Motion platform for high-vacuum atomic force microscope

Abstract

The utility model discloses a motion platform for a high-vacuum atomic force microscope, and the platform comprises a support module which is used for installing the atomic force microscope; the X-axis movement module comprises a U-shaped X-axis base, a U-shaped X-axis top cover and an X-axis linear driving assembly for driving the U-shaped X-axis top cover to reciprocate; the Y-axis movement module comprises a Y-axis top cover and a Y-axis linear driving assembly for driving the Y-axis top cover to reciprocate; the sample bearing table is used for placing a tested sample; first crossed roller guide rail sets which are matched with each other are arranged in a groove of the U-shaped X-axis base and at the bottom of the U-shaped X-axis top cover respectively so that the U-shaped X-axis top cover can reciprocate relative to the U-shaped X-axis base. And matched second crossed roller guide rail groups are respectively arranged in the U-shaped X-axis top cover groove and at the bottom of the Y-axis top cover, so that the Y-axis top cover reciprocates relative to the U-shaped X-axis top cover. The utility model has the advantages of large running stroke and high precision, and can be applied to a vacuum test system.

Description

Technical Field

[0001] The utility model relates to the field of ultra-precision measurement technology, and more specifically, to a motion platform for a high vacuum atomic force microscope. Background Art

[0002] An atomic force microscope (AFM) utilizes a microcantilever to sense and amplify the forces between a fine probe on the cantilever and atoms on the surface of the sample being tested to achieve detection. AFM has nanometer-scale resolution and is widely used in a variety of disciplines, including solid-state physics, semiconductor science and technology, molecular engineering, polymer chemistry and physics, surface chemistry, molecular biology, cell biology, and medicine. In a natural environment, the presence of air damping, dust, and the like adversely affects AFM measurements. A vacuum environment can effectively avoid these problems, improving the sensitivity and accuracy of AFM measurements while also reducing test noise. Most existing AFM testing processes require manual adjustment of the detection device. For example, the invention patent with publication number CN118311300A discloses an AFM comprising a manual module fixedly mounted on a manual rotation stage. The manual module comprises a first L-shaped adapter fixedly mounted on the manual rotation stage and an XY two-axis precision manual adjustment mount fixedly mounted thereon. Manual adjustment of the manual module is required during the AFM test, making it unsuitable for use in a vacuum system.

[0003] In order to solve the problem of adaptability between atomic force microscopes and vacuum systems, a variety of motion platforms for vacuum atomic force microscopes have emerged. For example, the utility model patent with the announcement number CN217385552U discloses an atomic force microscope shutdown system based on probe movement scanning, which includes a base, an X-axis drive mechanism, a Y-axis drive mechanism, and a Z-axis drive mechanism; another example is the utility model patent with the announcement number CN217966176U, which discloses an online tool wear measurement system based on an atomic force microscope, which includes an atomic force microscope assembly, an X-axis motion axis, a Y-axis motion axis, a Z-axis motion axis, and a base. The above-mentioned motion platforms for vacuum atomic force microscopes generally have the defects of limited operating range and low precision, which greatly affects the measurement accuracy of the atomic force microscope and limits the application range of the atomic force microscope. Utility Model Content

[0004] An object of the present invention is to solve at least the above problems and to provide at least the advantages to be described below.

[0005] Another object of the present invention is to provide a motion platform for a high vacuum atomic force microscope, which has a large operating stroke and high precision and can be applied to a vacuum testing system.

[0006] In order to achieve these purposes and other advantages according to the present invention, a motion platform for a high vacuum atomic force microscope is provided, comprising:

[0007] A support module having at least one mounting surface for mounting an atomic force microscope so that the atomic force microscope can measure a sample under the support module;

[0008] An X-axis motion module is provided below the atomic force microscope and includes a U-shaped X-axis base, a U-shaped X-axis top cover provided on the U-shaped X-axis base and reciprocating along the X-axis direction relative to the U-shaped X-axis base, and an X-axis linear drive assembly driving the U-shaped X-axis top cover to reciprocate;

[0009] The Y-axis motion module includes a Y-axis top cover provided on a U-shaped X-axis top cover and reciprocating relative to the U-shaped X-axis top cover along the Y-axis direction, and a Y-axis linear drive assembly driving the Y-axis top cover to reciprocate;

[0010] A sample carrying platform, which is arranged on the Y-axis top cover to place the sample to be tested;

[0011] Among them, a matching first cross roller guide group is respectively provided in the groove of the U-shaped X-axis base and the bottom of the U-shaped X-axis top cover to realize the reciprocating motion of the U-shaped X-axis top cover relative to the U-shaped X-axis base, and a matching second cross roller guide group is respectively provided in the groove of the U-shaped X-axis top cover and the bottom of the Y-axis top cover to realize the reciprocating motion of the Y-axis top cover relative to the U-shaped X-axis top cover.

[0012] Preferably, the support module includes:

[0013] A base, used for setting the U-shaped X-axis base;

[0014] A vertical bracket, with one side close to the base vertically arranged on the base, and a side surface of the vertical bracket is a mounting surface for mounting the atomic force microscope.

[0015] Preferably, the motion platform for the high vacuum atomic force microscope further comprises a vacuum cover, which is arranged on the base and covers the vertical support, the atomic force microscope, the X-axis motion module and the Y-axis motion module.

[0016] Preferably, the X-axis linear drive assembly includes:

[0017] An X-axis linear drive motor, wherein the mover is arranged on the U-shaped X-axis base and the stator is arranged on the bottom of the U-shaped X-axis top cover;

[0018] X-axis grating ruler, which is set at the bottom of the U-shaped X-axis top cover;

[0019] An X-axis reading head is arranged on the U-shaped X-axis base through an X-axis reading head mounting seat, and the X-axis reading head is positionally adapted to the X-axis grating ruler.

[0020] Preferably, the Y-axis linear drive assembly includes:

[0021] A Y-axis linear drive motor, the mover of which is arranged on the U-shaped X-axis top cover and the stator is arranged on the bottom of the Y-axis top cover;

[0022] Y-axis grating ruler, which is set at the bottom of the Y-axis top cover;

[0023] The Y-axis reading head is arranged on the U-shaped X-axis top cover through a Y-axis reading head mounting seat, and the Y-axis reading head is adapted to the position of the Y-axis grating ruler.

[0024] Preferably, the first cross roller guide group and the second cross roller guide group both include an outer guide rail and an inner guide rail, wherein the outer guide rail and the inner guide rail of the first cross roller guide group are respectively arranged in the U-shaped X-axis base groove and the bottom of the U-shaped X-axis top cover; the outer guide rail and the inner guide rail of the second cross roller guide group are respectively arranged in the U-shaped X-axis top cover groove and the bottom of the Y-axis top cover.

[0025] Preferably, the motion platform for the high vacuum atomic force microscope also includes a pair of first buffer assemblies arranged between the U-shaped X-axis base and the U-shaped X-axis top cover, and a pair of second buffer assemblies arranged between the U-shaped X-axis top cover and the Y-axis top cover; wherein, the pair of first buffer assemblies include two first buffer seats arranged at both ends of the U-shaped X-axis base groove and a first anti-collision block arranged at the bottom of the U-shaped X-axis top cover and adapted to the positions of the two first buffer seats; the pair of second buffer assemblies include two second buffer seats arranged at both ends of the U-shaped X-axis top cover groove and a second anti-collision block arranged at the bottom of the Y-axis top cover and adapted to the positions of the two second buffer seats.

[0026] Preferably, the motion platform for high vacuum atomic force microscope further comprises a Y-axis junction box including a cover, which is arranged on a side of the U-shaped X-axis top cover parallel to the Y-axis.

[0027] Preferably, the motion platform for the high vacuum atomic force microscope also includes a pair of X-axis baffles and a pair of Y-axis baffles, wherein the pair of X-axis baffles are arranged at the two ends of the U-shaped X-axis top cover parallel to the Y-axis, and the pair of Y-axis baffles are arranged at the two ends of the Y-axis top cover parallel to the X-axis.

[0028] The utility model has at least the following beneficial effects:

[0029] First, the motion platform for a high vacuum atomic force microscope provided by the present invention includes a support module, an X-axis motion module, a Y-axis motion module, and a sample carrier. The support module is used to install the atomic force microscope, the X-axis motion module, and the Y-axis motion module. The X-axis motion module is used to control the reciprocating motion of the sample carrier along the X-axis direction, and the Y-axis motion module is used to control the reciprocating motion of the sample along the Y-axis direction. The X-axis motion module and the Y-axis motion module both use a cross roller guide (guide support) in conjunction with a linear drive motor (drive), which expands the operating range of the sample carrier and improves the control of the X-axis and Y-axis motion precision.

[0030] Secondly, the upper surfaces of the U-shaped X-axis base and the U-shaped X-axis top cover in the motion platform for a high vacuum atomic force microscope provided by the present invention are both groove-shaped, wherein the bottom of the U-shaped X-axis top cover is just embedded in the groove of the U-shaped X-axis base, and the bottom of the Y-axis top cover is just embedded in the groove of the U-shaped X-axis top cover. The U-shaped X-axis base, the U-shaped X-axis top cover and the Y-axis top cover form a three-piece structure, which greatly reduces the overall height of the motion modules (X-axis motion module and Y-axis motion module), reduces the influence of Abbe error, and improves the overall reliability of the motion platform for a high vacuum atomic force microscope;

[0031] Third, in the motion platform for a high vacuum atomic force microscope provided by the present invention, the connections between the U-shaped X-axis base and the outer guide rail of the first cross roller guide group, the U-shaped X-axis top cover and the inner guide rail of the first cross roller guide group, the U-shaped X-axis top cover and the outer guide rail of the second cross roller guide group, and the Y-axis top cover and the inner guide rail of the second cross roller guide group are all fixed with screws, and the fixing screws are machined with through holes along their axial directions to ensure that there is no enclosed space in the overall structure of the motion platform for a high vacuum atomic force microscope, thereby ensuring the long-term cleanliness of the vacuum environment;

[0032] Fourthly, the X-axis linear drive motor and the Y-axis linear drive motor in the motion platform for the high vacuum atomic force microscope provided by the present invention are both arranged in a manner that the mover is fixed and the stator moves, and the grating-reading head feedback system is both arranged in a manner that the reading head is fixed and the grating scale moves, thereby ensuring that the cables of the motion platform for the high vacuum atomic force microscope are fixed and stationary, thereby reducing the management of cables in the entire system.

[0033] Other advantages, objectives and features of the present invention will be reflected in part through the following description, and in part will be understood by those skilled in the art through research and practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 This is a schematic diagram of the structure of a motion platform for a high vacuum atomic force microscope described in one technical solution of the utility model;

[0035] Figure 2 This is a schematic structural diagram of the motion module (X-axis and Y-axis) in another technical solution of the present utility model;

[0036] Figure 3 This is a bottom view schematic diagram of the motion module (X-axis and Y-axis) in another technical solution of the present utility model;

[0037] Figure 4 This is a first side view of the motion module (X-axis and Y-axis) in another technical solution of the present invention;

[0038] Figure 5 This is a cross-sectional schematic diagram of point AA in another technical solution of the present utility model;

[0039] Figure 6 This is a second side view of the motion module (X-axis and Y-axis) in another technical solution of the present invention;

[0040] Figure 7 It is a cross-sectional schematic diagram of point BB in another technical solution of the utility model. DETAILED DESCRIPTION

[0041] The present invention will be described in further detail below in conjunction with the accompanying drawings so that those skilled in the art can implement the invention with reference to the description.

[0042] It should be understood that terms such as “having”, “including” and “comprising” used herein do not preclude the existence or addition of one or more other elements or combinations thereof.

[0043] It should be noted that the experimental methods described in the following embodiments are conventional methods unless otherwise specified, and the reagents and materials are commercially available unless otherwise specified. In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "set" should be understood in a broad sense. For example, they can be fixedly connected or set, or detachably connected or set, or integrally connected or set. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances. The directions or positional relationships indicated by the terms "transverse", "longitudinal", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. are based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention.

[0044] like Figures 1 to 7As shown, the utility model provides a motion platform for a high vacuum atomic force microscope 3, comprising:

[0045] A support module having at least one mounting surface for mounting the atomic force microscope 3 so that the atomic force microscope 3 can measure a sample under the support module;

[0046] An X-axis motion module is provided below the atomic force microscope 3 and includes a U-shaped X-axis base 20, a U-shaped X-axis top cover 21 provided on the U-shaped X-axis base 20 and reciprocating along the X-axis direction relative to the U-shaped X-axis base 20, and an X-axis linear drive assembly driving the U-shaped X-axis top cover 21 to reciprocate;

[0047] The Y-axis motion module includes a Y-axis cover 5 that is disposed on the U-shaped X-axis cover 21 and reciprocates along the Y-axis direction relative to the U-shaped X-axis cover 21, and a Y-axis linear drive assembly that drives the Y-axis cover 5 to reciprocate;

[0048] A sample carrying platform 4, which is arranged on the Y-axis top cover 5 to place the sample to be tested;

[0049] Among them, a matching first cross roller guide group is respectively provided in the groove of the U-shaped X-axis base and at the bottom of the U-shaped X-axis top cover 21 to realize the reciprocating motion of the U-shaped X-axis top cover 21 relative to the U-shaped X-axis base 20, and a matching second cross roller guide group is respectively provided in the groove of the U-shaped X-axis top cover 21 and at the bottom of the Y-axis top cover 5 to realize the reciprocating motion of the Y-axis top cover 5 relative to the U-shaped X-axis top cover 21.

[0050] In the above technical solution, the motion platform for the high vacuum atomic force microscope 3 includes a bracket module, a motion module and a sample carrier 4, wherein the bracket module is used to install the atomic force microscope 3 and the motion module, and the X-axis motion module and the Y-axis motion module are formed as a whole to form a motion module, and the motion module includes an X-axis motion module and a Y-axis motion module arranged in sequence from bottom to top, the X-axis motion module is used to realize the reciprocating motion of the sample carrier 4 along the X-axis direction, and the Y-axis motion module is used to realize the reciprocating motion of the sample carrier 4 along the Y-axis direction. In terms of the installation position, the atomic force microscope 3 is located above the motion module, and the test direction of the atomic force microscope 3 is set downward, so that the atomic force microscope 3 tests the test sample set below it, and the sample carrier 4 is installed on the motion module and the test sample is set on the sample carrier 4. As the motion module moves, the test sample on the sample carrier 4 moves to the test area of ​​the atomic force microscope 3. The atomic force microscope 3 is a prior art, and this application does not elaborate on its specific structure, test principle, etc.

[0051] In the above technical solution, the bracket module is made of aviation aluminum alloy material, and the aviation aluminum alloy material undergoes multiple high and low temperature treatments to ensure that no substance in the bracket module evaporates into the vacuum system to pollute the high vacuum test environment. The X-axis motion module includes a U-shaped X-axis base 20, a U-shaped X-axis top cover 21 and an X-axis linear drive assembly which are arranged in sequence from bottom to top. The upper parts of the U-shaped X-axis base 20 and the U-shaped X-axis top cover 21 are U-shaped, that is, the top middle parts of the U-shaped X-axis base 20 and the U-shaped X-axis top cover 21 have a groove. The U-shaped X-axis top cover 21 and the U-shaped X-axis base are connected by a first cross roller guide group, so that the U-shaped X-axis top cover 21 reciprocates along the X-axis direction relative to the U-shaped X-axis base 20. The X-axis linear drive assembly drives the U-shaped X-axis top cover 21 to reciprocate along the X-axis direction relative to the U-shaped X-axis base 20. The U-shaped X-axis top cover 21 is connected to the Y-axis top cover 5 by a second cross roller guide group, so that the Y-axis top cover 5 reciprocates along the Y-axis direction relative to the U-shaped X-axis top cover 21. The Y-axis linear drive assembly drives the Y The axis top cover reciprocates along the Y-axis direction relative to the U-shaped X-axis top cover 21; the top of the Y-axis top cover 5 is a flat surface, the sample carrier 4 is set on the Y-axis top cover 5, and the sample to be tested is placed on the sample carrier 4.

[0052] In the above technical solution, the upper surfaces of the U-shaped X-axis base 20 and the U-shaped X-axis top cover 21 are both groove-shaped, wherein the bottom of the U-shaped X-axis top cover 21 is just embedded in the groove of the U-shaped X-axis base 20, and the bottom of the Y-axis top cover 5 is just embedded in the groove of the U-shaped X-axis top cover 21. The U-shaped X-axis base 20, the U-shaped X-axis top cover 21 and the Y-axis top cover 5 form a three-piece structure, which greatly reduces the overall height of the motion module (X-axis motion module and Y-axis motion module), reduces the influence of Abbe error, and improves the overall reliability of the motion platform for the high vacuum atomic force microscope 3.

[0053] like Figure 1 As shown, in one of the technical solutions, the bracket module includes:

[0054] Base 2, used for setting the U-shaped X-axis base 20;

[0055] The vertical bracket 1 has a side close to the base 2 vertically arranged on the base 2 , and the side surface of the vertical bracket 1 is a mounting surface for mounting the atomic force microscope 3 .

[0056] In the above technical solution, the bracket module includes a base 2 and a vertical bracket 1 arranged on one side of the base 2. The base 2 can be set on the test table, the X-axis motion module and the Y-axis motion module are set on the base 2, the vertical bracket 1 is vertically arranged on the base 2, and the vertical bracket 1 is arranged on one side of the base 2 to facilitate setting a high vacuum environment on the base 2. The atomic force microscope 3 is arranged on the vertical bracket 1, and the atomic force microscope 3 is located above the X-axis motion module.

[0057] like Figure 1 As shown, in one of the technical solutions, the motion platform for the high vacuum atomic force microscope 3 also includes a vacuum cover, which is arranged on the base 2 and covers the vertical support 1, the atomic force microscope 3, the X-axis motion module and the Y-axis motion module. Figure 1 The vacuum cover is not shown in the figure. The vacuum cover is provided with air holes for connecting to a vacuum pump through an air pipe to create a high vacuum environment in the vacuum cover to improve the accuracy of the atomic force microscope 3 test.

[0058] like Figures 2 to 7 As shown, in one of the technical solutions, the X-axis linear drive assembly includes:

[0059] An X-axis linear drive motor, whose mover 23 is arranged on the U-shaped X-axis base 20 and the stator 22 is arranged at the bottom of the U-shaped X-axis top cover 21;

[0060] An X-axis grating ruler 24 is provided at the bottom of the U-shaped X-axis top cover 21;

[0061] The X-axis reading head 25 is arranged on the U-shaped X-axis base 20 through the X-axis reading head mounting seat 26, and the X-axis reading head is positionally adapted to the X-axis grating scale.

[0062] In the above technical solution, the X-axis linear drive assembly includes an X-axis linear drive motor and an X-axis grating scale-reading head feedback system. The mover of the X-axis linear drive motor is arranged on the U-shaped X-axis base 20, and the stator is arranged at the bottom of the U-shaped X-axis top cover 21. The X-axis linear drive motor is arranged in a manner that the mover is fixed and the stator moves. The X-axis grating scale and the X-axis reading head are respectively arranged on the U-shaped X-axis top cover 21 and the U-shaped X-axis base 20. The X-axis grating-reading head feedback system is arranged in a manner that the reading head is fixed and the grating scale moves, ensuring that the motion platform cable used for the high vacuum atomic force microscope 3 is fixed and stationary, thereby reducing the management of cables in the entire system.

[0063] like Figures 2 to 7 As shown, in one of the technical solutions, the Y-axis linear drive assembly includes:

[0064] Y-axis linear drive motor, whose mover 15 is arranged on the U-shaped X-axis top cover 21 and the stator 14 is arranged at the bottom of the Y-axis top cover 5;

[0065] A Y-axis grating ruler 16 is provided at the bottom of the Y-axis top cover 5;

[0066] The Y-axis reading head 17 is arranged on the U-shaped X-axis top cover 21 through the Y-axis reading head mounting seat 18, and the Y-axis reading head is adapted to the position of the Y-axis grating scale.

[0067] In the above technical solution, the Y-axis linear drive assembly is similar to the X-axis linear drive assembly, and the Y-axis linear drive assembly includes a Y-axis linear drive motor and a Y-axis grating scale-reading head feedback system. The mover of the Y-axis linear drive motor is arranged on the U-shaped X-axis top cover 21, and the stator is arranged at the bottom of the Y-axis top cover 5. The Y-axis linear drive motor is arranged in a manner that the mover is fixed and the stator moves. The Y-axis grating scale and the Y-axis reading head are respectively arranged on the Y-axis top cover 5 and the U-shaped X-axis top cover 21. The Y-axis grating-reading head feedback systems are arranged in a manner that the reading head is fixed and the grating scale moves, ensuring that the motion platform cable used for the high vacuum atomic force microscope 3 is fixed, thereby reducing the management of cables in the entire system.

[0068] like Figure 5 and Figure 7 As shown, in one of the technical solutions, the first cross roller guide group and the second cross roller guide group both include an outer guide rail and an inner guide rail, wherein the outer guide rail 27 and the inner guide rail of the first cross roller guide group are respectively arranged in the groove of the U-shaped X-axis base and the bottom of the U-shaped X-axis top cover 21; the outer guide rail 19 and the inner guide rail of the second cross roller guide group are respectively arranged in the groove of the U-shaped X-axis top cover 21 and the bottom of the Y-axis top cover 5. When the first cross roller guide group is installed in the groove of the U-shaped X-axis base 20, the outer guide rail of the first cross roller guide group is tightly arranged on one side of the groove of the U-shaped X-axis base 20, and an adjustment gap is left between the outer guide rail of the first cross roller guide group and the other side of the groove of the U-shaped X-axis base 20. A bolt hole is provided on the side of the U-shaped X-axis base 20 close to the adjustment gap. The installation accuracy of the first cross roller guide group is adjusted by screwing in or out the bolt installed in the bolt hole. The outer guide rail of the second cross roller guide group adopts the same structure and method to adjust its installation accuracy.

[0069] In one of the technical solutions, the motion platform for the high vacuum atomic force microscope 3 also includes a pair of first buffer assemblies arranged between the U-shaped X-axis base 20 and the U-shaped X-axis top cover 21, and a pair of second buffer assemblies arranged between the U-shaped X-axis top cover 21 and the Y-axis top cover 5; wherein, the pair of first buffer assemblies include two first buffer seats 11 arranged at both ends of the groove of the U-shaped X-axis base 20 and a first anti-collision block 12 arranged at the bottom of the U-shaped X-axis top cover 21 and adapted to the positions of the two first buffer seats 11; a pair of second buffer assemblies include two second buffer seats arranged at both ends of the groove of the U-shaped X-axis top cover 21 and a second anti-collision block arranged at the bottom of the Y-axis top cover 5 and adapted to the positions of the two second buffer seats, the first buffer assembly and the second buffer assembly serve as mechanical limits for the movement of the U-shaped X-axis top cover 21 and the Y-axis top cover 5, and control the movement range of the U-shaped X-axis top cover 21 and the Y-axis top cover 5.

[0070] like Figure 2 and Figure 3 As shown in one of the technical solutions, the motion platform for the high vacuum atomic force microscope 3 also includes a Y-axis junction box 7, which is arranged on one side of the U-shaped X-axis top cover 21 parallel to the Y-axis, for passing the Y-axis linear drive motor cable and the Y-axis reading head cable. The figure numeral 8 is the top cover of the Y-axis junction box 7, and the U-shaped X-axis base 20 is provided with an X-axis junction box 9, for passing the X-axis linear drive motor cable and the X-axis reading head cable. Figure 3 Also shown is an X-axis reading head cover 13, which is fixed to the bottom of the U-shaped X-axis base 20 by bolts to prevent dust.

[0071] In one of the technical solutions, the motion platform for the high vacuum atomic force microscope 3 also includes a pair of X-axis baffles 6 and a pair of Y-axis baffles 10, wherein the pair of X-axis baffles 6 are arranged at the two ends of the U-shaped X-axis top cover 21 parallel to the Y-axis, and the pair of Y-axis baffles 10 are arranged at the two ends of the Y-axis top cover 5 parallel to the X-axis to play a dust-proof role.

[0072] The number of devices and processing scales described here are used to simplify the description of the present invention. Applications, modifications and variations of the motion platform for high vacuum atomic force microscope 3 of the present invention are obvious to those skilled in the art.

[0073] Although the embodiments of the present invention have been disclosed above, they are not limited to the applications listed in the description and implementation methods. They can be fully applied to various fields suitable for the present invention. For those familiar with this field, additional modifications can be easily implemented. Therefore, without departing from the general concept defined by the claims and the scope of equivalents, the present invention is not limited to the specific details and illustrations shown and described herein.

Claims

1. A motion platform for a high vacuum atomic force microscope, characterized in that: include: A support module having at least one mounting surface for mounting an atomic force microscope so that the atomic force microscope can measure a sample under the support module; An X-axis motion module is provided below the atomic force microscope and includes a U-shaped X-axis base, a U-shaped X-axis top cover provided on the U-shaped X-axis base and reciprocating along the X-axis direction relative to the U-shaped X-axis base, and an X-axis linear drive assembly driving the U-shaped X-axis top cover to reciprocate; The Y-axis motion module includes a Y-axis top cover provided on a U-shaped X-axis top cover and reciprocating relative to the U-shaped X-axis top cover along the Y-axis direction, and a Y-axis linear drive assembly driving the Y-axis top cover to reciprocate; A sample carrying platform, which is arranged on the Y-axis top cover to place the sample to be tested; Among them, a matching first cross roller guide group is respectively provided in the groove of the U-shaped X-axis base and the bottom of the U-shaped X-axis top cover to realize the reciprocating motion of the U-shaped X-axis top cover relative to the U-shaped X-axis base, and a matching second cross roller guide group is respectively provided in the groove of the U-shaped X-axis top cover and the bottom of the Y-axis top cover to realize the reciprocating motion of the Y-axis top cover relative to the U-shaped X-axis top cover.

2. The motion platform for a high vacuum atomic force microscope according to claim 1, wherein: The support module includes: A base, used for setting the U-shaped X-axis base; A vertical bracket, with one side close to the base vertically arranged on the base, and a side surface of the vertical bracket is a mounting surface for mounting the atomic force microscope.

3. The motion platform for a high vacuum atomic force microscope according to claim 2, wherein: The invention also includes a vacuum cover, which is arranged on the base and covers the vertical support, the atomic force microscope, the X-axis motion module and the Y-axis motion module.

4. The motion platform for a high vacuum atomic force microscope according to claim 1, wherein: The X-axis linear drive assembly includes: An X-axis linear drive motor, wherein the mover is arranged on the U-shaped X-axis base and the stator is arranged on the bottom of the U-shaped X-axis top cover; X-axis grating ruler, which is set at the bottom of the U-shaped X-axis top cover; An X-axis reading head is arranged on the U-shaped X-axis base through an X-axis reading head mounting seat, and the X-axis reading head is positionally adapted to the X-axis grating ruler.

5. The motion platform for a high vacuum atomic force microscope according to claim 4, characterized in that: The Y-axis linear drive assembly includes: A Y-axis linear drive motor, the mover of which is arranged on the U-shaped X-axis top cover and the stator is arranged on the bottom of the Y-axis top cover; Y-axis grating ruler, which is set at the bottom of the Y-axis top cover; The Y-axis reading head is arranged on the U-shaped X-axis top cover through a Y-axis reading head mounting seat, and the Y-axis reading head is adapted to the position of the Y-axis grating ruler.

6. The motion platform for a high vacuum atomic force microscope according to claim 1, wherein: The first cross roller guide group and the second cross roller guide group both include an outer guide rail and an inner guide rail, wherein the outer guide rail and the inner guide rail of the first cross roller guide group are respectively arranged in the U-shaped X-axis base groove and the bottom of the U-shaped X-axis top cover; the outer guide rail and the inner guide rail of the second cross roller guide group are respectively arranged in the U-shaped X-axis top cover groove and the bottom of the Y-axis top cover.

7. The motion platform for a high vacuum atomic force microscope according to claim 1, wherein: It also includes a pair of first buffer assemblies arranged between the U-shaped X-axis base and the U-shaped X-axis top cover, and a pair of second buffer assemblies arranged between the U-shaped X-axis top cover and the Y-axis top cover; wherein, the pair of first buffer assemblies include two first buffer seats arranged at both ends of the U-shaped X-axis base groove and a first anti-collision block arranged at the bottom of the U-shaped X-axis top cover and adapted to the positions of the two first buffer seats; the pair of second buffer assemblies include two second buffer seats arranged at both ends of the U-shaped X-axis top cover groove and a second anti-collision block arranged at the bottom of the Y-axis top cover and adapted to the positions of the two second buffer seats.

8. The motion platform for a high vacuum atomic force microscope according to claim 1, wherein: It also includes a Y-axis junction box with a cover, which is arranged on one side of the U-shaped X-axis top cover parallel to the Y-axis.

9. The motion platform for a high vacuum atomic force microscope according to claim 1, wherein: It also includes a pair of X-axis baffles and a pair of Y-axis baffles, wherein the pair of X-axis baffles are arranged at the two ends of the U-shaped X-axis top cover parallel to the Y-axis, and the pair of Y-axis baffles are arranged at the two ends of the Y-axis top cover parallel to the X-axis.

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