Film taking and rolling device for vacuum environment

Abstract

The utility model aims to disclose a film taking rolling device for a vacuum environment, which comprises a support main body, symmetrical track positioning shafts are respectively arranged on the left side and the right side of the support main body, the track positioning shafts are connected through a tension spring, and the track positioning shafts move in a set track; the support body is connected with a rotating shaft which is located below the track positioning shaft, one end of the rotating shaft is connected with the electric clamping jaw fixing plate, and the other end of the rotating shaft is connected with the second deep groove ball bearing. An electric clamping jaw is fixed on the electric clamping jaw fixing plate; an electric linear module is arranged below the support body and connected with the roller support. The rolling position and angle of the film coating roller are adjusted by changing the motion trail of the rotating shaft through the trail positioning shaft, so that the heating film is tightly attached to the aluminum disc, generation of bubbles and mixing of impurities in the bonding process are reduced, and the stability of the thickness of a glue layer and the bonding performance between the aluminum substrate and the heating film are guaranteed.

Description

Technical Field

[0001] The utility model relates to a device for an electrostatic chuck, in particular to a film taking and rolling device used in a vacuum environment. Background Art

[0002] As a core component in semiconductor manufacturing, electrostatic chucks have the advantages of stable adsorption force, controllable temperature and uniform heat transfer, little contamination to wafers, and can be used in high vacuum and plasma environments. They are widely used in manufacturing processes such as etching, ion implantation, physical vapor deposition and chemical vapor deposition.

[0003] An electrostatic chuck consists of a ceramic electrode layer, a heating layer, and a base layer. The heating layer, composed of an aluminum substrate, a heating film, and a glue layer between the aluminum substrate and the heating film, ensures controllable and uniform wafer surface temperature. Designing a film removal and rolling device for use in a vacuum environment is crucial.

[0004] Therefore, there is a particular need for a film taking and rolling device for use in a vacuum environment to solve the above-mentioned existing problems. Utility Model Content

[0005] The purpose of the utility model is to provide a film-taking and rolling device for a vacuum environment. In view of the shortcomings of the existing technology, the device is used to tightly bond the aluminum substrate and the heating film in a vacuum environment, reduce the generation of bubbles and the mixing of impurities during bonding, ensure the stability of the thickness of the glue layer and the adhesion between the aluminum substrate and the heating film, and has a novel structure and ingenious conception.

[0006] The technical problem solved by the present invention can be achieved by adopting the following technical solutions:

[0007] A film-taking and rolling device for a vacuum environment comprises a bracket body, wherein a symmetrical track positioning shaft is provided on each of the left and right sides of the bracket body, the track positioning shaft is connected by a tension spring, and the track positioning shaft moves in a set track; the bracket body is connected to a rotating shaft, the rotating shaft is located below the track positioning shaft, one end of the rotating shaft is connected to an electric clamp fixing plate, and the other end of the rotating shaft is connected to a second deep groove ball bearing; an electric clamp for grabbing a film is fixed on the electric clamp fixing plate; an electric linear module is provided below the bracket body, and the electric linear module is interconnected with the roller bracket.

[0008] In one embodiment of the present invention, the roller bracket is provided with a first reinforcing rib and a second reinforcing rib.

[0009] In one embodiment of the present invention, a roller positioning block is provided at the left and right ends of the roller bracket respectively, and the roller positioning blocks are connected through a roller positioning shaft. A first deep groove ball roller bearing is provided below the roller positioning shaft, and a coating roller is also provided below the roller positioning shaft.

[0010] Furthermore, a laminating bottom plate is provided below the laminating drum.

[0011] Compared with the prior art, the film-taking and rolling device for a vacuum environment of the present invention adjusts the rolling position and angle of the coating roller by changing the motion trajectory of the rotating shaft through the trajectory positioning shaft, so that the heating film is tightly attached to the aluminum plate, which is convenient for the operator to operate, reduces the generation of bubbles and the mixing of impurities during the bonding process, ensures the stability of the thickness of the glue layer and the adhesion between the aluminum substrate and the heating film, and achieves the purpose of the present invention.

[0012] The features of the present invention can be clearly understood by referring to the drawings and the following detailed description of preferred embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic structural diagram of the overall plane of the utility model;

[0014] Figure 2 It is a structural schematic diagram of the roller positioning of the utility model;

[0015] Figure 3 It is a structural diagram of the track positioning of the utility model;

[0016] Figure 4 It is a structural sectional view of the rotary clamping jaw of the present invention.

[0017] Numbers in the figure: 1- bracket body; 2- roller bracket; 3- roller positioning block; 4- roller positioning shaft; 5- first deep groove ball bearing; 6- coating roller; 7- first reinforcing rib; 8- second reinforcing rib; 9- electric linear module; 10- electric clamp; 11- electric clamp fixing plate; 12- rotating shaft; 13- second deep groove ball bearing; 14- track positioning shaft; 15- tension spring; 16- coating bottom plate; 17- film. DETAILED DESCRIPTION

[0018] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. In the description of the present invention, it should be noted that the terms "center," "up," "down," "left," "right," "vertical," "horizontal," "inside," "outside," and the like, indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings and are intended only to facilitate the description of the present invention and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be construed as limiting the present invention. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0019] like Figures 1 to 4 As shown, the film rolling device for vacuum environment of the present invention includes a bracket body 1, and a symmetrical track positioning shaft 14 is provided on the left and right sides of the bracket body 1. The track positioning shaft 14 is connected by a tension spring 15, and the track positioning shaft 14 moves in a set track.

[0020] The bracket body 1 is connected to a rotating shaft 12, which is located below the track positioning shaft 14. One end of the rotating shaft 12 is connected to the electric clamp fixing plate 11, and the other end of the rotating shaft 12 is connected to the second deep groove ball bearing 13. The electric clamp fixing plate 11 is fixed with an electric clamp 10 for grabbing the film.

[0021] An electric linear module 9 is provided below the bracket body 1 . The electric linear module 9 is connected to the roller bracket 2 . The roller bracket 2 is provided with a first reinforcing rib 7 and a second reinforcing rib 8 .

[0022] A roller positioning block 3 is provided at the left and right ends of the roller bracket 2, and the roller positioning block 3 is connected by a roller positioning shaft 4. A first deep groove ball bearing 5 is provided below the roller positioning shaft 4, and a coating roller 6 is also provided below the roller positioning shaft 4. A coating bottom plate 16 is provided below the coating roller 6.

[0023] The working process of the film taking and rolling device for vacuum environment of the utility model is as follows:

[0024] Apply glue evenly on the film-coated base plate 16 to be pressed, clamp the film 17 with the electric clamp 10, and the track positioning shaft 14 controls the clamping angle and position of the electric clamp 10. The roller bracket 2 presses the film 17 and the film-coated base plate 16 back and forth along a straight line, thereby tightly pressing the film 17 on the film-coated base plate 16.

[0025] The film-taking and rolling device for a vacuum environment of the present invention is based on the structure of the electrostatic suction cup heating layer. The track positioning axis changes the motion trajectory of the rotating axis to adjust the rolling position and angle of the coating roller, so that the heating film is tightly attached to the aluminum plate, which is convenient for the operator to operate, reduces the generation of bubbles and the mixing of impurities during the bonding process, and ensures the stability of the glue layer thickness and the adhesion between the aluminum substrate and the heating film.

[0026] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for illustrative purposes. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and improvements shall fall within the scope of the present invention as claimed, and the scope of protection claimed by the present invention shall be defined by the appended claims and their equivalents.

Claims

1. A film rolling device for use in a vacuum environment, characterized in that: It includes a bracket main body, and a symmetrical track positioning shaft is respectively provided on the left and right sides of the bracket main body, and the track positioning shaft is connected by a tension spring, and the track positioning shaft moves in a set track; the bracket main body is connected to a rotating shaft, and the rotating shaft is located below the track positioning shaft, one end of the rotating shaft is connected to the electric clamp fixing plate, and the other end of the rotating shaft is connected to the second deep groove ball bearing; the electric clamp for grabbing the film is fixed on the electric clamp fixing plate; an electric linear module is provided below the bracket main body, and the electric linear module is interconnected with the roller bracket.

2. The film taking and rolling device for vacuum environment according to claim 1, characterized in that: The roller bracket is provided with a first reinforcing rib and a second reinforcing rib.

3. The film taking and rolling device for use in a vacuum environment according to claim 1, wherein: A roller positioning block is respectively provided at the left and right ends of the roller bracket, and the roller positioning blocks are connected through a roller positioning shaft. A first deep groove ball roller bearing is provided below the roller positioning shaft, and a coating roller is also provided below the roller positioning shaft.

4. The film taking and rolling device for use in a vacuum environment according to claim 3, characterized in that: A film laminating bottom plate is provided below the film laminating roller.

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