Electric control telescopic device for accurately controlling displacement distance of sputtering gun

Abstract

The utility model relates to the technical field of vapor deposition equipment, and particularly discloses an electric control telescopic device for accurately controlling the displacement distance of a sputtering gun, which comprises a sliding table connecting plate I, a movable plate mounted at the upper end of a sliding table connecting seat, a telescopic pipe connected inside the movable plate, and a sputtering gun arranged at one end of the telescopic pipe, the sliding table connecting base is connected with a driving assembly, and stroke scales are arranged at the upper ends of one set of side baffles. According to the electric control telescopic device disclosed by the utility model, the position of the sputtering target can be accurately adjusted, and a film with more accurate process adjustment and better repeatability can be produced, so that the product yield is improved; the electric control telescopic device is driven by the motor, so that the use convenience of an operator is improved; the electric control telescopic device is stable in telescopic action, the speed can be adjusted, and different operation requirements are met; the electric control telescopic device can respond quickly, so that the working efficiency is improved; the electric control telescopic device can accurately measure the displacement value and record the working condition, and is convenient for process traceability.

Description

Technical Field

[0001] The utility model belongs to the technical field of vapor deposition equipment, and in particular relates to an electrically controlled telescopic device for accurately controlling the displacement distance of a sputtering gun. Background Art

[0002] Magnetron sputtering technology is a physical vapor deposition technology. Due to its advantages such as fast deposition speed, low substrate temperature rise, dense and uniform controllable thin films, easy operation and environmental protection, it is widely used in multiple fields from basic research to industrial applications. In the magnetron sputtering system, the distance between the sputtering source and the substrate has an important influence on the generation rate and quality of the thin film; the electrically controlled telescopic device that accurately controls the displacement distance of the sputtering gun, as a mechanism for adjusting the distance between the target material and the substrate in the sputtering process, plays a key role in ensuring sputtering uniformity and thin film quality; however, traditional telescopic devices face problems such as complex structure, high cost, insufficient displacement control accuracy and lack of telescopic flexibility in manual control mode, and poor repeatability. Utility Model Content

[0003] The purpose of the utility model is to provide an electrically controlled telescopic device for accurately controlling the displacement distance of a sputtering gun, so as to solve the problems raised in the above-mentioned background technology.

[0004] To achieve the above objectives, the present invention provides the following technical solutions:

[0005] An electrically controlled telescopic device for precisely controlling the displacement distance of a sputtering gun, comprising:

[0006] Material toggling mechanism, its both sides respectively have a cylinder pressure, and the cylinder pressure bar connects swing arm, and the swing arm end face has hook portion, and a bar passes position between the end of two swing arms and the hook portion. The swing arm ends up being rotated by the hook portion. The swing arm ends are rotated by the hook portion. Installed on the vacuum chamber, the interior of the mounting flange is provided with a through hole that cooperates with the telescopic tube for the passage of the telescopic tube. The upper end of the slide connecting plate 1 is also provided with a side baffle, and the upper end of a group of the side baffles is provided with a travel scale. The upper end of the slide connecting plate 1 is also installed with a grating ruler. The upper end of the slide connecting plate 1 is installed with a photoelectric switch through a bracket. The photoelectric switch is opposite to the installation position of the grating ruler. The measuring block of the grating ruler is connected to the side of the slide connecting seat. When the sputtering gun performs a telescopic action, it will drive the measuring block of the grating ruler to move synchronously. This movement process is monitored in real time by the photoelectric switch, and can send out corresponding reminder signals at the initial position and final position of the movement.

[0007] Preferably, the driving assembly includes a driving motor, a threaded rod and a threaded sleeve. The driving motor is installed on one side of the guide column fixing plate, the output end of the driving motor is connected to the threaded rod, and the lower end of the slide connecting seat is installed with the threaded sleeve that cooperates with the threaded rod. The threaded rod is driven to rotate by the provided driving motor, and the threaded rod is threadedly cooperated with the threaded sleeve, thereby driving the movable plate to move, and further driving the sputtering gun to perform telescopic movement. This design not only realizes the precise control of the telescopic movement of the sputtering gun, but also realizes the precise reading and real-time monitoring of the movement stroke by combining devices such as photoelectric switches and pointer scale plates.

[0008] Preferably, a guide column body is installed on one side of the guide column fixing plate, a through hole matching the guide column body is opened inside the upper end of the movable plate, and a guide column support matching the guide column body is installed on one side of the mounting flange to install the guide column body.

[0009] Preferably, a slide baffle is installed on one side of the slide connecting seat, and the slide baffle and the slide connecting seat are positioned by cylindrical pins and locked by bolts to ensure that the slide baffle can be accurately fixed in the predetermined position and will not be displaced due to external force.

[0010] Preferably, a pointer scale plate is installed on one side of the slide baffle, and a blocking rod is suspended below the pointer scale plate, so that the pointer scale plate will move in the same way as the sputtering gun, and the pointer scale plate points to the stroke scale in real time to measure the current stroke position.

[0011] Preferably, a graphite copper sleeve is provided on one side of the mounting flange, and the graphite copper sleeve is located on the outside of the telescopic tube. Dynamic seals are provided at both ends of the graphite copper sleeve, which are sealing devices in the prior art and are not described in detail here. They serve to maintain the sealing state of the entire device. A dynamic sealing cover plate is provided on the outside of a group of the dynamic seals, and the dynamic sealing cover plate is located on the outside of the mounting flange.

[0012] Preferably, a reinforcing plate 1 is further installed on the upper end of the slide connecting plate 1, one side of the reinforcing plate 1 is connected to the mounting flange, and an arc groove matching the graphite copper sleeve is opened on the upper end of the reinforcing plate 1.

[0013] Preferably, the lower end of the slide connecting plate 1 is connected to the reinforcing plate 2, the lower end of the reinforcing plate 2 is connected to the supporting base plate, the lower end of the supporting base plate is connected to the slider, and the lower end of the slider is provided with a guide rail matching therewith. By connecting the guide rail to the slider, the guide rail is installed on the bracket, and the supporting base plate in the above-mentioned installed device is installed on the slider, the movement of the sputtering gun flange can be realized when it is disassembled.

[0014] Compared with the prior art, the beneficial effects of the present invention are:

[0015] 1. This electrically controlled telescopic device enables the sputtering target to be precisely adjusted in position, producing thin films with more precise process adjustment and better repeatability, thereby improving product yield;

[0016] 2. This electric telescopic device is driven by a motor, which improves the operator's convenience;

[0017] 3. The electric telescopic device has a smooth telescopic movement and the speed can be adjusted to meet different operating requirements;

[0018] 4. This electric telescopic device can respond quickly and improve work efficiency;

[0019] 5. This electric telescopic device can accurately measure displacement values ​​and record operating conditions, facilitating process traceability. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0021] Figure 2 It is a partial enlarged schematic diagram of the utility model;

[0022] Figure 3 This is a schematic diagram from another perspective of the present invention;

[0023] In the figure: 1. Guide rail; 2. Slide connecting plate 1; 3. Drive motor; 4. Guide column fixing plate; 5. Guide column body; 6. Slide connecting seat; 8. Moving plate; 9. Telescopic tube; 10. Graphite copper sleeve; 11. Mounting flange; 12. Dynamic sealing cover plate; 13. Sputtering gun; 14. Dynamic seal; 15. Reinforcement plate 1; 16. Reinforcement plate 2; 17. Slider; 18. Side baffle; 19. Guide column support; 20. Support base plate; 21. Grating scale; 22. Threaded rod; 23. Photoelectric switch; 24. Travel scale; 25. Pointer scale plate; 26. Slide guide rail assembly. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0025] Example:

[0026] See also Figure 1-Figure 3 As shown, an electrically controlled telescopic device for precisely controlling the displacement distance of a sputtering gun comprises:

[0027] The slide connecting plate 2, the upper end of the slide connecting plate 2 is connected to the slide connecting seat 6 through the slide guide rail assembly 26, the slide guide rail assembly 26 is a guide rail assembly in the prior art, which plays a linear guiding role, and the upper end of the slide connecting seat 6 is installed with a movable plate 8, and the interior of the movable plate 8 is connected with a telescopic tube 9, which can drive the sputtering gun 13 to perform telescopic movement. The sputtering gun 13 is provided at one end of the telescopic tube 9, and the slide connecting seat 6 is connected with a driving assembly for driving the movable plate 8 to move. The guide column fixing plate 4 is connected to one side of the upper end of the platform connecting plate 1, and the reinforcing plate 15 is connected to the other side of the upper end of the platform connecting plate 1. A mounting flange 11 is installed on one side of the reinforcing plate 15, and the mounting flange 11 is mounted on the vacuum pump by bolt fastening. Above the cavity, a through hole is provided inside the mounting flange 11, which cooperates with the telescopic tube 9 for the passage of the telescopic tube 9. A side baffle 18 is also provided on the upper end of the slide connecting plate 2, and a set of side baffles 18 are provided on the upper end of a travel scale 24. A grating ruler 21 is also installed on the upper end of the slide connecting plate 2. A photoelectric switch 23 is installed on the upper end of the slide connecting plate 2 through a bracket. The photoelectric switch 23 is opposite to the installation position of the grating ruler 21. The measuring block of the grating ruler 21 is connected to the side of the slide connecting seat 6. When the sputtering gun 13 performs a telescopic action, it will drive the measuring block of the grating ruler 21 to move synchronously. This movement process is monitored in real time by the photoelectric switch 23, and can send out corresponding reminder signals at the initial position and final position of the movement.

[0028] refer to Figure 1-Figure 3 As shown, the driving assembly includes a driving motor 3, a threaded rod 22 and a threaded sleeve. The driving motor 3 is installed on one side of the guide column fixing plate 4, and the output end of the driving motor 3 is connected to the threaded rod 22. The lower end of the slide connecting seat 6 is installed with a threaded sleeve that matches the threaded rod 22. The threaded rod 22 is driven to rotate by the set driving motor 3, and the threaded rod 22 is threadedly matched with the threaded sleeve, thereby driving the movable plate 8 to move, and further driving the sputtering gun 13 to perform telescopic movement. This design not only realizes the precise control of the telescopic movement of the sputtering gun 13, but also realizes the precise reading and real-time monitoring of the movement stroke by combining devices such as the photoelectric switch 23 and the pointer scale plate 25.

[0029] refer to Figure 1-Figure 3 As shown, a guide column body 5 is installed on one side of the guide column fixing plate 4, a through hole matching the guide column body 5 is opened inside the upper end of the movable plate 8, and a guide column support 19 matching the guide column body 5 is installed on one side of the mounting flange 11 to install the guide column body 5.

[0030] refer to Figure 1-Figure 3 As shown, a slide baffle is installed on one side of the slide connecting seat 6. The slide baffle and the slide connecting seat 6 are positioned with cylindrical pins and locked with bolts to ensure that the slide baffle can be accurately fixed in the predetermined position and will not be displaced due to external force.

[0031] refer to Figure 1-Figure 3 As shown, a pointer scale plate 25 is installed on one side of the slide baffle, and a blocking rod is suspended below the pointer scale plate 25. Therefore, the pointer scale plate 25 will move in the same way as the sputtering gun 13. The pointer scale plate 25 points to the stroke scale 24 in real time to measure the current stroke position.

[0032] refer to Figure 1-Figure 3 As shown, a graphite copper sleeve 10 is provided on one side of the mounting flange 11, and the graphite copper sleeve 10 is located on the outside of the telescopic tube 9. Dynamic seals 14 are provided at both ends of the graphite copper sleeve 10. They are sealing devices in the prior art and are not described in detail here. They serve to maintain the sealing state of the entire device. A dynamic sealing cover plate 12 is provided on the outside of a group of dynamic seals 14, and the dynamic sealing cover plate 12 is located on the outside of the mounting flange 11.

[0033] refer to Figure 1-Figure 3 As shown, a reinforcing plate 15 is further installed on the upper end of the slide connecting plate 2. One side of the reinforcing plate 15 is connected to the mounting flange 11. An arc groove is opened on the upper end of the reinforcing plate 15 to match the graphite copper sleeve 10.

[0034] refer to Figure 1-Figure 3 As shown, the lower end of the slide connecting plate 1 2 is connected to the reinforcing plate 2 16, the lower end of the reinforcing plate 2 16 is connected to the supporting base plate 20, the lower end of the supporting base plate 20 is connected to the slider 17, and the lower end of the slider 17 is provided with a guide rail 1 that cooperates with it. By connecting the guide rail 1 and the slider 17, the guide rail 1 is installed on the bracket, and the supporting base plate 20 in the above-mentioned installed device is installed on the slider 17, the movement of the sputtering gun 13 flange can be realized when it is disassembled.

[0035] The utility model proposes a design scheme for an electrically controlled telescopic device for accurately controlling the displacement distance of a sputtering gun. The core of this scheme is the use of a guide column as a motion guide, which simplifies and optimizes the structure. At the same time, a stepper motor is integrated on the top of the slide to realize electric control, which greatly improves the convenience of operation. In addition, the device is also equipped with a ruler and a grating ruler, so that the operator can accurately read and control the displacement distance during operation, ensuring the accuracy and reliability of the displacement control.

[0036] 1. This electrically controlled telescopic device enables the sputtering target to be precisely adjusted in position, producing thin films with more precise process adjustment and better repeatability, thereby improving product yield;

[0037] 2. This electric telescopic device is driven by a motor, which improves the operator's convenience;

[0038] 3. The electric telescopic device has a smooth telescopic movement and the speed can be adjusted to meet different operating requirements;

[0039] 4. This electric telescopic device can respond quickly and improve work efficiency;

[0040] 5. This electric telescopic device can accurately measure displacement values ​​and record operating conditions, facilitating process traceability.

[0041] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An electrically controlled telescopic device for precisely controlling the displacement distance of a sputtering gun, characterized in that: include: The slide connecting plate (2) is connected to the slide connecting seat (6) at its upper end through the slide guide rail assembly (26). The upper end of the slide connecting seat (6) is provided with a movable plate (8). The interior of the movable plate (8) is connected to a telescopic tube (9). One end of the telescopic tube (9) is provided with a sputtering gun (13). The slide connecting seat (6) is connected to a driving assembly. One side of the upper end of the slide connecting plate is connected to a guide column fixing plate (4). The other side of the upper end of the slide connecting plate is connected to a guide column fixing plate (4). A reinforcing plate (15) is provided on one side of the reinforcing plate (15), a mounting flange (11) is provided inside the mounting flange (11) and a through hole is provided inside the mounting flange (11) to match the telescopic tube (9), a side baffle (18) is provided on the upper end of the slide connecting plate (2), a travel scale (24) is provided on the upper end of a group of the side baffles (18), a grating scale (21) is also provided on the upper end of the slide connecting plate (2), and a photoelectric switch (23) is installed on the upper end of the slide connecting plate (2) through a bracket.

2. The electrically controlled telescopic device for precisely controlling the displacement distance of a sputtering gun according to claim 1, characterized in that: The driving assembly comprises a driving motor (3), a threaded rod (22) and a threaded sleeve; the driving motor (3) is mounted on one side of the guide column fixing plate (4); the output end of the driving motor (3) is connected to the threaded rod (22); and the lower end of the slide connecting seat (6) is mounted with the threaded sleeve matched with the threaded rod (22).

3. The electrically controlled telescopic device for precisely controlling the displacement distance of a sputtering gun according to claim 2, characterized in that: A guide column body (5) is installed on one side of the guide column fixing plate (4), a through hole matching the guide column body (5) is opened inside the upper end of the movable plate (8), and a guide column support (19) matching the guide column body (5) is installed on one side of the mounting flange (11).

4. The electrically controlled telescopic device for precisely controlling the displacement distance of a sputtering gun according to claim 3, characterized in that: A slide baffle is installed on one side of the slide connecting seat (6).

5. The electrically controlled telescopic device for accurately controlling the displacement distance of a sputtering gun (13) according to claim 4, characterized in that: A pointer scale plate (25) is installed on one side of the slide baffle.

6. The electrically controlled telescopic device for precisely controlling the displacement distance of a sputtering gun according to claim 5, characterized in that: A graphite copper sleeve (10) is provided on one side of the mounting flange (11), and the graphite copper sleeve (10) is located outside the telescopic tube (9). Dynamic seals (14) are provided at both ends of the graphite copper sleeve (10), and a dynamic sealing cover plate (12) is provided on the outside of a group of the dynamic seals (14), and the dynamic sealing cover plate (12) is located outside the mounting flange (11).

7. The electrically controlled telescopic device for precisely controlling the displacement distance of a sputtering gun according to claim 6, characterized in that: A reinforcing plate (15) is also installed on the upper end of the slide connecting plate (2), one side of the reinforcing plate (15) is connected to the mounting flange (11), and an arc groove is provided on the upper end of the reinforcing plate (15) to match the graphite copper sleeve (10).

8. The electrically controlled telescopic device for precisely controlling the displacement distance of a sputtering gun according to claim 7, characterized in that: The lower end of the slide connecting plate 1 (2) is connected to the reinforcing plate 2 (16), the lower end of the reinforcing plate 2 (16) is connected to the supporting base plate (20), the lower end of the supporting base plate (20) is connected to the slider (17), and the lower end of the slider (17) is provided with a guide rail (1) that cooperates with it.

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