Special shaping all-in-one machine for silicon carbide crystals

Abstract

The utility model discloses a special shaping all-in-one machine for silicon carbide crystals, and provides the following scheme aiming at the problems that the detection and shaping processes of the existing silicon carbide crystals are generally completed manually, the working efficiency of workers is low, and the automation degree of the traditional silicon carbide crystals is low in the detection and shaping processes: the special shaping all-in-one machine comprises a lathe bed, a stand column is arranged on the lathe bed, a supporting plate is arranged on the stand column, two spindle heads are arranged on the supporting plate, grinding wheels are arranged on the two spindle heads, a workbench located on the lathe bed is arranged below the grinding wheels, an operation table is arranged on one side of the lathe bed, a pneumatic brake is opened, so that the whole workbench is fixed, then the outer circle grinding wheels are cut down to conduct grinding, and the workbench moves front and back. A millimeter notch is ground at a polar position, and a movable cart table is arranged, so that the silicon carbide crystal is automatically detected and shaped, the accuracy is high, the use is convenient, and the working environment of operators is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon carbide crystals, in particular to a special all-in-one shaping machine for silicon carbide crystals. Background Art

[0002] Silicon carbide (SiC) is made of quartz sand, petroleum coke (or coal coke), sawdust (salt is needed to produce green silicon carbide) and other raw materials through high-temperature smelting in a resistance furnace. Silicon carbide is also a rare mineral in nature, moissanite. Silicon carbide is also called carbon silicon stone. Among contemporary non-oxide high-tech refractory raw materials such as C, N, and B, silicon carbide is the most widely used and most economical one. It can be called diamond grit or refractory sand.

[0003] The inspection and shaping process of silicon carbide crystals is generally done manually, which has low efficiency. In addition, the degree of automation in the inspection and shaping process of traditional silicon carbide crystals is low. Therefore, a new type of silicon carbide crystal special shaping machine is needed to meet people's needs.

[0004] In response to the above problems, it is urgent to carry out innovative design based on the original all-in-one structure. Utility Model Content

[0005] The purpose of the present utility model is to provide a special all-in-one shaping machine for silicon carbide crystals, so as to solve the problem that silicon carbide crystal powder will fall during the process of grinding silicon carbide crystals by the shaping machine proposed in the above background technology. The scattered silicon carbide crystal powder will affect the working environment of the workers, and it is inconvenient to clean the silicon carbide crystal powder, which increases the complexity of cleaning the silicon carbide crystal powder.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a special all-in-one shaping machine for silicon carbide crystals, comprising a protective base and a protective cover fixedly mounted on the upper end of the protective base;

[0007] A switch door is slidably installed inside the protective cover, a fixed base is fixedly installed inside the protective base, a driving motor is fixedly installed on the upper end of the fixed base, and a rotating shaft is fixedly installed on the output end of the driving motor, and the rotating shaft is rotatably installed on the upper end of the fixed base, and a moving block is threadedly installed on the outer side of the rotating shaft;

[0008] A rotating motor is mounted on the outer side of the moving block, and a vacuum suction cup is rotatably mounted on the upper end of the rotating motor. A vent pipe is fixedly mounted on the upper end of the protective cover, and a mounting frame is fixedly mounted on the upper end of the protective base, and the mounting frame is located inside the protective cover.

[0009] Preferably, an input unit is fixedly installed on the outer side of the fixed base, and the input unit is located inside the protective cover, and a touch screen is provided on the upper end of the input unit. A limiting guide rail is fixedly installed on the upper end of the fixed base, and the limiting guide rail is slidably connected to the rotating motor.

[0010] Preferably, a fixed vertical plate is fixedly installed on the upper end of the protective base, and a directional guide rail and a horizontal motor are fixedly installed on one end of the fixed vertical plate close to the rotating motor, and a moving plate and a vertical guide rail are slidably installed on the outer side of the directional guide rail.

[0011] Preferably, an adjustment plate is slidably installed on one end of the vertical guide rail away from the directional guide rail, and a driving member and an orienter assembly are fixedly installed on one end of the adjustment plate away from the directional guide rail, and a grinding member is fixedly installed on the output end of the driving member, and is located on the left side of the vacuum suction cup.

[0012] Preferably, a rotary motor is provided at the lower end of the orientator assembly, and the output end of the rotary motor is fixedly connected to the rotating motor, and the upper end of the orientator assembly is connected to the air vent, and a laser projector is fixedly installed on the outside of the orientator assembly.

[0013] Preferably, a servo motor is fixedly mounted on the upper end of the fixed vertical plate, and an output end of the servo motor is connected to a vertical guide rail outside the driving component.

[0014] Preferably, a discharge plate is fixedly installed inside the protective base, and the end of the discharge plate away from the protective base is located on the outside of the protective base, and a guide plate is fixedly installed inside the protective base, and the guide plate is located at the upper end of the discharge plate.

[0015] Compared with the prior art, the beneficial effects of the present invention are:

[0016] 1. By setting up multi-directional guide rails inside the all-in-one machine, multi-directional grinding can be achieved, and the angle of the crystal ingot can be adjusted by the operation of the rotating motor and the rotary motor, further expanding the convenience of multi-angle processing of the crystal ingot;

[0017] 2. The laser projector and orienter assembly can control the placement of the ingot to ensure the accuracy of ingot processing;

[0018] 3. The protective cover and the guide plate can be used to wrap the all-in-one machine to prevent the silicon carbide crystal powder from scattering. The guide plate can also be used to transport the silicon carbide crystal powder to the inside of the discharge plate and discharge it uniformly through the discharge plate, thus ensuring the working environment of the operator and improving the convenience of cleaning the silicon carbide crystal powder.

[0019] 4. The directional guide rail and the vertical guide rail can change the position of the driving part and the grinding part, making it easier for the grinding part to process the silicon carbide crystal at multiple angles, thus improving the convenience of using the all-in-one machine.

[0020] 5. Furthermore, by inputting data into the input unit, the all-in-one machine can realize an automated processing process, so that the all-in-one machine automatically completes the processing process, effectively improving the convenience of using the all-in-one machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of the three-dimensional structure of the utility model;

[0022] Figure 2 This is a schematic diagram of the three-dimensional structure of the protective cover of the utility model;

[0023] Figure 3 This is a schematic diagram of the three-dimensional structure of the orientation instrument assembly of the utility model;

[0024] Figure 4 This is a schematic diagram of the three-dimensional structure of the fixed vertical plate of the utility model;

[0025] Figure 5 This is a schematic diagram of the three-dimensional structure of the protective base of the utility model;

[0026] Figure 6 This is a schematic diagram of the three-dimensional structure of the directional guide rail of the utility model;

[0027] Figure 7 This is a schematic diagram of the three-dimensional structure of the installation frame of the utility model;

[0028] Figure 8 This is a schematic diagram of the structure of the three-dimensional drive motor of the utility model.

[0029] In the figure: 1. Protective base; 2. Protective cover; 3. Switch door; 4. Fixed base; 5. Ventilation tube; 6. Limiting guide rail; 7. Driving motor; 8. Moving block; 9. Rotating shaft; 10. Input unit; 11. Fixed vertical plate; 12. Moving plate; 13. Driving part; 14. Polishing part; 15. Mounting frame; 16. Laser projector; 17. Rotating motor; 18. Vacuum suction cup; 19. Orienting guide rail; 20. Guide plate; 21. Orienter assembly; 22. Discharging plate; 23. Rotating motor; 24. Adjustment plate; 25. Servo motor; 26. Vertical guide rail; 27. Horizontal motor. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0031] In a specific embodiment, Figures 1-6 As shown, the automatic working process of the all-in-one machine is disclosed;

[0032] A protective base 1 and a protective cover 2 fixedly mounted on the upper end of the protective base 1;

[0033] A switch door 3 is slidably installed inside the protective cover 2, a fixed base 4 is fixedly installed inside the protective base 1, a driving motor 7 is fixedly installed on the upper end of the fixed base 4, and a rotating shaft 9 is fixedly installed on the output end of the driving motor 7, and the rotating shaft 9 is rotatably installed on the upper end of the fixed base 4, and a moving block 8 is threadedly installed on the outer side of the rotating shaft 9;

[0034] A rotating motor 17 is mounted on the outer side of the moving block 8, and a vacuum suction cup 18 is rotatably mounted on the upper end of the rotating motor 17. A vent pipe 5 is fixedly mounted on the upper end of the protective cover 2. A mounting frame 15 is fixedly mounted on the upper end of the protective base 1, and the mounting frame 15 is located inside the protective cover 2.

[0035] An input unit 10 is fixedly installed on the outside of the fixed base 4, and the input unit 10 is located inside the protective cover 2, and a touch screen is provided on the upper end of the input unit 10. A limiting guide rail 6 is fixedly installed on the upper end of the fixed base 4, and the limiting guide rail 6 is slidably connected to the rotating motor 17.

[0036] During the use of the all-in-one machine, the ingot needs to be placed on the upper end of the vacuum suction cup 18. Then the laser projector 16 can project the aperture onto the ingot, and the concentricity of the ingot and the suction cup can be adjusted visually. The concentric circles projected by the laser and the suction cup are concentric, which is more accurate. The adjustment of the ingot is mainly to make the outer circle of the ingot and the nearest projected circle coincide as much as possible. At the same time, because the specification of the ingot blank is 162MM, it is required to be processed to 150.2MM, which is sufficient size without affecting the finished workpiece.

[0037] After the ingot is placed, the vacuum chuck 18 can be used to absorb and position the ingot.

[0038] The grinding part 14 is composed of three grinding wheels of different sizes, which can realize the end face grinding and outer cylindrical grinding of the ingot. The X axis of the grinding part 14 drives the grinding wheel to swing back and forth on the ingot, and the Z axis feeds downward. When the lower knife reaches the set thickness, the grinding stops and each axis stops at its respective safety position.

[0039] During the external cylindrical grinding of the ingot, the grinding wheel for external cylindrical grinding sticks to the outer circle of the ingot and swings up and down. The X-axis feeds and the C-axis grinding wheel rotates continuously. When the X-axis reaches the set value, it stops at its respective safety position.

[0040] After the above two processes are completed, a complete cylinder is formed. Next, the orientation instrument is used to find the deviation value of the end face and the position of the positioning edge of the cylinder. After measuring these two values, the silicon carbide rod is trimmed.

[0041] The orienter assembly 21 is internally provided with a cylindrical orienter and an end face orienter, which can perform orientation measurement;

[0042] Since there is a certain deviation angle between the growth direction and the crystal orientation of the silicon carbide crystal during its growth process, in simple terms, the silicon carbide crystal sheet is a standard disc shape from a macroscopic point of view, but from a microscopic point of view, the internal crystal structure is not necessarily completely vertical. Therefore, crystal orientation is required, and then the angle of the processing table is adjusted to ensure that the microscopic internal crystal structure is used as the basis during processing. X-rays are used for orientation detection.

[0043] Before measuring with the orienter assembly 21, the distance between the X-ray and the ingot should be 50±0.01mm, the angle of the X-ray injection should not be changed, the surface of the workpiece to be measured should be clean and free of water stains, and the orienter orientation process is divided into four steps and can be started with just one button.

[0044] At the same time, the operator can observe the processing status of the silicon carbide crystal through the multiple switch doors 3, which is convenient for the operator to observe from multiple angles.

[0045] In one specific embodiment, Figures 1-8 As shown, the process of multi-angle processing by the all-in-one machine is disclosed;

[0046] A fixed vertical plate 11 is fixedly mounted on the upper end of the protective base 1, and a directional guide rail 19 and a horizontal motor 27 are fixedly mounted on the end of the fixed vertical plate 11 close to the rotating motor 17, and a moving plate 12 and a vertical guide rail 26 are slidably mounted on the outer side of the directional guide rail 19;

[0047] An adjustment plate 24 is slidably mounted on one end of the vertical guide rail 26 away from the directional guide rail 19, and a driving member 13 and an orienter assembly 21 are fixedly mounted on one end of the adjustment plate 24 away from the directional guide rail 19. A polishing member 14 is fixedly mounted on the output end of the driving member 13 and is located on the left side of the vacuum suction cup 18.

[0048] A rotary motor 23 is provided at the lower end of the direction finder assembly 21, and the output end of the rotary motor 23 is fixedly connected to the rotary motor 17. The upper end of the direction finder assembly 21 is connected to the air vent 5. A laser projector 16 is fixedly mounted on the outer side of the direction finder assembly 21.

[0049] A servo motor 25 is fixedly mounted on the upper end of the fixed vertical plate 11 , and an output end of the servo motor 25 is connected to a vertical guide rail 26 outside the driving member 13 .

[0050] The rotary table is driven by a rotating motor 17 and is equipped with a rotary encoder to accurately locate the rotation angle. The pneumatic brake and brake disc are stopped, with good stability and precise positioning. The table moves back and forth on the limit guide rail 6, adding a variety of grinding methods to facilitate the processing of outer circles and cut corners. The laser projector 16 is powered on to generate red light, which is gathered by the spotlight cover. The lampshade is pasted with reflective paper, so that the light passes through the scale gap of the mask and is projected onto the surface of the silicon carbide blank. Because silicon carbide is cast through a mold, the shape of the outer surface is inconsistent. The operator needs to adjust the silicon carbide according to the scale line so that the whole circle of light is on the silicon carbide, and then open the solenoid valve of the vacuum suction cup 18 to suck the silicon carbide crystal, and then run the program to grind the upper surface and outer circle of the silicon carbide. After grinding the outer circle, a complete cylinder can be formed. After the outer circle and crystal of silicon carbide are ground, the transverse motor 27 automatically controls the movement of the detection head inward and outward so that the indicator needle of the orientation instrument assembly 21 touches the outer circle of silicon carbide. The laser head emits laser, and the workbench starts to rotate slowly under the drive motor 7. The laser receiver 16 receives the laser emitted by the laser transmitter into the silicon carbide crystal, and judges the polarity position of silicon carbide through the received laser data. When the polarity orientation is accurate, the motor stops and the pneumatic brake is opened at the same time to fix the entire workbench. Then the grinding piece 14 is lowered for grinding, and the workbench moves back and forth to grind millimeter incisions at the polar position. The movable cart can realize automatic detection and shaping of silicon carbide crystals with high accuracy and easy use.

[0051] Based on the above embodiments, Figure 2-Figure 7 As shown, the automatic collection process of the all-in-one machine is disclosed;

[0052] A discharge plate 22 is fixedly installed inside the protective base 1, and the end of the discharge plate 22 away from the protective base 1 is located on the outside of the protective base 1, and a guide plate 20 is fixedly installed inside the protective base 1, and the guide plate 20 is located at the upper end of the discharge plate 22.

[0053] When using the dedicated silicon carbide crystal shaping machine, silicon carbide crystal powder will be scattered on the upper end of the guide plate 20, and the interior of the guide plate 20 is recessed downward, and the recessed portion at the lower end of the guide plate 20 is open, which will cause the silicon carbide crystal powder to be scattered through the opening to the upper end of the discharge plate 22. At this time, the silicon carbide crystal powder can be cleaned centrally, thereby increasing overall practicality.

[0054] The contents not described in detail in this specification belong to the prior art known to those skilled in the art.

[0055] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A dedicated silicon carbide crystal shaping machine, comprising a protective base (1) and a protective cover (2) fixedly mounted on the upper end of the protective base (1); Its characteristics are: A switch door (3) is slidably mounted inside the protective cover (2), a fixed base (4) is fixedly mounted inside the protective base (1), a driving motor (7) is fixedly mounted on the upper end of the fixed base (4), and a rotating shaft (9) is fixedly mounted on the output end of the driving motor (7), and the rotating shaft (9) is rotatably mounted on the upper end of the fixed base (4), and a moving block (8) is threadedly mounted on the outer side of the rotating shaft (9); A rotating motor (17) is mounted on the outer side of the moving block (8), and a vacuum suction cup (18) is rotatably mounted on the upper end of the rotating motor (17). A vent pipe (5) is fixedly mounted on the upper end of the protective cover (2). A mounting frame (15) is fixedly mounted on the upper end of the protective base (1), and the mounting frame (15) is located inside the protective cover (2).

2. The silicon carbide crystal shaping machine according to claim 1, characterized in that: An input unit (10) is fixedly mounted on the outer side of the fixed base (4), and the input unit (10) is located inside the protective cover (2). A touch screen is provided on the upper end of the input unit (10). A limiting guide rail (6) is fixedly mounted on the upper end of the fixed base (4), and the limiting guide rail (6) is slidably connected to the rotating motor (17).

3. The silicon carbide crystal shaping machine according to claim 1, characterized in that: A fixed vertical plate (11) is fixedly mounted on the upper end of the protective base (1), and a directional guide rail (19) and a transverse motor (27) are fixedly mounted on one end of the fixed vertical plate (11) close to the rotating motor (17), and a moving plate (12) and a vertical guide rail (26) are slidably mounted on the outer side of the directional guide rail (19).

4. The silicon carbide crystal shaping machine according to claim 3, characterized in that: An adjustment plate (24) is slidably mounted on one end of the vertical guide rail (26) away from the directional guide rail (19), and a driving member (13) and an orienter assembly (21) are fixedly mounted on one end of the adjustment plate (24) away from the directional guide rail (19), and a grinding member (14) is fixedly mounted on the output end of the driving member (13), and is located on the left side of the vacuum suction cup (18).

5. The silicon carbide crystal shaping machine according to claim 4, characterized in that: A rotary motor (23) is provided at the lower end of the direction finder assembly (21), and the output end of the rotary motor (23) is fixedly connected to the rotary motor (17), and the upper end of the direction finder assembly (21) is connected to the air vent (5), and a laser projector (16) is fixedly installed on the outer side of the direction finder assembly (21).

6. The silicon carbide crystal shaping machine according to claim 1, characterized in that: A servo motor (25) is fixedly mounted on the upper end of the fixed vertical plate (11), and an output end of the servo motor (25) is connected to a vertical guide rail (26) outside the driving member (13).

7. The silicon carbide crystal shaping machine according to claim 1, characterized in that: A discharge plate (22) is fixedly installed inside the protective base (1), and one end of the discharge plate (22) away from the protective base (1) is located outside the protective base (1), and a guide plate (20) is fixedly installed inside the protective base (1), and the guide plate (20) is located at the upper end of the discharge plate (22).

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