Cooling liquid cooling mechanism for pipeline cleaning system

Abstract

The utility model discloses a cooling liquid cooling mechanism for a pipeline cleaning system, and relates to the technical field of pipeline cooling. Comprising an air source end cooling block filled with cooling liquid; the air source end cooling block is attached to the periphery of the air source pipeline in a covering mode, and heat on the air source pipeline is absorbed and taken away through cooling liquid. The pipeline end cooling block is filled with cooling liquid and is communicated with the air source end cooling block; the pipeline end cooling block is attached to the periphery of the clean gas transmission pipeline in a covering mode, and heat on the clean gas transmission pipeline is absorbed and taken away through cooling liquid. The air source end cooling block is connected with the liquid inlet connector, and the pipeline end cooling block is connected with the liquid return connector, so that cooling liquid circulates for refrigeration. The cooling liquid can absorb and take away heat generated in the equipment cleaning process more efficiently, so that it is ensured that the equipment runs at the lower temperature, and the running efficiency and stability are improved. The cooling liquid also has good thermal conductivity and stability, is not easy to evaporate or scale, and reduces the frequency of maintenance and replacement.

Description

Technical Field

[0001] The utility model relates to the technical field of pipeline cooling, in particular to a coolant cooling mechanism used in a pipeline cleaning system. Background Art

[0002] Piping systems are a vital component of semiconductor equipment. As integrated circuit line widths continue to shrink, the requirements for surface cleanliness within piping systems are becoming increasingly stringent. Traditional mechanical cleaning methods struggle to meet these requirements and are prone to particulate contamination. Plasma cleaning technology, with its non-contact, residue-free advantages, has gradually become the mainstream method for piping system cleaning. However, plasma is a high-temperature gas, and plasma cleaning generates a certain amount of heat. If this heat is not promptly removed, it can cause the piping surface to expand, deform, or even be damaged. Furthermore, the high temperature can affect downstream process parameters.

[0003] Existing cooling methods present several issues. The primary issue is excessive detection signals, which frequently trigger alarms. This not only increases maintenance costs but also impacts the equipment's normal operation. Furthermore, water cooling, the primary heat dissipation method, fails to effectively remove heat from the pipes, posing a potential threat to the equipment's stability and lifespan. Utility Model Content

[0004] The purpose of the utility model is to provide a coolant cooling mechanism for a pipeline cleaning system, which can more efficiently absorb and remove heat from the pipeline, thereby improving the operating efficiency and stability of semiconductor equipment.

[0005] To achieve the above objectives, the present application proposes a coolant cooling mechanism for a pipe cleaning system, comprising:

[0006] The air source end cooling block has a built-in coolant. The air source end cooling block is attached to the outer periphery of the air source pipeline and absorbs and removes the heat on the air source pipeline through the coolant.

[0007] The pipeline end cooling block has a built-in coolant and is connected to the gas source end cooling block; the pipeline end cooling block is attached to the outer periphery of the clean gas transmission pipeline and absorbs and removes the heat on the clean gas transmission pipeline through the coolant.

[0008] Furthermore, the cooling block at the gas source end is connected to the liquid inlet joint, and the cooling block at the pipeline end is connected to the liquid return joint, so that the coolant circulates for refrigeration.

[0009] Furthermore, the gas source end cooling block comprises:

[0010] The first gas source end cooling block is wrapped around the side wall and bottom of the gas source pipeline, and the liquid inlet end is connected to the liquid inlet joint;

[0011] The second gas source end cooling block is wrapped around the side wall and bottom of the gas source pipeline, and the liquid inlet end is connected to the liquid outlet end of the first gas source end cooling block;

[0012] The third gas source end cooling block is arranged on the top of the gas source pipeline, and the liquid inlet end is connected with the liquid outlet end of the second gas source end cooling block.

[0013] Furthermore, the pipeline end cooling block comprises:

[0014] The first size pipeline end cooling block a is arranged on the first size clean gas transmission pipeline, and the liquid inlet end is connected to the liquid outlet end of the third gas source end cooling block;

[0015] The first-size pipeline end cooling block b is arranged on the first-size clean gas transmission pipeline, and its liquid inlet end is connected to the liquid outlet end of the first-size pipeline end cooling block a.

[0016] Furthermore, the pipeline end cooling block further includes:

[0017] The second size pipeline end cooling block a is provided on the second size clean gas transmission pipeline, and the liquid inlet end is connected to the liquid outlet end of the first size pipeline end cooling block b;

[0018] The second size pipeline end cooling block b is arranged on the second size clean gas transmission pipeline, and the liquid inlet end is connected to the liquid outlet end a of the second size pipeline end cooling block, and the liquid outlet end is connected to the liquid return joint.

[0019] Furthermore, it also includes:

[0020] Cooling water inlet connector, connected to the water inlet end of the pipe cleaning system transmitter;

[0021] The cooling water return joint is connected to the return end of the pipe cleaning system transmitter.

[0022] Furthermore, the first size pipeline end cooling block a and the first size pipeline end cooling block b are an up-down structure or a left-right structure; the second size pipeline end cooling block a and the second size pipeline end cooling block b are an up-down structure or a left-right structure.

[0023] Furthermore, the gas source end cooling block and the pipeline end cooling block are made of alloy material.

[0024] Furthermore, both the liquid inlet joint and the liquid return joint are provided with manual stop valves.

[0025] Furthermore, the cooling water inlet joint and the cooling water return joint are both provided with water source shut-off valves.

[0026] The above technical solution adopted by this utility model has the following advantages over the existing technology: the coolant used in this application exhibits a superior cooling effect compared to traditional cooling water. The coolant can more efficiently absorb and remove heat generated during the equipment cleaning process, thereby ensuring that the equipment operates at a lower temperature, improving operational efficiency and stability. In addition, the coolant has excellent thermal conductivity and stability, and is not prone to evaporation or scaling, which reduces the frequency of maintenance and replacement, further reducing operating costs.

[0027] The coolant cooling mechanism in this application utilizes energy-saving, environmentally friendly, and safe alloy materials for the gas source cooling block, pipeline cooling block, and coolant transmission pipeline. This material not only exhibits excellent corrosion resistance and high-temperature resistance, enabling long-term stable operation in harsh operating environments, but also complies with environmental standards, minimizing potential environmental impact. Furthermore, it fully considers personal safety considerations, avoids the release of harmful substances, and effectively protects the health and safety of operators and equipment maintenance personnel. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 This is an exploded view of the coolant cooling mechanism used in the pipe cleaning system;

[0029] Figure 2 It is a schematic diagram of the structure of the coolant cooling mechanism used in the pipe cleaning system;

[0030] Among them: 1. Water source shut-off valve, 2. Liquid inlet joint, 3. Liquid return joint, 4. Cooling water return joint, 5. Cooling water inlet joint, 6. Second air source end cooling block, 7. First air source end cooling block, 8. Third air source end cooling block, 9. Air source pipeline, 10. First size pipeline end cooling block a, 11. First size pipeline end cooling block b, 12. Second size pipeline end cooling block a, 13. Second size pipeline end cooling block b, 14 pipeline cleaning system transmitter. DETAILED DESCRIPTION

[0031] In order to make the technical problems, technical solutions and beneficial effects to be solved by this application more clearly understood, this application is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this application and are not intended to limit this application.

[0032] It should be noted that when an element is referred to as being “fixed on” or “disposed on” another element, it may be directly on the other element or indirectly on the other element. When an element is referred to as being “connected to” another element, it may be directly connected to the other element or indirectly connected to the other element.

[0033] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, "multiple" means two or more, unless otherwise clearly and specifically defined. "Several" means one or more, unless otherwise clearly and specifically defined.

[0034] In the description of this application, it should be understood that the terms "center", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application.

[0035] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; they can refer to internal communication between two components or the interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0036] See also Figure 1-2 The present embodiment provides a coolant cooling mechanism for a pipeline cleaning system, comprising a gas source end cooling block and a pipeline end cooling block connected to each other, both of which are filled with coolant, the gas source end cooling block is connected to a liquid inlet joint via a pipeline for transmitting coolant, and the pipeline end cooling block is connected to a liquid return joint via a pipeline for transmitting coolant, so that the coolant circulates and cools, and the preferred cooling block and pipeline material is alloy; the gas source end cooling block is attached to the outer periphery of the gas source pipeline, and absorbs and takes away the heat on the gas source pipeline through the coolant; the pipeline end cooling block is attached to the outer periphery of the clean gas transmission pipeline, and absorbs and takes away the heat on the clean gas transmission pipeline through the coolant.

[0037] In this embodiment, the gas source end cooling block includes:

[0038] The first gas source end cooling block is an angular structure, wrapped around the side wall and bottom of the gas source pipeline, and the liquid inlet end is connected to the liquid inlet connector;

[0039] The second air source end cooling block is an angular structure, wrapped around the side wall and bottom of the air source pipeline, and the liquid inlet end is connected to the liquid outlet end of the first air source end cooling block;

[0040] The third gas source end cooling block is a plate-like U-shaped structure to avoid the joint of the gas source pipeline. It is arranged on the top of the gas source pipeline, and the liquid inlet end is connected to the liquid outlet end of the second gas source end cooling block;

[0041] After the second gas source end cooling block and the third gas source end cooling block are docked, they can completely wrap the side wall and bottom of the gas source pipeline.

[0042] In this embodiment, the pipeline end cooling block includes:

[0043] The first size pipeline end cooling block a is arranged on the first size clean gas transmission pipeline, and the liquid inlet end is connected to the liquid outlet end of the third gas source end cooling block;

[0044] The first-size pipeline end cooling block b is arranged on the first-size clean gas transmission pipeline, and its liquid inlet end is connected to the liquid outlet end of the first-size pipeline end cooling block a.

[0045] The first-size pipeline end cooling block a and the first-size pipeline end cooling block b are of an up-down structure or a left-right structure; after the two are docked, they can completely wrap the first-size clean gas transmission pipeline;

[0046] Since the diameter of the clean gas transmission pipeline may be different, the first size in this embodiment may be 1.5 inches or other sizes.

[0047] In this embodiment, the pipeline end cooling block further includes:

[0048] The second size pipeline end cooling block a is provided on the second size clean gas transmission pipeline, and the liquid inlet end is connected to the liquid outlet end of the first size pipeline end cooling block b;

[0049] The second size pipeline end cooling block b is provided on the second size clean gas transmission pipeline, and the liquid inlet end is connected to the liquid outlet end a of the second size pipeline end cooling block, and the liquid outlet end is connected to the liquid return joint;

[0050] The second-size pipeline end cooling block a and the second-size pipeline end cooling block b are an up-down structure or a left-right structure. After the two are connected, they can completely wrap the second-size clean gas transmission pipeline.

[0051] In this embodiment, the second size can be 4 inches, or other sizes;

[0052] As a preferred implementation provided in this embodiment, the pipeline cleaning system emitter is cooled by water cooling, specifically including:

[0053] The cooling water inlet joint is equipped with a water source shut-off valve and is connected to the water inlet end of the pipeline cleaning system transmitter;

[0054] The cooling water return joint is equipped with a water source shut-off valve and is connected to the return end of the pipeline cleaning system transmitter;

[0055] The cooling water inlet joint can be connected to the RPC cooling water inlet device of the semiconductor equipment, and the cooling water return joint can be connected to the RPC cooling water return device of the semiconductor equipment; forming circulating cooling water to achieve a cooling effect.

[0056] After opening the manual stop valve, the coolant flows from the liquid supply block through the liquid inlet joint to the gas source end cooling block, that is, the circulating coolant flows from the first gas source end cooling block to the second gas source end cooling block to the third gas source end cooling block, and then flows into the pipeline end cooling block, that is, the circulating coolant flows from the third gas source end cooling block to the first size pipeline end cooling block a and flows into the first size pipeline end cooling block b, and then flows from the first size pipeline end cooling block b to the second size pipeline end cooling block a and flows into the second size pipeline end cooling block b. Finally, the second size pipeline end cooling block b is connected to the return liquid block, so that the coolant flows back to the plant service end, forming a circulating cooling to cool the pipeline.

[0057] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A coolant cooling mechanism for a pipe cleaning system, characterized in that: include: The air source end cooling block has a built-in coolant. The air source end cooling block is attached to the outer periphery of the air source pipeline and absorbs and removes heat from the air source pipeline through the coolant. A pipeline end cooling block, which contains a coolant and is connected to the gas source end cooling block; the pipeline end cooling block is attached to the outer periphery of the clean gas transmission pipeline and absorbs and removes heat from the clean gas transmission pipeline through the coolant; The cooling block at the gas source end is connected to the liquid inlet joint, and the cooling block at the pipeline end is connected to the liquid return joint, so that the coolant circulates and refrigerates; The gas source end cooling block comprises: A first gas source end cooling block is wrapped around the side wall and bottom of the gas source pipeline; a liquid inlet end of the first gas source end cooling block is connected to the liquid inlet connector; The second air source end cooling block is wrapped around the side wall and bottom of the air source pipeline; the liquid inlet end of the second air source end cooling block is connected to the liquid outlet end of the first air source end cooling block; The third gas source end cooling block is arranged on the top of the gas source pipeline; the liquid inlet end of the third gas source end cooling block is connected to the liquid outlet end of the second gas source end cooling block; The pipeline end cooling block comprises: The first size pipeline end cooling block a is arranged on the first size clean gas transmission pipeline; the liquid inlet end of the first size pipeline end cooling block a is connected to the liquid outlet end of the third gas source end cooling block; A first-size pipeline end cooling block b is provided on the first-size clean gas transmission pipeline; The liquid inlet end of the cooling block b at the first size pipeline end is connected to the liquid outlet end of the cooling block a at the first size pipeline end; The pipeline end cooling block further includes: The second-size pipeline end cooling block a is provided on the second-size clean gas transmission pipeline; the liquid inlet end of the second-size pipeline end cooling block a is connected to the liquid outlet end of the first-size pipeline end cooling block b; The second-size pipeline end cooling block b is provided on the second-size clean gas transmission pipeline; the liquid inlet end of the second-size pipeline end cooling block b is connected to the liquid outlet end a of the second-size pipeline end cooling block, and the liquid outlet end is connected to the liquid return joint; Cooling water inlet connector, connected to the water inlet end of the pipe cleaning system transmitter; Cooling water return joint, connected to the return end of the pipe cleaning system transmitter; The cooling water inlet joint and the cooling water return joint are both provided with water source stop valves.

2. The coolant cooling mechanism for a pipe cleaning system according to claim 1, characterized in that: The first size pipeline end cooling block a and the first size pipeline end cooling block b are an up-down structure or a left-right structure; the second size pipeline end cooling block a and the second size pipeline end cooling block b are an up-down structure or a left-right structure.

3. The coolant cooling mechanism for a pipe cleaning system according to claim 1, characterized in that: The gas source end cooling block and the pipeline end cooling block are made of alloy material.

4. The coolant cooling mechanism for a pipe cleaning system according to claim 1, characterized in that: The liquid inlet joint and the liquid return joint are both provided with manual stop valves.

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