Rapid vacuumizing device

Abstract

The utility model provides a rapid vacuumizing device, which relates to the technical field of vacuum equipment and comprises an outer shell, a middle spacer bush, an inner shell, an injection pipe and an exhaust pipe. An inner cavity of the inner shell is an adsorption cavity, the inner shell is located in the middle spacer bush, the inner cavity of the inner shell is an adsorption cavity, a cavity between the inner shell and the middle spacer bush is a freezing cavity, and a cavity between the middle spacer bush and the outer shell is a heat insulation cavity; and an adsorption material is arranged in the adsorption cavity. The vacuumizing device disclosed by the utility model has the beneficial effects that the temperature in the adsorption cavity can be quickly reduced by injecting liquid nitrogen into the freezing cavity through the injection pipe, so that residual gas in the device to be vacuumized flows to the adsorption cavity, and moisture in the residual gas is liquefied and then is absorbed by an adsorption material; in this way, the device to be vacuumized can be quickly vacuumized, the vacuum degree in the device is quickly reduced to the level of 1E-2Pa to 1E-3Pa, and the requirements of semiconductor manufacturing procedures, surface analysis, material treatment and other applications for quick vacuumizing are met.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum equipment, in particular to a fast vacuuming device. Background Art

[0002] Vacuum pumps play a vital role in numerous industrial and technological fields, providing the necessary vacuum environment for applications such as semiconductor manufacturing, scientific research, medical equipment, and aerospace. A wide variety of vacuum pumps are currently available on the market, including but not limited to oil-sealed mechanical pumps and dry screw pumps for rough vacuum environments, as well as molecular pumps and ion pumps for high vacuum environments. These pumps vary in pumping speed and caliber to meet the needs of different operating conditions.

[0003] However, in response to specific process requirements, such as in semiconductor manufacturing, surface analysis, or certain material processing, the vacuum level needs to be rapidly reduced to 1E-2Pa to 1E-3Pa. Traditional vacuum pump solutions can achieve a certain vacuum level, but due to structural limitations, traditional vacuum pumps struggle to further extract the gas from the device to be evacuated, and are unable to meet the requirements for further reducing the vacuum level to 1E-2Pa to 1E-3Pa. To achieve the vacuum level requirement of 1E-2Pa to 1E-3Pa, the current common practice is to use a combination of a backing pump and a molecular pump. Although this configuration can achieve the required vacuum level, it has significant limitations: first, the cost of this combination is high, not only in terms of the initial purchase cost, but also in terms of subsequent maintenance and energy consumption costs; second, the entire process from starting the pump to achieving the required vacuum level takes a long time, which is particularly inconvenient in environments requiring rapid cycles or continuous production. Utility Model Content

[0004] In view of this, the utility model provides a rapid vacuum device, comprising an outer shell, a middle septum sleeve, an inner shell, an injection pipe and an exhaust pipe;

[0005] The inner cavity of the inner shell is an adsorption cavity, the middle septum is located in the outer shell, the inner shell is located in the middle septum, the inner cavity of the inner shell is an adsorption cavity, the cavity between the inner shell and the middle septum is a freezing cavity, and the cavity between the middle septum and the outer shell is an insulation cavity;

[0006] One end of the injection pipe is located outside the outer shell, and the other end extends into the outer shell and communicates with the freezing chamber. One end of the exhaust pipe is located outside the outer shell, and the other end passes through the outer shell and communicates with the adsorption chamber.

[0007] Adsorption material is arranged in the adsorption cavity.

[0008] Furthermore, a plurality of fixed columns are provided in the adsorption chamber, and the adsorption material is an activated carbon pressed plate, which is fixed on the fixed columns.

[0009] Furthermore, the fixing column is provided with an external thread and a locking nut, the adsorption material is provided with a mounting hole, the fixing column passes through the mounting hole, and the locking nut presses the adsorption material.

[0010] Furthermore, a limiting boss is provided on the fixing column.

[0011] Furthermore, the number of the fixing columns is four, and the four fixing columns are evenly arranged around the axis of the exhaust pipe.

[0012] Furthermore, the outer shell and the middle spacer sleeve are both rounded rectangular sleeves, and the heat insulation cavity surrounds the middle spacer sleeve.

[0013] Furthermore, one end portion of the middle spacer sleeve is a connecting end plate, the inner shell is provided with an open end, and the inner shell is connected to the connecting end plate.

[0014] Furthermore, a first connecting hole and a second connecting hole are provided on the outer shell, the exhaust pipe passes through the first connecting hole, the injection pipe passes through the second connecting hole, and the exhaust pipe and the injection pipe are fixed in the first connecting hole and the second connecting hole respectively.

[0015] Furthermore, the end of the exhaust pipe is fixed to the connecting end plate, and the exhaust pipe passes through the connecting end plate, so that the exhaust pipe is connected to the adsorption chamber.

[0016] Furthermore, the middle portion of the activated carbon pressed plate is concave, so that the middle portion of the activated carbon pressed plate forms a conical surface.

[0017] The beneficial effects of the quick vacuuming device of the utility model are:

[0018] (1) The vacuum pumping device includes an outer shell, a middle septum, an inner shell, an injection pipe and an exhaust pipe; the inner cavity of the inner shell is an adsorption chamber, the middle septum is located in the outer shell, the inner shell is located in the middle septum, the inner cavity of the inner shell is an adsorption chamber, the cavity between the inner shell and the middle septum is a freezing chamber, and the cavity between the middle septum and the outer shell is a heat-insulating chamber; an adsorption material is provided in the adsorption chamber. When the vacuum pumping device is used, it is connected to the device to be evacuated through the exhaust pipe, and then liquid nitrogen is injected into the freezing chamber through the injection pipe to quickly reduce the temperature in the adsorption chamber, so that the residual gas in the device to be evacuated flows to the adsorption chamber, and the moisture in the residual gas is liquefied and then absorbed by the adsorption material. In this way, the device to be evacuated can be quickly evacuated, and the vacuum degree inside it can reach the level of 1E-2Pa to 1E-3Pa, meeting the requirements of semiconductor manufacturing, surface analysis and material processing for rapid vacuuming.

[0019] (2) The heat-insulating cavity outside the freezing cavity of the vacuum device is in a closed state, and the heat-insulating cavity can maintain a vacuum state, which can prevent the low temperature in the freezing cavity from spreading to the outside and ensure the safety of its use.

[0020] (3) The device has a simple structure and does not require a power device. It can adapt to different process requirements and has strong applicability. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic cross-sectional view of a rapid vacuuming device according to an embodiment of the present invention;

[0022] Figure 2 This is a left side view of a rapid vacuuming device according to an embodiment of the present utility model;

[0023] Figure 3 This is a schematic structural diagram of the adsorption material of a rapid vacuuming device according to an embodiment of the present utility model.

[0024] In the figure: 1-outer shell, 11-insulation cavity, 2-middle spacer, 21-freezing cavity, 3-inner shell, 31-adsorption cavity, 32-fixing column, 33-connecting end plate, 4-exhaust pipe, 5-injection pipe, 6-adsorption material, 61-mounting hole. DETAILED DESCRIPTION

[0025] In order to make the purpose, technical solutions and advantages of the present invention more clear, the embodiments of the present invention will be further described below with reference to the accompanying drawings.

[0026] Please refer to Figures 1 to 3 A rapid vacuum pumping device includes an outer shell 1, a middle spacer sleeve 2, an inner shell 3, an injection pipe 5 and an exhaust pipe 4.

[0027] The outer shell 1 and the middle septum sleeve 2 are both closed rectangular sleeves with rounded corners, wherein the outer shell 1 is larger than the middle septum sleeve 2 , that is, the middle septum sleeve 2 is completely located in the outer shell 1 .

[0028] The internal cavity of the inner shell 3 is an adsorption cavity 31, the middle spacer sleeve 2 is located in the outer shell 1, the inner shell 3 is located in the middle spacer sleeve 2, the internal cavity of the inner shell 3 is an adsorption cavity 31, the cavity between the inner shell 3 and the middle spacer sleeve 2 is a freezing cavity 21, and the cavity between the middle spacer sleeve 2 and the outer shell 1 is an insulating cavity 11; the insulating cavity 11 surrounds the middle spacer sleeve 2.

[0029] One end of the injection pipe 5 is located outside the outer shell 1, and the other end extends into the outer shell 1 and communicates with the freezing chamber 21. One end of the exhaust pipe 4 is located outside the outer shell 1, and the other end passes through the outer shell 1 and communicates with the adsorption chamber 31.

[0030] The adsorption chamber 31 is provided with an adsorption material 6, and the freezing chamber 21 is used to inject liquid nitrogen through the injection pipe 5 to reduce the temperature in the adsorption chamber 31. The adsorption material 6 is used to absorb the liquid after the residual air is frozen and liquefied, thereby achieving the purpose of reducing the vacuum degree. The insulation chamber 11 is in a negative pressure or vacuum state to insulate the freezing chamber.

[0031] When the vacuuming device is in use, it is connected to the device to be evacuated through the vacuum pipe (the device to be evacuated is pre-evacuated to make its vacuum degree close to the vacuum degree of 1E-2Pa level, and the main water vapor in the air remaining in the device to be evacuated is at this time). Then, liquid nitrogen is injected into the freezing chamber through the injection pipe to quickly lower the temperature in the adsorption chamber, so that the residual gas in the device to be evacuated flows to the adsorption chamber, and the water in the residual gas is liquefied and then absorbed by the adsorption material. In this way, the vacuuming of the device to be evacuated can be quickly completed, and the vacuum degree inside it can be reduced to the level of 1E-2Pa to 1E-3Pa.

[0032] In a preferred embodiment, a plurality of fixing columns 32 are provided in the adsorption chamber 31, and the adsorption material 6 is a disc-shaped activated carbon pressed plate, which is fixed to the fixing columns 32. Specifically, the fixing columns 32 are provided with external threads and locking nuts, and the adsorption material 6 is provided with mounting holes 61. The fixing columns 32 pass through the mounting holes 61, and the locking nuts compress the adsorption material 6.

[0033] In a more preferred embodiment, there are four fixed columns 32, each fixed column 32 is provided with multiple locking nuts, and the four fixed columns 32 are evenly arranged around the axis of the exhaust pipe. The fixed column 32 is also provided with a limiting boss. There are multiple adsorption materials 6, and multiple adsorption materials are stacked along the fixed column 32, and adjacent adsorption materials are separated by locking nuts, which can increase the adsorption area of ​​the adsorption material. The middle part of all activated carbon pressed plates is recessed, so that the middle part of the activated carbon pressed plate forms a conical surface, which can further increase the adsorption area of ​​each adsorption material activated carbon pressed plate.

[0034] In another preferred embodiment, one end of the middle spacer sleeve 2 is a connecting end plate 33, the inner shell 3 is provided with an open end, and the inner shell 3 is connected to the connecting end plate 33. The outer shell 1 is provided with a first connecting hole and a second connecting hole, the exhaust pipe 4 passes through the first connecting hole, and the injection pipe 5 passes through the second connecting hole, and the exhaust pipe 4 and the injection pipe 5 are fixed in the first connecting hole and the second connecting hole, respectively. The end of the exhaust pipe 4 is fixed to the connecting end plate 33, and the exhaust pipe 4 passes through the connecting end plate 33, so that the exhaust pipe 4 is connected to the adsorption chamber 31. This structure is fixedly connected to the outer shell 1 and the middle spacer sleeve 2 through the injection pipe 5 and the exhaust pipe 4, and the middle spacer sleeve 2 and the inner shell 3 are connected as a whole, which can improve the structural strength of the entire device and improve its durability.

[0035] In another preferred embodiment, the injection tube 5 is a funnel structure with one end thick and the other end thin, which facilitates the injection of liquid nitrogen.

[0036] In this document, directional terms such as front, back, top, and bottom are defined based on the positions of components in the accompanying drawings and relative to each other, and are intended only for clarity and convenience in describing the technical solution. It should be understood that the use of these directional terms should not limit the scope of protection claimed in this application.

[0037] In the absence of conflict, the above embodiments and features in the embodiments may be combined with each other.

[0038] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A rapid vacuuming device, characterized in that: It includes an outer shell, a middle septum, an inner shell, an injection pipe and an exhaust pipe; The middle septum is located in the outer shell, the inner shell is located in the middle septum, the inner cavity of the inner shell is an adsorption cavity, the cavity between the inner shell and the middle septum is a freezing cavity, and the cavity between the middle septum and the outer shell is an insulation cavity; One end of the injection pipe is located outside the outer shell, and the other end extends into the outer shell and communicates with the freezing chamber. One end of the exhaust pipe is located outside the outer shell, and the other end passes through the outer shell and communicates with the adsorption chamber. Adsorption material is arranged in the adsorption cavity.

2. A rapid vacuuming device according to claim 1, characterized in that: A plurality of fixed columns are provided in the adsorption chamber, and the adsorption material is an activated carbon pressed plate, which is fixed on the fixed columns.

3. A rapid vacuuming device according to claim 2, characterized in that: The fixing column is provided with an external thread and a locking nut, the adsorption material is provided with a mounting hole, the fixing column passes through the mounting hole, and the locking nut presses the adsorption material.

4. A rapid vacuuming device according to claim 3, characterized in that: The fixing column is also provided with a limiting boss.

5. A rapid vacuuming device according to claim 4, characterized in that: There are four fixing columns, which are evenly arranged around the axis of the air extraction pipe.

6. A rapid vacuuming device according to claim 1, characterized in that: The outer shell and the middle spacer sleeve are both rounded rectangular sleeves, and the heat insulation cavity surrounds the middle spacer sleeve.

7. A rapid vacuuming device according to claim 1, characterized in that: One end portion of the middle spacer sleeve is a connecting end plate, the inner shell is provided with an open end, and the inner shell is connected to the connecting end plate.

8. A rapid vacuuming device according to claim 7, characterized in that: The outer shell is provided with a first connecting hole and a second connecting hole, the exhaust pipe passes through the first connecting hole, the injection pipe passes through the second connecting hole, and the exhaust pipe and the injection pipe are fixed in the first connecting hole and the second connecting hole respectively.

9. The rapid vacuuming device according to claim 7, characterized in that: The end of the exhaust pipe is fixed on the connecting end plate, and the exhaust pipe passes through the connecting end plate, so that the exhaust pipe is connected to the adsorption chamber.

10. A rapid vacuuming device according to claim 2, characterized in that: The middle part of the activated carbon pressed plate is concave, so that the middle part of the activated carbon pressed plate forms a conical surface.

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