Heater and single crystal furnace

Abstract

The utility model provides a heater and a single crystal furnace, the heater comprises: a heating body, the heating body comprises a plurality of heating petals connected end to end; a first limiting piece is arranged at the head end of at least one heating petal, and a second limiting piece is arranged at the tail end of at least one heating petal; the first limiting piece of at least one heating section is connected with the second limiting piece of the adjacent heating section in a spigot mode so as to limit the two connected heating sections to move in the axial direction of the heating body. According to the utility model, the requirement on the strength of the bolt can be reduced, the contact benign property between the two heating petals which are connected with each other is improved, and the service life of the heater is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of heating, in particular to a heater and a single crystal furnace. Background Art

[0002] At present, the heaters used in single crystal furnaces usually include heating petals and connecting plates for splicing the heating petals. The heating petals and the connecting plates are connected by bolts. The bolts are subjected to large shear and tensile forces, and high strength requirements are placed on the bolts. Insufficient bolt strength can easily lead to breakage of the bolt cap and the screw position, resulting in poor contact between the heating petals and sparks, which reduces the service life of the heater. Utility Model Content

[0003] In view of the above problems, embodiments of the present invention are proposed to provide a heater and a single crystal furnace that overcome the above problems or at least partially solve the above problems.

[0004] In order to solve the above problems, the present invention discloses a heater, comprising:

[0005] A heating body, the heating body comprising a plurality of heating petals connected end to end;

[0006] At least one of the heating petals is provided with a first limiting member at its head end and a second limiting member at its tail end;

[0007] The first limiting member of at least one of the heating petals is connected to the stop of the second limiting member of the adjacent heating petal to limit the axial movement of the two interconnected heating petals along the heating body.

[0008] The present invention has the following advantages:

[0009] In an embodiment of the present invention, the limiting cooperation of the first limiting member and the second limiting member can realize the limiting of the two mutually connected heating petals in the axial direction of the heating body. In this way, when the two heating petals are fixed with bolts, the bolts can limit the two heating petals in directions other than the axial direction of the heating body. The bolts do not need to bear the axial shear force of the heating body, which can reduce the strength requirements of the bolts, improve the contact quality between the two mutually connected heating petals, and increase the service life of the heater. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 This is a structural diagram of a heater of the present invention;

[0011] Figure 2 This is a structural diagram of a heating petal of the utility model;

[0012] Figure 3 This is a structural diagram of a second position-limiting member of the present utility model;

[0013] Figure 4 This is a structural diagram of a first position-limiting member of the utility model;

[0014] Figure 5 It is a structural schematic diagram of another heater of the present utility model;

[0015] Figure 6 This is a structural diagram of another heating petal of the present invention;

[0016] Figure 7 It is a partial schematic diagram of the connection between the first limiting member and the second limiting member stopper of the utility model.

[0017] Description of reference numerals:

[0018] 1. Heating element; 11. Heating petal; 111. Raised structure; 1111. First through hole; 112. Limiting groove; 1120. First notch; 1121. First groove wall; 1122. Second groove wall; 1130. Second notch; 1131. Third groove wall; 1132. Fourth groove wall; 1140. Second through hole; 12. First heating petal; 13. Second heating petal; 2. Foot plate. DETAILED DESCRIPTION

[0019] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0020] The terms "first" and "second" in the specification and claims of this application may explicitly or implicitly refer to one or more of these features. In the description of this utility model, unless otherwise specified, "plurality" means two or more. Furthermore, "and / or" in the specification and claims refers to at least one of the connected items, and the character " / " generally indicates an "or" relationship between the connected items.

[0021] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial direction of the heating body", "radial direction of the heating body", "circumferential direction of the heating body", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present invention.

[0022] In the description of this utility model, it should be noted that unless otherwise specified and limited

[0023] The terms "mounted," "connected," and "connected" should be interpreted broadly. For example, they can refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediary; and internal communication between two components. Those skilled in the art will understand the specific meanings of these terms in this utility model.

[0024] In a first aspect, the utility model discloses a heater, such as Figures 1 to 4 As shown, the heater may include: a heating body 1, the heating body 1 includes a plurality of heating petals 11 connected end to end; at least one heating petal 11 is provided with a first limit member at the head end and a second limit member at the tail end; the first limit member of at least one heating petal 11 is connected to the second limit member stop of the adjacent heating petal 11 to limit the axial movement of the two heating petals 11 along the heating body 1.

[0025] In an embodiment of the present utility model, the limiting cooperation of the first limiting member and the second limiting member can realize the axial limiting of the two mutually connected heating petals 11 in the heating body 1. In this way, when the two heating petals 11 are fixed with bolts, when the bolts limit the two heating petals 11 in the radial direction of the heating body 1, the bolts do not need to bear the axial shear force of the heating body 1, which can reduce the strength requirements of the bolts, improve the contact between the two mutually connected heating petals 11, and increase the service life of the heater.

[0026] Specifically, the heater described in the embodiment of the present invention can be used in industries such as semiconductors, polycrystalline silicon, single crystal silicon, and smelting to provide a thermal environment. The embodiment of the present invention only uses the application of the heater in the thermal field of a single crystal furnace to provide a thermal environment for pulling single crystal silicon rods as an example for explanation. Other situations can refer to the settings. Specifically, the thermal field of a single crystal furnace can include a single crystal furnace and a crucible and a crucible side arranged in the single crystal furnace. The crucible is used to accommodate single crystal silicon. The crucible is arranged in the crucible side, and the crucible side can provide support for the crucible.

[0027] Specifically, the heater may include a heater 1, which may be disposed around the crucible rim to radiate heat to the crucible through the rim to melt the silicon material within the crucible. The heater 1 may be an annular or square structure, and the specific arrangement may be based on actual needs. Specifically, the heater 1 may be made of graphite, carbon-carbon, or the like.

[0028] Specifically, the heater may further include at least two foot plates 2, such as Figure 1As shown, only two foot plates 2 are illustrated. The two foot plates 2 can be symmetrically arranged on both sides of the heating body 1. The foot plates 2 can be connected to the power supply and the heating body 1 respectively to realize electrical heating of the heating body 1.

[0029] Specifically, the foot plate 2 and the heating body 1 can be fixed by bolts, and / or the foot plate 2 and the heating body 1 can be fixed by adhesive such as graphite glue, etc. In some embodiments, the foot plate 2 and the heating body 1 can also be limitedly matched.

[0030] Specifically, the heating body 1 may include a plurality of heating petals 11 connected end to end. The number of the heating petals 11 may be set according to actual needs, and is not specifically limited in the embodiment of the present invention.

[0031] In an embodiment of the present invention, at least one heating petal 11 can be a target heating petal, and a first stopper is provided at the head end of the target heating petal and a second stopper is provided at the tail end. In some embodiments, some of the heating petals 11 in the heating body 1 can be target heating petals, or in other embodiments, all of the heating petals 11 in the heating body 1 can be target heating petals. The number of target heating petals can be selected according to actual needs, and the present invention does not impose specific limitations on this.

[0032] In some embodiments, the two target heating petals connected to each other are the first heating petal 12 and the second heating petal 13. Since the multiple heating petals 11 are connected end to end, the head end of the first heating petal 12 can be connected to the tail end of the second heating petal 13, that is, the first limit member of the first heating petal 12 can be connected to the second limit member stop of the second heating petal 13 to limit the relative movement of the first heating petal 12 and the second heating petal 13 along the axial direction of the heating body 1.

[0033] Specifically, the first stopper, the second stopper, and the heating petal 11 can be an integrally formed structure. The first stopper and the second stopper can be combined to form a mortise and tenon structure, and adjacent first stoppers and second stoppers can be connected in a mortise and tenon manner, thereby improving the convenience of the stopper connection between the two interconnected heating petals 11.

[0034] Furthermore, with the cooperation of the first limiting member and the second limiting member, the two mutually connected heating petals 11 can be limited to restrict the relative movement of the two mutually connected heating petals 11 along the axial direction of the heating body 1.

[0035] Specifically, in order to ensure the structural stability of the heating body 1, the two interconnected heating petals 11 need to be spliced ​​and fixed. For example, the relative movement of the two interconnected heating petals 11 needs to be restricted in three dimensions: radial direction of the heating body 1, axial direction of the heating body 1, and circumferential direction of the heating body 1, so as to avoid sparks due to poor contact between the two interconnected heating petals 11. Since the two interconnected heating petals 11 are connected by the first limit member and the second limit member stop, the two heating petals 11 can be limited in the axial direction of the heating body 1, which can at least reduce the force on the bolt in one dimension.

[0036] In some embodiments, as Figures 1 to 4 As shown, the first limiting member includes a protruding structure 111, and the second limiting member includes a limiting groove 112; the protruding structure 111 of at least one heating petal 11 is embedded in the limiting groove 112 of the adjacent heating petal 11; the limiting groove 112 is used to limit the axial movement of the protruding structure 111 along the heating body 1.

[0037] In an embodiment of the present utility model, the protruding structure 111 of the first heating petal 12 can be embedded in the limiting groove 112 of the second heating petal 13. The limiting groove 112 limits the axial movement of the protruding structure 111 along the heating body 1, thereby improving the reliability of splicing and fixing the first heating petal 12 and the second heating petal 13, and the implementation method is simple and convenient.

[0038] Specifically, the limiting groove 112 can be equivalent to the mortise in the mortise and tenon structure, and the protruding structure 111 is equivalent to the tenon in the mortise and tenon structure.

[0039] Specifically, the head end of the first heating petal 12 may be provided with a protruding structure 111 , and the tail end of the second heating petal 13 may be provided with a limiting groove 112 .

[0040] In some embodiments, the limiting groove 112 has a first slot 1120; the first slot 1120 is opened along the radial direction of the heating petal 11; the limiting groove 112 includes a first slot wall 1121 and a second slot wall 1122, and the first slot wall 1121 and the second slot wall 1122 are arranged on both sides of the first slot 1120 along the axial direction of the heating body 1; when the protruding structure 111 is connected to the stop end of the limiting groove 112, the first slot wall 1121 and the second slot wall 1122 are used to limit the axial movement of the protruding structure 111 along the heating body 1.

[0041] In an embodiment of the present invention, the first groove wall 1121 and the second groove wall 1122 cooperate to limit the protruding structure 111 in the axial direction of the heating body 1, thereby preventing the bolt from bearing the axial shear force of the heating body 1, reducing the strength requirements for the bolt, and being beneficial to improving the service life of the heater by increasing the service life of the bolt.

[0042] Specifically, the first notch 1120 is the opening of the limiting groove 112, and is used to assemble the protruding structure 111. For example, Figures 1 to 4 As shown, during the process of assembling the first heating petal 12 and the second heating petal 13, the protruding structure 111 can enter the limiting groove 112 from the first notch 1120, thereby improving the convenience of assembling the first heating petal 12 and the second heating petal 13.

[0043] One end of the protruding structure 111 along the axial direction of the heating body 1 can be connected to the first groove wall 1121, and the other end can be connected to the second groove wall 1122 to limit the relative movement of the first heating petal 12 and the second heating petal 13 along the axial direction of the heating body 1.

[0044] Specifically, the radial direction of the heating petal 11 is consistent with the radial direction of the heating body 1, the raised structure 111 is arranged on the radial edge of the heating petal 11, and the first slot 1120 is opened along the radial direction of the heating petal 11. During the assembly of the first heating petal 12 and the second heating petal 13, the raised structure 111 can enter the limiting groove 112 from the first slot 1120, so that the assembly process of the first heating petal 12 and the second heating petal 13 can be visualized, which can improve the convenience of assembling the first heating petal 12 and the second heating petal 13.

[0045] In an embodiment of the present utility model, the first groove wall 1121 and the second groove wall 1122 can block the two ends of the protruding structure 111 along the axial direction of the heating body 1, and can also reduce the infiltration of silicon vapor into the splicing gap between the first limiter and the second limiter, so as to ensure the reliability of the splicing and fixation between the first limiter and the second limiter, so that the two interconnected heating petals 11 have good contact, which can reduce the probability of the heater sparking due to the virtual connection of the two interconnected heating petals 11, and help to improve the service life of the heater.

[0046] Specifically, in the embodiment of the present invention, the principles of mechanics and mortise and tenon structure can be used to transfer part of the force between the two interconnected heating petals 11 to between the first groove wall 1121 and the protruding structure 111, and between the second groove wall 1122 and the protruding structure 111, thereby reducing the axial shear force borne by the bolt on the heating body 1.

[0047] In an embodiment of the present utility model, the first groove wall 1121 and the second groove wall 1122 limit the protruding structure 111, which can achieve limitation in one direction dimension. Fasteners can be further used to fasten the protruding structure 111 in the limiting groove 112 to achieve limitation in the other two directions dimensions. The combination of the two methods can achieve fixation in three directions dimensions, so as to improve the reliability of splicing and fixation between the two interconnected heating petals 11.

[0048] Alternatively, on the basis of limiting the protruding structure 111 by the first groove wall 1121 and the second groove wall 1122, graphite glue or other glue can be further used to bond the protruding structure 111 into the limiting groove 112 to improve the reliability of the splicing and fixing between the first limiting member and the second limiting member.

[0049] Alternatively, on the basis of limiting the protruding structure 111 by the first groove wall 1121 and the second groove wall 1122, fasteners and graphite glue can be used to fix the protruding structure 111 in the limiting groove 112 to improve the reliability of the splicing and fixing between the first limiting member and the second limiting member.

[0050] In other embodiments of the present invention, Figures 5 to 7 As shown, the limiting groove 112 has a second slot 1130, and the second slot 1130 is opened along the circumferential direction of the heating petal 11; the limiting groove 112 includes a third slot wall 1131 and a fourth slot wall 1132, and the third slot wall 1131 and the fourth slot wall 1132 are arranged on both sides of the second slot 1130 along the radial direction of the heating body 1; when the protruding structure 111 is connected to the stop end of the limiting groove 112, the third slot wall 1131 and the fourth slot wall 1132 are used to limit the relative movement of the protruding structure 111 along the radial direction of the heating body 1.

[0051] In an embodiment of the present utility model, the third groove wall 1131 and the fourth groove wall 1132 can be used to limit the radial direction of the heating body 1 on the protruding structure 111, which is conducive to ensuring the tight fit of the first limiting member and the second limiting member in the radial direction of the heating body 1, thereby reducing the probability of sparks caused by the virtual connection between the two interconnected heating petals 11.

[0052] Specifically, the second notch 1130 is the opening of the limiting groove 112, which is used to avoid the protruding structure 111. For example, Figures 5 to 7 As shown, when the protruding structure 111 is installed into the limiting groove 112 along the axial direction of the heating body 1 , at least a portion of the protruding structure 111 is accommodated in the second notch 1130 .

[0053] Optionally, the depth of the limiting groove 112 in the axial direction of the heating body 1 is smaller than the height of the heating petal 11 in the axial direction of the heating body 1 .

[0054] In an embodiment of the present utility model, the groove depth of the limiting groove 112 along the axial direction of the heating body 1 is smaller than the axial height of the heating petal 11 in the heating body 1. On the one hand, the protruding structure 111 can be limited from the axial direction of the heating body 1, which is beneficial to improve the tightness of the fit between the first limiting member and the second limiting member, and improve the good contact between the two mutually connected heating petals 11; on the other hand, it can also reduce the splicing gap between the first limiting member and the second limiting member. During the crystal pulling process, the amount of silicon vapor penetrating into the splicing gap can be reduced, and the increase of the splicing gap can be avoided, thereby ensuring good contact between the two mutually connected heating petals 11 and improving the service life of the heater.

[0055] Specifically, in the embodiment of the present invention, the limiting groove 112 has a groove wall at at least one end along the axial direction of the heating body 1 , so as to limit the protruding structure 111 in the axial direction of the heating body 1 .

[0056] Optionally, the groove depth of the limiting groove 112 in the axial direction of the heating body 1 is equal to the axial height of the heating petal 11 in the heating body 1, so that the limiting groove 112 is provided with openings at both ends in the axial direction of the heating body 1. In this way, when assembling two mutually connected heating petals 11, the protruding structure 111 can enter the limiting groove 112 along the axial direction of the heating body 1, that is, the protruding structure 111 can enter the limiting groove 112 from any end of the limiting groove 112 in the axial direction of the heating body 1, which can further improve the convenience of splicing the two mutually connected heating petals 11.

[0057] In an embodiment of the present invention, based on the limitation of the protruding structure 111 by the third groove wall 1131 and the fourth groove wall 1132, fasteners can be further used to fasten the protruding structure 111 in the limiting groove 112 to improve the reliability of the splicing and fixation between the first limiting member and the second limiting member.

[0058] Alternatively, on the basis of limiting the protruding structure 111 by the third groove wall 1131 and the fourth groove wall 1132, graphite glue can be further used to bond the protruding structure into the limiting groove 112 to improve the reliability of the splicing and fixing between the first limiting member and the second limiting member.

[0059] Alternatively, on the basis of limiting the protruding structure 111 by the third groove wall 1131 and the fourth groove wall 1132, fasteners and graphite glue can be used to fix the protruding structure 111 in the limiting groove 112 to improve the reliability of the splicing and fixing between the first limiting member and the second limiting member.

[0060] Optionally, the groove depth in the axial direction of the heater 1 is equal to the height of the heating petal 11 in the axial direction of the heater 1. The protruding structure 111 has different thicknesses in the radial direction of the heater 1 at both ends along the axial direction of the heater 1; and / or, the protruding structure 111 has different thicknesses in the radial direction of the heater 1 at both ends along the circumference of the heater 1, so as to facilitate the first and second limiting members to cooperate in the axial direction of the heater 1.

[0061] Specifically, during the use of the heater, the two sides of the heating body 1 are connected to the foot plate 2 and can be supported by the foot plate 2. Under the action of its own gravity, the heating body 1 sags away from the middle position of the foot plate 2, and the heating body 1 is deformed, so that the groove wall of the limiting groove 112 and the contact surface of the protruding structure 111 form an angle with the vertical direction. Since the thickness of the protruding structure 111 at both ends along the circumference of the heating body 1 is different in the radial direction of the heating body 1, and / or the thickness of the protruding structure 111 at both ends along the axial direction of the heating body 1 is different in the radial direction of the heating body 1, the groove wall of the limiting groove 112 can generate a component force in the vertical direction on the protruding structure 111 to support and limit the protruding structure 111, thereby limiting the relative movement of the two interconnected heating petals 11 along the axial direction of the heating body 1.

[0062] For example, taking the case where the thickness of the protruding structure 111 at both ends along the circumference of the heating body 1 is different in the radial direction of the heating body 1, during the use of the heater, the foot plate 2 of the heater is located below the heating body 1, and the foot plate 2 is arranged on the left and right sides of the heating body 1. The middle position of the heating body 1 is deformed under the action of gravity, and the middle part of the heating body 1 sags, causing the heating petals 11 to deform in the vertical direction. At the connection between the two interconnected heating petals 11, the contact surface between the limiting groove 112 and the protruding structure 111 forms an angle θ with the vertical direction. In this way, for the two adjacent heating petals 11, the third groove wall 1131 or the fourth groove wall 1132 can support and limit the protruding structure 111 in the vertical direction, that is, the limiting groove 112 can support the protruding structure 111 from the axial direction of the heating body 1.

[0063] Specifically, the larger the droop distance L of the central portion of the heating element 11, the larger the angle θ. The droop distance L is also related to the diameter of the heating element 1 and the physical properties of the material used for processing, such as the flexural strength and density. Under normal temperature and natural conditions, the droop distance L can be 1 mm to 18 mm, and the angle θ can be 0.1° to 4°. During the crystal pulling process, both the droop distance L and the angle θ will increase.

[0064] Optionally, the raised structure 111 includes a first end and a second end along the circumference of the heating body 1. When the thicknesses of the two ends in the radial direction of the heating body 1 are different, the thickness of the first end in the radial direction of the heating body 1 can be smaller than the thickness of the second end in the radial direction of the heating body 1, which can prevent the raised structure 111 from sliding out of the limiting groove 112 along the circumference of the heating body 1, so that the first limiting member and the second limiting member can achieve limitation along the circumference of the heating body 1, which can further reduce the force on the bolt.

[0065] In some embodiments, in the radial direction of the heating body 1, the distance between the third groove wall 1131 and the fourth groove wall 1132 matches the thickness of the protruding structure 111, which can improve the adaptability of the protruding structure 111 and the limiting groove 112, and effectively ensure the reliability of the splicing between two adjacent heating petals 11.

[0066] In the embodiment of the present invention, in the adjacent first heating petal 12 and the second heating petal 13, the third groove wall 1131 and the fourth groove wall 1132 can limit the raised structure from the radial direction of the heating body 1, so as to achieve the fixation of the radial dimension; the thickness of the first end in the radial direction of the heating body 1 can be smaller than the thickness of the second end in the radial direction of the heating body 1, and the limiting groove 112 is adapted to the raised structure 111, so that the limiting groove 112 can also limit the raised structure 111 from the circumferential direction of the heating body 1, so as to achieve the fixation of the circumferential dimension; under gravity, Under the action, the protruding structure 111 naturally droops, and the third groove wall 1131 or the fourth groove wall 1132 can limit the protruding structure 111 in the axial direction of the heating body 1, so as to realize the fixation of the axial dimension, that is, the cooperation of the first limiting member and the second limiting member can realize the locking of the three-dimensional direction, and the use of bolt fixation can be eliminated, and the setting of threaded holes on the surface of the heating petal 11 can be avoided. During the crystal pulling process, the silicon vapor infiltration area can be reduced, which is conducive to enhancing the reliability of the splicing and fixation of the first limiting member and the second limiting member, and reducing the probability of the heater igniting.

[0067] Alternatively, as Figure 7 As shown, the raised structure 111 includes a first end and a second end along the circumference of the heating body 1, and the first end is connected to the heating petal 11; the thickness of the first end in the radial direction of the heating body 1 is less than the thickness of the second end in the radial direction of the heating body 1; the limiting groove 112 includes a third end and a fourth end along the circumference of the heating body 1, and the third end is connected to the heating petal 11, and the distance between the two opposite groove walls of the third end in the radial direction of the heating body 1 is greater than the distance between the two opposite groove walls of the fourth end in the radial direction of the heating body 1.

[0068] In the embodiment of the present invention, during the assembly of the first heating petal 12 and the second heating petal 13, the protruding structure 111 enters the limiting groove 112 along the axial direction of the heater. Since the thickness of the first end in the radial direction of the heater 1 is less than the thickness of the second end in the radial direction of the heater 1, and the radial spacing between the two opposing groove walls at the third end in the radial direction of the heater 1 is greater than the radial spacing between the two opposing groove walls at the fourth end in the radial direction of the heater 1, the ease with which the protruding structure 111 can enter the limiting groove 112 can be improved. At the same time, the movement of the protruding structure 111 and the limiting groove 112 in the circumferential direction of the heater 1 can be restricted.

[0069] In some embodiments, the thickness of the first end in the radial direction of the heater 1 may also be equal to the thickness of the second end in the radial direction of the heater 1; correspondingly, at the third and fourth ends of the limiting groove 112 along the circumference of the heater 1, the spacing between the two opposing groove walls at the third end in the radial direction of the heater 1 is equal to the spacing between the two opposing groove walls at the fourth end in the radial direction of the heater 1. The limiting groove 112 and the protruding structure 111 may be fixed by bolts or graphite adhesive.

[0070] Optionally, the first limit member and the second limit member can be fixed by fasteners and / or adhesive bonding, and the two interconnected heating petals 11 can be further fastened in three dimensions: radial direction of the heating body 1, axial direction of the heating body 1, and circumferential direction of the heating body 1, thereby improving the structural stability of the heating body 1.

[0071] Specifically, in an embodiment of the present invention, at least two adjacent heating petals 11 can be connected by a first limit member and a second limit member stop, wherein a part of two adjacent heating petals 11 can be fixedly connected only by bolts or glue, or a part of two adjacent heating petals 11 can be connected by a first limit member and a second limit member stop and fixedly connected by bolts or glue.

[0072] In some embodiments, the first limiting member of a heating petal 11 is provided with a first through hole 1111 which passes through the radial direction of the heating body 1, and the second limiting member of another adjacent heating petal 11 is provided with a second through hole 1140 which passes through the radial direction of the heating body 1; the first through hole 1111 and the second through hole 1140 of the two interconnected heating petals 11 are arranged opposite to each other, that is, the first through hole 1111 in the first heating petal 12 and the second through hole 1140 in the second heating petal 13 are arranged opposite to each other; the fasteners are respectively passed through the first through hole 1111 and the second through hole 1140 which are arranged opposite to each other, for fixing the first limiting member and the second limiting member.

[0073] In an embodiment of the present utility model, on the basis of the axial limiting cooperation of the first limiting member and the second limiting member along the heating body 1, fasteners are further used to fix the first limiting member and the second limiting member, which can improve the reliability of the tight cooperation between the first limiting member and the second limiting member, thereby ensuring good contact between the two interconnected heating petals 11, reducing the probability of ignition, and increasing the service life of the heater.

[0074] Specifically, the fasteners may include bolts or screws, etc., which can be selected according to actual needs and are not specifically limited in the embodiments of the present invention.

[0075] Specifically, compared with the solution in the prior art that relies solely on bolt fastening, the embodiment of the utility model can utilize the first limit member and the second limit member to achieve axial limit cooperation on the heating body 1, reducing the axial shear force of the fastener on the heating body 1, thereby reducing the strength requirements for the fastener, and reducing the probability of the first limit member and the second limit member being separated due to damage to the fastener, thereby avoiding the phenomenon of sparks caused by the virtual connection between the first heating petal 12 and the second heating petal 13.

[0076] In other embodiments, the first limiting member and the second limiting member are fixed by gluing, so that the first limiting member and the second limiting member can fit tightly together, thereby improving the reliability of current transmission between the two interconnected heating petals 11, reducing the probability of ignition, and increasing the service life of the heater.

[0077] Specifically, in some embodiments, the first limit member and the second limit member can be fixed only by a stopper connection; in other embodiments, while the first limit member and the second limit member are connected by a stopper, graphite glue can be added for fixation; in still other embodiments, while the first limit member and the second limit member are connected by a stopper, fasteners can be added for fixation; in still other embodiments, while the first limit member and the second limit member are connected by a stopper, fasteners and graphite glue can be added at the same time for fixation.

[0078] Optionally, the first limiting piece of at least one heating petal 11 and the stop connection part of the second limiting piece of the adjacent heating petal 11 constitute an assembly; the thickness of the assembly in the radial direction of the heating body 1 is equal to the thickness of the heating petal 11 in the radial direction of the heating body 1, so that the overall thickness of the heating body 1 is relatively uniform, which facilitates uniform radiation of heat when powered on and can improve the heating effect.

[0079] The heater described in the embodiment of the present utility model has at least the following advantages:

[0080] In the embodiment of the utility model, the limiting cooperation of the first limiting member and the second limiting member can realize the limiting of the two mutually connected heating petals in the axial direction of the heating body. In this way, when the two heating petals are fixed with bolts, the bolts can limit the two heating petals in directions other than the axial direction of the heating body. The bolts do not need to bear the axial shear force of the heating body, which can reduce the strength requirements of the bolts, improve the contact between the two mutually connected heating petals, and increase the service life of the heater.

[0081] In a second aspect, an embodiment of the present utility model further discloses a single crystal furnace, which may specifically include the above-mentioned heater.

[0082] The single crystal furnace described in the embodiment of the present invention can achieve the same beneficial effects as the above-mentioned heater, and will not be described in detail here.

[0083] Although the preferred embodiments of the present invention have been described, those skilled in the art may make additional changes and modifications to these embodiments once they are aware of the basic creative concepts. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the present invention.

[0084] Finally, it should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or terminal device that includes a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such process, method, article, or terminal device. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of additional identical elements in the process, method, article, or terminal device that includes the element.

[0085] The above is a detailed introduction to a heater and a single crystal furnace provided by the present invention. Specific examples are used in this article to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method and core idea of ​​the present invention. At the same time, for those skilled in the art, according to the idea of ​​the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. A heater, characterized in that: include: A heating body (1), the heating body (1) comprising a plurality of heating petals (11) connected end to end; At least one of the heating petals (11) is provided with a first limiting member at its head end and a second limiting member at its tail end; The first limiting member of at least one of the heating petals (11) is connected to the stop of the second limiting member of the adjacent heating petal (11) to limit the axial movement of the two interconnected heating petals (11) along the heating body (1).

2. The heater according to claim 1, wherein The first limiting member includes a protruding structure (111), and the second limiting member includes a limiting groove (112); The protruding structure (111) of at least one of the heating petals (11) is embedded in the limiting groove (112) of the adjacent heating petal (11); the limiting groove (112) is used to limit the axial movement of the protruding structure (111) along the heating body (1).

3. The heater according to claim 2, characterized in that The limiting groove (112) has a first notch (1120), and the first notch (1120) is opened along the radial direction of the heating petal (11); the limiting groove (112) comprises a first groove wall (1121) and a second groove wall (1122), and the first groove wall (1121) and the second groove wall (1122) are arranged on both sides of the first notch (1120) along the axial direction of the heating body (1); When the protruding structure (111) is connected to the stopper of the limiting groove (112), the first groove wall (1121) and the second groove wall (1122) are used to limit the axial movement of the protruding structure (111) along the heating body (1).

4. The heater according to claim 2, characterized in that The limiting groove (112) has a second notch (1130), and the second notch (1130) is opened along the circumferential direction of the heating petal (11); the limiting groove (112) includes a third groove wall (1131) and a fourth groove wall (1132), and the third groove wall (1131) and the fourth groove wall (1132) are arranged on both sides of the second notch (1130) along the radial direction of the heating body (1); When the protruding structure (111) is connected to the stopper of the limiting groove (112), the third groove wall (1131) and the fourth groove wall (1132) are used to limit the radial movement of the protruding structure (111) along the heating body (1).

5. The heater according to claim 4, characterized in that The depth of the limiting groove (112) in the axial direction of the heating body (1) is smaller than the height of the heating petal (11) in the axial direction of the heating body (1).

6. The heater according to claim 4, characterized in that The depth of the limiting groove (112) in the axial direction of the heating body (1) is equal to the height of the heating petal (11) in the axial direction of the heating body (1); wherein, The protruding structure (111) has different thicknesses in the radial direction of the heating body (1) at both ends of the axial direction of the heating body (1); and / or, The protruding structure (111) has different thicknesses in the radial direction of the heating body (1) at both ends along the circumference of the heating body (1).

7. The heater according to claim 6, characterized in that The protruding structure (111) comprises a first end and a second end along the circumference of the heating body (1); the first end is connected to the heating petal (11); The thickness of the first end in the radial direction of the heating body (1) is smaller than the thickness of the second end in the radial direction of the heating body (1).

8. The heater according to claim 1, wherein The first limiting member and the second limiting member are fixed by fasteners and / or adhesive.

9. The heater according to claim 1, wherein The first limiting member of at least one heating petal (11) and the stop connection portion of the second limiting member of the adjacent heating petal (11) form an assembly; the thickness of the assembly in the radial direction of the heating body (1) is equal to the thickness of the heating petal (11) in the radial direction of the heating body (1).

10. A single crystal furnace comprising the heater according to any one of claims 1 to 9.

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