning device according to claim 1, characterized in that: The fixing seat is formed with a central hole, and the transmission member is provided with a rotating rod, and the rotating rod is rotatably arranged in the central hole through a bearing; The first end of the rotating rod is provided with a driving connecting rod, and the driving connecting rod is suitable for being connected to the driving member; the cleaning member is connected to the second end of the rotating rod.

5. The single crystal furnace exhaust duct cleaning device according to claim 4 is characterized in that: The rotating rod is passed through the central hole, and the driving connecting rod protrudes from a side of the fixing seat away from the cleaning piece.

6. The single crystal furnace exhaust duct cleaning device according to claim 1, characterized in that: A cavity is formed inside the fixing seat, and a dust removal interface is formed outside the fixing seat, wherein the cavity faces the cleaning piece, and the dust removal interface is communicated with the cavity.

7. The single crystal furnace exhaust duct cleaning device according to claim 1, characterized in that: The maximum length of the transmission member is equal to the height of the straight wall of the exhaust pipe.

8. The single crystal furnace exhaust duct cleaning device according to claim 7, characterized in that: A flexible shaft is provided between the transmission member and the cleaning member, a first end of the flexible shaft is fixedly connected to the transmission member, and a second end of the flexible shaft is fixedly connected to the cleaning member.

9. The single crystal furnace exhaust duct cleaning device according to claim 4, characterized in that: The rotating rod includes a plurality of connecting rods, which are connected end to end in sequence, and the diameters of two adjacent connecting rods gradually decrease along a predetermined direction, wherein the connecting rod with the largest diameter is rotatably connected to the fixing seat.

10. The single crystal furnace exhaust duct cleaning device according to claim 1, characterized in that: The fixing seat is provided with a handle ring.

Images