Thermal insulation barrel and furnace tube equipment

Abstract

According to the heat preservation barrel and the furnace tube equipment, the base is arranged, the vacuum quartz plates are horizontally arranged on the base, and each vacuum quartz plate is provided with a non-heat-conducting vacuum cavity, so that heat can only be transmitted through heat radiation, and compared with an existing heat preservation barrel formed by solid quartz plates, the heat preservation barrel has the advantages that the heat preservation efficiency is greatly improved; the heat preservation effect of the heat preservation barrel can be effectively improved, meanwhile, the flow guide function is taken into consideration, the number of the needed vacuum quartz plates can be freely adjusted and set according to different furnace tube devices, the compatibility of the heat preservation barrel on different types of devices is enhanced, and therefore the production efficiency is improved while the process effect is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of furnace tube machines, in particular to a heat preservation barrel and furnace tube equipment. Background Art

[0002] The furnace tube machine is a process equipment used for semiconductor silicon wafer processing. Silicon wafer processing is a very precise process. Temperature is a very important indicator in the silicon wafer processing process, which directly affects the thickness and uniformity of the silicon wafer film.

[0003] To ensure stable temperature within the furnace's reaction chamber and enhance thermal insulation, a heat preservation barrel is installed. During the process, the barrel is located beneath the thermal reaction tubes in the furnace, supporting the quartz boat and providing thermal insulation. After the process is complete, the barrel descends with the quartz boat into the microenvironment. Its inherent heat capacity affects the temperature fluctuations within the microenvironment, necessitating a relatively small heat storage capacity.

[0004] However, the existing insulation barrel is basically a layered structure composed of solid quartz plates, which limits the insulation performance of the insulation barrel and leads to unsatisfactory insulation effect of the insulation barrel. Therefore, there is an urgent need for an insulation barrel with good insulation effect. Utility Model Content

[0005] In view of this, an embodiment of the present invention provides a heat preservation barrel and a furnace tube device to solve the problem that the heat preservation barrel has unsatisfactory performance due to the layered structure composed of solid quartz plates in the existing heat preservation barrel.

[0006] To achieve the above objectives, the present invention provides the following technical solutions:

[0007] A first aspect of the utility model provides a heat preservation bucket, comprising: a base and a plurality of vacuum quartz plates arranged on the base.

[0008] Preferably, the vacuum quartz plate comprises: a first quartz plate and a second quartz plate;

[0009] A vacuum chamber is provided between the first quartz plate and the second quartz plate.

[0010] Preferably, a plurality of support columns are provided in the vacuum chamber.

[0011] Preferably, the diameter of the support pillar ranges from 0.3 mm to 0.5 mm.

[0012] Preferably, the thickness of the vacuum quartz plate ranges from 3 mm to 5 mm.

[0013] Preferably, the thickness of the vacuum chamber is in the range of 0.1 mm to 0.3 mm.

[0014] Preferably, the first surface and / or the second surface of the vacuum quartz plate is provided with a low-emissivity film.

[0015] Preferably, the base comprises: an upper quartz plate, a lower quartz plate and a plurality of support rods;

[0016] A plurality of support rods are arranged between the upper quartz plate and the lower quartz plate;

[0017] The support rod is provided with a groove for fixing the vacuum quartz plate.

[0018] The second aspect of the present invention provides a furnace tube device, comprising the heat preservation barrel disclosed in the first aspect of the present invention.

[0019] Based on the above-mentioned insulation barrel and furnace tube equipment provided by the utility model, a base is set and several vacuum quartz plates are horizontally set on the base. Since the vacuum quartz plates of the present application have a non-heat-conducting vacuum cavity, heat can only be transferred through thermal radiation. Therefore, compared with the existing insulation barrel composed of solid quartz plates, the present application can not only effectively improve the insulation effect of the insulation barrel, but also take into account the diversion effect, and can freely adjust the required number of vacuum quartz plates according to different furnace tube equipment, thereby enhancing the compatibility of the insulation barrel on different types of equipment, thereby improving production efficiency while ensuring the process effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0021] Figure 1 A schematic structural diagram of a heat preservation barrel provided by an embodiment of the present utility model;

[0022] Figure 2 A top view of a vacuum quartz plate provided in an embodiment of the present utility model;

[0023] Figure 3 A front view of a vacuum quartz plate provided in an embodiment of the present utility model;

[0024] Figure 4 A cross-sectional view of another vacuum quartz plate provided in an embodiment of the present utility model;

[0025] Figure 5 A cross-sectional view of another vacuum quartz plate provided in an embodiment of the present utility model;

[0026] Figure 6A schematic diagram of an application of a conventional heat preservation barrel provided by an embodiment of the present utility model;

[0027] Figure 7 A schematic diagram of the application of the heat preservation barrel provided in the embodiment of the utility model;

[0028] Figure 8 A schematic diagram of another application of the heat preservation bucket provided in an embodiment of the present utility model;

[0029] Figure 9 This is a structural schematic diagram of the furnace tube equipment provided in an embodiment of the utility model.

[0030] Among them, the base 1, the upper quartz plate 11, the lower quartz plate 12, the support rod 13, the groove 14, the vacuum quartz plate 2, the first quartz plate 21, the second quartz plate 22, the vacuum chamber 23, and the support column 24;

[0031] Furnace tube equipment: furnace tube 31, manifold 32, radiator 33, wafer boat 34 and internal thermocouple 35. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0033] The present invention provides a heat preservation barrel. Figures 1 to 9 , Figure 1 Schematic diagram of the structure of a heat preservation barrel, which includes a base 1 and a plurality of vacuum quartz plates 2 horizontally arranged on the base 1.

[0034] It should be noted that the vacuum quartz plate 2 is a quartz plate with a vacuum cavity 23 inside. As the gas pressure in the vacuum cavity 23 decreases, the gas density will also decrease, the mean free path of the gas molecules will increase, and the frequency and intensity of collisions between gas molecules and between gas molecules and the container wall will be relatively weakened, thereby reducing the heat conduction capacity. Therefore, the vacuum quartz plate 2 can provide a certain degree of thermal insulation.

[0035] The embodiment of the present invention is provided with a base 1 and a plurality of vacuum quartz plates 2 are horizontally arranged on the base 1. Since the vacuum quartz plates 2 of the present application have a non-heat-conducting vacuum cavity, heat can only be transferred through thermal radiation. Therefore, compared with the existing insulation barrel composed of solid quartz plates, the present application can not only effectively improve the insulation effect of the insulation barrel, but also take into account the diversion effect, and can freely adjust the required number of vacuum quartz plates 2 according to different furnace tube machines, thereby enhancing the compatibility of the insulation barrel on different types of equipment, thereby ensuring the process effect while improving production efficiency.

[0036] Specifically, the vacuum quartz plate 2 includes: a first quartz plate 21 and a second quartz plate 22;

[0037] A vacuum chamber 23 is provided between the first quartz plate 21 and the second quartz plate 22 .

[0038] It should be noted that the vacuum quartz plate 2 is configured as a first quartz plate 21 and a second quartz plate 22, and a vacuum cavity 23 is provided between the first quartz plate 21 and the second quartz plate 22. The first quartz plate 21 and the second quartz plate 22 can be completely fused under a high-temperature vacuum environment, and a vacuum cavity 23 is formed between the first quartz plate 21 and the second quartz plate 22. Therefore, the vacuum quartz plate 2 can play a certain role in heat insulation.

[0039] Specifically, refer to Figure 4 Several support columns 24 are provided in the vacuum chamber 23 .

[0040] It should be noted that, by providing a plurality of support columns 24 in the vacuum chamber 23 , it is possible to prevent the vacuum quartz plate 2 from being deformed in a high temperature environment due to the different pressures inside and outside the vacuum chamber 23 .

[0041] Specifically, the diameter of the support column 24 ranges from 0.3 mm to 0.5 mm.

[0042] It should be noted that the diameter of the support column 24 can be 0.3 mm, 0.5 mm, or 0.35 mm, and those skilled in the art can make the selection according to their needs.

[0043] Specifically, the thickness of the vacuum quartz plate 2 ranges from 3 mm to 5 mm.

[0044] It should be noted that the thickness of the vacuum quartz plate 2 can be 3 mm, 5 mm, or 4 mm, and those skilled in the art can select the thickness according to their needs.

[0045] Specifically, the first surface and / or the second surface of the vacuum quartz plate 2 is provided with a low-emissivity film.

[0046] It should be noted that by providing a low-emissivity film on the first surface and / or the second surface of the vacuum quartz plate 2 , the thermal insulation performance of the vacuum quartz plate 2 can be further improved, and the overall thermal insulation performance of the insulation barrel can be further improved.

[0047] Specifically, the base 1 includes: an upper quartz plate 11, a lower quartz plate 12 and a plurality of support rods 13;

[0048] A plurality of support rods 13 are disposed between the upper quartz plate 11 and the lower quartz plate 12;

[0049] The support rod 13 is provided with a groove 14 for fixing the vacuum quartz plate 2 .

[0050] It should be noted that by providing the groove 14 on the support rod 13 and horizontally plugging the vacuum quartz plate 2 into the support rod 13 through the groove 14 , the installation efficiency of the support rod 13 and the vacuum quartz plate 2 can be improved.

[0051] Preferably, the number of support rods 13 is 3 or 5.

[0052] It should be noted that the number of support rods 13 can be 3 or 5, and those skilled in the art can make the selection according to needs.

[0053] Preferably, the vacuum quartz plate 2 is a circular structure.

[0054] Compared with the existing insulation barrel, this application has the following advantages:

[0055] To facilitate understanding of the advantages of the above solution, an example is given below.

[0056] 1. Reference Figure 6 and Figure 7 For example, if the space height of the existing reaction chamber is 100, when a solid quartz plate is used, the space of the insulation barrel is 20, the space of the wafer boat is 80, and the process loss space on the wafer boat is 10. However, if a vacuum quartz plate is used, while ensuring that the height of the insulation barrel remains unchanged, assuming that the process loss is reduced by 5, the production capacity will increase from 70 to 75.

[0057] 2. Reference Figure 6 and Figure 8 For example, the existing reaction chamber has a space height of 100. When a solid quartz plate is used, the space of the insulation barrel is 20, the space of the wafer boat is 80, and the process loss space on the wafer boat is 10. If a vacuum quartz plate is used, while the insulation effect of the insulation barrel remains unchanged, the length of the insulation barrel is shortened to 15, and the length of the wafer boat is increased from 80 to 85. Assuming that the process loss can be reduced by 5, the production capacity is increased from 70 to 80.

[0058] Based on the insulation barrel provided in the above embodiment, the present utility model embodiment also provides a furnace pipe device, referring to Figures 1 to 8, furnace tube equipment includes: insulation barrel;

[0059] The heat preservation barrel comprises a base 1 and a plurality of vacuum quartz plates 2 horizontally arranged on the base 1 .

[0060] It should be noted that the vacuum quartz plate 2 is a quartz plate with a vacuum cavity 23 inside. As the gas pressure in the vacuum cavity 23 decreases, the gas density will also decrease, the mean free path of the gas molecules will increase, and the frequency and intensity of collisions between gas molecules and between gas molecules and the container wall will be relatively weakened, thereby reducing the heat conduction capacity. Therefore, the vacuum quartz plate 2 can provide a certain degree of thermal insulation.

[0061] The embodiment of the present invention is provided with a base 1 and a plurality of vacuum quartz plates 2 are horizontally arranged on the base 1. Since the vacuum quartz plates 2 of the present application have a non-heat-conducting vacuum cavity, heat can only be transferred through thermal radiation. Therefore, compared with the existing insulation barrel composed of solid quartz plates, the present application can not only effectively improve the insulation effect of the insulation barrel, but also take into account the diversion effect, and can freely adjust the required number of vacuum quartz plates 2 according to different furnace tube machines, thereby enhancing the compatibility of the insulation barrel on different types of equipment, thereby ensuring the process effect while improving production efficiency.

[0062] The furnace tube equipment also includes: a furnace tube 31, a manifold 32, a radiator 33, a crystal boat 34 and an internal thermocouple 35;

[0063] Manifold 32 is located below furnace tube 31. Its primary function is to distribute and collect fluid. In a furnace tube system, manifold 32 is typically located at the inlet and outlet. Manifold 32 evenly distributes fluid to each section of the furnace tube, ensuring that each tube receives the appropriate amount of fluid, thereby ensuring uniform heating and reaction. After the reaction or heating in furnace tube 31 is complete, manifold 32 collects and discharges the fluid for subsequent processing or recycling.

[0064] The radiator 33 is arranged in the furnace tube, and its main function is to dissipate heat and exchange heat. The radiator has multiple fins, which are usually made of copper or aluminum. The main function of the fins is to transfer heat from the heat pipe to the air, thereby achieving heat dissipation. The heat pipe itself only transfers heat from the base to the fins, and the fins are the key components that actually exchange heat with the air. In furnace tube equipment, the fins are usually located around the heating element to improve the heat exchange efficiency by increasing the surface area. The design and layout of the fins are crucial to the heat dissipation effect. Reasonable fin structure and material selection can significantly improve the thermal performance and service life of the equipment. For example, in a thermal oxidation furnace, the design of the fins can affect the temperature distribution and gas flow inside the furnace tube, thereby affecting the uniformity and efficiency of silicon wafer processing.

[0065] The furnace tube 31 of the present application is a double-layer structure, the wafer is located in the internal space of the furnace tube 31, and the top of the furnace tube 31 mainly plays the role of protection, support and heat insulation.

[0066] The wafer boat 34 is located inside the furnace tube and is mainly used to carry wafers.

[0067] An internal thermocouple 35 is provided in the furnace tube for detecting the temperature inside the furnace tube 31 .

[0068] The above description of the disclosed embodiments will enable one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not limited to the embodiments shown herein but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A thermos barrel, characterized in that: include: A base and a plurality of vacuum quartz plates horizontally arranged on the base.

2. The heat preservation barrel according to claim 1, characterized in that: The vacuum quartz plate comprises: a first quartz plate and a second quartz plate; A vacuum chamber is provided between the first quartz plate and the second quartz plate.

3. The heat preservation barrel according to claim 2, characterized in that: A plurality of supporting columns are arranged in the vacuum chamber.

4. The heat preservation barrel according to claim 3, characterized in that: The diameter of the support column ranges from 0.3 mm to 0.5 mm.

5. The heat preservation barrel according to claim 2, characterized in that: The thickness of the vacuum quartz plate ranges from 3 mm to 5 mm.

6. The heat preservation barrel according to claim 5, characterized in that: The thickness of the vacuum chamber ranges from 0.1 mm to 0.3 mm.

7. The heat preservation barrel according to claim 1, characterized in that: The first surface and / or the second surface of the vacuum quartz plate is provided with a low-emissivity film.

8. The heat preservation barrel according to any one of claims 1 to 7, characterized in that: The vacuum quartz plate includes a plurality of vacuum cavities.

9. The heat preservation barrel according to any one of claims 1 to 7, characterized in that: The base comprises an upper quartz plate, a lower quartz plate and a plurality of support rods; A plurality of support rods are arranged between the upper quartz plate and the lower quartz plate; The support rod is provided with a groove for fixing the vacuum quartz plate.

10. A furnace tube device, characterized in that: The invention comprises the heat preservation barrel as claimed in any one of claims 1 to 9.

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