Anti-collision needle device and semiconductor equipment

Abstract

The utility model provides an anti-collision needle device and semiconductor equipment. The anti-collision needle device is provided with a fixed probe station, a movable probe station, and an ejection mechanism and a connecting mechanism which are arranged between the fixed probe station and the movable probe station; a chuck for bearing a wafer is arranged below the fixed probe station, and a probe card for detecting the wafer is arranged on the movable probe station; the connecting mechanism is used for maintaining or releasing the fixed connection between the movable probe station and the fixed probe station; and the ejection mechanism is used for controlling the movable probe station to move so as to drive the probe card to be far away from the chuck when the fixed connection between the movable probe station and the fixed probe station is released. The fixed probe station and the movable probe station are utilized to form the separated probe station, and the connection structure and the ejection mechanism are matched with each other, so that the fixed connection between the movable probe station and the fixed probe station can be released in time, the movable probe station moves to drive the probe card to be far away from the chuck, the probe card is protected, and the occurrence of needle collision is avoided.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor equipment, in particular to an anti-collision pin device and semiconductor equipment. Background Art

[0002] In the semiconductor manufacturing industry, wafer acceptance testing (WAT), also known as process control monitoring (PCM), is a critical step in ensuring product quality and stability. This process, performed after tapeout and before quality inspection, measures the electrical parameters of specific test structures on the wafer to assess the quality and stability of the semiconductor manufacturing process and determine whether the wafer meets the electrical specifications of the process technology platform.

[0003] The implementation of WAT testing relies heavily on the coordinated operation of the tester, probe stage, and probe card. As the platform for wafer positioning and testing, the probe stage's stability and accuracy directly impact the accuracy of test results. The performance of the probe card, the interface between the tester and the wafer, is equally crucial. The probe card not only transmits signals from the tester to the wafer but also transmits test information back to the tester to generate accurate test data.

[0004] However, on the one hand, Figure 1 and 2 As shown, a conventional probe card 2 is fixed to a probe station 1, which has inherent limitations. Furthermore, during actual testing or calibration, the wafer-carrying chuck 3 (called the "chuck") must move up and down. Operator error can cause the chuck to move excessively, potentially colliding with the probe card fixed to the probe station. This collision not only causes irreversible damage to the probes, such as bending or wear, but can also affect the stability of the entire test system and the accuracy of test results.

[0005] Therefore, there is an urgent need for an anti-collision pin device and a semiconductor device to improve the above-mentioned problem. Utility Model Content

[0006] The purpose of the utility model is to provide an anti-collision needle device and a semiconductor device, which can protect a probe card and avoid the occurrence of a collision needle.

[0007] In a first aspect, the utility model provides an anti-collision needle device, comprising a fixed probe station, a movable probe station, and an ejection mechanism and a connection mechanism arranged between the fixed probe station and the movable probe station;

[0008] A chuck for carrying a wafer is provided below the fixed probe station, and a probe card for detecting the wafer is provided on the movable probe station;

[0009] The connecting mechanism is used to maintain or release the fixed connection between the movable probe station and the fixed probe station;

[0010] The ejection mechanism is used to control the movable probe station to move so as to drive the probe card away from the chuck when the fixed connection between the movable probe station and the fixed probe station is released.

[0011] The beneficial effects of the present invention are as follows: by setting a fixed probe station, a movable probe station, and an ejection mechanism and a connecting mechanism arranged between the fixed probe station and the movable probe station; a chuck for carrying wafers is provided below the fixed probe station, and a probe card for detecting the wafer is provided on the movable probe station; the connecting mechanism is used to maintain or release the fixed connection between the movable probe station and the fixed probe station; the ejection mechanism is used to control the movable probe station to move so as to drive the probe card away from the chuck when the fixed connection between the movable probe station and the fixed probe station is released. By using a separate probe station composed of a fixed probe station and a movable probe station, and by using the connecting structure and the ejection mechanism to cooperate with each other, the fixed connection between the movable probe station and the fixed probe station can be released in time, so that the movable probe station moves to drive the probe card away from the chuck, thereby protecting the probe card and avoiding the occurrence of needle collision.

[0012] Optionally, the ejection mechanism is a spring ejection mechanism, a hydraulic ejection mechanism, an electric ejection mechanism or an electromagnetic ejection mechanism. The beneficial effect is that the corresponding ejection mechanism can be selected according to the actual application scenario, and the application range is wide.

[0013] Optionally, a first opening is provided in the middle of the fixed probe station, and a groove structure is provided on the sidewall around the first opening to accommodate the movable probe station; a second opening is provided in the middle of the movable probe station, and the probe card is fixedly installed at the second opening;

[0014] In the vertical direction, the sidewall of the groove structure is in contact with the outer sidewall of the movable probe station;

[0015] The connecting mechanism is used to limit the relative position of the side wall of the groove structure and the outer side wall of the movable probe station in the vertical direction;

[0016] In the horizontal direction, the top surface of the groove structure is in contact with the bottom surface of the movable probe station;

[0017] The ejection mechanism is disposed between the top surface of the slot structure and the bottom surface of the movable probe stage, and is used to control the vertical movement of the movable probe stage to drive the probe card away from the chuck. The beneficial effect is that the addition of the slot structure not only improves the stability of the connection between the movable probe stage and the fixed probe stage, but also ensures the accuracy of the moving direction of the movable probe stage during ejection, thereby protecting the probe card on the movable probe stage to a certain extent.

[0018] Optionally, when the ejection mechanism is a spring-type ejection mechanism, the ejection mechanism includes a positioning column and a first spring;

[0019] One end of the positioning post is fixedly arranged on the top surface of the slot structure, and the first spring is sleeved on the positioning post;

[0020] The bottom surface of the movable probe station is provided with a positioning groove. When the other end of the positioning post is inserted into the positioning groove, the fixed probe station and the movable probe station squeeze each other, compressing the first spring. This has the beneficial effect of forming a spring-type ejection mechanism by providing an ejection mechanism including the positioning post and the first spring. This not only achieves precise positioning and stable support, but also has a simple structure and low cost.

[0021] Optionally, the connecting mechanism includes a magnetic snap rod, a second spring and an electromagnet;

[0022] A first hollow area is provided inside the fixed probe station, the magnetic buckle rod, the second spring and the electromagnet are all arranged in the first hollow area, and the electromagnet is arranged away from the movable probe station;

[0023] One end of the magnetic buckle rod is arranged close to the electromagnet, and the second spring is sleeved on one end of the magnetic buckle rod, and a limit block for limiting the movement of the second spring is provided in the middle of the magnetic buckle rod;

[0024] The electromagnet is used to attract the magnetic buckle rod to move toward the electromagnet after being energized, and squeeze the second spring to compress it, so as to release the fixed connection between the movable probe station and the fixed probe station;

[0025] After the electromagnet is powered off, the second spring drives the other end of the magnetic latch rod to penetrate the side wall of the slot structure and then insert into the first limiting hole on the outer wall of the movable probe station to maintain the fixed connection between the movable probe station and the fixed probe station. The beneficial effect is that by utilizing the cooperation between the magnetic latch rod, the second spring and the electromagnet, not only can the movable probe station be quickly released, but also the reliability and stability of the connection between the movable probe station and the fixed probe station can be achieved. Moreover, the electrically controlled release method has a quick response and is easy to operate.

[0026] Optionally, the connecting mechanism includes a magnetic snap rod, a first spring and an electromagnet;

[0027] A second hollow area is provided inside the movable probe station, the magnetic buckle rod, the second spring and the electromagnet are all arranged in the second hollow area, and the electromagnet is arranged away from the fixed probe station;

[0028] One end of the magnetic buckle rod is arranged close to the electromagnet, and the second spring is sleeved on one end of the magnetic buckle rod, and a limit block for limiting the movement of the second spring is provided in the middle of the magnetic buckle rod;

[0029] The electromagnet is used to attract the magnetic buckle rod to move toward the electromagnet after being energized, and squeeze the second spring to compress it, so as to release the fixed connection between the movable probe station and the fixed probe station;

[0030] After the electromagnet is powered off, the second spring drives the other end of the magnetic snap rod to penetrate the outer wall of the movable probe station and then insert into the second limiting hole on the side wall of the slot structure, thereby maintaining the fixed connection between the movable probe station and the fixed probe station. The beneficial effect is that, compared with setting the magnetic snap rod, the first spring and the electromagnet in the fixed probe station, the selection of the magnetic snap rod, the first spring and the electromagnet in the movable probe station is conducive to selection according to actual needs, thereby meeting different application scenarios.

[0031] Optionally, the number of the connecting mechanisms is two or more; and / or the number of the ejection mechanisms is two or more. The beneficial effect is that by providing multiple connecting mechanisms, the stability of the connection can be improved, and by providing multiple ejection mechanisms, the stability of the force applied to the movable probe station during ejection can be ensured, and the ejection time can be shortened.

[0032] Optionally, a sensor is also included;

[0033] The sensor is provided at the bottom of the fixed probe station and is used to detect the position of the chuck relative to the fixed probe station. This advantageously allows the user to detect the position of the chuck relative to the fixed probe station by providing a sensor at the bottom of the fixed probe station, thereby facilitating the detection of whether the chuck has reached a dangerous distance. This facilitates the release of the fixed connection between the movable probe station and the fixed probe station, thereby protecting the probe card.

[0034] Optionally, a controller is also included;

[0035] The sensor and the electromagnet are electrically connected to the controller respectively;

[0036] The controller is configured to control the power on and off of the electromagnet based on the position of the chuck detected by the sensor. This advantageously provides a fast response time by controlling the power on and off of the electromagnet based on the position of the chuck detected by the sensor, and can automatically protect the probe card and prevent probe collisions.

[0037] In a second aspect, the present invention further provides a semiconductor device comprising an anti-collision pin device of any possible combination according to the first aspect.

[0038] For the beneficial effects of the second aspect, please refer to the description of the first aspect. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 A top view of a probe card fixedly installed on a probe table in the prior art;

[0040] Figure 2 A side view of a probe card, a probe station, and a chuck in the prior art;

[0041] Figure 3 A schematic structural diagram of an anti-collision pin device provided in an embodiment of the present utility model;

[0042] Figure 4 A schematic diagram of the overall structure of an anti-collision pin device provided in an embodiment of the present utility model;

[0043] Figure 5 A schematic structural diagram of another anti-collision pin device provided in an embodiment of the present utility model;

[0044] Figure 6 The present invention provides a schematic diagram of the principle of an anti-collision pin device.

[0045] Description of reference numerals:

[0046] 1. Probe station; 2. Probe card; 3. Chuck; 4. Fixed probe station; 5. Movable probe station; 6. Ejection mechanism; 7. Connecting mechanism; 8. Sensor; 9. Controller;

[0047] 41. First hollow area; 42. Second limiting hole; 43. Groove structure;

[0048] 51. First limiting hole; 52. Second hollow area;

[0049] 61. Positioning column; 62. First spring;

[0050] 71. Magnetic buckle rod; 72. Second spring; 73. Electromagnet;

[0051] 711. Limit block. DETAILED DESCRIPTION

[0052] To further clarify the objectives, technical solutions, and advantages of the present invention, the following will provide a clear and complete description of the technical solutions in the embodiments of the present invention, in conjunction with the accompanying drawings. It should be understood that the described embodiments represent only a portion of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments derived by persons of ordinary skill in the art without inventive effort are within the scope of protection of the present invention. Unless otherwise defined, technical or scientific terms used herein shall have the ordinary meanings understood by persons of ordinary skill in the art to which the present invention belongs. The following will describe the technical solutions in the embodiments of the present invention, in conjunction with the accompanying drawings. The terms used in the following embodiments are intended only to describe specific embodiments and are not intended to limit the present invention. As used in the specification of the present invention and the appended claims, the singular expressions "a," "the," "the," and "the" are intended to include expressions such as "one or more," unless the context clearly indicates otherwise. It should also be understood that in the following embodiments of the present invention, "at least one" and "one or more" refer to one or more (including two). The term "and / or" is used to describe a relationship between related objects, indicating that three possible relationships exist. For example, A and / or B can represent: A alone, A and B together, and B alone. A and B can be singular or plural. The character " / " generally indicates an "or" relationship between the related objects.

[0053] References to "one embodiment" or "some embodiments" described in this specification mean that the specific features, structures or characteristics described in conjunction with the embodiment are included in one or more embodiments of the present invention. Therefore, the statements "in one embodiment", "in some embodiments", "in some other embodiments", and "in some other embodiments" appearing in different places in this specification do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in another way. The terms "including", "comprising", "having" and their variations all mean "including but not limited to", unless otherwise specifically emphasized in another way. The term "connected" includes direct and indirect connections, unless otherwise stated. "First" and "second" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated.

[0054] In the embodiments of the present invention, the words "exemplarily" or "for example" are used to indicate examples, illustrations, or descriptions. Any embodiment or design described as "exemplarily" or "for example" in the embodiments of the present invention should not be construed as being preferred or advantageous over other embodiments or designs. Rather, the use of "exemplarily" or "for example" is intended to present the relevant concepts in a concrete manner.

[0055] In view of the problems existing in the existing technology, such as Figure 3 As shown, the utility model provides an anti-collision needle device, including a fixed probe station 4, a movable probe station 5, and an ejection mechanism 6 and a connecting mechanism 7 arranged between the fixed probe station 4 and the movable probe station 5; a chuck 3 (not shown) for carrying a wafer is provided below the fixed probe station 4, and a probe card 2 for detecting the wafer is provided on the movable probe station 5; the connecting mechanism 7 is used to maintain or release the fixed connection between the movable probe station 5 and the fixed probe station 4; the ejection mechanism 6 is used to control the movement of the movable probe station 5 to drive the probe card 2 away from the chuck 3 when the fixed connection between the movable probe station 5 and the fixed probe station 4 is released. Compared with the prior art, the present invention utilizes a separate probe station consisting of a fixed probe station 4 and a movable probe station 5. When the probe card 2 detects the wafer on the chuck 3, the connecting mechanism 7 maintains the fixed connection between the movable probe station 5 and the fixed probe station 4. When the chuck 3 drives the wafer too close to the probe card 2, the connecting mechanism 7 is controlled to release the fixed connection between the movable probe station 5 and the fixed probe station 4, so that the movable probe station 5 moves to drive the probe card 2 away from the chuck 3, thereby protecting the probe card 2 and avoiding the occurrence of needle collision.

[0056] In some embodiments, in order to be able to select the corresponding ejection mechanism 6 according to the actual application scenario and improve the scope of application, such as Figure 3 As shown, the ejection mechanism 6 is a spring ejection mechanism, a hydraulic ejection mechanism, an electric ejection mechanism, or an electromagnetic ejection mechanism. For example, the hydraulic ejection mechanism is used to move the movable probe stage 5 by hydraulic pressure, while the electric ejection mechanism can be composed of a motor, a worm gear reducer, and an ejector to control the movement of the movable probe stage 5. It should be understood that no matter what principle the ejection mechanism adopts, it will not affect the movement of the movable probe stage 5 and is therefore within the scope of protection of the present invention.

[0057] In some embodiments, in order to improve the stability of the connection between the movable probe station 5 and the fixed probe station 4 and ensure the accuracy of the moving direction of the movable probe station 5 during ejection, thereby protecting the probe card 2 on the movable probe station 5 to a certain extent, as shown in FIG. Figure 4As shown, a first opening is provided in the middle of the fixed probe station 4, and a groove structure 43 is provided on the side walls around the first opening to accommodate the movable probe station 5; a second opening is provided in the middle of the movable probe station 5, and the probe card 2 is fixedly installed (such as by a fixed connection method such as welding or integral molding, or a detachable connection method such as threading or snap-fitting) at the second opening; in the vertical direction, the side walls of the groove structure 43 are in contact with the outer side walls of the movable probe station 5; the connecting mechanism 7 is used to limit the relative position of the side walls of the groove structure 43 and the outer side walls of the movable probe station 5 in the vertical direction; in the horizontal direction, the top surface of the groove structure 43 is in contact with the bottom surface of the movable probe station 5; the ejection mechanism 6 is arranged between the top surface of the groove structure 43 and the bottom surface of the movable probe station 5, and is used to control the movement of the movable probe station 5 in the vertical direction to drive the probe card 2 away from the chuck 3. The inner diameter of the bottom of the groove structure 43 is smaller than the inner diameter of the top, thereby forming a first step structure. The corresponding position of the movable probe station 5 forms a second step structure adapted to the first step structure.

[0058] In some specific embodiments, in order to achieve precise positioning and stable support and reduce costs, such as Figure 4 As shown, when the ejection mechanism 6 is a spring-type ejection mechanism, the ejection mechanism 6 includes a positioning column 61 and a first spring 62; one end of the positioning column 61 is fixedly arranged on the top surface of the groove structure 43, and the first spring 62 is sleeved on the positioning column 61; a positioning groove (not marked) is provided on the bottom surface of the movable probe station 5, and after the other end of the positioning column 61 is inserted into the positioning groove, the fixed probe station 4 and the movable probe station 5 squeeze each other to compress the first spring 62.

[0059] In some specific embodiments, the connecting mechanism 7 is arranged inside the fixed probe station 4, in order to achieve the rapid release of the movable probe station 5 and the reliability and stability of the connection between the movable probe station 5 and the fixed probe station 4, as shown in FIG. Figure 4As shown, the connecting mechanism 7 includes a magnetic snap rod 71, a second spring 72 and an electromagnet 73; a first hollow area 41 is provided inside the fixed probe station 4, and the magnetic snap rod 71, the second spring 72 and the electromagnet 73 are all arranged in the first hollow area 41, and the electromagnet 73 is arranged away from the movable probe station 5; one end of the magnetic snap rod 71 is arranged close to the electromagnet 73, and the second spring 72 is sleeved on one end of the magnetic snap rod 71, and the middle part of the magnetic snap rod 71 is provided with a The limit block 711 is moved by the spring 72; the electromagnet 73 is used to attract the magnetic latch rod 71 to move toward the electromagnet 73 after power is turned on, and squeeze the second spring 72 to compress, so as to release the fixed connection between the movable probe station 5 and the fixed probe station 4; after the electromagnet 73 is powered off, the second spring 72 drives the other end of the magnetic latch rod 71 to pass through the side wall of the groove structure 43 and then insert into the first limit hole 51 on the outer wall of the movable probe station 5 to maintain the fixed connection between the movable probe station 5 and the fixed probe station 4.

[0060] It should be understood that the connecting mechanism 7 can be arranged inside the fixed probe station 4 as well as inside the movable probe station 5. Therefore, in other specific embodiments, such as Figure 5 As shown, the connecting mechanism 7 includes a magnetic snap rod 71 (not marked), a first spring 62 (not marked) and an electromagnet 73 (not marked); a second hollow area 52 is provided inside the movable probe station 5, and the magnetic snap rod 71, the second spring 72 and the electromagnet 73 are all arranged in the second hollow area 52, and the electromagnet 73 is arranged away from the fixed probe station 4; one end of the magnetic snap rod 71 is arranged close to the electromagnet 73, and the second spring 72 is sleeved on one end of the magnetic snap rod 71, and the middle part of the magnetic snap rod 71 is provided with a The second spring 72 moves the limit block 711 (unmarked); the electromagnet 73 is used to attract the magnetic latch rod 71 to move toward the electromagnet 73 after power is turned on, and squeeze the second spring 72 to compress, so as to release the fixed connection between the movable probe station 5 and the fixed probe station 4; after the electromagnet 73 is powered off, the second spring 72 drives the other end of the magnetic latch rod 71 to pass through the outer wall of the movable probe station 5 and then insert into the second limit hole 42 on the side wall of the groove structure 43 to maintain the fixed connection between the movable probe station 5 and the fixed probe station 4.

[0061] It is worth noting that when the electromagnet 73 is energized to release the fixed connection between the movable probe station 5 and the fixed probe station 4, the ejection mechanism 6 is triggered to drive the movable probe station 5 to move upward and away from the chuck 3. The movable probe station 5 needs to be reset, that is, the first spring 62 on the positioning column 61 is compressed by pressing down the movable probe station 5 until the other end of the magnetic clamping rod 71 is aligned with the first limiting hole 51 or the second limiting hole 42. The electromagnet 73 is controlled to be de-energized. At this time, the second spring 72 drives the other end of the magnetic clamping rod 71 to be reinserted into the first limiting hole 51 or the second limiting hole 42, thereby maintaining the fixed connection between the movable probe station 5 and the fixed probe station 4, so that when the chuck 3 approaches the probe card 2 again, the ejection mechanism 6 is triggered.

[0062] In some embodiments, in order to improve the stability of the connection, the number of the connecting mechanisms 7 is set to two; and / or in order to ensure the stability of the force applied to the movable probe station 5 during ejection and shorten the ejection time, the number of the ejection mechanisms 6 is set to two. It should be understood that the specific number of the connecting mechanisms 7 and the ejection mechanisms 6 can be adjusted according to actual needs. For example, Figure 3 As shown, two connecting mechanisms 7 can be evenly distributed in the fixed probe station 4 or the movable probe station 5 to ensure the stability of the connection, or two ejection mechanisms 6 can be evenly distributed in the slot structure 43 to ensure the uniformity of the force on the movable probe station 5 during ejection.

[0063] In some embodiments, in order to know whether the chuck 3 has reached the dangerous distance, so as to release the fixed connection between the movable probe station 5 and the fixed probe station 4, the probe card 2 is protected, such as Figure 3 As shown, the device further includes a sensor 8 ; the sensor 8 is disposed at the bottom of the fixed probe station 4 and is used to detect the position of the chuck 3 relative to the fixed probe station 4 .

[0064] In some specific embodiments, in order to improve the response speed, the probe card 2 is automatically protected to avoid the occurrence of needle collision, such as Figure 6 As shown, the device further includes a controller 9; the sensor 8 and the electromagnet 73 are electrically connected to the controller 9 respectively; the controller 9 is used to control the power on and off of the electromagnet 73 according to the position of the chuck 3 detected by the sensor 8.

[0065] Based on the above anti-collision needle device, Figure 3As shown, the present invention also provides a semiconductor device, including an anti-collision needle device, and a test machine connected to the probe card 2; wherein the probe card 2 (probe card) is composed of a probe (probe pin), an electronic component (component), a wire (wire) and a printed circuit board (PCB), and is used to transmit the test machine signal to the wafer, and then feed back the test information to the test machine, thereby generating test data. When the probe card 2 is testing the wafer on the chuck 3, the sensor 8 detects that the chuck 3 is too close to the probe card 2, and the controller 9 controls the electromagnet 73 to be energized to adsorb the magnetic clamp rod 71 and move it toward the electromagnet 73, and squeeze the second spring 72 to compress it, so as to release the fixed connection between the movable probe station 5 and the fixed probe station 4, thereby avoiding The chuck 3 and the probe card 2 collide to protect the probe card 2, and then the movable probe stage 5 needs to be reset. The movable probe stage 5 is pressed down to compress the first spring 62 on the positioning column 61 until the other end of the magnetic clamping rod 71 is aligned with the first limiting hole 51 or the second limiting hole 42. The controller 9 controls the electromagnet 73 to cut off the power. At this time, the second spring 72 drives the other end of the magnetic clamping rod 71 to be reinserted into the first limiting hole 51 or the second limiting hole 42, thereby maintaining the fixed connection between the movable probe stage 5 and the fixed probe stage 4, so that when the chuck 3 approaches the probe card 2 again, the ejection mechanism 6 is triggered.

[0066] While the embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations may be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as set forth in the claims. Furthermore, the present invention described herein may have other embodiments and may be implemented or carried out in a variety of ways.

Claims

1. An anti-collision needle device, characterized in that: It includes a fixed probe station, a movable probe station, and an ejection mechanism and a connection mechanism arranged between the fixed probe station and the movable probe station; A chuck for carrying a wafer is provided below the fixed probe station, and a probe card for detecting the wafer is provided on the movable probe station; The connecting mechanism is used to maintain or release the fixed connection between the movable probe station and the fixed probe station; The ejection mechanism is used to control the movable probe station to move so as to drive the probe card away from the chuck when the fixed connection between the movable probe station and the fixed probe station is released.

2. The device according to claim 1, characterized in that The ejection mechanism is a spring ejection mechanism, a hydraulic ejection mechanism, an electric ejection mechanism or an electromagnetic ejection mechanism.

3. The device according to claim 1, characterized in that A first opening is provided in the middle of the fixed probe station, and a groove structure is provided on the sidewall around the first opening to accommodate the movable probe station; a second opening is provided in the middle of the movable probe station, and the probe card is fixedly installed at the second opening; In the vertical direction, the sidewall of the groove structure is in contact with the outer sidewall of the movable probe station; The connecting mechanism is used to limit the relative position of the side wall of the groove structure and the outer side wall of the movable probe station in the vertical direction; In the horizontal direction, the top surface of the groove structure is in contact with the bottom surface of the movable probe station; The ejection mechanism is disposed between the top surface of the slot structure and the bottom surface of the movable probe stage, and is used to control the movable probe stage to move in a vertical direction to drive the probe card away from the chuck.

4. The device according to claim 3, characterized in that When the ejection mechanism is a spring-type ejection mechanism, the ejection mechanism includes a positioning column and a first spring; One end of the positioning post is fixedly arranged on the top surface of the slot structure, and the first spring is sleeved on the positioning post; A positioning groove is provided on the bottom surface of the movable probe station. After the other end of the positioning column is inserted into the positioning groove, the fixed probe station and the movable probe station press each other to compress the first spring.

5. The device according to claim 3, characterized in that The connecting mechanism includes a magnetic buckle rod, a second spring and an electromagnet; A first hollow area is provided inside the fixed probe station, the magnetic buckle rod, the second spring and the electromagnet are all arranged in the first hollow area, and the electromagnet is arranged away from the movable probe station; One end of the magnetic buckle rod is arranged close to the electromagnet, and the second spring is sleeved on one end of the magnetic buckle rod, and a limit block for limiting the movement of the second spring is provided in the middle of the magnetic buckle rod; The electromagnet is used to attract the magnetic buckle rod to move toward the electromagnet after being energized, and squeeze the second spring to compress it, so as to release the fixed connection between the movable probe station and the fixed probe station; After the electromagnet is powered off, the second spring drives the other end of the magnet latch rod to pass through the side wall of the slot structure and then insert into the first limiting hole on the outer wall of the movable probe station to maintain a fixed connection between the movable probe station and the fixed probe station.

6. The device according to claim 3, characterized in that The connecting mechanism includes a magnetic buckle rod, a first spring and an electromagnet; A second hollow area is provided inside the movable probe station, the magnetic buckle rod, the second spring and the electromagnet are all arranged in the second hollow area, and the electromagnet is arranged away from the fixed probe station; One end of the magnetic buckle rod is arranged close to the electromagnet, and the second spring is sleeved on one end of the magnetic buckle rod, and a limit block for limiting the movement of the second spring is provided in the middle of the magnetic buckle rod; The electromagnet is used to attract the magnetic buckle rod to move toward the electromagnet after being energized, and squeeze the second spring to compress it, so as to release the fixed connection between the movable probe station and the fixed probe station; After the electromagnet is powered off, the second spring drives the other end of the magnet latch rod to pass through the outer wall of the movable probe station and then insert into the second limiting hole on the side wall of the slot structure to maintain a fixed connection between the movable probe station and the fixed probe station.

7. The device according to claim 1, characterized in that The number of the connecting mechanisms is more than two; and / or the number of the ejection mechanisms is more than two.

8. The device according to claim 1, characterized in that Also includes sensors; The sensor is arranged at the bottom of the fixed probe station and is used to detect the position of the chuck relative to the fixed probe station.

9. The device according to claim 8, characterized in that Also includes a controller; The sensor and the electromagnet are electrically connected to the controller respectively; The controller is used to control the power on and off of the electromagnet according to the position of the chuck detected by the sensor.

10. A semiconductor device, characterized in that: The invention comprises the anti-collision pin device according to any one of claims 1 to 9.

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