Dust collection device for treating dust falling from furnace wall

Abstract

The utility model belongs to the field of modification of carbide coating equipment, particularly relates to a dust collection device for treating dust falling from a furnace wall, and aims to solve the problem that dust and attachments on a furnace top fly to a furnace bottom and then rebound to a reaction chamber due to the fact that a base or the furnace top is driven to slightly vibrate in the rising process of the furnace bottom or the furnace top after an existing product is charged into the furnace. According to the scheme, the device comprises a dust conveying pipeline arranged around the furnace top, a dust suction opening is formed in the dust conveying pipeline and is close to the outer wall of the furnace top, and the dust conveying pipeline is connected with the air exhaust end of a dust collector through a dust suction pipeline; when dust on the furnace top falls off, the dust is sucked into the dust conveying pipeline under the suction action of the dust suction opening and is finally collected by the dust collector, the dust on the furnace top is directly collected by the designed dust suction device in the falling process, and therefore the dust is prevented from falling off and being attached to the surface of a product, and the high purity of the product is guaranteed.

Description

Technical Field

[0001] The utility model relates to the field of carbide coating equipment modification, in particular to a dust collecting device for processing dust falling from a furnace wall. Background Art

[0002] MOCVD equipment is widely used in the semiconductor industry and is a key piece of equipment in the production process. It also represents the most profitable and heavily invested segment of the industry, sitting at the top of the industry's value chain. Its value accounts for 70% of the entire industry chain (epitaxial wafers, chips, packaging, and applications). Graphite susceptors and components of varying sizes are the core heat- and corrosion-resistant components of MOCVD equipment. They serve as the carrier, heating element, and thermal structure for the substrate, directly determining the uniformity and purity of the film material. However, the production process produces corrosive gases and residual metal organic matter, which can cause the graphite susceptor to corrode and shed powder, significantly reducing its service life. Furthermore, the falling graphite powder can contaminate the chip, becoming one of the primary issues limiting the application of MOCVD equipment and hindering the development of the semiconductor industry.

[0003] An effective solution to the problem of graphite susceptor corrosion and powder shedding is to apply a dense coating to the surface of the graphite susceptor. Currently, a popular coating method involves depositing high-purity SiC or TaC coatings on the graphite susceptor or heat- and corrosion-resistant components via chemical vapor deposition. However, producing SiC and TaC coatings that meet performance requirements, effectively extend the life of the graphite susceptor, and meet the demands of chip growth requires strict control over the coating preparation process.

[0004] The chemical vapor deposition process for depositing SiC or TaC coatings on graphite susceptors places stringent requirements on the cleanliness of the reaction chamber. After the product is loaded into the furnace, the base of the furnace is raised. Slight vibrations from the base can cause some dust and debris from the top of the furnace to drift toward the bottom, where they then rebound into the reaction chamber, ultimately affecting product purity. If reaction residues or carbon powder from carbon-based heat-supporting parts fall off at any point in the reaction chamber and eventually remain on the surface of the graphite base, it will cause the graphite base surface coating to form protrusions larger than 100μm, resulting in a reduction in the coating flatness. Secondly, due to the attachment of impurity protrusions, the purity of the graphite base surface coating will be reduced, and corrosion pits will be formed preferentially during use, accelerating the corrosion failure of the coating. Finally, due to the attachment of impurities to the substrate surface, when depositing the SiC coating, the coating will be deposited on the substrate surface before the impurity surface. This will make it impossible to achieve effective bonding between the coating and the substrate, resulting in the coating maintaining good bonding strength under high-speed rotation, high temperature, and highly corrosive atmosphere, and ultimately causing the coating to crack and fail at the impurity sites.

[0005] In response to the above problems, the device designed in this utility model uses a vacuum cleaner to generate suction, which is used through a pipe and a duckbill to quickly extract dust, thereby ensuring the purity of the reaction chamber and thus ensuring the quality of the product. Utility Model Content

[0006] The utility model provides a dust collection device for processing dust falling from the furnace wall, which solves the problem in the prior art that after the product is loaded into the furnace, the furnace bottom or the furnace top is raised, resulting in slight vibration of the base or the furnace top, which eventually causes some dust and attachments on the furnace top to float to the furnace bottom and then rebound to the reaction chamber, affecting the purity of the product.

[0007] The utility model provides the following technical solutions:

[0008] A dust collection device for processing dust falling from the furnace wall includes a dust transport pipe arranged around the furnace top, a dust collection port is provided on the dust transport pipe, and the dust collection port is arranged close to the outer wall of the furnace top. The dust transport pipe is connected to the exhaust end of the dust collector through the dust collection pipe. When dust falls from the furnace top, it is collected by the dust collector under the suction force of the dust collection port.

[0009] In one possible implementation, a check valve is installed on the dust collection pipe. Before closing the furnace, the vacuum cleaner is first started to generate suction in the dust collection pipe, and then the check valve is opened, and then the furnace is closed. After the furnace is closed, the check valve is closed first, and finally the vacuum cleaner is turned off.

[0010] In one possible implementation, the suction port is a flat duckbill port. By setting it into a duckbill shape, the adsorption effect of the suction port is increased. The duckbill ports are evenly spaced around the furnace top, and the adsorption blind spots around the furnace top are reduced by the evenly spaced arrangement.

[0011] In one possible implementation, the dust transport duct can automatically rotate with the furnace top as the center, and the dust transport duct drives the duckbill mouth to rotate and adsorb together, while ensuring the suction effect, further reducing the blind area of ​​adsorption, and the duckbill mouth can perform 360° adsorption on the outer wall of the furnace top.

[0012] In one possible implementation, the dust transport duct includes a lower fixed part and an upper rotating part rotatably mounted on the lower fixed part and capable of rotating freely. The duckbill is mounted on the upper rotating part. The lower fixed part and the upper rotating part form an annular dust suction cavity. The duckbill is connected to the annular dust suction cavity, and the lower fixed part is connected to the dust suction duct. After starting the vacuum cleaner, the upper rotating part rotates 360° around the furnace top, and the duckbill rotates synchronously with the upper rotating part. At the same time, the duckbill, the annular dust suction cavity and the dust suction duct are connected to the exhaust end of the vacuum cleaner to generate adsorption force to collect the fallen dust.

[0013] In one possible implementation, a drive motor is mounted on the lower fixed part, and a drive wheel is mounted on the output shaft of the drive motor. The drive motor drives the drive wheel to rotate, and the rotation of the drive wheel drives the upper rotating part to rotate, and the rotation of the upper rotating part will not affect the adsorption effect of the duckbill mouth, the annular dust suction cavity, the dust suction pipe and the vacuum cleaner. At the same time, the duckbill mouth, the annular dust suction cavity and the dust suction pipe are connected to the exhaust end of the vacuum cleaner to generate adsorption force to collect the fallen dust.

[0014] In one possible implementation, an impeller is installed in the dust suction pipe, and the rotating shaft of the impeller passes through the dust suction pipe and is fixedly connected to the driving wheel. When gas flows in the dust suction pipe, the impeller is driven to rotate, and the impeller drives the driving wheel to rotate. The rotation of the driving wheel drives the upper rotating part to rotate. At the same time, the duckbill mouth, the annular dust suction cavity and the dust suction pipe are connected to the exhaust end of the vacuum cleaner to generate adsorption force to collect the fallen dust.

[0015] In one possible implementation, an annular dust suction port is opened on the top of the dust transport pipe, and the annular dust suction port is connected to the exhaust end of the vacuum cleaner through the dust suction pipe to generate adsorption force to collect the fallen dust. The annular dust suction port generates a downward adsorption force around the furnace top to collect the dust. The annular dust suction port has no adsorption blind spot and can comprehensively collect the dust falling from the furnace top.

[0016] In one possible implementation, a conical dust collecting port is formed on the top of the dust transport pipe, and the annular dust suction port is opened at the bottom of the conical dust collecting port. The annular dust suction port forms an annular downward adsorption force, and the conical dust collecting port guides the adsorption force, and finally guides the suction force in different directions to the annular dust suction port at the bottom.

[0017] In a possible implementation, the furnace top and furnace bottom are combined to form a complete CVD coating furnace, and at least one of the furnace top or furnace bottom can move up and down to perform the furnace combination action.

[0018] It should be understood that the above general description and the following detailed description are merely illustrative and do not limit the present invention.

[0019] In the utility model, a high-powered vacuum cleaner is provided, and a dry and wet dual-purpose industrial vacuum cleaner is used for vacuuming. The high-powered vacuum cleaner dust collection pipe is sealed with the air outlet of the dust transport pipe. When the high-powered vacuum cleaner is turned on, the adsorption force of the high-powered vacuum cleaner is transmitted to the dust transport pipe through the dust collection pipe, and finally a negative pressure is formed at the duckbill mouth of the dust transport pipe. The adsorption force of the duckbill mouth collects dust and dust, and the dust transport pipe transports dust and dust, so that the dust on the furnace top is directly adsorbed and collected by the designed dust collection device during the falling process, thereby preventing dust and dust from falling on the product surface and ensuring the high purity of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the three-dimensional structure of a dust collection device for treating dust falling from a furnace wall provided in Example 1 of the present utility model;

[0021] Figure 2 This is a schematic diagram of the three-dimensional structure of a dust collection device for treating dust falling from a furnace wall provided in Example 2 of the present utility model;

[0022] Figure 3 A schematic diagram of the structure of a dust transport duct of a dust collection device for treating dust falling from a furnace wall provided in Example 2 of the present utility model;

[0023] Figure 4 This is a schematic diagram of the three-dimensional structure of a dust collection device for treating dust falling from the furnace wall provided in Example 3 of the present utility model.

[0024] Reference numerals:

[0025] 1. Furnace top; 2. Dust transport duct; 201. Upper rotating part; 202. Lower fixed part; 3. Duckbill; 4. Dust suction duct; 5. Dust collector; 6. Frame; 7. Lifting frame; 8. Guide rod; 9. Conveyor rail; 10. Furnace bottom; 11. Annular dust suction port; 12. Conical dust collection port. DETAILED DESCRIPTION

[0026] The terms used in the implementation section of this application are only used to explain the specific embodiments of this application and are not intended to limit this application.

[0027] As mentioned in the background technology, an effective measure to solve the problem of graphite base corrosion and powder loss is to apply an overall dense coating to the surface of the graphite base. Currently, the most popular coating and its preparation method is to prepare a high-purity SiC or TaC coating on the surface of the graphite base or heat-resistant and corrosion-resistant parts by chemical vapor deposition.

[0028] However, in order to prepare SiC and TaC coatings that meet performance requirements, effectively improve the service life of the graphite base and meet the needs of chip growth, the coating preparation process needs to be strictly controlled.

[0029] After the product is loaded into the furnace, when the furnace bottom 10 is raised, due to slight vibration of the base, some dust and attachments on the furnace top 1 float to the furnace bottom 10 and then rebound to the reaction chamber, eventually affecting the purity of the product.

[0030] If reaction residues or carbon powder from carbon-based heat-supporting parts fall off at any point in the reaction chamber and eventually remain on the surface of the graphite base, it will cause the graphite base surface coating to form protrusions larger than 100μm, resulting in a reduction in the coating flatness. Secondly, due to the attachment of impurity protrusions, the purity of the graphite base surface coating will be reduced, and corrosion pits will be formed preferentially during use, accelerating the corrosion failure of the coating. Finally, due to the attachment of impurities to the substrate surface, when depositing the SiC coating, the coating will be deposited on the substrate surface before the impurity surface. This will make it impossible to achieve effective bonding between the coating and the substrate, resulting in the coating maintaining good bonding strength under high-speed rotation, high temperature, and highly corrosive atmosphere, and ultimately causing the coating to crack and fail at the impurity sites.

[0031] Based on this, an embodiment of the present application provides a dust collection device for processing dust falling from the furnace wall, which can ensure that the dust in the furnace body is directly absorbed by the designed device during the falling process, thereby preventing the dust from falling on the product surface and ensuring its high purity.

[0032] Specifically, taking the CVD coating furnace equipment with a liftable furnace bottom 10 as an example, when the furnace bottom 10 is transported to the bottom of the furnace 1 and the furnace bottom 10 is driven upward by the motor, the upper part of the furnace top 1 will also shake slightly, which may cause dust to fall off the furnace top 1. By arranging a surrounding dust suction port on the outer wall of the furnace top 1 and allowing the dust suction port to rotate around the furnace top 1, the dust suction port can perform 360-degree dust suction on the furnace top 1, thereby absorbing the fallen dust and preventing the dust from falling onto the lower substrate. After the furnace bottom 10 and the furnace top 1 are completed, the check valve is closed first, and then the vacuum cleaner 5 is closed, thereby effectively preventing the dust in the vacuum cleaner 5 from flowing back, thereby ensuring the cleanliness of the environment.

[0033] The following is a detailed description of a dust collection device for treating dust falling from a furnace wall provided in an embodiment of the present application in conjunction with the accompanying drawings.

[0034] Example 1, as Figure 1As shown, a dust collection device for handling dust falling from the furnace wall is shown, the furnace top 1 is the furnace top 1 of the CVD coating furnace, the furnace top 1 or the furnace bottom 10 of the CVD coating furnace can be raised and lowered to complete the furnace closing or opening action, the furnace bottom 10 of the CVD coating furnace equipment in this application can be raised and lowered to complete the furnace closing or opening, wherein the furnace top 1 is fixed on the frame 6, and a conveying guide rail 9 is installed on one side of the frame 6. The conveying guide rail 9 is used to convey the furnace bottom 10 to the bottom of the furnace top 1. A plurality of guide rods 8 and a driving screw are installed on the frame 6, and a guide rod 8 is installed on the guide rod 8. The lifting frame 7 is connected to the driving screw by a thread, and the driving screw is fixedly connected to the output shaft of the motor. The motor is installed on the frame 6, and the driving screw is driven by the motor to rotate so that the lifting frame 7 moves up and down along the guide rod 8. The lifting frame 7 drives the furnace bottom 10 and the furnace top 1 to perform the furnace closing operation. During this process, the motor will vibrate when running, and the vibration will drive the furnace top 1 to vibrate slightly, which may cause the dust on the top platform of the furnace top 1 to fall off. If the dust is not processed, it may adhere to the substrate, thereby affecting the product quality.

[0035] Therefore, in the present application, a dust transport pipe 2 is provided surrounding the furnace top 1. The dust transport pipe 2 can be directly installed on the outer wall of the furnace top 1, or it can be installed on the frame 6 through a bracket. In the present application, the dust transport pipe 2 is consistent with the outer diameter of the furnace top 1, and the pipe diameter is 10-20 cm. By placing it in contact with the furnace wall of the furnace top 1, the transportation efficiency can be effectively improved, as well as the dust collection effect.

[0036] The dust transport duct 2 can automatically rotate with the furnace top 1 as the center, thereby improving 360° all-round dust collection during the dust collection process. The dust transport duct 2 can automatically rotate with the furnace body as the center.

[0037] In order to drive the dust transport duct 2 to rotate around the furnace top 1, the dust collector 5, the dust collection duct 4 and the dust transport duct 2 can be rotated synchronously, or the dust transport duct 2 can be designed as a sealed splicing structure, with a fixed part and a rotating part, so that the rotating part can be sealed and rotated on the fixed part, wherein the fixed part is connected to the dust collection duct 4.

[0038] The present application designs the dust transport duct 2 as a sealed splicing structure, including a lower fixed part 202 and an upper rotating part 201 driven to rotate by a driving mechanism. The upper rotating part 201 will always maintain a sealed connection with the lower fixed part 202 during the rotation process. A dust suction port is installed on the upper rotating part 201. The dust suction port is a duckbill port 3 adapted to the furnace top 1. The duckbill port 3 is symmetrically designed, and 4-6 are designed and placed at equal distances. The dust suction port is close to the outer wall of the furnace top 1. The dust transport duct 2 is connected to the exhaust end of the dust collector 5 through the dust suction pipe 4. A check valve is installed on the dust suction pipe 4. When the dust on the furnace top 1 falls, it is collected by the dust collector 5 under the suction force of the dust suction port. The lower fixed part 202 and the upper rotating part 201 form an annular dust suction cavity. The duckbill port 3 is connected to the annular dust suction cavity, and the lower fixed part 202 is connected to the dust suction pipe 4.

[0039] The upper rotating part 201 is driven to rotate by a driving motor. Specifically, the driving motor is installed on the lower fixing part 202 or the frame 6. A driving wheel is installed on the output shaft of the driving motor, and the upper rotating part 201 is driven to rotate by the driving wheel.

[0040] The driving wheel can be a gear, a friction wheel, a pulley, etc., and the outer side of the upper rotating part 201 can be provided with teeth, friction belts and belt grooves that cooperate therewith. When the driving wheel is a gear, the gear is engaged with the teeth to drive the upper rotating part 201 to rotate. When the driving wheel is a friction wheel, the friction wheel is in close contact with the friction belt on the outer side of the upper rotating part 201, thereby driving the upper rotating part 201 to rotate through the friction wheel. When the driving wheel is a pulley, it is connected to the belt groove on the outer side of the upper rotating part 201 through a belt, thereby driving the upper rotating part 201 to rotate.

[0041] Example 2, see Figure 2-Figure 3 As shown, the present application provides a dust collection device for processing dust falling from the furnace wall. No additional power mechanism is set to drive the upper rotating part 201. Instead, an impeller is installed in the dust collection pipe 4. The impeller is sealed and rotatably connected to the dust collection pipe 4. The rotating shaft of the impeller passes through the dust collection pipe 4 and is fixedly connected to the driving wheel. When gas flows in the dust collection pipe 4, the impeller is driven to rotate, the impeller drives the driving wheel to rotate, and the rotation of the driving wheel drives the upper rotating part 201 to rotate.

[0042] Similarly, the driving wheel can be a gear, a friction wheel, a pulley, etc., and the outer side of the upper rotating part 201 can be set with teeth, friction belts and belt grooves that cooperate therewith. When the driving wheel is a gear, the gear is engaged with the teeth to drive the upper rotating part 201 to rotate. When the driving wheel is a friction wheel, the friction wheel is in close contact with the friction belt on the outer side of the upper rotating part 201, thereby driving the upper rotating part 201 to rotate through the friction wheel. When the driving wheel is a pulley, it is connected to the belt groove on the outer side of the upper rotating part 201 through a belt, thereby driving the upper rotating part 201 to rotate.

[0043] Example 3, see Figure 4 As shown, the present application provides a dust collection device for processing dust falling from the furnace wall, including a dust transport pipe 2 arranged around the furnace top 1, and a dust collection port is provided on the dust transport pipe 2, and the dust collection port is close to the outer wall of the furnace top 1. The dust transport pipe 2 is connected to the exhaust end of the dust collector 5 through the dust collection pipe 4, and a check valve is installed on the dust collection pipe 4. When the dust on the furnace top 1 falls, it is collected by the dust collector 5 by the suction force of the dust collection port.

[0044] The top of the dust transport pipe 2 can also be set as an annular dust suction port 11, and the outer wall of the furnace body can be fully dusted through the annular dust suction port 11. In order to further improve the dust suction efficiency and avoid dust falling, a conical dust collecting port 12 can be formed on the top of the dust transport pipe 2, and the annular dust suction port 11 is opened at the bottom of the conical dust collecting port 12.

[0045] In the description of the embodiments of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to a fixed connection, an indirect connection via an intermediate medium, an internal connection between two components, or an interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in the embodiments of this application based on specific circumstances.

[0046] The terms "first", "second", "third", "fourth", etc. (if any) in the description and claims of the embodiments of this application and the above-mentioned drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence.

[0047] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the embodiments of the present application, rather than to limit them. Although the embodiments of the present application have been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. These modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A dust collecting device for treating dust falling from furnace wall, characterized in that: It includes a dust transport pipe arranged around the furnace top, the dust transport pipe is provided with a dust suction port, the dust suction port is arranged close to the outer wall of the furnace top, the dust transport pipe is connected to the exhaust end of the vacuum cleaner through the dust suction pipe, and when the dust on the furnace top falls, it is collected by the vacuum cleaner due to the suction force of the dust suction port.

2. A dust collecting device for treating dust falling from furnace wall according to claim 1, characterized in that: A check valve is installed on the dust suction pipe.

3. A dust collecting device for treating dust falling from furnace wall according to claim 2, characterized in that: The dust suction port is a flat duckbill port, and the duckbill ports are evenly spaced around the furnace top.

4. A dust collecting device for treating dust falling from a furnace wall according to claim 3, characterized in that: The dust transport pipe can automatically rotate with the furnace top as the center, and the dust transport pipe drives the duckbill mouth to rotate and adsorb together, and the duckbill mouth can adsorb the outer wall of the furnace top 360 degrees.

5. A dust collecting device for treating dust falling from furnace wall according to claim 4, characterized in that: The dust transport duct includes a lower fixed part and an upper rotating part rotatably installed on the lower fixed part and can rotate freely. The duckbill is installed on the upper rotating part. The lower fixed part and the upper rotating part form an annular dust suction cavity. The duckbill is connected to the annular dust suction cavity, and the lower fixed part is connected to the dust suction duct.

6. A dust collecting device for treating dust falling from furnace wall according to claim 5, characterized in that: A driving motor is installed on the lower fixed part, and a driving wheel is installed on the output shaft of the driving motor. The driving motor drives the driving wheel to rotate, and the rotation of the driving wheel drives the upper rotating part to rotate, and the rotation of the upper rotating part will not affect the adsorption effect of the duckbill mouth, the annular dust suction cavity, the dust suction pipe and the vacuum cleaner.

7. A dust collecting device for treating dust falling from a furnace wall according to claim 5, characterized in that: An impeller is installed in the dust suction pipe, and the rotating shaft of the impeller passes through the dust suction pipe and is fixedly connected to the driving wheel. When gas flows in the dust suction pipe, the impeller is driven to rotate, and the impeller drives the driving wheel to rotate. The rotation of the driving wheel drives the upper rotating part to rotate.

8. The dust collecting device for treating dust falling from the furnace wall according to claim 2, characterized in that: An annular dust suction port is provided on the top of the dust transport pipe. The annular dust suction port is connected to the exhaust end of the vacuum cleaner through the dust suction pipe to generate adsorption force to collect the fallen dust. The annular dust suction port generates a downward adsorption force around the furnace top to collect the dust.

9. A dust collecting device for treating dust falling from a furnace wall according to claim 8, characterized in that: A conical dust collecting port is formed on the top of the dust transport pipe, and the annular dust suction port is opened at the bottom of the conical dust collecting port. The annular dust suction port forms an annular downward adsorption force, and the conical dust collecting port guides the adsorption force, and finally guides the suction force in different directions to the annular dust suction port at the bottom.

10. A dust collecting device for treating dust falling from a furnace wall according to any one of claims 1 to 9, characterized in that: The furnace top and furnace bottom are combined to form a complete CVD coating furnace, and at least one of the furnace top or furnace bottom can move up and down to perform the furnace closing action.

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