Hydrogen fluoride recovery device

Abstract

The utility model provides a hydrogen fluoride recovery device. The hydrogen fluoride recovery device comprises a gas collection module, a filtering module, a condensation module and a filtrate recovery tank, two ends of the gas collecting pipe are respectively connected with the gas collecting hood and the filtering module; the filtering module comprises a filtering cavity and a bottom baffle, the filtering cavity is provided with a filtering inlet and a filtering outlet, the filtering inlet is connected with the gas collecting pipe, the filtering outlet is connected with the gas inlet pipe, and the gas inlet pipe is connected with the condensation module; the condensation module comprises a shell, a tube bundle and a condensation plate, the bottom of the shell is provided with a liquid inlet connector, and the top is provided with a liquid outlet connector; the two ends of the liquid inlet header pipe are connected with the liquid inlet connector and the liquid inlet sub-pipe respectively. Two sides of the condensing plate are respectively connected with the liquid inlet sub-pipe and the liquid outlet sub-pipe; the liquid outlet sub-pipe is connected with a liquid outlet header pipe, and the liquid outlet header pipe is connected with a liquid outlet connector; the filtrate recovery tank is connected with the condensation module through a filtrate pipe. According to the hydrogen fluoride recovery device, hydrogen fluoride waste gas is cooled through the condensation plate, a condensation medium is replaced through the tube bundle, and the hydrogen fluoride recovery efficiency is improved.

Description

Technical Field

[0001] The present application relates to the technical field of fluoride recovery, and in particular to a hydrogen fluoride recovery device. Background Art

[0002] The fluoride sintering furnace production process involves placing the material being treated in an environment containing fluoride, allowing the fluorine element to penetrate the surface or interior of the material at high temperatures. This process improves the corrosion and oxidation resistance of the material being treated and is used in surface treatment and alloying processes for materials such as metals and ceramics.

[0003] The process of incorporating fluorine into materials produces harmful waste gases such as hydrogen fluoride, sulfur oxides, and nitrogen oxides. Hydrogen fluoride is a colorless gas with a pungent odor that dissolves in water to form hydrofluoric acid, a corrosive and toxic liquid. Discharged directly into the environment without treatment can pose a threat to ecosystems.

[0004] Activated carbon adsorbents can be used to separate hydrogen fluoride from waste gas. However, due to the low adsorption capacity of activated carbon, when the adsorbent reaches saturation point, the adsorption capacity decreases, resulting in poor hydrogen fluoride recovery. Furthermore, the adsorbent replacement process is time-consuming, resulting in low hydrogen fluoride recovery efficiency. Utility Model Content

[0005] The present application provides a hydrogen fluoride recovery device, which condenses process waste gas through a condensation module to separate and recover hydrogen fluoride, and replaces the condensation medium through a tube bundle to improve the recovery efficiency of hydrogen fluoride.

[0006] The present application provides a hydrogen fluoride recovery device, comprising: a gas collection module, a filtration module, a condensation module and a filtrate recovery tank;

[0007] The gas collection module includes a gas collection hood and a gas collection pipe. The top and bottom of the gas collection hood are both provided with openings. The top opening area of ​​the gas collection hood is larger than the bottom opening area. One end of the gas collection pipe is connected to the bottom opening of the gas collection hood, and the other end of the gas collection pipe is connected to the filter module.

[0008] The filter module includes a filter cavity and a bottom baffle. The bottom of the filter cavity is provided with an opening, and the bottom baffle is detachably connected to the filter cavity. A filter inlet is provided on one side of the filter cavity, and a filter outlet is provided on the opposite side of the filter inlet. The filter inlet is connected to the air collecting pipe. The filter outlet is connected to one end of the air inlet pipe, and the other end of the air inlet pipe is connected to the condensation module.

[0009] The condensation module includes a shell, a tube bundle, and a condensation plate. The bottom of the shell is provided with a liquid inlet interface, and the top of the shell is provided with a liquid outlet interface. The tube bundle and the condensation plate are accommodated inside the shell. The tube bundle includes a liquid inlet main pipe, a liquid inlet sub-pipe, a liquid outlet sub-pipe, and a liquid outlet main pipe. One end of the liquid inlet main pipe is connected to the liquid inlet interface, and the other end of the liquid inlet main pipe is connected to the liquid inlet sub-pipe.

[0010] The condensation plate is a hollow sheet of a preset thickness. One end of the condensation plate is connected to the liquid inlet pipe, and the other end of the condensation plate is connected to the liquid outlet pipe; the liquid outlet pipe is connected to one end of the liquid outlet main pipe, and the other end of the liquid outlet main pipe is connected to the liquid outlet interface;

[0011] The filtrate recovery tank is connected to the condensation module through a filtrate tube, one end of the filtrate tube is connected to the bottom of the condensation module, and the other end of the filtrate tube is connected to the top of the filtrate recovery tank.

[0012] Optionally, a safety valve is provided at the bottom of the gas collecting hood.

[0013] Based on the above technical features, the safety valve can regulate the internal pressure of the hydrogen fluoride recovery device. When the internal pressure exceeds the preset safety threshold, the safety valve closes and stops the input of industrial waste gas into the hydrogen fluoride recovery device to prevent equipment damage and safety accidents.

[0014] Optionally, the filter module further includes a mesh plate, which is arranged on a side of the filter cavity close to the filter outlet.

[0015] Based on the above technical features, the screen plate can reduce the amount of solid impurities entering the hydrogen fluoride recovery device and extend the service life of the equipment.

[0016] Optionally, a first strip groove and a second strip groove are provided on the inner side of the filter cavity, the first strip groove is provided on the opposite side of the second strip groove, and the bottom baffle is slidably connected to the bottom of the filter cavity based on the first strip groove and the second strip groove.

[0017] Based on the above technical features, the bottom baffle is detachably connected to the filter cavity based on the first strip groove and the second strip groove. The bottom baffle can slide along the groove direction of the first strip groove and the second strip groove, and then be removed from the filter module.

[0018] Optionally, the bottom baffle includes a first push rod and a second push rod, the first push rod and the second push rod are strip-shaped columnar structures, and the first push rod and the second push rod are fixed to both sides of the bottom baffle along the sliding direction of the bottom baffle.

[0019] Based on the above technical features, by arranging the first push rod and the second push rod on both sides of the bottom baffle, the bottom baffle can be easily disassembled, the replacement efficiency of the filter medium can be improved, and the recovery efficiency of hydrogen fluoride can be improved.

[0020] Optionally, the condensation module further includes a temperature monitoring device, which is connected to the liquid inlet main pipe.

[0021] Based on the above technical features, the temperature monitoring device can detect the internal temperature of the condensing module in real time, allowing the operator to adjust the flow parameters of the cooling medium according to the internal temperature, improve the condensing efficiency and reduce energy consumption.

[0022] Optionally, the condensing module further includes a pressure monitoring device, which is connected to the air inlet pipe.

[0023] Based on the above technical features, the pressure monitoring device can detect the internal pressure of the condensation module in real time, ensuring that the condensation process is carried out within an appropriate pressure range, thereby improving the condensation effect.

[0024] Optionally, the condensing module further includes a base, which is disposed below the shell.

[0025] Based on the above technical features, by setting the base under the condensation module, the stability of the condensation module can be maintained, preventing the condensation module from tilting or collapsing during the condensation process, thereby causing damage to the hydrogen fluoride recovery device and affecting the hydrogen fluoride recovery effect.

[0026] Optionally, the number of liquid inlet pipes is greater than or equal to the number of condensation plates.

[0027] Based on the above technical features, the condensation plate is connected to one or more liquid inlet pipes, which can improve the heat transfer efficiency of the condensation medium and thus improve the recovery efficiency and purity of hydrogen fluoride.

[0028] Optionally, the number of liquid outlet sub-pipes is greater than or equal to the number of condensation plates.

[0029] Based on the above technical features, the condensation plate is connected to one or more liquid outlet pipes, which can accelerate the flow rate of the condensation medium and thus improve the recovery efficiency and purity of hydrogen fluoride.

[0030] It can be seen from the above technical solution that the present application provides a hydrogen fluoride recovery device, comprising: a gas collecting module, a filter module, a condensation module and a filtrate recovery tank; the gas collecting module comprises a gas collecting hood and a gas collecting pipe, the top and bottom of the gas collecting hood are both provided with openings, the top opening area of ​​the gas collecting hood is larger than the bottom opening area, one end of the gas collecting pipe is connected to the bottom opening of the gas collecting hood, and the other end of the gas collecting pipe is connected to the filter module; the filter module comprises a filter cavity and a bottom baffle, the bottom of the filter cavity is provided with an opening, and the bottom baffle is detachably connected to the filter cavity; a filter inlet is provided on one side of the filter cavity, and a filter outlet is provided on the opposite side of the filter inlet, and the filter inlet is connected to the gas collecting pipe; the filter outlet is connected to one end of the air inlet pipe, and the other end of the air inlet pipe is connected to the condensation module The condensation module includes a shell, a tube bundle and a condensation plate. The bottom of the shell is provided with a liquid inlet interface, and the top of the shell is provided with a liquid outlet interface. The tube bundle and the condensation plate are accommodated inside the shell. The tube bundle includes a liquid inlet main pipe, a liquid inlet sub-pipe, a liquid outlet sub-pipe and a liquid outlet main pipe. One end of the liquid inlet main pipe is connected to the liquid inlet interface, and the other end of the liquid inlet main pipe is connected to the liquid inlet sub-pipe. The condensation plate is a hollow sheet plate of preset thickness. One end of the condensation plate is connected to the liquid inlet sub-pipe, and the other end of the condensation plate is connected to the liquid outlet sub-pipe. The liquid outlet sub-pipe is connected to one end of the liquid outlet main pipe, and the other end of the liquid outlet main pipe is connected to the liquid outlet interface. The filtrate recovery tank is connected to the condensation module through a filtrate pipe. One end of the filtrate pipe is connected to the bottom of the condensation module, and the other end of the filtrate pipe is connected to the top of the filtrate recovery tank. The above-mentioned hydrogen fluoride recovery device condenses the process waste gas through the condensation module to separate and recover hydrogen fluoride, and replaces the condensation medium through the tube bundle to improve the recovery efficiency of hydrogen fluoride. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the technical solution of the present application, the following is a brief introduction to the drawings required for use in the embodiments. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0032] Figure 1 This is a schematic structural diagram of a hydrogen fluoride recovery device according to an embodiment of the present application;

[0033] Figure 2 This is a schematic diagram of the internal structure of the condensation module according to an embodiment of the present application.

[0034] Illustration:

[0035] Among them: 100-gas collection module; 101-gas collection hood; 102-gas collection pipe; 103-safety valve; 200-filtration module; 201-filtration cavity; 202-bottom baffle; 203-air inlet pipe; 300-condensation module; 301-condensation plate; 302-liquid inlet main pipe; 303-liquid inlet sub-pipe; 304-liquid outlet sub-pipe; 305-liquid outlet main pipe; 306-temperature monitoring device; 400-filtrate recovery tank; 401-filtrate pipe. DETAILED DESCRIPTION

[0036] The following embodiments are described in detail, with examples illustrated in the accompanying drawings. When the following description refers to the drawings, identical numbers in different figures represent identical or similar elements unless otherwise indicated. The embodiments described in the following embodiments are not intended to represent all possible implementations consistent with the present application. They are merely examples of systems and methods consistent with certain aspects of the present application, as detailed in the claims.

[0037] It should be noted that the brief descriptions of terms in this application are only for the purpose of facilitating the understanding of the embodiments described below, and are not intended to limit the embodiments of this application. Unless otherwise specified, these terms should be understood according to their ordinary and usual meanings.

[0038] In the specification and claims of this application and the accompanying drawings, the terms "first," "second," "third," etc. are used to distinguish similar or similar objects or entities, and are not necessarily intended to limit a particular order or sequence, unless otherwise noted. It should be understood that the terms used in this manner are interchangeable under appropriate circumstances.

[0039] The fluoride sintering furnace production process involves placing the material being treated in an environment containing fluoride, allowing the fluorine element to penetrate the surface or interior of the material at high temperatures. This process improves the corrosion and oxidation resistance of the material being treated and is used in surface treatment and alloying processes for materials such as metals and ceramics.

[0040] The process of incorporating fluorine into materials produces harmful waste gases such as hydrogen fluoride, sulfur oxides, and nitrogen oxides. Hydrogen fluoride is a colorless gas with a pungent odor that dissolves in water to form hydrofluoric acid, a corrosive and toxic liquid. Discharged directly into the environment without treatment can pose a threat to ecosystems.

[0041] Activated carbon adsorbents can be used to separate hydrogen fluoride from waste gas. However, due to the low adsorption capacity of activated carbon, when the adsorbent reaches saturation point, the adsorption capacity decreases, resulting in poor hydrogen fluoride recovery. Furthermore, the adsorbent replacement process is time-consuming, resulting in low hydrogen fluoride recovery efficiency.

[0042] In order to solve the problem of low hydrogen fluoride recovery efficiency in the production process of a fluorine-permeating sintering furnace, some embodiments of the present application provide a hydrogen fluoride recovery device. Figure 1 This is a schematic structural diagram of a hydrogen fluoride recovery device according to an embodiment of the present application. Figure 2 This is a schematic diagram of the internal structure of the condensation module of the embodiment of the present application. Figure 1 and Figure 2The hydrogen fluoride recovery device provided in this application is described in detail.

[0043] The present embodiment provides a hydrogen fluoride recovery device, comprising: a gas collection module 100, a filtration module 200, a condensation module 300, and a filtrate recovery tank 400. The gas collection module 100 includes a gas collection hood 101 and a gas collection pipe 102. The gas collection hood 101 has openings at the top and bottom, with the top opening area of ​​the gas collection hood 101 being larger than the bottom opening area. One end of the gas collection pipe 102 is connected to the bottom opening of the gas collection hood 101, and the other end of the gas collection pipe 102 is connected to the filtration module 200.

[0044] Gas collection module 100 collects industrial waste gas generated during the fluorine-permeating sintering furnace production process. This waste gas is concentrated using gas collection hood 101 and introduced into filtration module 200 via gas collection pipe 102, providing a foundation for subsequent hydrogen fluoride treatment and recovery. The larger top opening area of ​​gas collection hood 101 creates a smoother airflow path, improving waste gas capture efficiency.

[0045] In some embodiments, a safety valve 103 is provided at the bottom of the gas collection hood 101. For example, the internal pressure of the hydrogen fluoride recovery device may exceed a preset safety threshold, and therefore, safety valve 103 is required to regulate the internal pressure. When the internal pressure exceeds the preset safety threshold, safety valve 103 closes, stopping the flow of industrial waste gas into the hydrogen fluoride recovery device and preventing equipment damage and safety accidents.

[0046] The filter module 200 includes a filter cavity 201 and a bottom baffle 202. The bottom of the filter cavity 201 is provided with an opening, and the bottom baffle 202 is detachably connected to the filter cavity 201; a filter inlet is provided on one side of the filter cavity 201, and a filter outlet is provided on the opposite side of the filter inlet, and the filter inlet is connected to the air collecting pipe 102; the filter outlet is connected to one end of the air inlet pipe 203, and the other end of the air inlet pipe 203 is connected to the condensation module 300.

[0047] The fluorine permeation sintering furnace production process will produce other industrial waste gas containing gaseous pollutants, such as sulfur dioxide. Placing a filter medium in the filter cavity 201 and using the filter medium to absorb these gaseous pollutants can improve the purity of the recovered hydrogen fluoride.

[0048] In some embodiments, the filter module 200 further includes a mesh plate disposed within the filter cavity 201 near the filter outlet. The fluorine permeation sintering furnace production process generates some solid impurities, such as dusty metal fluorides. These solid impurities can clog the pipelines of the hydrogen fluoride recovery device, affecting its normal operation. The mesh plate of the filter module 200 can reduce the amount of solid impurities that enter the hydrogen fluoride recovery device, thereby extending the service life of the device.

[0049] In some embodiments, a first strip groove and a second strip groove are provided on the inner side of the filter cavity 201, and the first strip groove is provided on the opposite side of the second strip groove. The bottom baffle 202 is slidably connected to the bottom of the filter cavity 201 based on the first strip groove and the second strip groove.

[0050] The bottom baffle 202 is detachably connected to the filter cavity 201 via the first and second strip grooves. The bottom baffle 202 can be slid along the groove direction of the first and second strip grooves to be removed from the filter module 200. After the bottom baffle 202 is removed, the filter medium in the filter cavity 201 can be replaced to prevent the filter medium from reaching the filtration saturation point and causing a decrease in adsorption capacity, which in turn reduces the recovery efficiency of other gaseous pollutants and leads to a decrease in the purity of the recovered hydrogen fluoride.

[0051] In some embodiments, the bottom baffle 202 includes a first push rod and a second push rod, each of which is a bar-shaped columnar structure and is fixed to both sides of the bottom baffle 202 along the sliding direction of the bottom baffle 202. Providing the first push rod and the second push rod on both sides of the bottom baffle 202 facilitates removal of the bottom baffle 202, improves the efficiency of filter medium replacement, and thereby improves the efficiency of hydrogen fluoride recovery.

[0052] like Figure 2 As shown, the condensation module 300 includes a shell, a tube bundle and a condensation plate 301. A liquid inlet interface is provided at the bottom of the shell, and a liquid outlet interface is provided at the top of the shell; the tube bundle and the condensation plate 301 are accommodated inside the shell, and the tube bundle includes a liquid inlet main pipe 302, a liquid inlet sub-pipe 303, a liquid outlet sub-pipe 304 and a liquid outlet main pipe 305; one end of the liquid inlet main pipe 302 is connected to the liquid inlet interface, and the other end of the liquid inlet main pipe 302 is connected to the liquid inlet sub-pipe 303.

[0053] The condensation plate 301 is a hollow sheet plate of preset thickness. One end of the condensation plate 301 is connected to the liquid inlet pipe 303, and the other end of the condensation plate 301 is connected to the liquid outlet pipe 304; the liquid outlet pipe 304 is connected to one end of the liquid outlet main pipe 305, and the other end of the liquid outlet main pipe 305 is connected to the liquid outlet interface.

[0054] The condensation module 300 reduces the temperature of the hydrogen fluoride gas by the flow of the condensing medium, thereby converting the hydrogen fluoride gas into a liquid state and flowing into the filtrate recovery tank 400. The condensing medium flows in the tube bundle. The condensing medium has good heat conduction performance. During the flow of the condensing medium, it can quickly and effectively remove the heat of the hydrogen fluoride gas and convert the hydrogen fluoride gas into a liquid state. The condensation effect of the condensation module 300 can be improved by replacing the condensing medium with a tube bundle. The condensing medium is divided from the liquid inlet main pipe 302 to multiple liquid inlet sub-pipes 303, and enters the condensation plate 301 from the liquid inlet sub-pipes 303. Then it flows out from the condensation plate 301 to the liquid outlet sub-pipe 304, and from the liquid outlet sub-pipe 304 to the liquid outlet main pipe 305, which can remove the heat of the hydrogen fluoride gas and complete the replacement of the cooling medium.

[0055] In some embodiments, the condensing module 300 further includes a temperature monitoring device 306 connected to the liquid inlet manifold 302. The temperature monitoring device 306 is used to monitor the internal temperature of the condensing module 300 in real time, allowing the operator to adjust the flow parameters of the cooling medium according to the internal temperature, thereby improving condensation efficiency and reducing energy consumption.

[0056] In some embodiments, the condensation module 300 further includes a pressure monitoring device connected to the air inlet pipe 103. Since appropriate pressure helps hydrogen fluoride gas condense more fully into liquid, thereby improving the purity and efficiency of hydrogen fluoride recovery, the pressure monitoring device is provided in the condensation module 300 to detect the internal pressure of the condensation module 300 in real time, ensuring that the condensation process is carried out within an appropriate pressure range, thereby improving the condensation effect.

[0057] In some embodiments, the condensing module 300 further includes a base disposed below the housing. Positioning the base below the condensing module 300 maintains the stability of the condensing module 300 and prevents the condensing module 300 from tilting or collapsing during the condensation process, which could damage the hydrogen fluoride recovery device and affect hydrogen fluoride recovery efficiency.

[0058] In some embodiments, the number of liquid inlet tubes 303 is greater than or equal to the number of condensation plates 301. The condensation plate 301 is connected to at least one liquid inlet tube 303 to improve the heat transfer efficiency of the condensing medium, thereby improving the recovery efficiency and purity of hydrogen fluoride.

[0059] In some embodiments, the number of liquid outlet sub-pipes 304 is greater than or equal to the number of condensation plates 301. The condensation plate 301 is connected to at least one liquid outlet sub-pipe 304 to accelerate the flow rate of the condensation medium, thereby improving the recovery efficiency and purity of hydrogen fluoride.

[0060] In some embodiments, the filtrate recovery tank 400 is connected to the condensation module 300 via a filtrate tube 401. One end of the filtrate tube 401 is connected to the bottom of the condensation module 300, and the other end of the filtrate tube 401 is connected to the top of the filtrate recovery tank 400. The filtrate recovery tank 400 recovers the condensed liquid hydrogen fluoride through the filtrate tube 401, thereby improving the recovery efficiency of hydrogen fluoride.

[0061] As can be seen from the above technical solutions, the present application provides a hydrogen fluoride recovery device, comprising: a gas collection module 100, a filter module 200, a condensation module 300, and a filtrate recovery tank 400; the gas collection module 100 comprises a gas collection hood 101 and a gas collection pipe 102, the gas collection hood 101 is provided with openings at the top and bottom, the top opening area of ​​the gas collection hood 101 is larger than the bottom opening area, one end of the gas collection pipe 102 is connected to the bottom opening of the gas collection hood 101, and the other end of the gas collection pipe 102 is connected to the filter module 200. The filter module 200 comprises a filter cavity 201 and a bottom baffle 202, the bottom of the filter cavity 201 is provided with an opening, and the bottom baffle 202 is detachably connected to the filter cavity 201; a filter inlet is provided on one side of the filter cavity 201, and a filter outlet is provided on the opposite side of the filter inlet, and the filter inlet is connected to the gas collection pipe 102. The filter outlet is connected to one end of the air inlet pipe 203, the other end of which is connected to the condensation module 300. The condensation module 300 comprises a shell, a tube bundle, and a condensation plate 301. The shell has a liquid inlet port at the bottom and a liquid outlet port at the top. The tube bundle and condensation plate 301 are housed within the shell. The tube bundle comprises a liquid inlet manifold 302, a liquid inlet sub-pipe 303, a liquid outlet sub-pipe 304, and a liquid outlet manifold 305. One end of the liquid inlet manifold 302 is connected to the liquid inlet port, while the other end is connected to the liquid inlet sub-pipe 303. The condensation plate 301 is a hollow sheet of a predetermined thickness. One end of the condensation plate 301 is connected to the liquid inlet sub-pipe 303, while the other end of the condensation plate 301 is connected to the liquid outlet sub-pipe 304. The liquid outlet sub-pipe 304 is connected to one end of the liquid outlet manifold 305, while the other end of the liquid outlet manifold 305 is connected to the liquid outlet port. The filtrate recovery tank 400 is connected to the condensation module 300 via a filtrate tube 401. One end of the filtrate tube 401 is connected to the bottom of the condensation module 300, and the other end of the filtrate tube 401 is connected to the top of the filtrate recovery tank 400. The hydrogen fluoride recovery device condenses the process exhaust gas through the condensation module 300 to separate and recover hydrogen fluoride, and replaces the condensing medium through the tube bundle to improve the recovery efficiency of hydrogen fluoride.

[0062] Similar parts between the embodiments provided in this application can be referenced to each other. The specific implementation methods provided above are only a few examples under the overall concept of this application and do not constitute a limitation on the scope of protection of this application. For those skilled in the art, any other implementation methods expanded based on the scheme of this application without expending creative work shall fall within the scope of protection of this application.

Claims

1. A hydrogen fluoride recovery device, characterized in that: include: Gas collection module, filtration module, condensation module and filtrate recovery tank; The gas collection module includes a gas collection hood and a gas collection pipe. The top and bottom of the gas collection hood are both provided with openings. The top opening area of ​​the gas collection hood is larger than the bottom opening area. One end of the gas collection pipe is connected to the bottom opening of the gas collection hood, and the other end of the gas collection pipe is connected to the filter module. The filter module includes a filter cavity and a bottom baffle, the bottom of the filter cavity is provided with an opening, and the bottom baffle is detachably connected to the filter cavity; a filter inlet is provided on one side of the filter cavity, and a filter outlet is provided on the opposite side of the filter inlet, and the filter inlet is connected to the air collecting pipe; the filter outlet is connected to one end of the air intake pipe, and the other end of the air intake pipe is connected to the condensation module; The condensation module includes a shell, a tube bundle, and a condensation plate. The bottom of the shell is provided with a liquid inlet interface, and the top of the shell is provided with a liquid outlet interface. The tube bundle and the condensation plate are accommodated in the shell. The tube bundle includes a liquid inlet main pipe, a liquid inlet sub-pipe, a liquid outlet sub-pipe, and a liquid outlet main pipe. One end of the liquid inlet main pipe is connected to the liquid inlet interface, and the other end of the liquid inlet main pipe is connected to the liquid inlet sub-pipe. The condensation plate is a hollow sheet plate of a preset thickness, one end of the condensation plate is connected to the liquid inlet sub-pipe, and the other end of the condensation plate is connected to the liquid outlet sub-pipe; the liquid outlet sub-pipe is connected to one end of the liquid outlet main pipe, and the other end of the liquid outlet main pipe is connected to the liquid outlet interface; The filtrate recovery tank is connected to the condensation module through a filtrate tube, one end of the filtrate tube is connected to the bottom of the condensation module, and the other end of the filtrate tube is connected to the top of the filtrate recovery tank.

2. The hydrogen fluoride recovery device according to claim 1, characterized in that: A safety valve is provided at the bottom of the gas collecting hood.

3. The hydrogen fluoride recovery device according to claim 1, characterized in that: The filter module further includes a mesh plate, which is arranged on a side of the filter cavity close to the filter outlet.

4. The hydrogen fluoride recovery device according to claim 1, characterized in that: A first strip groove and a second strip groove are provided on the inner side of the filter cavity, the first strip groove is arranged on the opposite side of the second strip groove, and the bottom baffle is slidably connected to the bottom of the filter cavity based on the first strip groove and the second strip groove.

5. The hydrogen fluoride recovery device according to claim 4, characterized in that: The bottom baffle includes a first push rod and a second push rod, the first push rod and the second push rod are strip-shaped columnar structures, and the first push rod and the second push rod are fixed on both sides of the bottom baffle along the sliding direction of the bottom baffle.

6. The hydrogen fluoride recovery device according to claim 1, characterized in that: The condensation module further includes a temperature monitoring device, which is connected to the liquid inlet main pipe.

7. The hydrogen fluoride recovery device according to claim 1, characterized in that: The condensing module further includes a pressure monitoring device, which is connected to the air inlet pipe.

8. The hydrogen fluoride recovery device according to claim 1, characterized in that: The condensing module further includes a base, which is disposed below the shell.

9. The hydrogen fluoride recovery device according to claim 1, characterized in that: The number of the liquid inlet sub-pipes is greater than or equal to the number of the condensation plates.

10. The hydrogen fluoride recovery device according to claim 1, characterized in that: The number of the liquid outlet sub-pipes is greater than or equal to the number of the condensation plates.

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