Carrying manipulator and wafer conveying device

Abstract

The utility model discloses a carrying manipulator and a wafer transmission device, comprising a mechanical arm, the top of one end of the mechanical arm is fixedly connected with a movable round frame, the top of the movable round frame is fixedly connected with a hydraulic cylinder, the output end of the hydraulic cylinder is fixedly connected with a driving rod, and the driving rod is fixedly connected with a driving rod. A rack plate arranged in a cross shape is fixedly connected to one end of the bottom of the driving rod, a plurality of fixing rods are fixedly connected to the position, close to the periphery of the driving rod, of the top end of the inner wall of the movable round frame, a square frame is fixedly connected to the bottoms of the fixing rods, and transmission gears are rotationally connected to the four edges of the frame; the two sides of each transmission gear are fixedly connected with a rotating rod, one end of the bottom of each rotating rod is fixedly connected with a rubber clamping block, and a reinforcing rib is fixedly connected between the included angle between every two rotating rods on one side. And the practicability of the clamping assembly is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer conveying devices, in particular to a handling robot and a wafer conveying device. Background Art

[0002] A wafer is a silicon chip used in the manufacture of silicon semiconductor integrated circuits. Due to its round shape, it is called a wafer. A wafer is the carrier used to produce integrated circuits. Generally speaking, a wafer is primarily composed of silicon (Si).

[0003] However, most of the current robots are specially customized according to the size of the wafer, which makes them unable to adapt to wafers of different sizes. When different wafers need to be replaced, the robot needs to be replaced, which is time-consuming and labor-intensive. For this reason, we propose a handling robot and a wafer conveying device. Utility Model Content

[0004] The purpose of the present invention is to provide a transport robot and a wafer conveying device to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a handling robot comprises a robot arm, wherein the top of one end of the robot arm is fixedly connected to a moving circular frame, the top of the moving circular frame is fixedly connected to a hydraulic cylinder, the output end of the hydraulic cylinder is fixedly connected to a driving rod, the bottom end of the driving rod is fixedly connected to a rack plate arranged in a cross shape, the top of the inner wall of the moving circular frame is fixedly connected near the driving rod, the bottoms of several of the fixed rods are fixedly connected to a frame arranged in a square shape, the four sides of the frame are rotatably connected to transmission gears, several of the transmission gears are fixedly connected to rotating rods on both sides, and the bottom ends of several of the rotating rods are fixedly connected to rubber clamps.

[0006] Preferably, a plurality of tooth blocks are fixedly connected to the side walls of the rack plate, and the rack plate is meshed with a plurality of transmission gears.

[0007] Preferably, the fixing rods are connected to the four corners of the frame through circular connecting blocks.

[0008] Preferably, a reinforcing rib is fixedly connected between the angles of two rotating rods on one side.

[0009] Preferably, the plurality of rotating rods are arranged in a V-shape.

[0010] It includes the robotic arm and a conveyor body, a conveyor belt mechanism is provided inside the conveyor body, stabilizing plates are fixedly connected on both sides of the conveyor body, an L-shaped support plate is fixedly connected to the upper end of one side of the conveyor body, and the support plates are fixedly connected to the robotic arm.

[0011] Compared with the existing technology, the beneficial effect of the utility model is: starting the hydraulic cylinder drives the driving rod to move up and down, and then through the linkage and coordination of the rack plate, fixed rod, frame, transmission gear, rotating rod, reinforcing ribs, and rubber clamps, wafers of different sizes can be clamped, avoiding frequent replacement of the manipulator and improving the practicality of the clamping assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a schematic diagram of the structure of the utility model;

[0013] Figure 2 This is a schematic diagram of the main structure of the transmission device of the present utility model;

[0014] Figure 3 This is a schematic diagram of the structure of the mechanical arm of the present utility model;

[0015] Figure 4 This is a schematic diagram of the internal structure of the movable circular frame of the present utility model.

[0016] In the figure: 1. Conveyor body; 11. Conveyor belt mechanism; 12. Stabilizing plate; 13. Support plate; 2. Robotic arm; 21. Moving circular frame; 22. Hydraulic cylinder; 23. Driving rod; 24. Rack plate; 3. Fixed rod; 31. Frame; 32. Transmission gear; 33. Rotating rod; 34. Rubber clamp; 35. Reinforcing rib. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0018] See also Figure 1-4The utility model provides a technical solution: a handling robot, including a robotic arm 2, a mobile circular frame 21 is fixedly connected to the top of one end of the robotic arm 2, a hydraulic cylinder 22 is fixedly connected to the top of the mobile circular frame 21, the output end of the hydraulic cylinder 22 is fixedly connected to a driving rod 23, and one end of the bottom of the driving rod 23 is fixedly connected to a rack plate 24 arranged in a cross shape, a plurality of fixed rods 3 are fixedly connected to the top of the inner wall of the mobile circular frame 21 near the driving rod 23, and a plurality of fixed rods 3 are fixedly connected to a square-shaped frame 31 at the bottom, and the frame 31 is rotatably connected to transmission gears 32 on all four sides, and a plurality of transmission gears 32 are fixedly connected to rotating rods 33 on both sides, and a plurality of rotating rods 33 are fixedly connected to rubber clamps 34 at one end of their bottoms.

[0019] Furthermore, a plurality of tooth blocks are fixedly connected to the side walls of the rack plate 24 , and the rack plate 24 is meshed with a plurality of transmission gears 32 . When the rack plate 24 moves up and down, the transmission gears 32 can be driven to rotate.

[0020] Furthermore, the four included corners of the plurality of fixing rods 3 and the frame 31 are connected by circular connecting blocks, and the connecting blocks can fix the plurality of fixing rods 3 and the frame 31 together.

[0021] Furthermore, a reinforcing rib 35 is fixedly connected between the angles of the two rotating rods 33 on one side, and the reinforcing rib 35 can make the two rotating rods 33 more stable.

[0022] Furthermore, the plurality of rotating rods 33 are all arranged in a V-shape, and the rotation of the V-shaped rotating rods 33 can achieve a clamping effect.

[0023] A wafer conveying device includes a robotic arm 2 and a conveying device body 1. A conveyor belt mechanism 11 is provided inside the conveying device body 1. Stabilizing plates 12 are fixedly connected on both sides of the conveying device body 1. A support plate 13 arranged in an L shape is fixedly connected to the upper end of one side of the conveying device body 1, and the support plates 13 are fixedly connected to the robotic arm 2.

[0024] Specifically, when using the present invention, first start the conveyor belt mechanism 11, and then start the hydraulic cylinder 22 to drive the driving rod 23 to move downward, thereby driving the rack plate 24 to rotate downward by engaging several transmission gears 32. At this time, it can drive several rotating rods 33 to rotate outward. At this time, the driving robot arm 2 drives the moving circular frame 21 to move above the wafer. At this time, the hydraulic cylinder 22 drives the driving rod 23 to move upward, thereby driving the rack plate 24 to move upward. Similarly, the rotating rod 33 can be rotated inward, and then the rubber clamp 34 can be used to clamp wafers of different sizes, thereby improving the practicality of the clamping assembly. Finally, the robot arm 2 is started to drive the moving circular frame 21 to move to the conveyor belt mechanism 11 for transportation.

[0025] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A handling robot, comprising a robot arm (2), characterized in that: The top of one end of the mechanical arm (2) is fixedly connected to a moving circular frame (21), the top of the moving circular frame (21) is fixedly connected to a hydraulic cylinder (22), the output end of the hydraulic cylinder (22) is fixedly connected to a driving rod (23), the bottom end of the driving rod (23) is fixedly connected to a rack plate (24) arranged in a cross shape, the top of the inner wall of the moving circular frame (21) is fixedly connected to a plurality of fixed rods (3) near the driving rod (23), the bottoms of the plurality of fixed rods (3) are fixedly connected to a frame (31) arranged in a square shape, the four sides of the frame (31) are rotatably connected to transmission gears (32), the two sides of the plurality of transmission gears (32) are fixedly connected to rotating rods (33), and the bottom ends of the plurality of rotating rods (33) are fixedly connected to rubber clamps (34).

2. A handling robot according to claim 1, characterized in that: Several tooth blocks are fixedly connected to the side walls of the rack plate (24), and the rack plate (24) is meshedly connected to several transmission gears (32).

3. A handling robot according to claim 1, characterized in that: The fixing rods (3) are connected to the frame (31) at four corners via circular connecting blocks.

4. A handling robot according to claim 1, characterized in that: A reinforcing rib (35) is fixedly connected between the angles of two rotating rods (33) on one side.

5. The handling robot according to claim 1, characterized in that: The plurality of rotating rods (33) are all arranged in a V-shape.

6. A wafer transfer device, comprising the robot arm (2) and a transfer device body (1) as claimed in claim 1, characterized in that: A conveyor belt mechanism (11) is provided inside the conveyor body (1), and stabilizing plates (12) are fixedly connected to both sides of the conveyor body (1). An L-shaped support plate (13) is fixedly connected to the upper end of one side of the conveyor body (1), and the support plates (13) are fixedly connected to the robotic arm (2).

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