Fan operation detection device and wafer processing system

Abstract

The utility model provides a fan operation detection device and a wafer processing system, and relates to the technical field of wafer processing. The fan operation detection device is applied to the wafer processing system, the wafer processing system comprises a fan, and the fan discharges air through an air outlet; the fan operation detection device comprises a metal sheet, a power supply, an induction sheet and an alarm, the power supply is electrically connected with the metal sheet and the alarm, and the alarm is further electrically connected with the induction sheet; the metal sheet is rotationally connected with the position close to the air outlet, and the induction sheet is also arranged at the position close to the air outlet; when the fan works normally, the metal sheet is separated from the induction sheet; and when the fan works abnormally, the metal sheet is in contact with the induction sheet, so that the alarm gives an alarm. The fan operation detection device and the wafer processing system provided by the utility model have the advantages that the fan operation state can be detected in real time, and the production cost is reduced.

Description

Technical Field

[0001] The present application relates to the field of wafer processing technology, and in particular to a fan operation detection device and a wafer processing system. Background Art

[0002] Chemical vapor deposition (CVD) is a thin film deposition technology that uses chemical reactions to transform reactants (gases) into solid products, which are then deposited on the wafer surface. Dust is a major issue with CVD. High levels of dust can lead to unstable CVD performance.

[0003] Therefore, in the prior art, ion fans are generally installed in wafer processing systems to transport dust particles in the space to the atmosphere. However, ion fans may malfunction or have low wind speed during operation, requiring manual maintenance, which increases production costs.

[0004] In summary, the prior art has the problem of high maintenance cost when the ion fan fails or the wind force is low. Utility Model Content

[0005] The purpose of the present application is to provide a fan operation detection device and a wafer processing system to solve the problem in the prior art of high maintenance cost when the ion fan fails or the wind force is low.

[0006] In order to achieve the above objectives, the technical solutions adopted in the embodiments of the present application are as follows:

[0007] In one aspect, an embodiment of the present application provides a fan operation detection device, which is applied to a wafer processing system. The wafer processing system includes a fan, and the fan discharges air through an air outlet. The fan operation detection device includes a metal sheet, a power supply, a sensor sheet, and an alarm. The power supply is electrically connected to the metal sheet and the alarm, respectively, and the alarm is also electrically connected to the sensor sheet.

[0008] The metal sheet is rotatably connected to a position close to the air outlet, and the induction sheet is also arranged close to the air outlet;

[0009] When the fan operates normally, the metal sheet is separated from the induction sheet;

[0010] When the fan operates abnormally, the metal sheet contacts the sensor sheet, so that the alarm device sounds an alarm.

[0011] Optionally, the fan operation detection device further includes a limiting portion, wherein the limiting portion is connected to the bottom of the metal sheet;

[0012] When the fan is operating normally, the limiting portion is used to limit the separation angle between the metal sheet and the sensor sheet.

[0013] Optionally, the fan operation detection device further comprises a limiting portion, and the limiting portion is provided on the top of the metal sheet;

[0014] When the fan is operating normally, the limiting portion abuts against the metal sheet to limit the separation angle between the metal sheet and the sensor sheet.

[0015] Optionally, when the fan operates normally, the angle between the metal sheet and the induction sheet is 10° to 45°.

[0016] Optionally, when the fan operates normally, the angle between the metal sheet and the induction sheet is 15°.

[0017] Optionally, the fan operation detection device further includes a mounting plate, the mounting plate is installed at a position close to the air outlet, and the metal sheet is rotatably connected to the mounting plate.

[0018] Optionally, the alarm includes an audible and visual alarm.

[0019] Optionally, the metal sheet includes an iron sheet, and the gravity generated by the iron sheet is smaller than the wind force generated by the fan at the air outlet.

[0020] Optionally, when the fan operates abnormally, the metal sheet cover is provided on the air outlet.

[0021] On the other hand, an embodiment of the present application further provides a wafer processing system, which includes the above-mentioned fan operation detection device.

[0022] Compared with the prior art, this application has the following beneficial effects:

[0023] The present application provides a fan operation detection device and a wafer processing system, wherein the fan operation detection device is applied to the wafer processing system, wherein the wafer processing system includes a fan, and the fan discharges air through an air outlet; the fan operation detection device includes a metal sheet, a power supply, a sensor sheet, and an alarm, wherein the power supply is electrically connected to the metal sheet and the alarm, respectively, and the alarm is also electrically connected to the sensor sheet; the metal sheet is rotatably connected to a position near the air outlet, and the sensor sheet is also arranged at a position near the air outlet; when the fan is operating normally, the metal sheet is separated from the sensor sheet; when the fan is operating abnormally, the metal sheet contacts the sensor sheet to cause the alarm to sound. By setting the metal sheet, when the fan fails or the wind force is low, the metal sheet can directly contact the sensor sheet, thereby realizing an alarm, eliminating the need for manual maintenance, and thus reducing production costs.

[0024] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0026] Figure 1 A schematic diagram of a module of a fan operation detection device provided in an embodiment of the present application.

[0027] Figure 2 This is a structural diagram of the fan operation detection device provided in an embodiment of the present application.

[0028] In the picture:

[0029] 110-metal sheet; 120-power supply; 130-sensor sheet; 140-alarm; 150-air outlet; 160-mounting plate. DETAILED DESCRIPTION

[0030] To make the objectives, technical solutions, and advantages of the embodiments of the present application more clear, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Generally, the components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0031] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for protection, but merely represents selected embodiments of the present application. All other embodiments obtained by persons of ordinary skill in the art based on the embodiments in the present application without creative work are within the scope of protection of the present application.

[0032] It should be noted that similar reference numerals and letters represent similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings. At the same time, in the description of this application, the terms "first", "second", etc. are only used to distinguish the description and should not be understood as indicating or implying relative importance.

[0033] It should be noted that, in this document, relational terms such as first and second, etc. are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations.

[0034] The following describes some embodiments of the present application in detail with reference to the accompanying drawings. In the absence of conflict, the following embodiments and features therein may be combined with each other.

[0035] As mentioned in the background, during chemical vapor deposition (CVD), it is necessary to keep the airspace dust-free, so an ion fan is generally required. However, since the ion fan is an external component of the wafer processing system and has no communication with the machine, and its high position makes it difficult for manual inspection.

[0036] During the operation of the fan, the fan may be damaged or the fan wind force may be low, resulting in incomplete dust processing and floating in the wafer processing space, ultimately leading to a decrease in the wafer product yield.

[0037] In order to improve the yield of wafer products, it is necessary to check for fan damage or low wind speed. Currently, there are two common inspection methods:

[0038] The first option is for staff to perform regular inspections. However, because the ion fan is located relatively high, staff cannot observe it during patrol inspections, and each inspection requires stopping the machine for inspection, which affects the production efficiency of the entire system. Furthermore, because the ion fan is located relatively high, staff need to climb up to inspect it, which increases production costs and poses a safety risk. Furthermore, because each inspection is performed on a regular basis, even if an abnormal fan operation is discovered, it may have already affected the yield of many products. For example, during maintenance on January 2, staff discovered an abnormal fan operation and repaired the fan. However, the abnormal fan operation may have occurred on January 1, so the yield of the wafers processed on January 1 had already been affected. Furthermore, a large amount of manpower is required to check the yield of the wafers processed on January 1, increasing the workload and cost.

[0039] The second method uses sensors to monitor the dust in the space. If the detected dust content exceeds a threshold, it indicates that the fan may be operating abnormally. However, this method cannot determine the time of fan abnormality in real time. When the sensor detects that the dust content in the space exceeds the standard, it indicates that the fan is operating abnormally, which may have already affected the yield of some wafers.

[0040] In summary, the existing technology has the problem of being unable to perform real-time operation detection on the ion fan, resulting in high maintenance costs.

[0041] In view of this, in order to solve the above problems, the present application provides a fan operation detection device, which realizes real-time detection of the operation of the ion fan by arranging metal sheets and sensor sheets at the ventilation opening.

[0042] The following is an exemplary description of the fan operation detection device provided by this application:

[0043] As an optional implementation, the fan operation detection device is applied to a wafer processing system, the wafer processing system includes a fan, and the fan discharges air through the air outlet 150; see Figure 1 and Figure 2 The fan operation detection device includes a metal sheet 110, a power supply 120, a sensor sheet 130 and an alarm 140. The power supply 120 is electrically connected to the metal sheet 110 and the alarm 140 respectively, and the alarm 140 is also electrically connected to the sensor sheet 130; the metal sheet 110 is rotatably connected to a position near the air outlet 150, and the sensor sheet 130 is also set at a position near the air outlet 150; when the fan is working normally, the metal sheet 110 is separated from the sensor sheet 130; when the fan is working abnormally, the metal sheet 110 contacts the sensor sheet 130, so that the alarm 140 alarms.

[0044] It should be noted that the abnormal operation of the fan described in this application includes two states: the fan stops rotating and the fan blades are rotating but the wind force is small. Normal operation of the fan means that the fan maintains a certain wind force during operation.

[0045] On this basis, when the fan is operating normally, the wind force generated by the fan at the air outlet 150 is relatively strong, so it can blow the metal sheet 110 up. At this time, the metal sheet 110 and the sensor sheet 130 are separated, so the entire alarm circuit is disconnected and the alarm 140 will not sound an alarm. However, when the fan is operating abnormally, the wind force generated by the fan at the air outlet 150 is relatively weak. At this time, due to the certain gravity of the metal sheet 110, the air at the air outlet 150 cannot blow the metal sheet 110 up. The metal sheet 110 and the sensor sheet 130 come into contact, the alarm circuit is connected, and the alarm 140 directly sounds an alarm.

[0046] It can be understood that the fan operation detection device provided in this application can achieve real-time detection of the fan operation status. Once the fan malfunctions, the wind force is reduced, the metal sheet 110 directly contacts the sensor sheet 130, and the alarm 140 immediately sounds an alarm. The staff can directly inspect and repair the fan without affecting the product yield.

[0047] The power supply 120 provided in this application can be a 5V DC power supply 120, the positive electrode of which is connected to the metal sheet 110, and the negative electrode of which is connected to the alarm 140. The material of the metal sheet 110 is not limited in this application, and can be, for example, an iron sheet, a copper sheet, etc., as long as it is conductive. For example, a 9cm*10cm iron sheet can be used, and the position of the patch is fixed 1cm to the left. In addition, the alarm 140 provided in this application can be an audible and visual alarm 140, for example, a buzzer can be used.

[0048] It should be noted that in this application, the threshold for determining abnormal fan operation can be adjusted by adjusting the weight of the metal sheet 110. Specifically, the gravity generated by the metal sheet 110 needs to be less than the wind force generated by the fan at the air outlet 150, so as to ensure that the metal sheet 110 can be blown up when the fan is operating normally. That is, when the fan is operating normally, the wind force at the air outlet 150 is greater than the gravity of the metal sheet 110, and the metal sheet 110 can be blown up. However, when the fan is abnormal, the wind force at the air outlet 150 will be less than the gravity of the metal sheet 110, and the air outlet will not be able to blow the metal sheet 110 up.

[0049] Therefore, by adjusting the weight of metal sheet 110, the threshold for fan anomalies can be adjusted. For example, when metal sheet 110 weighs 0.2 kg, the corresponding wind force threshold is 40 N. Therefore, for the fan to operate normally, it needs to generate a wind force greater than 40 N. If the generated wind force is less than 40 N, it indicates that the fan is anomaly. If the weight of metal sheet 110 is changed to 0.5 kg, the corresponding wind force threshold is 100 N. Therefore, for the fan to operate normally, it needs to generate a wind force greater than 100 N.

[0050] Furthermore, it should be noted that the angle of the metal sheet 110 when being blown up should not be too large. If the angle of the metal sheet 110 is too large, the turning temperature of the metal sheet 110 may exceed 90 degrees. In this case, the metal sheet 110 will not be able to turn back to the side facing the disposal port, resulting in the inability to perform the fan operation status detection function.

[0051] In view of this, the fan operation detection device provided in the present application also includes a limiting portion to limit the separation angle of the metal sheet 110 and the sensor sheet 130, that is, to limit the angle at which the metal sheet 110 is blown up. In one implementation, the limiting portion is connected to the bottom of the metal sheet 110; when the fan is operating normally, the limiting portion is used to limit the separation angle of the metal sheet 110 and the sensor sheet 130. That is, a limiting portion is provided in the rotation mechanism at the bottom of the metal sheet 110, thereby limiting the maximum angle at which the metal sheet 110 can rotate. When the metal sheet 110 is blown up, once the maximum blowing angle is reached, the metal sheet 110 will no longer be able to move.

[0052] In another implementation, a stopper is provided on the top of the metal sheet 110. When the fan is operating normally, the stopper abuts against the metal sheet 110 to limit the separation angle between the metal sheet 110 and the sensor sheet 130. In other words, in this implementation, when the metal sheet 110 is blown up, once the height of the stopper reaches the height of the stopper, the metal sheet 110 cannot move further, thereby limiting the separation angle between the metal sheet 110 and the sensor sheet 130.

[0053] When the fan is operating normally, the angle between the metal sheet 110 and the induction sheet 130 is 10° to 45°. That is, when the fan is operating normally, the metal sheet 110 is limited by the limiting portion to a blowing angle of 10° to 45°, thus ensuring both ventilation requirements and the separation between the metal sheet 110 and the induction sheet 130.

[0054] Optionally, in the example provided in this application, when the fan operates normally, the angle between the metal sheet 110 and the induction sheet 130 is 15°.

[0055] In addition, as an implementation, the fan operation detection device further includes a mounting plate 160 . The mounting plate 160 is installed near the air outlet 150 , and the metal sheet 110 is rotatably connected to the mounting plate 160 .

[0056] Based on the above implementation, an embodiment of the present application further provides a wafer processing system, which includes the above fan operation detection device.

[0057] In summary, the present application provides a fan operation detection device and a wafer processing system, wherein the fan operation detection device is applied to the wafer processing system, the wafer processing system includes a fan, and the fan discharges air through the air outlet; the fan operation detection device includes a metal sheet, a power supply, a sensor sheet and an alarm, the power supply is electrically connected to the metal sheet and the alarm respectively, and the alarm is also electrically connected to the sensor sheet; the metal sheet is rotatably connected to a position near the air outlet, and the sensor sheet is also set at a position near the air outlet; when the fan is working normally, the metal sheet is separated from the sensor sheet; when the fan is working abnormally, the metal sheet contacts the sensor sheet to make the alarm sound. By setting the metal sheet, when the fan fails or the wind force is small, the metal sheet can directly contact the sensor sheet, thereby realizing an alarm, without the need for manual maintenance, thereby reducing production costs.

[0058] The foregoing description is merely a preferred embodiment of the present application and is not intended to limit the present application. Persons skilled in the art will readily appreciate that various modifications and variations are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present application shall be included within the scope of protection of the present application.

[0059] It will be apparent to those skilled in the art that the present application is not limited to the details of the exemplary embodiments described above and that the present application can be implemented in other specific forms without departing from the spirit or essential characteristics of the present application. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the present application is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be included therein. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

Claims

1. A fan operation detection device, characterized in that: Applicable to a wafer processing system, the wafer processing system includes a fan, and the fan discharges air through an air outlet; the fan operation detection device includes a metal sheet, a power supply, a sensor sheet, and an alarm, the power supply is electrically connected to the metal sheet and the alarm respectively, and the alarm is also electrically connected to the sensor sheet; The metal sheet is rotatably connected to a position close to the air outlet, and the induction sheet is also arranged close to the air outlet; When the fan operates normally, the metal sheet is separated from the induction sheet; When the fan operates abnormally, the metal sheet contacts the sensor sheet, so that the alarm device sounds an alarm.

2. The fan operation detection device according to claim 1, wherein: The fan operation detection device further includes a limiting portion connected to the bottom of the metal sheet; When the fan is operating normally, the limiting portion is used to limit the separation angle between the metal sheet and the sensor sheet.

3. The fan operation detection device according to claim 1, wherein: The fan operation detection device further includes a limiting portion, which is arranged on the top of the metal sheet; When the fan is operating normally, the limiting portion abuts against the metal sheet to limit the separation angle between the metal sheet and the sensor sheet.

4. The fan operation detection device according to claim 1, wherein: When the fan operates normally, the angle between the metal sheet and the induction sheet is 10° to 45°.

5. The fan operation detection device according to claim 4, wherein: When the fan operates normally, the angle between the metal sheet and the induction sheet is 15°.

6. The fan operation detection device according to claim 1, wherein: The fan operation detection device further includes a mounting plate, which is mounted at a position close to the air outlet, and the metal sheet is rotatably connected to the mounting plate.

7. The fan operation detection device according to claim 1, wherein: The alarm includes an audible and visual alarm.

8. The fan operation detection device according to claim 1, wherein: The metal sheet includes an iron sheet, and the gravity generated by the iron sheet is smaller than the wind force generated by the fan at the air outlet.

9. The fan operation detection device according to claim 1, wherein: When the fan works abnormally, the metal sheet cover is arranged on the air outlet.

10. A wafer processing system, characterized in that: The wafer processing system includes the fan operation detection device according to any one of claims 1 to 9.

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