Mortar curtain with adjustable thickness

Abstract

The utility model relates to the technical field of semiconductor cutting. The utility model discloses a mortar curtain capable of adjusting the thickness of the mortar curtain. The mortar curtain comprises a mortar storage tank, a mortar distribution pipe, a flow limiting plate and a mortar homogenizing plate, a slurry distributing pipe is mounted at the top of the slurry storage tank, a slurry inlet is formed in the top of the slurry distributing pipe, and a strip-shaped slurry outlet is formed in the bottom of the slurry distributing pipe; flow limiting plates are longitudinally connected to the two sides of the slurry storage tank in a sliding mode and detachably connected with the slurry storage tank through screws; the slurry storage tank is divided into a storage area and a slurry outlet area through the flow limiting plate, a gap communicating the storage area with the slurry outlet area exists between the bottom of the flow limiting plate and the slurry storage tank, the slurry dividing pipe is installed in the storage area, and the slurry outlet area is connected with the slurry homogenizing plate. A discharging opening is formed in the bottom of the storage area, a blocking piece capable of moving longitudinally is installed in the slurry storage tank, and a spring used for elastically pressurizing the blocking piece to block the discharging opening is connected between the blocking piece and the slurry storage tank. Through the longitudinal adjustment of the flow limiting plate, the thickness of the extruded pulp curtain can be conveniently realized.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor cutting, in particular to mortar curtain. BACKGROUND

[0002] In the cutting of semiconductor silicon wafer, the diamond wire is usually used for cutting, but the surface quality of cutting is poor, the subsequent processing time is long, and the material loss is relatively large, so the mortar cutting is adopted, the surface quality is better, and the material loss is small. The mortar curtain is an important part in the cutting process, which can ensure the uniformity of the mortar and improve the cutting quality.

[0003] The mortar curtain is a mechanism for changing the liquid mortar into a form like a waterfall. Some existing mortar curtain mechanisms have the problems of thick thickness, waste of resources, and uneven mortar, which affects the processing quality. UTILITY MODEL CONTENT

[0004] In view of the problems in the prior art, the utility model provides a mortar curtain with adjustable mortar curtain thickness, which solves at least one of the above technical problems.

[0005] The technical scheme of the utility model is as follows: a mortar curtain with adjustable mortar curtain thickness, characterized by comprising a mortar storage tank, a mortar distribution pipe, a flow limiting plate and a mortar uniformizing plate.

[0006] The top of the mortar storage tank is provided with the mortar distribution pipe, the top of the mortar distribution pipe is provided with a mortar inlet, and the bottom of the mortar distribution pipe is provided with a strip-shaped mortar outlet.

[0007] The flow limiting plate is longitudinally and slidably connected to the two sides of the mortar storage tank, and the flow limiting plate is detachably connected to the mortar storage tank through connecting bolts.

[0008] The mortar storage tank is divided into a storage area and a mortar outlet area by the flow limiting plate, a gap is formed between the bottom of the flow limiting plate and the mortar storage tank, the mortar distribution pipe is arranged in the storage area, and the mortar outlet area is connected to the mortar uniformizing plate.

[0009] The bottom of the storage area is provided with a discharge port, the mortar storage tank is provided with a blocking member which can move longitudinally, a spring is connected between the blocking member and the mortar storage tank to elastically press the blocking member to block the discharge port, the bottom of the blocking member is a blocking portion for blocking the discharge port, and the top of the blocking member is a hand holding portion for lifting the blocking member.

[0010] The utility model facilitates the thickness of the extruded slurry curtain by longitudinally adjusting the flow limiting plate. The elastic rebound of the blocking piece ensures the quality of the blocking of the discharge port. At the same time, the slurry in the slurry storage tank can be completely drained by pulling the blocking piece, which is convenient for emptying the slurry when cleaning the device.

[0011] Further preferably, the two sides of the flow limiting plate are provided with bent portions, and the bent portions are provided with vertical waist-shaped holes;

[0012] The slurry storage tank is provided with a circular hole through which the connecting bolt passes;

[0013] The flow limiting plates are connected by connecting bolts passing through the waist-shaped holes and the round holes.

[0014] Further preferably, the blocking member comprises a handle ball, a guide rod shaft and a polyurethane plug connected in sequence from top to bottom;

[0015] The handle ball is the handheld gripping portion;

[0016] The polyurethane plug is the sealing part;

[0017] A support frame is installed on the side wall of the storage area, and the support frame is longitudinally slidably connected to the guide rod shaft;

[0018] The spring is sleeved on the guide rod shaft, and the spring is sandwiched between the support frame and the guide rod shaft.

[0019] The discharge outlet can be opened by lifting the handle ball. When the handle ball is released, the polyurethane plug is driven by the elastic force of the spring to seal the discharge outlet.

[0020] Further preferably, the upper and lower ends of the guide rod shaft are detachably connected to the handle ball and the polyurethane plug respectively.

[0021] Further preferably, a limit plate for resisting the spring is fixed on the guide rod shaft;

[0022] The lower side of the support frame abuts against the spring, and the upper side of the limiting plate abuts against the spring.

[0023] Further preferably, the outer diameter of the handle ball is larger than the outer diameter of the guide rod shaft, and the support frame is provided with a guide hole longitudinally slidably connected to the guide rod shaft.

[0024] Further preferably, L-shaped mounting plates are installed at both ends of the slurry storage tank in the length direction, and the L-shaped mounting plates are connected with eye screws.

[0025] Further preferably, upwardly bent ribs are provided on both sides of the homogenizing plate in the length direction.

[0026] Further preferably, the front end of the slurry storage tank is provided with an upper end opening and a guide outlet of the front end opening;

[0027] The periphery of the guide outlet is sleeved with the slurry uniformizing plate, and the left and right sides of the guide outlet are detachably connected with the slurry uniformizing plate through bolts.

[0028] Further preferably, the height of the guide outlet is lower than the height of the rear side plate of the slurry storage tank.

[0029] Further preferably, the bottom of the slurry storage tank is a decreasing portion with a decreasing cross-sectional area from top to bottom.

[0030] The slurry is conveniently gathered and discharged.

[0031] Compared with the prior art, the present application has the following beneficial effects:

[0032] The thickness of the extruded slurry curtain can be conveniently realized by longitudinal adjustment of the flow limiting plate. The plugging quality of the discharge port can be conveniently ensured by elastic rebound of the plugging member. Meanwhile, the plugging member can be pulled and lifted to realize the discharge of the slurry in the slurry storage tank, so that the slurry can be emptied when the device is cleaned. BRIEF DESCRIPTION OF DRAWINGS

[0033] Fig. 1 Fig. 1 is a structural schematic view of a specific embodiment of the present application;

[0034] Fig. 2 Fig. 2 is a sectional view of the plugging member of the specific embodiment of the present application;

[0035] Fig. 3 Fig. 3 is a sectional view of the specific embodiment of the present application.

[0036] In the drawings, 1 is a slurry distribution pipe, 2 is a flow limiting plate, 3 is a lifting ring screw, 4 is a slurry uniformizing plate, 5 is a polyurethane plug, 6 is a guide rod shaft, 7 is a handle ball, 8 is a slurry storage tank, 9 is a spring, and 10 is a support frame. DETAILED DESCRIPTION

[0037] Referring to Figs. 1 to 3, Specific embodiment 1, a mortar curtain with adjustable slurry curtain thickness, comprising a slurry storage tank 8, a slurry distribution pipe 1, a flow limiting plate 2 and a slurry homogenizing plate 4; a slurry distribution pipe 1 is installed on the top of the slurry storage tank 8, a slurry inlet is opened on the top of the slurry distribution pipe 1, and a strip slurry outlet is opened at the bottom of the slurry distribution pipe 1; the two sides of the slurry storage tank 8 are longitudinally slidably connected to the flow limiting plate 2, and the flow limiting plate 2 is detachably connected to the slurry storage tank 8 by screws; the slurry storage tank 8 is divided into a storage area and a slurry outlet area by ... There is a gap between the bottom of the plate 2 and the slurry storage tank, which connects the storage area and the slurry discharge area. The slurry distribution pipe 1 is installed in the storage area, and the slurry discharge area is connected to the homogenizing plate 4. A discharge outlet is provided at the bottom of the storage area, and a longitudinally movable sealing member is installed in the slurry storage tank 8. A spring 9 is connected between the sealing member and the slurry storage tank 8 to elastically pressurize the sealing member to block the discharge outlet. The bottom of the sealing member is a sealing portion for blocking the discharge outlet, and the top of the sealing member is a hand-held gripping portion for lifting the sealing member. The utility model facilitates the thickness of the extruded slurry curtain by longitudinally adjusting the flow limiting plate 2. The elastic rebound of the sealing member facilitates the guarantee of the sealing quality of the discharge outlet. At the same time, the slurry in the slurry storage tank 8 can be completely drained by pulling the sealing member, which facilitates the emptying of the slurry when cleaning the device.

[0038] The flow limiting plate 2 is provided with a bent portion on both sides, and a vertical waist-shaped hole is opened on the bent portion; the slurry storage tank 8 is provided with a circular hole through which the connecting bolts pass; the flow limiting plate 2 is connected by connecting bolts passing through the waist-shaped hole and the circular hole.

[0039] The sealing member consists of a handle ball 7, a guide shaft 6, and a polyurethane plug 5, connected sequentially from top to bottom. The handle ball 7 serves as the handheld grip, while the polyurethane plug 5 serves as the sealing member. A support frame 10 is mounted on the side wall of the storage area and is longitudinally slidably connected to the guide shaft 6. A spring 9 is sleeved around the guide shaft 6, with the spring 9 sandwiched between the support frame 10 and the guide shaft 6. This facilitates opening the outlet by pulling the handle ball 7. Releasing the handle ball 7 activates the spring 9, which in turn drives the polyurethane plug 5 to seal the outlet. The upper and lower ends of the guide shaft 6 are detachably connected to the handle ball 7 and the polyurethane plug 5, respectively. A stop plate is fixed to the guide shaft 6 to support the spring 9. The lower side of the support frame 10 abuts against the spring 9, while the upper side of the stop plate abuts against the spring 9. The outer diameter of the handle ball 7 is larger than that of the guide shaft 6, and the support frame 10 is provided with a guide hole that longitudinally slides with the guide shaft 6. The support frame is an L-shaped bracket. The stop plate can be the upper surface of a polyurethane plug. The support frame is a U-shaped frame. The support frame includes an upper support plate and a lower support plate disposed one above the other, each of which has guide holes formed therein. The upper end of the spring abuts against the lower support plate. The lower end of the spring abuts against the upper surface of the polyurethane plug.

[0040] L-shaped mounting plates are installed at both ends of the slurry storage tank 8 in the length direction, and eye screws 3 are connected to the L-shaped mounting plates.

[0041] The two sides of the length direction of the uniform slurry plate 4 are provided with upwardly bent retaining edges.

[0042] The front end of the slurry storage tank 8 is provided with an upper end opening and a guide outlet of the front end opening; the guide outlet is sleeved with the uniform slurry plate 4, and the left and right sides of the guide outlet are detachably connected with the uniform slurry plate 4 through bolts. The height of the guide outlet is lower than the height of the rear side plate of the slurry storage tank 8.

[0043] The bottom of the slurry storage tank 8 is a decreasing part with a decreasing cross-sectional area from top to bottom. The slurry is conveniently gathered and discharged.

[0044] Working principle: the mortar enters from the mortar inlet at the top of the slurry distribution pipe 1, uniformly flows out through the strip-shaped mortar outlet at the bottom of the slurry distribution pipe 1, and enters the bottom of the slurry storage tank 8. Due to the continuous entry of the mortar, the liquid level of the slurry storage tank 8 rises, and when it exceeds the guide outlet of the slurry storage tank 8, the mortar will spread out, and the mortar curtain is formed through the uniform slurry plate 4. By moving the flow limiting plate 2 up and down, the opening degree is adjusted, so that the thickness of the mortar curtain is adjusted.

[0045] When the mortar curtain needs to be cleaned, the remaining mortar in the slurry storage tank 8 needs to be emptied first. At this time, the handle ball 7 is pulled up, the spring 9 is compressed, the polyurethane plug 5 is separated from the bottom surface of the slurry storage tank, the discharge outlet is exposed, the remaining mortar flows out, and then the handle ball is loosened. Through the action of the spring 9, the polyurethane plug 5 blocks the discharge outlet again.

[0046] The above is only the preferred embodiment of the present application, and it should be pointed out that for ordinary skilled persons in the technical field, some improvements and refinements can be made without departing from the principle of the present application, and these improvements and refinements should also be regarded as the protection range of the present application.

Claims

1. A mortar curtain with adjustable thickness, characterized in that: It includes a slurry storage tank, a slurry distribution pipe, a flow limiting plate and a homogenizing plate; The pulp distribution pipe is installed on the top of the pulp storage tank, the top of the pulp distribution pipe is provided with a pulp inlet, and the bottom of the pulp distribution pipe is provided with a strip-shaped pulp outlet; The flow limiting plates are longitudinally slidably connected to both sides of the slurry storage tank, and the flow limiting plates are detachably connected to the slurry storage tank via connecting bolts; The slurry storage tank is divided into a storage area and a slurry discharge area by the flow limiting plate. There is a gap between the bottom of the flow limiting plate and the slurry storage tank, which connects the storage area and the slurry discharge area. The slurry distribution pipe is installed in the storage area, and the slurry discharge area is connected to the homogenizing plate. A discharge outlet is provided at the bottom of the storage area, and a longitudinally movable blocking member is installed in the slurry storage tank. A spring is connected between the blocking member and the slurry storage tank to elastically pressurize the blocking member to block the discharge outlet. The bottom of the blocking member is a blocking portion for blocking the discharge outlet, and the top of the blocking member is a hand-held gripping portion for lifting the blocking member.

2. The mortar curtain with adjustable thickness according to claim 1, characterized in that: The two sides of the flow limiting plate are provided with bent portions, and the bent portions are provided with vertical waist-shaped holes; The slurry storage tank is provided with a circular hole through which the connecting bolt passes; The flow limiting plates are connected by the connecting bolts passing through the waist-shaped holes and the circular holes.

3. The mortar curtain with adjustable thickness according to claim 1, characterized in that: The blocking member includes a handle ball, a guide rod shaft and a polyurethane plug connected in sequence from top to bottom; The handle ball is the handheld gripping portion; The polyurethane plug is the sealing part; A support frame is installed on the side wall of the storage area, and the support frame is longitudinally slidably connected to the guide rod shaft; The spring is sleeved on the guide rod shaft, and the spring is sandwiched between the support frame and the guide rod shaft.

4. The mortar curtain with adjustable thickness according to claim 3, characterized in that: The upper and lower ends of the guide rod shaft are detachably connected to the handle ball and the polyurethane plug respectively; A limiting plate for supporting the spring is fixed on the guide rod shaft; The lower side of the support frame abuts against the spring, and the upper side of the limiting plate abuts against the spring.

5. The mortar curtain with adjustable thickness according to claim 3, characterized in that: The outer diameter of the handle ball is larger than the outer diameter of the guide rod shaft, and the support frame is provided with a guide hole which is longitudinally slidably connected to the guide rod shaft.

6. The mortar curtain with adjustable thickness according to claim 1, characterized in that: L-shaped mounting plates are installed at both ends of the slurry storage tank in the length direction, and eye screws are connected to the L-shaped mounting plates.

7. The mortar curtain with adjustable thickness according to claim 1, characterized in that: Both sides of the homogenizing plate in the length direction are provided with upwardly bent ribs.

8. The mortar curtain with adjustable thickness according to claim 1, characterized in that: The front end of the slurry storage tank is provided with an upper end opening and a lead-out outlet of the front end opening; The outer periphery of the outlet is provided with the homogenizing plate, and the left and right sides of the outlet are detachably connected to the homogenizing plate via bolts.

9. The mortar curtain with adjustable thickness according to claim 8, characterized in that: The height of the guide outlet is lower than the height of the rear side plate of the slurry storage tank.

10. The mortar curtain with adjustable thickness according to claim 1, characterized in that: The bottom of the slurry storage tank is a decreasing portion whose cross-sectional area decreases from top to bottom.

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