Cleaning device for probe card

Abstract

The utility model discloses a cleaning device for a probe card, and relates to the technical field of probe card cleaning. The device comprises a cleaning box, a filtering device and a supporting frame, ultrasonic devices are symmetrically arranged on the two opposite surfaces of the cleaning box, a water tank is arranged on the upper surface of the supporting frame, a water suction pump is arranged on the upper surface of the supporting frame, a water outlet pipe is communicated with one side face of the water tank, and an electromagnetic valve is communicated with the peripheral side face of the water outlet pipe. One side face of the cleaning box communicates with a drainage pipe, and multiple sets of electric telescopic rods are symmetrically arranged on the two opposite surfaces of the cleaning box. The probe card is placed in the cleaning plate, the sliding rails arranged on the two sides of the cleaning plate slide into the basket along the sliding grooves formed in the basket, then the electric telescopic rod is started to enable the basket to move downwards to be immersed in the cleaning box, at the moment, the cleaning box is filled with cleaning liquid, the ultrasonic devices on the two sides of the cleaning box are started, and the ultrasonic devices are used for cleaning the probe card. And the ultrasonic device is used for cleaning the probe card in the cleaning plate by taking cleaning liquid as a medium.

Description

Technical Field

[0001] The utility model belongs to the technical field of probe card cleaning, in particular to a cleaning device for a probe card. Background Art

[0002] A probe card is a test interface composed of probes, electronic components, wires and printed circuit boards. Depending on different situations, there will also be a demand for electronic components, reinforcement plates, etc. It is mainly used to perform preliminary measurements of the electrical performance of chips before chip segmentation and packaging, and to screen out defective chips before proceeding with subsequent packaging projects. It is divided into blade needle cards, cantilever needle cards, vertical needle cards, membrane needle cards and micro-electromechanical system needle cards according to the structural type. During the production process of the probe card, impurities on its surface need to be cleaned to avoid affecting the use effect later.

[0003] Existing probe cards are often cleaned using ultrasonic cleaning devices. When cleaning related equipment on the market, the probe card is directly placed in a cleaning tank and the cleaning liquid cleans the probe card at room temperature. This has problems such as unsatisfactory cleaning quality and inconvenient operation. Therefore, a probe card cleaning device is proposed. Summary of the Invention

[0004] The purpose of the utility model is to provide a cleaning device for a probe card to solve the existing problems.

[0005] In order to solve the above technical problems, the present invention is achieved through the following technical solutions:

[0006] The utility model is a cleaning device for a probe card, comprising a cleaning box, a filtering device and a support frame, wherein ultrasonic devices are symmetrically arranged on two relatively opposite surfaces of the cleaning box, a water tank is arranged on the upper surface of the support frame, a water pump is arranged on the upper surface of the support frame, a water outlet pipe is connected to one side of the water tank, a solenoid valve is connected to the side surface of the water outlet pipe, a drain pipe is connected to one side of the cleaning box, a plurality of groups of electric telescopic rods are symmetrically arranged on two relatively opposite surfaces of the cleaning box, and baskets are arranged at the output ends of the plurality of groups of electric telescopic rods.

[0007] The basket is symmetrically provided with slide grooves, a washing plate is slidably connected to the slide grooves, the upper surface of the basket is provided with multiple groups of drying fans, the bottom surface of the basket is provided with multiple groups of water inlet holes, the washing plate is provided with slide rails on two opposite surfaces, the upper surface of the washing plate is provided with multiple groups of placement grooves, and the bottom surface of the washing plate is provided with multiple groups of water outlets.

[0008] One end of the drain pipe is fixedly connected to a side of the filter device, and the drain pipe is communicated with the filter device. The filter device includes a cover plate, and two groups of mounting grooves are symmetrically opened in the filter device. The bottom surface of the cover plate is respectively provided with a porous filter plate and a filter cotton purification layer. The ultrasonic device includes an ultrasonic generator and an ultrasonic transducer, and the ultrasonic transducer is contact-mounted on both sides of the cleaning box.

[0009] The shape and size of the porous filter plate and the filter cotton purification layer are adapted to the installation slot, and the porous filter plate and the filter cotton purification layer are slidably matched with the installation slot. A connecting pipe is provided on one side of the filter device; one end of the connecting pipe is fixedly connected to the water pump.

[0010] The shape and size of the slide rail are adapted to the slide groove, and the slide rail and the slide groove are slidably matched.

[0011] The electric telescopic rod, the drying fan, the water pump, the electromagnetic valve and the ultrasonic device are electrically connected to an indoor power supply.

[0012] The slide rails arranged on both sides of the cleaning plate slide into the basket along the slide grooves opened in the basket, and then the electric telescopic rod is started to move the basket downward and immerse it in the cleaning box. At this time, the cleaning box is filled with cleaning liquid, and the ultrasonic devices on both sides of the cleaning box are started. The ultrasonic devices use the cleaning liquid as a medium to clean the probe card in the cleaning plate.

[0013] The utility model has the following beneficial effects:

[0014] The utility model places the probe card into the cleaning plate, and then slides the slide rails provided on both sides of the cleaning plate into the basket along the slide grooves provided in the basket, and then starts the electric telescopic rod to move the basket downward and immerse it in the cleaning box. At this time, the cleaning box is filled with cleaning liquid, and the ultrasonic devices on both sides of the cleaning box are started. The ultrasonic devices use the cleaning liquid as a medium to clean the probe card in the cleaning plate. After the cleaning is completed, the electric telescopic rod is started to raise the basket upward, and after leaving the cleaning liquid, the drying fan is started to dry the probe card in the cleaning plate.

[0015] After a period of use, the cleaning liquid in the cleaning tank becomes dirty. At this time, the solenoid valve on one side of the filter device is opened to discharge the cleaning liquid into the filter device. The cleaning liquid is filtered through the porous filter plate and the filter cotton purification layer. The filtered cleaning liquid is then pumped into the water tank by the water pump on one side of the water tank to realize water circulation, so as to save some resources and reduce costs.

[0016] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0018] Figure 1 A schematic diagram of the overall structure of a probe card cleaning device;

[0019] Figure 2 An exploded view of a probe card cleaning device;

[0020] Figure 3 This is an exploded view of the basket structure;

[0021] Figure 4 Schematic diagram of the ultrasonic device structure.

[0022] In the accompanying drawings, the list of components represented by each reference numeral is as follows: 1. Cleaning box; 2. Basket; 21. Electric telescopic rod; 22. Slide; 23. Drying fan; 24. Water inlet; 25. Cleaning plate; 26. Slide rail; 27. Placement slot; 28. Water outlet; 3. Filter device; 31. Cover plate; 32. Mounting slot; 33. Porous filter plate; 34. Filter cotton purification layer; 4. Water tank; 41. Solenoid valve; 42. Water pump; 5. Ultrasonic device; 51. Ultrasonic generator; 52. Ultrasonic transducer. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0024] In the description of the present invention, it should be understood that the terms "upper", "middle", "outer", "inner" and the like indicating directions or positional relationships are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as limiting the present invention.

[0025] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "provided with," "connected," etc., should be understood in a broad sense. For example, "connected" may refer to a fixed connection, a detachable connection, or an integral connection; it may refer to a mechanical connection or an electrical connection; it may refer to a direct connection or an indirect connection through an intermediate medium; it may refer to internal communication between two components. Those skilled in the art will be able to understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0026] See also Figure 1 - Figure 4 As shown, the utility model is a cleaning device for a probe card, comprising a cleaning box 1, a filtering device 3 and a support frame, wherein ultrasonic devices 5 are symmetrically arranged on two opposite surfaces of the cleaning box 1, a water tank 4 is arranged on the upper surface of the support frame, a water pump 42 is arranged on the upper surface of the support frame, a water outlet pipe is connected to one side of the water tank 4, a solenoid valve 41 is connected to the side surface of the water outlet pipe, a drain pipe is connected to one side of the cleaning box 1, a plurality of electric telescopic rods 21 are symmetrically arranged on two opposite surfaces of the cleaning box 1, and a basket 2 is arranged at the output end of the plurality of electric telescopic rods 21.

[0027] Furthermore, symmetrical slide grooves 22 are provided in the basket 2, and a cleaning plate 25 is slidably connected in the slide groove 22. Multiple groups of drying fans 23 are provided on the upper surface of the basket 2, and multiple groups of water inlet holes 24 are provided on the bottom surface of the basket 2. Slide rails 26 are provided on the two opposite surfaces of the cleaning plate 25. Multiple groups of placement grooves 27 are provided on the upper surface of the cleaning plate 25, and multiple groups of water outlets 28 are provided on the bottom surface of the cleaning plate 25.

[0028] Furthermore, one end of the drain pipe is fixedly connected to one side of the filter device 3, and the drain pipe is communicated with the filter device 3. The filter device 3 includes a cover plate 31, and two groups of mounting grooves 32 are symmetrically opened in the filter device 3. The bottom surfaces of the cover plate 31 are respectively provided with a porous filter plate 33 and a filter cotton purification layer 34. The ultrasonic device 5 includes an ultrasonic generator 51 and an ultrasonic transducer 52. The ultrasonic transducer 52 is contact-mounted on both sides of the cleaning box 1.

[0029] Furthermore, the shape and size of the porous filter plate 33 and the filter cotton purification layer 34 are adapted to the mounting groove 32 , and the porous filter plate 33 and the filter cotton purification layer 34 slide in conjunction with the mounting groove 32 . A connecting pipe is provided on one side of the filter device 3 ; one end of the connecting pipe is fixedly connected to the water pump 42 .

[0030] Furthermore, the shape and size of the slide rail 26 are adapted to the slide groove 22 , and the slide rail 26 and the slide groove 22 are slidably matched.

[0031] Furthermore, the electric telescopic rod 21, the drying fan 23, the water pump 42, the electromagnetic valve 41 and the ultrasonic device 5 are electrically connected to the indoor power supply. The model of the ultrasonic device 5 is HY-1012C.

[0032] Furthermore, the slide rails 26 provided on both sides of the cleaning plate 25 slide into the basket 2 along the slide grooves 22 provided in the basket 2, and then the electric telescopic rod 21 is started to move the basket 2 downward and immerse it in the cleaning box 1. At this time, the cleaning box 1 is filled with cleaning liquid, and the ultrasonic devices 5 on both sides of the cleaning box 1 are started. The ultrasonic devices 5 use the cleaning liquid as a medium to clean the probe card in the cleaning plate 25.

[0033] It should be noted that the present invention places the probe card into the cleaning plate 25, and then slides the slide rails 26 provided on both sides of the cleaning plate 25 into the basket 2 along the slide groove 22 provided in the basket 2, and then starts the electric telescopic rod 21 to move the basket 2 downward and immerse it in the cleaning box 1. At this time, the cleaning box 1 is filled with cleaning liquid, and the ultrasonic devices 5 on both sides of the cleaning box 1 are started. The ultrasonic devices 5 use the cleaning liquid as a medium to clean the probe card in the cleaning plate 25. After cleaning is completed, the electric telescopic rod 21 is started to lift the basket 2 upward, and after leaving the cleaning liquid, the drying fan 23 is started to dry the probe card in the cleaning plate 25.

[0034] After being used for a period of time, the cleaning liquid in the cleaning box 1 becomes dirty. At this time, the solenoid valve 41 on one side of the filter device 3 is opened to discharge the cleaning liquid into the filter device 3. The cleaning liquid is filtered by the porous filter plate 33 and the filter cotton purification layer 34. The filtered cleaning liquid is then pumped into the water tank 4 by the water pump 42 on one side of the water tank 4 to realize water circulation, so as to save some resources and reduce costs.

[0035] Throughout this specification, references to terms such as "one embodiment," "example," and "specific example" indicate that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present invention. In this specification, schematic representations of these terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0036] The preferred embodiments of the present invention disclosed above are intended only to help illustrate the present invention. The preferred embodiments do not describe all details in detail, nor do they limit the invention to the specific embodiments described. Obviously, many modifications and variations are possible based on the contents of this specification. These embodiments are selected and described in detail in this specification to better explain the principles and practical applications of the present invention, thereby enabling those skilled in the art to better understand and utilize the present invention. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A probe card cleaning device, comprising a cleaning box (1), a filtering device (3) and a support frame, characterized in that: The cleaning box (1) is symmetrically provided with ultrasonic devices (5) on two opposite surfaces; a water tank (4) is provided on the upper surface of the support frame; a water pump (42) is provided on the upper surface of the support frame; a water outlet pipe is provided on one side of the water tank (4); a solenoid valve (41) is provided on the side of the water outlet pipe; a drain pipe is provided on one side of the cleaning box (1); a plurality of groups of electric telescopic rods (21) are symmetrically provided on two opposite surfaces of the cleaning box (1); and baskets (2) are provided at the output ends of the plurality of groups of electric telescopic rods (21).

2. The probe card cleaning device according to claim 1, wherein: The basket (2) is symmetrically provided with a slide groove (22), and a cleaning plate (25) is slidably connected in the slide groove (22). The upper surface of the basket (2) is provided with multiple groups of drying fans (23), and the bottom surface of the basket (2) is provided with multiple groups of water inlet holes (24). The cleaning plate (25) is provided with slide rails (26) on two opposite surfaces. The upper surface of the cleaning plate (25) is provided with multiple groups of placement grooves (27), and the bottom surface of the cleaning plate (25) is provided with multiple groups of water outlets (28).

3. The probe card cleaning device according to claim 1, wherein: One end of the drain pipe is fixedly connected to a side surface of the filter device (3), and the drain pipe is in communication with the filter device (3). The filter device (3) includes a cover plate (31), and two groups of mounting grooves (32) are symmetrically provided in the filter device (3). The bottom surface of the cover plate (31) is respectively provided with a porous filter plate (33) and a filter cotton purification layer (34). The ultrasonic device (5) includes an ultrasonic generator (51) and an ultrasonic transducer (52), and the ultrasonic transducer (52) is contact-mounted on both sides of the cleaning box (1).

4. The probe card cleaning device according to claim 3, wherein: The shape and size of the porous filter plate (33) and the filter cotton purification layer (34) are adapted to the mounting groove (32); the porous filter plate (33) and the filter cotton purification layer (34) are slidably matched with the mounting groove (32); a connecting pipe is provided on one side of the filter device (3); and one end of the connecting pipe is fixedly connected to the water pump (42).

5. The probe card cleaning device according to claim 2, wherein: The shape and size of the slide rail (26) are adapted to the slide groove (22), and the slide rail (26) and the slide groove (22) are slidably matched.

6. The probe card cleaning device according to claim 1, wherein: The electric telescopic rod (21), the drying fan (23), the water pump (42), the electromagnetic valve (41) and the ultrasonic device (5) are electrically connected to an indoor power supply.

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