ESD test device
By designing an automated ESD testing device, the problems of low efficiency and large errors in fixture ESD testing in semiconductor device production are solved, and efficient and accurate fixture detection is achieved to support semiconductor device production.
Patent Information
- Application Number
- CN202422364360.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-27
- Publication Date
- 2025-10-03
- Estimated Expiration
- 2034-09-27
AI Technical Summary
In the prior art, ESD testing of fixtures during semiconductor device production relies on manual operation, which is inefficient and prone to errors.
An ESD testing device is designed, including a base, a loading assembly, a traverse assembly, a lifting assembly, and a testing assembly. Multi-position ESD testing of the fixture is achieved through an automated slide rail and drive mechanism, reducing manual intervention.
It improves the efficiency and accuracy of fixture ESD testing, reduces the labor burden of operators, and ensures product quality and qualification rate.
Smart Images
Figure CN223413415U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of electrostatic protection in semiconductor manufacturing, and particularly relates to an ESD testing device. Background Art
[0002] ESD (Electro-Static Discharge) stands for "electrostatic discharge," also known as electrostatic discharge. It is a major factor in semiconductor device damage, affecting product yield, manufacturing costs, and product quality reliability. Currently, semiconductor devices are becoming increasingly integrated, making them more sensitive to ESD. Therefore, electrostatic protection during semiconductor device processing is crucial for semiconductor manufacturers.
[0003] During semiconductor device production and processing, equipment fixtures, as components that come into direct contact with the product, are a crucial component of electrostatic protection. To improve product qualification rates and ensure quality, semiconductor manufacturers require ESD testing of these fixtures. Existing techniques often rely on manual testing equipment, requiring manual operation. This results in low testing efficiency, high repetitive labor intensity, and the potential for errors due to human error. Utility Model Content
[0004] The utility model provides an ESD testing device, which aims to solve the problem in the prior art that ESD testing of a fixture used in semiconductor device production needs to be performed manually, which is inefficient and prone to errors.
[0005] To achieve the above objectives, the present invention adopts the following technical solution: to provide an ESD testing device, comprising:
[0006] A base, wherein a first slide rail is provided on an upper surface of the base along a first horizontal direction, the base is provided with a crossbeam on one side of the first slide rail, the crossbeam is provided with a second slide rail along a second horizontal direction, and the second horizontal direction is perpendicular to the first horizontal direction;
[0007] A loading assembly, comprising a loading platform and a first driving mechanism, wherein the loading platform is disposed above the base and slidably cooperates with the first slide rail, and the first driving mechanism is used to drive the loading platform to reciprocate along the first slide rail;
[0008] a transverse movement assembly, comprising a moving arm and a second driving mechanism, wherein the moving arm is provided on the crossbeam and slidably cooperates with the second slide rail, and the second driving mechanism is provided on the crossbeam and is used to drive the moving arm to reciprocate along the second slide rail;
[0009] a lifting assembly, provided on the movable arm, having a lifting end capable of moving in a vertical direction; and
[0010] The test assembly includes two test electrodes respectively arranged at the lifting ends, and a test meter. The test electrodes face vertically downward and are arranged at intervals in the horizontal direction. The test meter is electrically connected to the two test electrodes respectively.
[0011] In a possible implementation, a plurality of the first slide rails are provided on the base, and the plurality of the first slide rails are spaced apart along the second horizontal direction. A plurality of slide grooves are provided at the bottom of the loading platform, and the slide grooves correspond one-to-one to the first slide rails.
[0012] In a possible implementation, a limiting groove is provided on the upper surface of the loading platform, and the limiting groove is used to accommodate the clamp.
[0013] In a possible implementation, the loading platform is further provided with an auxiliary groove, and a plurality of the auxiliary grooves are provided. The plurality of auxiliary grooves are arranged opposite to each other with respect to the limiting groove and are connected to the auxiliary groove.
[0014] In a possible implementation, a suction hole is provided at the bottom of the limiting groove, and the suction hole is connected to a negative pressure suction component.
[0015] In a possible implementation, the lifting assembly is a vertically arranged cylinder, the cylinder rod of the cylinder is arranged downward to form the lifting end, and the test electrode is arranged on the cylinder rod.
[0016] In a possible implementation, the lifting end is provided with an adjustment rod in a horizontal direction, the adjustment rod is formed with an adjustment slot along its length, and the upper ends of the two test electrodes are respectively slidably engaged with the adjustment slots.
[0017] In one possible implementation, a slider is provided at the upper end of the test electrode, and the slider is slidably engaged with the adjustment groove. The slider is provided with an adjustment hole that passes through its own thickness direction in the vertical direction, and the internal thread of the adjustment hole is engaged with a fastening screw, and the screw end of the fastening screw abuts against the inner wall of the adjustment groove.
[0018] In a possible implementation, the upper surface of the loading platform has an insulating layer.
[0019] In a possible implementation, the ESD testing device further includes a controller, and the first driving mechanism, the second driving mechanism, the lifting assembly, and the testing instrument are respectively communicatively connected to the controller.
[0020] Compared with the prior art, the ESD testing device provided by the present invention has the following beneficial effects:
[0021] The ESD testing device provided by the present invention includes a base, a loading assembly, a transverse movement assembly, a lifting assembly, and a test assembly. The loading assembly has a loading platform that can reciprocate along a first slide rail, a movable arm of the transverse movement assembly that can reciprocate along a second slide rail, and a lifting assembly disposed on the movable arm that can drive two test electrodes to vertically move up and down. During use, a fixture is placed on the loading platform, and the first drive mechanism and the second drive mechanism are adjusted so that the test electrode and the fixture correspond to each other in the upper and lower directions. After the position adjustment is completed, the lifting assembly drives the test electrode to descend so that the lower end of the test electrode abuts against the upper surface of the fixture. The test electrode is electrically connected to a test meter, and the test meter can perform an ESD test on the fixture to detect whether its resistance value meets the requirements.
[0022] The loading, traverse, lift, and test assemblies in this utility model work together to automatically complete ESD testing of the fixture, reducing the operator's workload, improving testing efficiency and accuracy, and reducing the risk of errors. This provides support for semiconductor device manufacturing, ensuring product quality and yield rates. The loading platform and movable arm are movably positioned, and by adjusting the horizontal relative position of the loading platform and test electrodes, multiple test points can be tested, achieving higher efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] Figure 1 The structure of the ESD test device provided by the embodiment of the utility model is shown as follows: Figure 1 ;
[0024] Figure 2 The structure of the ESD test device provided by the embodiment of the utility model is shown as follows: Figure 2 ;
[0025] Figure 3 The structure of the ESD test device provided by the embodiment of the utility model is shown as follows: Figure 3 ;
[0026] Figure 4 This is a structural schematic diagram of the adjustment rod and test electrode in the ESD test device provided by an embodiment of the present utility model.
[0027] Description of reference numerals:
[0028] 1. ESD test device; 10. Base; 11. First slide rail; 12. Crossbeam; 20. Loading platform; 21. Limiting slot; 22. Auxiliary slot; 23. Adsorption hole; 30. Moving arm; 40. Lifting assembly; 41. Lifting end; 42. Adjusting rod; 421. Adjusting slot; 50. Test electrode; 51. Slider; 52. Fastening screw; 60. Controller; 61. Emergency stop switch; DETAILED DESCRIPTION
[0029] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.
[0030] It should be noted that when an element is referred to as being "fixed to," "fixed," or "fixedly disposed" on another element, it may be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected to," "connected to" another element, it may be directly connected to the other element or there may also be an intermediate element. When an element is referred to as being "set on," "disposed on" another element, it may be directly on the other element or there may also be an intermediate element. "Multiple" refers to two or more. "At least one" refers to one or more. "Several" refers to one or more.
[0031] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.
[0032] Please also refer to Figures 1 to 4 , the ESD testing device 1 provided in an embodiment of the present utility model is described below.
[0033] See also Figure 1 、 Figure 2 and Figure 3 The embodiment of the present invention provides an ESD testing device 1, which includes a base 10, a loading assembly, a lateral movement assembly, a lifting assembly 40 and a testing assembly. A first slide rail 11 is provided on the upper surface of the base 10 along the first horizontal direction, and a crossbeam 12 is provided on one side of the first slide rail 11 of the base 10. The crossbeam 12 is provided with a second slide rail along the second horizontal direction, and the second horizontal direction is perpendicular to the first horizontal direction; the loading assembly includes a loading platform 20 and a first driving mechanism, the loading platform 20 is provided above the base 10 and slides with the first slide rail 11, and the first driving mechanism is used to drive the loading platform 20 to move back and forth along the first slide rail 11; the transverse movement assembly includes a moving arm 30 and a second driving mechanism, the moving arm 30 is provided on the crossbeam 12 and slides with the second slide rail, and the second driving mechanism is provided on the crossbeam 12 to drive the moving arm 30 to move back and forth along the second slide rail; the lifting assembly 40 is provided on the moving arm and has a lifting end 41 that can move in the vertical direction; the test assembly includes two test electrodes 50 respectively provided at the lifting end 41, and a test instrument, the test electrode 50 is vertically downward, the two test electrodes 50 are arranged at intervals in the horizontal direction, and the test instrument is electrically connected to the two test electrodes 50 respectively.
[0034] Compared with the prior art, the ESD testing device 1 provided by the embodiment of the present invention has the following beneficial effects:
[0035] The ESD testing device 1 provided by the embodiment of the present invention includes a base 10, a loading assembly, a transverse movement assembly, a lifting assembly 40 and a test assembly. The loading assembly has a loading platform 20, which can move back and forth along the first slide rail 11. The movable arm 30 of the transverse movement assembly can move back and forth along the second slide rail. The lifting assembly 40 is arranged on the movable arm 30 and can drive two test electrodes 50 to move vertically up and down. When in use, the fixture is placed on the loading platform 20, and the first drive mechanism and the second drive mechanism are adjusted so that the test electrode 50 and the fixture correspond to each other up and down. When the position adjustment is completed, the test electrode 50 is driven down by the lifting assembly 40 so that the lower end of the test electrode 50 abuts against the upper surface of the fixture. The test electrode 50 is electrically connected to the test meter, and the test meter can perform an ESD test on the fixture to detect whether its resistance meets the requirements.
[0036] In this embodiment of the utility model, the loading assembly, traverse assembly, lifting assembly 40, and test assembly work together to automatically complete ESD testing of the fixture, reducing the operator's workload, improving testing efficiency and accuracy, and supporting semiconductor device manufacturing. The loading platform 20 and movable arm 30 are movably arranged, and by adjusting the horizontal relative position of the loading platform 20 and test electrode 50, multiple positional testing can be performed, achieving higher efficiency.
[0037] In the embodiment of the present invention, the base 10 is used to provide support and mounting positions for the various components mounted thereon. The base 10 is provided with a first slide rail 11, and a crossbeam 12 is disposed on one side of the base 10 and has a second slide rail. The crossbeam 12 is a horizontal plate-like or block-shaped member. The cross-sections of the first and second slide rails 11 and 11 can be square, trapezoidal, or dovetail-shaped. The loading platform 20 is disposed on the base 10 and slidably engages with the first slide rail 11. The movable arm 30 is disposed on the crossbeam 12 and slidably engages with the second slide rail.
[0038] The first and second drive mechanisms are used to drive the loading platform 20 and the movable arm 30 for horizontal movement, respectively, thereby changing the relative horizontal position of the fixture and the test electrode 50. These first and second drive mechanisms can be motor-screw mechanisms, crank slider 51 mechanisms, rack-and-pinion mechanisms, electric telescopic rods, hydraulic cylinders, telescopic cylinders, and other power devices capable of linear reciprocating motion. Depending on the spatial layout requirements, the first and second drive mechanisms can be located inside or outside the base 10.
[0039] One or more fixtures can be placed on the loading platform 20 as needed. When testing a single fixture, the horizontal relative position of the fixture and the test electrode 50 can be changed to achieve multiple point measurements. The test results at each position are then averaged for more accurate results. When testing multiple fixtures, the horizontal relative position of the fixture and the test electrode 50 can be changed to allow the test assembly to test multiple fixtures sequentially.
[0040] The fixture is used to contact semiconductor devices on the production line. Its specific structure and shape are not limited. Before and after testing, the fixture needs to be transferred to and removed from the loading platform 20. This transfer can be performed manually or by a robot.
[0041] Lifting assembly 40 can be a vertically mounted telescopic cylinder, electric telescopic rod, or similar device. When testing is required, lifting end 41 lowers two test electrodes 50, allowing the lower ends of test electrodes 50 to contact the fixture under test. The test meter can then monitor the fixture's ESD performance. The test electrodes 50, the test meter, and the operating principles of ESD testing are all known technologies and will not be further elaborated here. A commercially available test meter can be selected as long as it meets the test requirements.
[0042] See also Figure 1 and Figure 3 In some possible embodiments, the ESD testing device 1 further includes a controller 60, and the first drive mechanism, the second drive mechanism, the lifting assembly 40, and the test instrument are each communicatively connected to the controller 60. The test instrument can be integrated into the controller 60, and after the test is completed, the test results are recorded and displayed by the controller 60. By manipulating the controller 60, the operator can control the first drive mechanism, the second drive mechanism, the lifting assembly 40, and the test instrument to move and test the fixture. The operator can perform three ESD tests on the same fixture, average the results, and display the final test data on the controller 60.
[0043] To ensure the safety of the equipment, Figure 1 As shown, the base 10 is also provided with an emergency stop switch 61 for emergency stop in case of unexpected situations.
[0044] The ESD testing equipment proposed in the embodiment of the present utility model can replace manual inspection of the fixture, and there is no need for employees to hold the test equipment to test the fixtures one by one. It solves the low testing efficiency caused by the traditional method of using employees holding the test equipment, and the test error problems caused by poor repeatability of the test conditions.
[0045] See also Figure 1In some possible embodiments, a plurality of first slide rails 11 are provided on the base 10, and the plurality of first slide rails 11 are arranged at intervals along the second horizontal direction. A plurality of slide grooves are provided at the bottom of the loading platform 20, and the slide grooves correspond one-to-one to the first slide rails 11, so that the loading platform 20 runs more smoothly.
[0046] See also Figure 1 and Figure 3 In some possible embodiments, the upper surface of the loading platform 20 is provided with a limiting groove 21. The limiting groove 21 is used to accommodate the fixture, allowing for more accurate fixture placement and improving inspection accuracy. When multiple fixtures need to be inspected simultaneously, multiple limiting grooves 21 may be provided. The multiple limiting grooves 21 may be arranged in a rectangular array, a linear array, a circular array, or the like.
[0047] See also Figure 1 and Figure 3 In some possible embodiments, the loading platform 20 is further provided with a plurality of auxiliary slots 22, each of which is arranged opposite to the limiting slot 21 and is connected to the limiting slot 21. When manually removing and placing the fixture, the auxiliary slots 22 are used to accommodate the operator's fingers, making it easier for the operator to remove and place the fixture.
[0048] See also Figure 1 and Figure 3 In some possible embodiments, the bottom of the retaining groove 21 is provided with a suction hole 23, which is connected to a negative pressure suction assembly. When the fixture is placed in the retaining groove 21, the negative pressure suction assembly draws air, securing the fixture within the retaining groove 21 and preventing it from shaking or moving. The negative pressure suction assembly can be a commercially available suction pump, connected to the suction hole 23 via a gas hose. The negative pressure suction assembly can be mounted on either the loading platform 20 or the base 10.
[0049] Please refer to Figure 1. Figure 2 and Figure 3 In some possible embodiments, the lifting assembly 40 is a vertically arranged cylinder, the cylinder rod of the cylinder is arranged downward to form a lifting end 41, the test electrode 50 is arranged on the cylinder rod, and the cylinder is vertically extended and retracted to drive the test electrode 50 to move up and down.
[0050] See also Figure 4 In some possible embodiments, the lifting end 41 is provided with an adjustment rod 42 along a horizontal direction. The adjustment rod 42 has an adjustment slot 421 formed along its length. The upper ends of the two test electrodes 50 slide in the adjustment slots 421. In this embodiment, the lifting end 41 is provided with a horizontal adjustment rod 42. The two test electrodes 50 can slide along the adjustment rod 42, and the spacing between the two test electrodes 50 can be adjusted to meet different ESD detection requirements.
[0051] See also Figure 4 In some possible embodiments, a slider 51 is provided at the upper end of the test electrode 50. The slider 51 slidably engages with the adjustment slot 421. The slider 51 has an adjustment hole extending vertically through its thickness. A fastening screw 52 is threaded into the adjustment hole, and the end of the fastening screw 52 abuts against the inner wall of the adjustment slot 421. After the position of the test electrode 50 is adjusted, the fastening screw 52 can be rotated until the end of the fastening screw 52 abuts against the inner wall of the adjustment slot 421, thereby securing the slider 51 within the adjustment slot 421.
[0052] In some possible embodiments, the upper surface of the loading platform 20 has an insulating layer. The upper surface of the loading platform 20 is provided with an insulating layer, and the insulating layer can be made of insulating materials such as ceramics to prevent interference with test results during the discharge test.
[0053] It can be understood that the various parts in the above embodiments can be freely combined or deleted to form different combination embodiments. The specific contents of each combination embodiment will not be repeated here. After this description, it can be considered that the specification of the utility model has recorded various combination embodiments and can support different combination embodiments.
[0054] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.
Claims
1. ESD testing device, characterized in that, include: A base, wherein a first slide rail is provided on an upper surface of the base along a first horizontal direction, the base is provided with a crossbeam on one side of the first slide rail, the crossbeam is provided with a second slide rail along a second horizontal direction, and the second horizontal direction is perpendicular to the first horizontal direction; A loading assembly, comprising a loading platform and a first driving mechanism, wherein the loading platform is disposed above the base and slidably cooperates with the first slide rail, and the first driving mechanism is used to drive the loading platform to reciprocate along the first slide rail; a transverse movement assembly, comprising a moving arm and a second driving mechanism, wherein the moving arm is provided on the crossbeam and slidably cooperates with the second slide rail, and the second driving mechanism is provided on the crossbeam and is used to drive the moving arm to reciprocate along the second slide rail; a lifting assembly, provided on the movable arm, having a lifting end capable of moving in a vertical direction; as well as The test assembly includes two test electrodes respectively arranged at the lifting ends, and a test meter. The test electrodes face vertically downward and are arranged at intervals in the horizontal direction. The test meter is electrically connected to the two test electrodes respectively.
2. The ESD testing device according to claim 1, wherein: The base is provided with a plurality of first slide rails, which are spaced apart along the second horizontal direction. The bottom of the loading platform is provided with a plurality of slide grooves, which correspond one-to-one to the first slide rails.
3. The ESD testing device according to claim 1, wherein: A limiting groove is provided on the upper surface of the loading platform, and the limiting groove is used to accommodate a clamp.
4. The ESD testing device according to claim 3, wherein: The loading platform is further provided with an auxiliary groove, and a plurality of the auxiliary grooves are provided. The plurality of auxiliary grooves are arranged opposite to each other with respect to the limiting groove and are communicated with the auxiliary groove.
5. The ESD testing device according to claim 3, wherein: The bottom of the limiting groove is provided with an adsorption hole, and the adsorption hole is connected to a negative pressure suction component.
6. The ESD testing device according to claim 1, wherein: The lifting assembly is a vertically arranged cylinder, the cylinder rod of the cylinder is arranged downward to form the lifting end, and the test electrode is arranged on the cylinder rod.
7. The ESD testing device according to claim 1, wherein: The lifting end is provided with an adjustment rod in the horizontal direction. The adjustment rod is formed with an adjustment slot along its length direction. The upper ends of the two test electrodes are respectively slidably matched with the adjustment slots.
8. The ESD testing device according to claim 7, wherein: A slider is provided at the upper end of the test electrode, and the slider is slidably engaged with the adjustment slot. The slider is provided with an adjustment hole that passes through its own thickness direction in the vertical direction. The inner thread of the adjustment hole is engaged with a fastening screw, and the screw end of the fastening screw abuts against the inner wall of the adjustment slot.
9. The ESD testing device according to claim 1, wherein: The upper surface of the loading platform is provided with an insulating layer.
10. The ESD testing device according to claim 1, wherein: The ESD testing device further includes a controller, and the first driving mechanism, the second driving mechanism, the lifting assembly, and the testing instrument are respectively communicatively connected to the controller.