Aligning and positioning clamp for substrate bonding

Abstract

The utility model provides an alignment positioning clamp for substrate bonding, which comprises two symmetrically arranged supporting seats, an X-axis moving block is arranged between the two supporting seats, X-axis adjusting assemblies are arranged on the supporting seats, the output ends of the X-axis adjusting assemblies are connected with the X-axis moving block, and the output ends of the X-axis adjusting assemblies are connected with the X-axis moving block. A Y-axis adjusting assembly and a Y-axis moving block arranged at the output end of the Y-axis adjusting assembly are arranged on the X-axis moving block, a rotary table is arranged on the Y-axis moving block, a plurality of adsorption holes are formed in the rotary table, a vacuum generator is arranged at the lower end of the Y-axis moving block, and the vacuum generator is communicated with the adsorption holes through a connecting pipe. According to the utility model, through the position adjustment of the X-axis electric push rod and the Y-axis electric push rod and the angle adjustment of the rotary table, the device can adapt to substrates with different sizes, shapes and bonding requirements, the position and the angle of the substrate can be flexibly adjusted according to actual requirements, and various complex bonding process requirements can be met.

Description

Technical Field

[0001] The utility model mainly relates to the technical field of substrate bonding, in particular to an alignment and positioning fixture for substrate bonding. Background Art

[0002] In modern industrial production, especially in semiconductor manufacturing, electronic component assembly, optical device processing and other fields, substrate bonding technology is a key process. With the continuous advancement of science and technology, the requirements for the precision and quality of substrate bonding are becoming increasingly higher.

[0003] Traditional substrate bonding processes often face numerous challenges. The lack of high-precision adjustment devices for substrate positioning and alignment can lead to misalignment between substrates during bonding, impacting bonding quality and performance. For example, in semiconductor chip bonding, even slight misalignment can cause poor circuit connections, impacting chip functionality and reliability. Furthermore, traditional equipment lacks the flexibility and precision required for multi-axis adjustment. The turntable settings may be inadequate to accommodate bonding at varying angles. Utility Model Content

[0004] 1. Technical problems to be solved by the utility model:

[0005] The utility model provides an alignment and positioning fixture for substrate bonding, which is used to solve the technical problems existing in the above background technology.

[0006] 2. Technical solution:

[0007] To achieve the above-mentioned purpose, the technical solution provided by the present invention is: an alignment and positioning fixture for substrate bonding, comprising two symmetrically arranged support seats, an X-axis moving block is arranged between the two support seats, an X-axis adjustment component is arranged on the support seat, the output end of the X-axis adjustment component is connected to the X-axis moving block, a Y-axis adjustment component and a Y-axis moving block arranged on the output end of the Y-axis adjustment component are arranged on the X-axis moving block, a turntable is provided on the Y-axis moving block, a plurality of adsorption holes are opened on the turntable, a vacuum generator is provided at the lower end of the Y-axis moving block, and the vacuum generator is connected to the adsorption holes through a connecting pipe.

[0008] Preferably, the X-axis moving block includes two symmetrically arranged mounting blocks, the two mounting blocks are connected by two symmetrically arranged connecting blocks, the height of the connecting blocks is lower than the height of the mounting blocks, and the Y-axis moving block is arranged above the connecting blocks.

[0009] Preferably, two X-axis guide shafts are fixedly installed between the two support seats, the X-axis moving block is slidably sleeved on the X-axis guide shafts, and the X-axis adjustment component adopts an X-axis electric push rod, and the output end of the X-axis electric push rod extends out of the support seat and is connected to the X-axis moving block.

[0010] Preferably, two Y-axis guide shafts are fixedly installed between the two mounting blocks, the Y-axis moving block is slidably sleeved on the Y-axis guide shaft, the Y-axis adjustment assembly adopts a Y-axis electric push rod, the Y-axis electric push rod is fixed on one of the mounting blocks, and the output end of the Y-axis electric push rod extends out of the mounting block and is connected to the Y-axis moving block.

[0011] Preferably, a mounting groove is provided at the center of the Y-axis moving block, and the turntable includes a driving mechanism fixed in the mounting groove, the driving mechanism includes a motor and a reducer, and the output end of the reducer is connected to the turntable through a rotating shaft.

[0012] 3.Beneficial effects:

[0013] Compared with the prior art, the technical solution provided by this utility model has the following beneficial effects:

[0014] This utility model utilizes X-axis and Y-axis electric push rods for precise position adjustment in the X- and Y-axis directions, respectively. The turntable is controlled by a drive mechanism, enabling rotation and precise adjustment at any angle. This is crucial for processes requiring bonding at specific angles, such as in the assembly of optical devices, ensuring accurate light transmission and device performance. Through position adjustment of the X- and Y-axis electric push rods, as well as angle adjustment of the turntable, the device can adapt to substrates of varying sizes, shapes, and bonding requirements. The position and angle of the substrate can be flexibly adjusted according to actual needs, meeting the requirements of various complex bonding processes. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0016] Figure 2 This is a schematic diagram of the overall structure of the utility model from another angle;

[0017] Figure 3 This is a schematic diagram of the turntable structure of the utility model;

[0018] Figure 4 This is a schematic diagram of the X-axis moving block structure of the present utility model;

[0019] Figure 5 This is a schematic structural diagram of the vacuum generator of the present utility model.

[0020] Reference numerals:

[0021] 1. Support base; 2. X-axis moving block; 21. Mounting block; 22. Connecting block; 23. Y-axis guide shaft; 3. X-axis guide shaft; 4. X-axis electric push rod; 5. Y-axis moving block; 6. Y-axis electric push rod; 7. Turntable; 71. Drive mechanism; 72. Rotating shaft; 73. Adsorption hole; 8. Mounting slot; 9. Vacuum generator; 91. Connecting pipe. DETAILED DESCRIPTION

[0022] To facilitate understanding of the present invention, the present invention will be described more comprehensively below with reference to the relevant drawings. Several embodiments of the present invention are given in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0023] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "page", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0024] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature specified as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of this utility model, "plurality" means two or more, unless otherwise specifically defined.

[0025] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connected," "fixed," "provided with," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integral connection; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; or internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0026] It should be noted that the structures not introduced in the present invention do not involve the design points and improvement directions of the present invention, and are the same as the existing technology or can be implemented by using the existing technology, so they are not described in detail here. Example

[0027] Refer to the attached Figures 1 to 5 An alignment and positioning fixture for substrate bonding includes two symmetrically arranged support bases 1, an X-axis moving block 2 is arranged between the two support bases 1, an X-axis adjustment component is arranged on the support base 1, the output end of the X-axis adjustment component is connected to the X-axis moving block 2, a Y-axis adjustment component and a Y-axis moving block 5 arranged on the output end of the Y-axis adjustment component are arranged on the X-axis moving block 2, a turntable 7 is arranged on the Y-axis moving block 5, a plurality of adsorption holes 73 are opened on the turntable 7, and a vacuum generator 9 is arranged at the lower end of the Y-axis moving block 5, which is connected to the adsorption hole 73 through a connecting pipe 91.

[0028] The X-axis moving block 2 includes two symmetrically arranged mounting blocks 21, which are connected by two symmetrically arranged connecting blocks 22. The height of the connecting blocks 22 is lower than the height of the mounting blocks 21. The Y-axis moving block 5 is arranged above the connecting blocks 22 to prevent the connecting blocks 22 from affecting the movement of the Y-axis moving block 5 in the Y-axis direction, thereby ensuring stability when moving in the Y-axis direction.

[0029] The X-axis moving block 2 is composed of two mounting blocks 21 and a connecting block 22. The height of the connecting block 22 is lower than that of the mounting block 21. This structural design makes the entire device more stable during operation. At the same time, the Y-axis moving block 5 is set above the connecting block 22.

[0030] Two X-axis guide shafts 3 are fixedly installed between the two support seats 1, the X-axis moving block 2 is slidably sleeved on the X-axis guide shaft 3, and the X-axis adjustment component adopts an X-axis electric push rod 4. The output end of the X-axis electric push rod 4 extends out of the support seat 1 and is connected to the X-axis moving block 2.

[0031] Two Y-axis guide shafts 23 are fixedly installed between the two mounting blocks 21, and the Y-axis moving block 5 is slidably sleeved on the Y-axis guide shaft 23. The Y-axis adjustment component adopts a Y-axis electric push rod 6, which is fixed on a mounting block 21. The output end of the Y-axis electric push rod 6 extends out of the mounting block 21 and is connected to the Y-axis moving block 5.

[0032] The X-axis guide shaft 3 and the Y-axis guide shaft 23 provide precise guidance for the movement of the X-axis moving block 2 and the Y-axis moving block 5, respectively, preventing deviation or shaking during movement. This ensures the stability and accuracy of the device during position adjustment, thereby improving the quality and reliability of the bonding process.

[0033] A mounting slot 8 is provided at the center of the Y-axis moving block 5 . The turntable 7 includes a driving mechanism 71 fixed in the mounting slot 8 . The driving mechanism 71 includes a motor and a reducer. The output end of the reducer is connected to the turntable 7 via a rotating shaft 72 .

[0034] Working principle:

[0035] The substrate to be bonded is placed on turntable 7, and vacuum generator 9 is turned on. The vacuum is transmitted through connecting tube 91 to suction holes 73 on turntable 7, firmly adsorbing the substrate to the surface of turntable 7. Throughout the bonding process, vacuum generator 9 remains in operation, ensuring that the substrate does not move and providing stable support for the bonding operation.

[0036] The X-axis electric push rod 4 is activated. Its output pushes the X-axis moving block 2 to slide along the X-axis guide shaft 3. Because the X-axis moving block 2 supports the subsequent Y-axis adjustment assembly, Y-axis moving block 5, and turntable 7, the entire device moves in the X-axis direction. When the substrate approaches the target position in the X-axis direction, the X-axis electric push rod 4 stops.

[0037] The Y-axis electric push rod 6 is operated. The output end of the Y-axis electric push rod 6 pushes the Y-axis moving block 5 to slide on the Y-axis guide shaft 23. The Y-axis moving block 5 drives the turntable 7 and the substrate thereon to move in the Y-axis direction. By adjusting the extension and retraction of the Y-axis electric push rod 6, the substrate is also adjusted to the appropriate position in the Y-axis direction for accurate alignment with the corresponding bonding component.

[0038] The driving mechanism 71 of the turntable 7 is started, and the motor drives the rotating shaft 72 through the reducer to rotate, thereby rotating the turntable 7. According to the actual bonding requirements, the substrate is adjusted to the required angle.

[0039] After the position and angle of the substrate are adjusted, the bonding operation is performed. The substrate and the corresponding component can be bonded by mechanical pressing, welding, etc. At this time, the position and angle of the substrate are precisely controlled and stably fixed, which can ensure the quality and accuracy of the bonding.

[0040] After the bonding is completed, the vacuum generator 9 is turned off to release the adsorption of the substrate. Then, according to the subsequent process requirements, the bonded components are transferred or processed in the next step.

[0041] The above-mentioned embodiments only express a certain implementation method of the utility model, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the patent of the utility model. It should be pointed out that for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the utility model, which all fall within the scope of protection of the utility model. Therefore, the scope of protection of the utility model patent shall be based on the attached claims.

Claims

1. An alignment and positioning fixture for substrate bonding, comprising two symmetrically arranged support seats (1), characterized in that: An X-axis moving block (2) is provided between the two support seats (1); an X-axis adjustment component is provided on the support seat (1); an output end of the X-axis adjustment component is connected to the X-axis moving block (2); a Y-axis adjustment component and a Y-axis moving block (5) provided on the output end of the Y-axis adjustment component are provided on the X-axis moving block (2); a turntable (7) is provided on the Y-axis moving block (5); a plurality of adsorption holes (73) are provided on the turntable (7); a vacuum generator (9) is provided at the lower end of the Y-axis moving block (5); the vacuum generator (9) is connected to the adsorption holes (73) through a connecting pipe (91).

2. The alignment and positioning fixture for substrate bonding according to claim 1, wherein: The X-axis moving block (2) comprises two symmetrically arranged mounting blocks (21), the two mounting blocks (21) being connected via two symmetrically arranged connecting blocks (22), the height of the connecting blocks (22) being lower than the height of the mounting blocks (21), and the Y-axis moving block (5) being arranged above the connecting blocks (22).

3. The substrate bonding alignment fixture according to claim 1, wherein: Two X-axis guide shafts (3) are fixedly installed between the two support seats (1), the X-axis moving block (2) is slidably sleeved on the X-axis guide shafts (3), and the X-axis adjustment component adopts an X-axis electric push rod (4), the output end of the X-axis electric push rod (4) extends out of the support seat (1) and is connected to the X-axis moving block (2).

4. The alignment and positioning fixture for substrate bonding according to claim 2, wherein: Two Y-axis guide shafts (23) are fixedly installed between the two mounting blocks (21), the Y-axis moving block (5) is slidably sleeved on the Y-axis guide shafts (23), the Y-axis adjustment component adopts a Y-axis electric push rod (6), the Y-axis electric push rod (6) is fixed on one of the mounting blocks (21), and the output end of the Y-axis electric push rod (6) extends out of the mounting block (21) and is connected to the Y-axis moving block (5).

5. The substrate bonding alignment fixture according to claim 1, wherein: A mounting groove (8) is provided at the center of the Y-axis moving block (5). The turntable (7) includes a driving mechanism (71) fixed in the mounting groove (8). The driving mechanism (71) includes a motor and a reducer. The output end of the reducer is connected to the turntable (7) via a rotating shaft (72).

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