Wafer flower basket clamp

Abstract

The utility model relates to a wafer flower basket clamp. Comprising a placing support and flower baskets, and the flower baskets are arranged in two clamping containing grooves in the placing support; according to the utility model, the two clamping accommodating grooves are symmetrically arranged at the two sides of the placing bracket, so that two flower baskets with the same size can be stably hung at one time, and synchronous cleaning and processing of all 4-inch, 6-inch or 8-inch wafers in the two flower baskets can be carried out at the same time, and the processing efficiency can be obviously improved. The placing support is detachably connected to the hanging frame connecting block, rapid and stable installation between the placing support and the hanging frame connecting block is achieved through the T-shaped connecting groove, the vertical connecting transverse plate and the limiting plate, the situation that the placing support slides off is avoided, and potential safety hazards are avoided. When wafers of different sizes need to be cleaned and processed, only the placing supports of corresponding specifications need to be replaced, the placing supports are in threaded connection with the hanger connecting blocks, and replacement is convenient and labor-saving.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing, in particular to a wafer basket clamp. Background Art

[0002] In semiconductor manufacturing technology, cleaning silicon wafers is an essential and key step throughout the manufacturing process.

[0003] Existing patent CN201220219699.7 provides a wafer basket fixture, comprising a fixture body, two slots on each side of the lower portion of the fixture body, and a support surface at the top of the slot. This utility model has a simple structure and can improve the quality of silicon wafer cleaning using a wafer basket.

[0004] However, the above-mentioned wafer basket fixture can only load one basket at a time, and the cleaning efficiency is low; and the fixture body in the above-mentioned technology may slip during the actual installation process, resulting in a long installation time and a safety hazard. Utility Model Content

[0005] The technical problem to be solved by the utility model is to provide a wafer flower basket clamp.

[0006] In order to solve the above technical problems, the technical solution of the utility model is: a wafer basket clamp, the innovation of which is:

[0007] A placement bracket, the placement bracket is vertically arranged and includes an L-shaped main board, the L-shaped main board includes a bottom horizontal section, and a clamping receiving groove is symmetrically provided on both sides of the bottom horizontal section;

[0008] A flower basket is provided in each of the two clamping receiving grooves on the placement bracket;

[0009] The hanger connecting block is detachably mounted on the top of the placement bracket.

[0010] Furthermore, the flower basket includes a body, the top center of the body has a placement slot for accommodating multiple wafers, the top of both sides of the length of the body has a horizontal top plate, and a vertical connecting block is also provided on one side of the body below the two horizontal top plates;

[0011] A first L-shaped limiting block and a second L-shaped limiting block are vertically fixed on both sides of the bottom horizontal section of the L-shaped main board, and a clamping accommodating groove is formed between the first L-shaped limiting block, the second L-shaped limiting block and the L-shaped main board;

[0012] The two vertical connecting blocks of the flower basket are placed in the clamping accommodating groove, and the two horizontal top plates are placed on the top of the first L-shaped limit block and the second L-shaped limit block to prevent the flower basket from falling and achieve a stable connection between the two.

[0013] Furthermore, the rack connection block includes a rectangular block body, and a T-shaped connection groove is opened on one side of the rectangular block body, and the T-shaped connection groove includes an inner transverse groove and an outer longitudinal groove;

[0014] The external longitudinal groove can accommodate the L-shaped main board to pass through;

[0015] The placement bracket also includes a vertical connecting horizontal plate that can be accommodated in the internal horizontal groove. The vertical connecting horizontal plate is vertically fixed to the side surface of the L-shaped main board away from the bottom horizontal section. A limiting plate is also fixed to the top of the L-shaped main board and the vertical connecting horizontal plate. The limiting plate is placed on the top of the hanger connecting block to achieve position limitation.

[0016] Furthermore, threaded connection holes are provided on both sides of the external longitudinal groove on the rectangular block body, and corresponding threaded connection holes are also provided on the vertical connecting cross plate. Two connecting bolts can be used to pass through the rectangular block body and the vertical connecting cross plate to achieve the fastening between the placement bracket and the hanger connecting block.

[0017] Furthermore, a channel is opened through the middle of the rectangular block body, a plug is installed at the bottom of the channel, and the end of a lifting shaft passes through the channel and is fixedly connected to the plug to achieve a stable connection between the lifting shaft and the rectangular block body.

[0018] Furthermore, an anti-leakage pressure plate is fixedly installed between the rectangular block body and the lifting shaft. The anti-leakage pressure plate includes a plate body. A through hole is opened in the center of the plate body to accommodate the lifting shaft, and the plate body is also threadedly connected to the rectangular block body on the side around the through hole.

[0019] The advantages of the present invention are:

[0020] 1. In the present invention, two card receiving grooves are symmetrically provided on both sides of the placement bracket to achieve stable mounting of two flower baskets of the same size at one time, so that all 4-inch, 6-inch or 8-inch wafers in the two flower baskets can be cleaned synchronously at the same time, and the processing efficiency can be significantly improved.

[0021] 2. The placement bracket can be detachably connected to the bracket connection block, and the T-shaped connection groove, vertical connecting horizontal plate and limit plate can be used to achieve quick and stable installation between the two. The placement bracket will not slip, avoiding safety hazards.

[0022] 3. A leak-proof pressure plate is fixedly installed between the rectangular block body and the lifting shaft to achieve leak-proof treatment of the lifting shaft end during the wafer cleaning process.

[0023] 4. A channel is also opened through the middle of the rectangular block body, and a plug is installed at the bottom of the channel. The end of a lifting shaft passes through the channel and is fixedly connected to the plug to achieve a stable connection between the lifting shaft and the rectangular block body.

[0024] 5. When cleaning of wafers of different sizes is required, it is only necessary to replace the placement bracket of the corresponding specifications. The placement bracket and the rack connection block are threadedly connected, making replacement convenient and labor-saving. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a three-dimensional diagram of the present utility model.

[0026] Figure 2 This is a partial structural diagram of the utility model Figure 1 .

[0027] Figure 3 This is a partial structural diagram of the utility model Figure 2 . DETAILED DESCRIPTION

[0028] In order to further illustrate the technical means and effects adopted by the present invention to achieve the predetermined purpose of the utility model, the following is a detailed description of the specific implementation method, structure, characteristics and effects of the present invention in combination with the accompanying drawings and preferred embodiments.

[0029] like Figure 1-3 The wafer basket fixture shown includes a placement bracket 1, a basket 2, a hanger connecting block 3 and a lifting shaft 6.

[0030] The placement bracket 1 is arranged vertically and includes an L-shaped main board 11, a vertically connected horizontal board 12, and a limit plate 13. The L-shaped main board 11 includes a bottom horizontal section, and a snap-in receiving groove 14 is symmetrically provided on both sides of the bottom horizontal section;

[0031] A first L-shaped limit block and a second L-shaped limit block are vertically fixed on both sides of the bottom horizontal section of the L-shaped main board 11, and a clamping accommodating groove 14 is formed between the first L-shaped limit block, the second L-shaped limit block and the L-shaped main board 11;

[0032] The vertical connecting cross plate 12 can be accommodated in the internal cross groove. The vertical connecting cross plate 12 is vertically fixed on the side surface of the L-shaped main board 11 away from the bottom horizontal section. A horizontal limit plate 13 is also provided at the top of the L-shaped main board 11 and the vertical connecting cross plate 12. The limit plate 13 is placed on the top of the hanger connecting block 3 to achieve position limitation.

[0033] The flower basket 2 includes a main body with a placement slot in the center of the top of the main body for accommodating multiple wafers. The top of the two sides of the main body are each provided with a horizontal top plate 4. A vertical connecting block 5 is also provided on one side of the main body below the two horizontal top plates 4.

[0034] A flower basket 2 is provided in each of the two clamping receiving grooves 14 on the placement bracket 1;

[0035] By symmetrically arranging two snap-fitting receiving grooves 14 on both sides of the placement bracket 1, two flower baskets 2 can be stably mounted at one time, and all wafers in the two flower baskets 2 can be cleaned synchronously at the same time, which significantly improves the processing efficiency.

[0036] The two vertical connecting blocks 5 of the flower basket 2 are placed in the snap-fit ​​accommodating grooves 14, and the two horizontal top plates 4 are placed on top of the first L-shaped limit block and the second L-shaped limit block to prevent the flower basket 2 from falling and achieve a stable connection between the two.

[0037] The rack connection block 3 is detachably mounted on the top of the placement bracket 1 .

[0038] The rack connection block 3 includes a rectangular block body 31, and a T-shaped connection groove 32 is opened on one side of the rectangular block body 31 from top to bottom. The T-shaped connection groove 32 includes an inner horizontal groove and an outer vertical groove.

[0039] The external longitudinal groove can accommodate the L-shaped main board 11 to pass through;

[0040] Threaded connection holes are provided on both sides of the external longitudinal groove on the rectangular block body 31, and corresponding threaded connection holes are also provided on the vertical connecting cross plate. Two connecting bolts can be used to penetrate the rectangular block body 31 and the vertical connecting cross plate 12 to achieve the fastening between the placement bracket 1 and the bracket connecting block 3.

[0041] A channel is also opened through the middle of the rectangular block body 31, and a plug is installed at the bottom of the channel. The end of a lifting shaft 6 passes through the channel and is fixedly connected to the plug, thereby realizing a stable connection between the lifting shaft 6 and the rectangular block body 31.

[0042] A leak-proof pressure plate 7 is fixedly installed between the rectangular block body 31 and the lifting shaft 6 to achieve leak-proof treatment of the end of the lifting shaft 6 during the wafer cleaning process.

[0043] The anti-leakage pressure plate 7 includes an octagonal plate body, a through hole is opened in the center of the plate body just to accommodate the lifting shaft 6 to pass through, and the plate body is also connected to the rectangular block body 31 on the side around the through hole.

[0044] The placement bracket 1 in this embodiment can be detachably connected to the hanger connecting block 3, and a quick and stable installation between the two is achieved through the T-shaped connecting groove 32, the vertical connecting cross plate 12, and the limiting plate 13. The placement bracket 1 will not slip, avoiding safety hazards.

[0045] When wafers of different sizes need to be cleaned, the placement bracket 1 of the corresponding specification needs to be replaced. The placement bracket 1 and the rack connecting block 3 are threadedly connected, making replacement convenient and labor-saving.

[0046] Working principle of this patent:

[0047] According to actual needs, select a flower basket mounting bracket 1 of corresponding specifications and install it on the bracket connecting block 3. Mount the flower basket 2 with wafers on it on the bracket 1, and then perform subsequent processing operations.

[0048] The above description is merely a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Although the present invention has been disclosed as a preferred embodiment as above, it is not intended to limit the present invention. Any person skilled in the art can make some changes or modifications to equivalent embodiments using the technical contents disclosed above without departing from the scope of the technical solution of the present invention. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A wafer basket fixture, characterized by: include A placement bracket, the placement bracket is vertically arranged and includes an L-shaped main board, the L-shaped main board includes a bottom horizontal section, and a clamping receiving groove is symmetrically provided on both sides of the bottom horizontal section; A flower basket is provided in each of the two clamping receiving grooves on the placement bracket; The hanger connecting block is detachably mounted on the top of the placement bracket.

2. The wafer basket fixture according to claim 1, characterized in that: The flower basket includes a body, a placement slot for accommodating multiple wafers in the center of the top of the body, a horizontal top plate at the top of both sides of the length of the body, and a vertical connecting block below the two horizontal top plates on one side of the body; A first L-shaped limit block and a second L-shaped limit block facing each other are vertically fixed on both sides of the bottom horizontal section of the L-shaped main board, and a card receiving groove is formed between the first L-shaped limit block, the second L-shaped limit block and the L-shaped main board.

3. The wafer basket fixture according to claim 1, characterized in that: The rack connection block includes a rectangular block body, and a T-shaped connection groove is opened on one side of the rectangular block body, and the T-shaped connection groove includes an inner transverse groove and an outer longitudinal groove; The external longitudinal groove can accommodate the L-shaped main board to pass through; The placement bracket also includes a vertical connecting horizontal plate that can be accommodated in the internal horizontal groove. The vertical connecting horizontal plate is vertically fixed to the side surface of the L-shaped main board away from the bottom horizontal section. A limiting plate is also fixed to the top of the L-shaped main board and the vertical connecting horizontal plate.

4. The wafer basket fixture according to claim 3, characterized in that: Threaded connection holes are provided on both sides of the outer longitudinal groove on the rectangular block body.

5. The wafer basket fixture according to claim 3, characterized in that: A channel is also provided through the middle of the rectangular block body, a plug is installed at the bottom of the channel, and the end of a lifting shaft passes through the channel and is fixedly connected to the plug.

6. The wafer basket fixture according to claim 5, characterized in that: An anti-leakage pressure plate is fixedly installed between the rectangular block body and the lifting shaft.

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