Pneumatic shading device for LDI equipment
By using a pneumatic shading device in the LDI equipment, the problem of laser beam delay caused by mechanical shutter blocking is solved, delay-free shading and efficient imaging are achieved, and the imaging accuracy and work efficiency of the substrate are improved.
Patent Information
- Application Number
- CN202422670377.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-31
- Publication Date
- 2025-09-30
- Estimated Expiration
- 2034-10-31
AI Technical Summary
Existing mechanical shutters in LDI equipment have a delay when blocking the laser beam, affecting the imaging accuracy and efficiency of the substrate.
A pneumatic shading device is used to push the shading plate along the mounting plate through a pneumatic slide to keep the distance between the shading plate and the laser beam constant, and the solenoid valve is used to control the movement of the shading plate to achieve delay-free shading of the laser beam.
It realizes the laser beam blocking without delay, improves the imaging accuracy of the substrate and the working efficiency, and saves energy.
Smart Images
Figure CN223401139U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of LDI equipment, in particular to a pneumatic shading device for LDI equipment. Background Art
[0002] LDI equipment is a laser direct imaging device that replaces traditional photoresist exposure technology in the circuit board manufacturing process, achieving more precise circuit production and higher production efficiency. LDI equipment primarily consists of a laser system, control system, mechanical platform, optical system, safety devices, auxiliary equipment, and software interface. The shutter is the main component of the laser system, which blocks the laser beam when it is not needed, ensuring that the substrate is exposed only at the designated time and location.
[0003] The existing technical solution for a mechanical shutter is to fix the base plate on the mechanical shutter structure mounting base through a mechanical shutter guide shaft. The mechanical shutter guide shaft is connected to a cylinder, which is connected to the compressed air of the LDI device through a compressed air connector. The cylinder drives the mechanical shutter guide shaft to drive the shading component to move. The mechanical shutter structure uses pneumatic propulsion to push the mechanical shutter to slide, and there is a delay in movement, which causes the mechanical shutter to be unable to block the laser beam in time, affecting the substrate. Utility Model Content
[0004] In order to solve the problem of delay in shutter blocking laser beam, the utility model provides a pneumatic light shielding device for LDI equipment. The specific technical solution is as follows:
[0005] A pneumatic shading device for LDI equipment, the LDI equipment including a laser system capable of emitting a laser beam and being moved by a pneumatic device, the pneumatic shading device comprising: a mounting assembly connected to the laser system; a shading assembly disposed on the mounting assembly, capable of blocking the laser beam from irradiating a substrate surface; and a pneumatic assembly disposed on the mounting assembly, capable of pushing the shading assembly to move relative to the laser beam when the pneumatic device pushes the laser system.
[0006] Furthermore, the mounting assembly includes: a fixed plate connected to the laser system at one end; and a mounting plate connected to the fixed plate at one end, the length direction of the mounting plate being the moving direction of the shading assembly, and the length direction of the mounting plate being perpendicular to the axial direction of the laser beam.
[0007] Preferably, the shading assembly includes: a shading plate connected to the mounting plate at one end, the shading plate is perpendicular to the laser beam, and the shading plate can completely cover the light spot generated by the laser beam on the shading plate; and a light-transmitting hole formed on the shading plate, the diameter of the light-transmitting hole is not smaller than the light spot generated by the laser beam on the shading plate.
[0008] Preferably, the pneumatic component includes: a pneumatic slide arranged on the mounting plate, which can push the shading component to block the laser beam along the length direction of the mounting plate; and a solenoid valve connected to the pneumatic device and the pneumatic slide, which can control the movement of the pneumatic slide when the pneumatic device moves.
[0009] Preferably, the pneumatic device can control the electromagnetic valve. When the pneumatic device controls the movement of the laser beam, the electromagnetic valve can control the pneumatic slide to drive the shading plate to move relative to the laser beam along the length direction of the mounting plate.
[0010] Preferably, the two ends of the fixing plate are respectively connected to one end of the mounting plate, and the other end of the mounting plate is connected to the two ends of the shading plate. The pneumatic slide arranged on the mounting plate drives one end of the shading plate to move along the length direction of the mounting plate.
[0011] It can be seen from the above technical solution that the utility model has the following beneficial effects:
[0012] The utility model sets a pneumatic slide to push the light shielding plate to move along the mounting plate, so that the distance between the top surface of the light shielding plate and the laser beam is constant, so that the spot area of the laser beam on the light shielding plate is constant, and thus the light shielding plate can block the laser beam at any position. Secondly, when the pneumatic device controls the movement of the laser system, the pneumatic component pushes the light shielding plate to move, so that at the last moment when the laser beam needs to be blocked, the pneumatic device can control the pneumatic component to move the light shielding plate through the solenoid valve, thereby achieving delay-free blocking of the laser beam, improving the imaging accuracy of the substrate, and saving energy. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] Figure 1 This is a schematic diagram of the structure of the embodiment of the utility model connected to the laser system;
[0014] Figure 2 A schematic diagram of shielding a laser beam according to an embodiment of the present utility model;
[0015] Figure 3 Schematic diagram of a laser beam passing through an embodiment of the present invention.
[0016] In the figure: 1. Installation assembly; 2. Shading assembly; 3. Pneumatic assembly; 4. Laser system; 5. Pneumatic device; 11. Fixing plate; 12. Installation plate; 21. Shading plate; 22. Light-transmitting hole; 31. Pneumatic slide; 32. Solenoid valve; 41. Laser beam. DETAILED DESCRIPTION
[0017] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0018] In the description of the embodiments of the present invention, it should be noted that the terms "inside", "outside", "upper", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the product of the present invention is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as a limitation on the present invention.
[0019] like Figure 1 As shown, the LDI device includes a laser system 4 , which can emit a laser beam 41 and can be moved by a pneumatic device 5 .
[0020] Specifically, the pneumatic device 5 pushes the laser system 4 to move along the substrate through the cylinder, and then performs laser direct imaging on the surface of the substrate. When the control system controls the pneumatic device 5 to move the laser system 4, the control system needs to determine in advance when the laser system 4 will be blocked by the shutter to prevent the laser beam 41 from irradiating the substrate.
[0021] Furthermore, the pneumatic shading device includes: a mounting component 1 connected to the laser system 4; a shading component 2 arranged on the mounting component 1, which can block the laser beam 41 from irradiating the surface of the substrate; and a pneumatic component 3 arranged on the mounting component 1, which can push the shading component 2 to move relative to the laser beam 41 when the pneumatic device 5 pushes the laser system 4.
[0022] Specifically, the mounting assembly 1 is fixedly connected to the outer casing of the laser system 4 by bolts, so that the position of the mounting assembly 1 relative to the laser system 4 remains stable, thereby stabilizing the position of the shading assembly 2 slidably connected to the mounting assembly 1 relative to the mounting assembly 1, and thereby stabilizing the position of the shading assembly 2 relative to the laser beam 41, so that the movement trajectory of the shading assembly 2 intersects with the laser beam 41, and thus can block the laser beam 41; secondly, the pneumatic assembly 3 is fixedly installed on the mounting assembly 1 by bolts, and the telescopic end of the pneumatic assembly 3 is fixedly connected to the shielding assembly, so that the pneumatic assembly 3 can push the shading assembly 2 to move relative to the mounting assembly 1, and thus it can push the shading assembly 2 to move relative to the laser beam 41 to block or transmit light.
[0023] Among them, the control system controls the pneumatic device 5 to move the laser system 4, and then moves the laser beam 41. When the control component determines that the position of the laser beam 41 at the next moment should be blocked, the pneumatic device 5 controls the pneumatic component 3 to push the shading component 2 to block the laser beam 41 by distributing compressed gas and the solenoid valve 32, so that the laser beam 41 can be blocked without delay when the LDI equipment processes the substrate, thereby avoiding exposure of non-target areas and improving imaging accuracy.
[0024] Furthermore, the mounting assembly 1 includes: a fixing plate 11 connected to the laser system 4 at one end; and a mounting plate 12 connected to the fixing plate 11 at one end, the length direction of the mounting plate 12 is the moving direction of the shading assembly 2, and the length direction of the mounting plate 12 is perpendicular to the axial direction of the laser beam 41.
[0025] Specifically, the mounting surface of the fixing plate 11 is a vertical surface, which is fixed to the housing of the laser system 4 by bolts, thereby ensuring the position of the fixing plate 11 relative to the laser beam 41. The left and right ends of the fixing plate 11 are fixed with a mounting plate 12 by bolts. The side of the mounting plate 12 is also a vertical surface and is perpendicular to the mounting surface of the fixing plate 11, so that the side of the mounting plate 12 is parallel to the axis of the laser beam 41.
[0026] Combine Figure 2 and Figure 3 As shown, the shading assembly 2 includes: a shading plate 21 connected to the mounting plate 12 at one end, the shading plate 21 is perpendicular to the laser beam 41, and the shading plate 21 can completely cover the light spot generated by the laser beam 41 on the shading plate 21; and a light-transmitting hole 22 formed on the shading plate 21, the diameter of the light-transmitting hole 22 is not less than the light spot generated by the laser beam 41 on the shading plate 21.
[0027] Specifically, the shading plate 21 is connected to the mounting plate 12 through the pneumatic component 3, so that the moving direction of the shading component 2 is perpendicular to the axial direction of the laser beam 41, and the plane formed by the moving trajectory of the shading component 2 is perpendicular to the axis of the laser beam 41, so that the distance between the shading component 2 and the laser system 4 is constant, and the spot area of the laser beam 41 on the shading component 2 is always the same, and when the shading component 2 can completely cover the spot of the laser beam 41 thereon at a certain position, the shading component 2 and the laser beam 41 can always completely block the laser beam 41 even if they move relative to the mounting plate 12; secondly, when the laser beam 41 does not need to be blocked, the shading component 2 moves along the mounting plate 12, so that the laser beam 41 can expose the substrate through the light-transmitting hole 22, and a delay-free shutter function can be achieved through a simple structure, thereby improving imaging accuracy.
[0028] Furthermore, the pneumatic component 3 includes: a pneumatic slide 31 arranged on the mounting plate 12, which can push the shading component 2 to block the laser beam 41 along the length direction of the mounting plate 12; and a solenoid valve 32 connected to the pneumatic device 5 and the pneumatic slide 31, which can control the movement of the pneumatic slide 31 when the pneumatic device 5 moves.
[0029] Specifically, the pneumatic slide 31 can push the shading plate 21 to move along the mounting plate 12 under the control of the solenoid valve 32, so that the shading plate 21 can block the laser beam 41 and the laser beam 41 can pass through the light-transmitting hole 22. When the pneumatic device 5 controls the laser system 4, it can control the pneumatic component 3 through the solenoid valve 32, so that the movement state of the pneumatic component 3 is related to the movement state of the laser beam 41 and whether the laser beam 41 needs to be blocked, so that the shading plate 21 and the light-transmitting hole 22 can block or not block the laser beam 41 without delay, thereby reducing unnecessary laser irradiation, improving work efficiency, and saving energy.
[0030] Furthermore, the pneumatic device 5 can control the solenoid valve 32 . When the pneumatic device 5 controls the movement of the laser beam 41 , the solenoid valve 32 can control the pneumatic slide 31 to drive the shading plate 21 to move relative to the laser beam 41 along the length direction of the mounting plate 12 .
[0031] Specifically, the control system can simultaneously control the pneumatic device 5 and the pneumatic component 3. The pneumatic device 5 can also control the pneumatic component 3 through the solenoid valve 32, so that there is a correlation between the movement of the pneumatic component 3 and the pneumatic device 5. When the pneumatic device 5 drives the laser beam 41 to irradiate the substrate, the pneumatic component 3 drives the light-transmitting hole 22 to move with the laser beam 41. When the laser beam 41 needs to be blocked, the pneumatic component 3 drives the light shielding plate 21 to block the laser beam 41.
[0032] Furthermore, the pneumatic assembly 3 can adjust the intensity of the laser beam 41 according to the overlapping area between the laser beam 41 and the light-transmitting hole 22 , thereby adapting to different production requirements.
[0033] Furthermore, the two ends of the fixing plate 11 are respectively connected to one end of the mounting plate 12, and the other end of the mounting plate 12 is connected to the two ends of the shading plate 21. The pneumatic slide 31 arranged on the mounting plate 12 drives one end of the shading plate 21 to move along the length direction of the mounting plate 12.
[0034] Specifically, the pneumatic component 3 pushes the light shielding plate 21 to move along the length direction of the mounting plate 12, so that the two ends of the light shielding plate 21 can always move the same distance during the movement, thereby stabilizing the position relationship of the side of the light shielding plate 21 relative to the side of the mounting plate 12, thereby making the position relationship between the light shielding plate 21 and the laser beam 41 unchanged during the movement, thereby making the spot area of the laser beam 41 on the light shielding plate 21 constant, and the plane formed by the axis of the laser beam 41 and the axis of the light-transmitting hole 22 unchanged, thereby improving the shielding effect of the light shielding plate 21 on the laser beam 41, and the light transmission effect of the light-transmitting hole 22 on the laser beam 41, thereby improving the imaging accuracy of the substrate.
[0035] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.
[0036] The technology, shape and structure that are not described in detail in this utility model are all well-known technologies.
Claims
1. A pneumatic shading device for an LDI device, the LDI device comprising a laser system (4) capable of emitting a laser beam (41), and the laser system (4) being movable under the impetus of a pneumatic device (5), characterized in that: The pneumatic shading device comprises: a mounting assembly (1) connected to the laser system (4); a light shielding component (2) disposed on the mounting component (1), the light shielding component (2) being capable of shielding the laser beam (41) from irradiating the surface of the substrate; and A pneumatic assembly (3) is arranged on the mounting assembly (1), and the pneumatic assembly (3) is capable of pushing the shading assembly (2) to move relative to the laser beam (41) when the pneumatic device (5) pushes the laser system (4).
2. The pneumatic shading device according to claim 1, characterized in that: The installation assembly (1) comprises: a fixing plate (11) having one end connected to the laser system (4); and A mounting plate (12) connected to the fixing plate (11) at one end, the length direction of the mounting plate (12) being the moving direction of the shading component (2), and the length direction of the mounting plate (12) being perpendicular to the axial direction of the laser beam (41).
3. The pneumatic shading device according to claim 2, characterized in that: The shading component (2) comprises: a light shielding plate (21) connected to the mounting plate (12) at one end, the light shielding plate (21) being perpendicular to the laser beam (41), and the light shielding plate (21) being capable of completely covering a light spot generated by the laser beam (41) on the light shielding plate (21); and A light-transmitting hole (22) is formed on the light-shielding plate (21), and the diameter of the light-transmitting hole (22) is not smaller than the light spot generated by the laser beam (41) on the light-shielding plate (21).
4. The pneumatic shading device according to claim 3, characterized in that: The pneumatic assembly (3) comprises: a pneumatic slide (31) provided on the mounting plate (12), the pneumatic slide (31) being capable of pushing the light shielding assembly (2) to shield the laser beam (41) along the length direction of the mounting plate (12); and A solenoid valve (32) connected to the pneumatic device (5) and the pneumatic slide (31) is capable of controlling the movement of the pneumatic slide (31) when the pneumatic device (5) moves.
5. The pneumatic shading device according to claim 4, characterized in that: The pneumatic device (5) is capable of controlling the electromagnetic valve (32). When the pneumatic device (5) controls the movement of the laser beam (41), the electromagnetic valve (32) is capable of controlling the pneumatic slide (31) to drive the light shielding plate (21) to move relative to the laser beam (41) along the length direction of the mounting plate (12).
6. The pneumatic shading device according to claim 5, characterized in that: The two ends of the fixing plate (11) are respectively connected to one end of the mounting plate (12), and the other end of the mounting plate (12) is connected to the two ends of the light shielding plate (21). The pneumatic slide (31) arranged on the mounting plate (12) drives one end of the light shielding plate (21) to move along the length direction of the mounting plate (12).