Test machine self-locking device and wafer detection system

Abstract

The utility model provides a test machine self-locking device and a wafer detection system, the self-locking device is used for locking a test machine to a probe station, the self-locking device comprises a locking mechanism and a locking mechanism, the locking mechanism is arranged on the test machine, the locking mechanism comprises a fixed plate and a first fixed structure which are connected, the fixed plate is fixed on the test machine, and the first fixed structure is fixed on the test machine. The first fixing structure is fixed on the fixing plate, the locking mechanism is arranged on the probe table or on the rack adjacent to the probe table, the locking mechanism comprises a fixing base and a first limiting piece, the fixing base is arranged on the probe table or on the rack adjacent to the probe table, the first limiting piece is arranged on the fixing base, a first limiting groove is formed in the first limiting piece, and the first limiting groove is matched with the first limiting groove. The first limiting groove is used for abutting against and limiting the first fixing structure so as to limit the test machine, so that the test machine is effectively fixed on the probe station, the phenomenon that the heavy test machine is easy to shake when being located on the probe station is avoided, and the stability of the test machine is improved.

Description

Technical Field

[0001] The present application relates to the technical field of wafer detection systems, and in particular to a self-locking device for a test machine and a wafer detection system. Background Art

[0002] When performing wafer inspection, the tester needs to be placed above the probe station and docked with the probe station. As the size of wafer chips becomes smaller and smaller and the functional circuits become more and more complex, the size and weight of the tester continue to increase. The heavier tester is prone to shaking when placed on the probe station. How to effectively fix the tester on the probe station has become a technical problem that needs to be solved. Utility Model Content

[0003] The purpose of this application is to provide a self-locking device for a tester and a wafer detection system to solve the technical problem of how to effectively fix the tester on a probe station.

[0004] In a first aspect, the present application provides a self-locking device for a test machine, the self-locking device being used to lock the test machine to a probe station, the self-locking device comprising:

[0005] A locking mechanism, the locking mechanism being provided on the testing machine, the locking mechanism comprising a connected fixing plate and a first fixing structure, the fixing plate being fixed on the testing machine, and the first fixing structure being fixed on the fixing plate;

[0006] A locking mechanism, wherein the locking mechanism is arranged on the probe station or on a rack adjacent to the probe station, the locking mechanism includes a fixed base and a first limiting member, the fixed base is arranged on the probe station or on a rack adjacent to the probe station, the first limiting member is arranged on the fixed base, and a first limiting groove is provided on the first limiting member, the first limiting groove is used to abut and limit the first fixed structure to limit the testing machine.

[0007] In the self-locking device provided in the present application, a locking mechanism is arranged on the test machine, and the locking mechanism includes a connected fixing plate and a first fixing structure, the fixing plate is fixed on the test machine, the first fixing structure is fixed on the fixing plate, and the locking mechanism is arranged on the probe table or on a rack adjacent to the probe table. The locking mechanism includes a fixed base and a first limiting member, the fixed base is arranged on the probe table or on a rack adjacent to the probe table, the first limiting member is arranged on the fixed base, and the first limiting member is provided with a first limiting groove, the first limiting groove is used to abut and limit the first fixing structure to limit the test machine, thereby effectively fixing the test machine on the probe table, avoiding the phenomenon of shaking when the heavy test machine is on the probe table, and improving the stability of the test machine.

[0008] Wherein, the locking mechanism further includes a second fixing structure, the second fixing structure is fixed to the fixing plate, and the second fixing structure and the first fixing structure are spaced apart and arranged at both ends of the fixing plate;

[0009] The locking mechanism also includes a second limiting member, which is arranged on the fixed base and is spaced apart from the first limiting member at both ends of the fixed base. The second limiting member is provided with a second limiting groove, and the second limiting groove is used to abut and limit the second fixed structure to limit the testing machine.

[0010] In which, the locking mechanism also includes an electrically connected light sensor and a controller. The light sensor is arranged on the first limiting member. The light sensor passes through the first limiting groove and emits detection light into the first limiting groove. The light sensor is used to detect the first fixed structure and generate a detection signal to the controller. The controller is used to control the testing machine to stop moving according to the detection signal.

[0011] The first fixing structure includes a first fixing bar and a first cam assembly, wherein the first fixing bar is connected to the fixing plate, and the first cam assembly is arranged on a side of the first fixing bar away from the fixing plate. The shape of the first cam assembly corresponds to the shape of the first limiting groove, and the first cam assembly is arranged in the first limiting groove and abuts against the groove wall of the first limiting groove;

[0012] The second fixing structure includes a second fixing bar and a second cam assembly, the second fixing bar is connected to the fixing plate, the second cam assembly is arranged on the side of the second fixing bar away from the fixing plate, the shape of the second cam assembly corresponds to the shape of the second limiting groove, and the second cam assembly is arranged in the second limiting groove and abuts against the groove wall of the second limiting groove.

[0013] The first fixing bar is provided with a plurality of first waist-shaped holes. When the test machine is placed on the probe table, the first waist-shaped holes extend in the height direction. The fixing plate is provided with a plurality of first fixing holes. A plurality of first fixing members pass through the first waist-shaped holes and are fixed in the first fixing holes. The first fixing bar can move relative to the fixing plate in the height direction.

[0014] The second fixing bar is provided with a plurality of second waist-shaped holes. When the testing machine is placed on the probe table, the second waist-shaped holes extend along the height direction. The fixing plate is provided with a plurality of second fixing holes. A plurality of second fixing members pass through the second waist-shaped holes and are fixed in the second fixing holes. The second fixing bar can move along the height direction relative to the fixing plate.

[0015] Among them, the fixing plate is provided with a plurality of third waist-shaped holes, and the third waist-shaped holes extend along the length direction. The testing machine is provided with a plurality of third fixing holes, and a plurality of third fixing parts pass through the third waist-shaped holes and are fixed in the third fixing holes. The fixing plate can move along the length direction relative to the testing machine.

[0016] The locking mechanism further comprises a first hinge seat and a first locking member, the first hinge seat and the first limiting member are arranged along the width direction, one end of the first locking member is rotatably connected to the first hinge seat, and the first locking member is provided with a first locking groove at one end close to the first hinge seat, and the first locking member can be rotated relative to the first hinge seat so that the first locking groove accommodates the first cam assembly, thereby limiting the first cam assembly and the testing machine;

[0017] The locking mechanism also includes a second hinge seat and a second locking member. The second hinge seat and the second limiting member are arranged along the width direction. One end of the second locking member is rotatably connected to the second hinge seat. The second locking member is provided with a second locking groove at one end close to the second hinge seat. The second locking member can be rotated relative to the second hinge seat so that the second locking groove can accommodate the second cam assembly to limit the second cam assembly and the testing machine.

[0018] In which, the locking mechanism also includes a cylinder seat and a driving cylinder. The cylinder seat is arranged on the fixed base and is spaced apart from the first hinge seat. One end of the driving cylinder is rotatably connected to the cylinder seat, and the other end is rotatably connected to the end of the first locking member away from the first hinge seat. The driving cylinder is used to drive the first locking member to move away from the end of the first hinge seat so that the first locking member rotates around the first hinge seat.

[0019] Wherein, the locking mechanism further includes a connecting rod, which rotatably connects the first locking member and the second locking member, and the first locking member drives the second locking member to rotate synchronously through the connecting rod.

[0020] The first cam assembly includes a first cam member and a first spacer block. The first cam member includes a first camshaft, a first cam, and a first nut. The first camshaft passes through the first fixing bar. The first cam ring is disposed on the outer periphery of the first camshaft and is rotatable relative to the first camshaft. The first nut is disposed at an end of the first camshaft away from the first cam and locks the first cam to the first fixing bar. The first spacer block is disposed between the first fixing bar and the first cam.

[0021] The second cam assembly comprises a second cam member and a second spacer block, the second cam member comprises a second cam shaft, a second cam and a second nut, the second cam shaft penetrates the second fixed strip, the second cam ring is arranged outside the periphery of the second cam shaft and can rotate relative to the second cam shaft, and the second nut is arranged at one end of the second cam shaft away from the second cam and locks the second cam on the second fixed strip, and the second spacer block is arranged between the second fixed strip and the second cam.

[0022] The diameter of the first locking groove is greater than the diameter of the first cam, and the difference α between the diameter of the first locking groove and the diameter of the first cam satisfies the range: 0.5mm≤α≤1mm.

[0023] The diameter of the second locking groove is greater than the diameter of the second cam, and the difference α between the diameter of the second locking groove and the diameter of the second cam satisfies the range: 0.5mm≤α≤1mm.

[0024] In a second aspect, the application provides a wafer detection system, which comprises a probe station, a test machine, a turnover device and the self-locking device, the turnover device is used for turning over the test machine to the probe station, and the self-locking device is used for locking the test machine to the probe station.

[0025] In the wafer detection system provided by the application, the locking mechanism is arranged on the test machine, the locking mechanism comprises a fixed plate and a first fixed structure connected with each other, the fixed plate is fixed on the test machine, the first fixed structure is fixed on the fixed plate, the locking mechanism is arranged on the probe station or a rack adjacent to the probe station, the locking mechanism comprises a fixed base and a first limiting piece, the fixed base is arranged on the probe station or the rack adjacent to the probe station, the first limiting piece is arranged on the fixed base, the first limiting piece is provided with a first limiting groove, the first limiting groove is used for abutting and limiting the first fixed structure to limit the test machine, thereby effectively fixing the test machine on the probe station, avoiding the phenomenon that the test machine with large weight shakes when being located on the probe station, improving the stability of the test machine, and further improving the safety performance of the wafer detection system. BRIEF DESCRIPTION OF DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the embodiments of the application, the following will briefly introduce the drawings needed to be used in the embodiments. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0027] Figure 1 It is a structural schematic diagram of a wafer detection system provided by the embodiment of the application;

[0028] Figure 2 This is a structural diagram of a locking mechanism provided in an embodiment of the present application provided on a testing machine;

[0029] Figure 3 This is a structural diagram of a locking mechanism provided in an embodiment of the present application;

[0030] Figure 4 This is a schematic diagram of a locking mechanism and a locking mechanism provided in the embodiment of the present application. Figure 1 ;

[0031] Figure 5 This is a structural diagram of a first fixing structure and a second fixing structure provided in an embodiment of the present application;

[0032] Figure 6 This is an exploded schematic diagram of a locking mechanism and a testing machine provided in an embodiment of the present application;

[0033] Figure 7 This is a schematic diagram of a locking mechanism and a locking mechanism provided in the embodiment of the present application. Figure 2 .

[0034] Description of labels:

[0035] Wafer inspection system 1000, probe station 200, tester 300, third fixing hole 301, flip device 400, self-locking device 100, locking mechanism 10, fixing plate 11, first fixing hole 111, second fixing hole 112, third waist-shaped hole 113, first fixing structure 12, first fixing bar 121, first waist-shaped hole 1211, first cam assembly 122, first cam member 1221, first spacer block 1222, second fixing structure 13, second fixing bar 131, second waist-shaped hole The molded hole 1311, the second cam assembly 132, the second cam member 1321, the second spacer block 1322, the locking mechanism 20, the fixed base 21, the first limiting member 22, the first limiting groove 221, the second limiting member 23, the second limiting groove 231, the light sensor 24, the first hinge seat 25, the first locking member 26, the first locking groove 261, the second hinge seat 27, the second locking member 28, the second locking groove 281, the cylinder seat 291, the driving cylinder 292, and the connecting rod 293. DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0037] It should be noted that the terms "first," "second," and so on in the specification, claims, and drawings of this application are used to distinguish different objects, rather than to describe a specific order. Furthermore, the terms "including," "having," and any variations thereof are intended to cover non-exclusive inclusions.

[0038] In this specification, for convenience, words and phrases indicating orientation or positional relationships, such as "middle," "upper," "lower," "front," "back," "vertical," "horizontal," "top," "bottom," "inside," and "outside," are used to illustrate the positional relationships of constituent elements with reference to the accompanying drawings. This is merely for the purpose of facilitating the description of this specification and simplifying the description, and is not intended to indicate or imply that the device or element referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present disclosure. The positional relationships of constituent elements may be appropriately changed depending on the orientation of the constituent elements being described. Therefore, the present disclosure is not limited to the words and phrases described in the specification and may be appropriately replaced depending on the circumstances.

[0039] In this specification, unless otherwise specified or limited, the terms "mounted," "connected," and "connected" should be interpreted broadly. For example, they can refer to fixed, removable, or integral connections; mechanical or electrical connections; direct connections, indirect connections through intermediaries, or internal communication between two components. Those skilled in the art will understand the meaning of these terms in this disclosure based on the specific circumstances.

[0040] When performing wafer inspection, the tester needs to be placed above the probe station and docked with the probe station. As the size of wafer chips becomes smaller and smaller and the functional circuits become more and more complex, the size and weight of the tester continue to increase. The heavier tester is prone to shaking when placed on the probe station. How to effectively fix the tester on the probe station has become a technical problem that needs to be solved.

[0041] Please refer to Figures 1 to 4 , Figure 1 is a structural diagram of a wafer inspection system provided in an embodiment of the present application. Figure 2 This is a structural diagram of a locking mechanism provided in an embodiment of the present application provided on a testing machine. Figure 3 This is a structural diagram of a locking mechanism provided in an embodiment of the present application. Figure 4 This is a schematic diagram of a locking mechanism and a locking mechanism provided in the embodiment of the present application. Figure 1 .

[0042] The present application provides a tester self-locking device 100 and a wafer inspection system 1000. The wafer inspection system 1000 includes a probe station 200, a tester 300, a flipping device 400, and a self-locking device 100. The flipping device 400 is used to flip the tester 300 onto the probe station 200, and the self-locking device 100 is used to lock the tester 300 onto the probe station 200, so as to solve the technical problem of how to effectively fix the tester 300 on the probe station 200.

[0043] It should be noted that, in this embodiment, the self-locking device 100 is applied to the wafer detection system 1000 and is used to lock the test machine 300 to the probe station 200. In other embodiments, the self-locking device 100 can also be applied to other mechanical equipment to lock one device to another device. This application does not impose any restrictions on this.

[0044] The self-locking device 100 includes a locking mechanism 10 and a locking mechanism 20. The locking mechanism 10 is provided on the testing machine 300 and includes a connected fixing plate 11 and a first fixing structure 12. The fixing plate 11 is fixed to the testing machine 300, and the first fixing structure 12 is fixed to the fixing plate 11.

[0045] The locking mechanism 20 is arranged on the probe station 200 or on a rack adjacent to the probe station 200. The locking mechanism 20 includes a fixed base 21 and a first limiting member 22. The fixed base 21 is arranged on the probe station 200 or on a rack adjacent to the probe station 200. The first limiting member 22 is arranged on the fixed base 21. The first limiting member 22 is provided with a first limiting groove 221. The first limiting groove 221 is used to abut and limit the first fixed structure 12 to limit the testing machine 300.

[0046] The self-locking device 100 includes the locking mechanism 10 and the locking mechanism 20. It should be noted that the locking mechanism 10 and the locking mechanism 20 can be separated or abutted against each other. Specifically, when the test machine 300 is not located above the probe station 200, the locking mechanism 10 and the locking mechanism 20 can be separate structures. When the test machine 300 is located above the probe station 200, the locking mechanism 10 abuts against the locking mechanism 20 to limit and fix the test machine 300 on the probe station 200.

[0047] The locking mechanism 10 is provided on a side of the test machine 300 facing away from the flipping device 400. When the flipping device 400 flips the test machine 300 onto the probe station 200, one end of the test machine 300 is fixed on the flipping device 400, and the locking mechanism 10 and the locking mechanism 20 at the other end cooperate to limit and fix the other end of the test machine 300, thereby making both ends of the test machine 300 in a fixed and stable state, thereby effectively fixing the test machine 300 on the probe station 200 and improving the stability of the test machine 300.

[0048] Furthermore, the locking mechanism 10 includes the fixing plate 11 and the first fixing structure 12. The fixing plate 11 is fixed to the testing machine 300 and is provided on the side of the testing machine 300 facing away from the flipping device 400. The first fixing structure 12 is fixed to the fixing plate 11. The first fixing structure 12 can be moved and fine-tuned relative to the fixing plate 11 along the height direction H so that the first fixing structure 12 can effectively abut the first limiting groove 221 of the first limiting member 22 in the height direction H. The corresponding implementation structure of the first fixing structure 12 relative to the fixing plate 11 along the height direction H will be described in detail later. In addition, the fixing plate 11 can be moved and fine-tuned relative to the testing machine 300 along the length direction L so that the position of the first fixing structure 12 can correspond to the first limiting groove 221 and be located within the first limiting groove 221 in the length direction L. The corresponding implementation structure of the fixing plate 11 being able to be fine-tuned relative to the testing machine 300 along the length direction L will be described in detail later.

[0049] The locking mechanism 20 includes the fixed base 21 and the first limiting member 22. The fixed base 21 is arranged on the probe station 200 or on a rack adjacent to the probe station 200. Optionally, the connection method between the fixed base 21 and the probe station 200 or the rack includes but is not limited to a threaded connection.

[0050] In which, a first limiting groove 221 is provided on the first limiting member 22, and the shape of the first limiting groove 221 corresponds to the shape of the first fixing structure 12. The first limiting groove 221 can be used to accommodate and abut at least part of the first fixing structure 12 to limit and fix the first fixing structure 12.

[0051] The self-locking device 100 provided in the application, the locking mechanism 10 is arranged on the test machine 300, the locking mechanism 10 comprises a fixed plate 11 and a first fixed structure 12 connected with each other, the fixed plate 11 is fixed on the test machine 300, the first fixed structure 12 is fixed on the fixed plate 11, the locking mechanism 20 is arranged on the probe table 200 or the rack adjacent to the probe table 200, the locking mechanism 20 comprises a fixed base 21 and a first limiting piece 22, the fixed base 21 is arranged on the probe table 200 or the rack adjacent to the probe table 200, the first limiting piece 22 is arranged on the fixed base 21, the first limiting piece 22 is provided with a first limiting groove 221, the first limiting groove 221 is used for abutting and limiting the first fixed structure 12, so as to limit the test machine 300, thereby effectively fixing the test machine 300 on the probe table 200, avoiding the phenomenon that the test machine 300 with large weight is easy to shake when being located on the probe table 200, and improving the stability of the test machine 300.

[0052] In an embodiment, the locking mechanism 10 further comprises a second fixed structure 13, the second fixed structure 13 is fixed on the fixed plate 11, and the second fixed structure 13 and the first fixed structure 12 are arranged at two ends of the fixed plate 11.

[0053] The locking mechanism 20 further comprises a second limiting piece 23, the second limiting piece 23 is arranged on the fixed base 21 and is arranged at two ends of the fixed base 21 apart from the first limiting piece 22, the second limiting piece 23 is provided with a second limiting groove 231, the second limiting groove 231 is used for abutting and limiting the second fixed structure 13, so as to limit the test machine 300.

[0054] Specifically, the second fixed structure 13 is fixed on the fixed plate 11, the second fixed structure 13 can be finely adjusted along the height direction H relative to the fixed plate 11, so that the second fixed structure 13 can effectively abut the second limiting groove 231 of the second limiting piece 23 in the height direction H, and the corresponding implementation structure of the fine adjustment of the second fixed structure 13 along the height direction H relative to the fixed plate 11 is described in detail below. Moreover, the fixed plate 11 can be finely adjusted along the length direction L relative to the test machine 300, so that the position of the second fixed structure 13 can correspond to the second limiting groove 231 and be located in the second limiting groove 231 in the length direction L.

[0055] Specifically, a second limiting groove 231 is provided on the second limiting member 23, and the shape of the second limiting groove 231 corresponds to the shape of the second fixing structure 13. The second limiting groove 231 can be used to accommodate and abut at least part of the second fixing structure 13 to limit and fix the second fixing structure 13.

[0056] The locking mechanism 10 includes a first fixing structure 12 and a second fixing structure 13 arranged at intervals, and the locking mechanism 20 includes a first limiting member 22 and a second limiting member 23 arranged at intervals, and the first limiting member 22 abuts and limits the first fixing structure 12, and the second limiting member 23 abuts and limits the second fixing structure 13, so that both ends of the locking mechanism 10 abut and limit the locking mechanism 20, thereby improving the abutment and fixation stability of the locking mechanism 10 and the locking mechanism 20, so as to improve the fixing stability of the testing machine 300.

[0057] In one embodiment, the locking mechanism 20 also includes an electrically connected light sensor 24 and a controller (not shown), wherein the light sensor 24 is provided on the first limiting member 22, and the light sensor 24 passes through the first limiting groove 221 and emits detection light toward the first limiting groove 221. The light sensor 24 is used to detect the first fixed structure 12 and generate a detection signal to the controller, and the controller is used to control the testing machine 300 to stop moving according to the detection signal.

[0058] Specifically, the flipping device 400 drives the test machine 300 to flip until the first fixed structure 12 in the locking mechanism 10 on the test machine 300 abuts against the first limiting groove 221. The light sensor 24 detects the first fixed structure 12 and generates a corresponding detection signal to the controller. The controller is used to control the flipping device 400 to stop flipping the test machine 300 according to the detection signal, and then control the test machine 300 to stop moving.

[0059] It should be noted that, in one embodiment, the light sensor 24 can also be arranged on the second limiting member 23, and the light sensor 24 passes through the second limiting groove 231 and emits detection light toward the second limiting groove 231. The light sensor 24 is used to detect the second fixed structure 13 and generate a detection signal to the controller. The controller is used to control the testing machine 300 to stop moving according to the detection signal. This application does not impose any restrictions on this.

[0060] In one embodiment, the number of the light sensors 24 can also be two, and one of the light sensors 24 is provided on the first limiting member 22 and is used to detect the first fixed structure 12, and the other light sensor 24 is provided on the second limiting member 23 and is used to detect the second fixed structure 13, so as to improve the accuracy of the position detection of the testing machine 300. This application does not impose any restrictions on this.

[0061] Please refer to Figure 1 、 Figures 4 to 6 , Figure 5 This is a structural diagram of a first fixing structure and a second fixing structure provided in an embodiment of the present application. Figure 6 It is an exploded schematic diagram of a locking mechanism and a testing machine provided in an embodiment of the present application.

[0062] In one embodiment, the first fixing structure 12 includes a first fixing bar 121 and a first cam assembly 122, the first fixing bar 121 is connected to the fixing plate 11, the first cam assembly 122 is arranged on the side of the first fixing bar 121 away from the fixing plate 11, the shape of the first cam assembly 122 corresponds to the shape of the first limiting groove 221, and the first cam assembly 122 is arranged in the first limiting groove 221 and abuts against the groove wall of the first limiting groove 221.

[0063] Furthermore, the first fixing bar 121 is provided with a plurality of first waist-shaped holes 1211. When the testing machine 300 is arranged on the probe station 200, the first waist-shaped holes 1211 extend along the height direction H. The fixing plate 11 is provided with a plurality of first fixing holes 111. A plurality of first fixing members pass through the first waist-shaped holes 1211 and are fixed in the first fixing holes 111. The first fixing bar 121 can move relative to the fixing plate 11 along the height direction H.

[0064] The first fixing bar 121 can move relative to the fixing plate 11 along the height direction H, thereby driving the first cam assembly 122 to move along the height direction H, so that the user can fine-tune the position of the first cam assembly 122 in the height direction H, so that the first cam assembly 122 can be effectively located in the first limiting groove 221 and abut the first limiting groove 221, so as to effectively limit the first fixing structure 12 and the testing machine 300.

[0065] The second fixing structure 13 includes a second fixing bar 131 and a second cam assembly 132. The second fixing bar 131 is connected to the fixing plate 11. The second cam assembly 132 is arranged on the side of the second fixing bar 131 away from the fixing plate 11. The shape of the second cam assembly 132 corresponds to the shape of the second limiting groove 231. The second cam assembly 132 is arranged in the second limiting groove 231 and abuts against the groove wall of the second limiting groove 231.

[0066] Furthermore, the second fixing bar 131 is provided with a plurality of second waist-shaped holes 1311. When the testing machine 300 is arranged on the probe station 200, the second waist-shaped holes 1311 extend along the height direction H. The fixing plate 11 is provided with a plurality of second fixing holes 112. A plurality of second fixing parts pass through the second waist-shaped holes 1311 and are fixed in the second fixing holes 112. The second fixing bar 131 can move along the height direction H relative to the fixing plate 11.

[0067] The second fixing bar 131 can move relative to the fixing plate 11 along the height direction H, thereby driving the second cam assembly 132 to move along the height direction H, so that the user can fine-tune the position of the second cam assembly 132 in the height direction H, so that the second cam assembly 132 can be effectively located in the second limiting groove 231 and abut the second limiting groove 231, so as to effectively limit the second fixing structure 13 and the testing machine 300.

[0068] In one embodiment, the fixing plate 11 is provided with a plurality of third waist-shaped holes 113, and the third waist-shaped holes 113 extend along the length direction L. The testing machine 300 is provided with a plurality of third fixing holes 301, and a plurality of third fixing parts pass through the third waist-shaped holes 113 and are fixed in the third fixing holes 301. The fixing plate 11 can move along the length direction L relative to the testing machine 300.

[0069] The fixing plate 11 can move relative to the testing machine 300 along the length direction L, and drive the first fixing bar 121 and the second fixing bar 131 to move along the length direction L, thereby driving the first cam assembly 122 and the second cam assembly 132 to move along the length direction L, so that the user can fine-tune the positions of the first cam assembly 122 and the second cam assembly 132 in the length direction L, so that the position of the first fixing structure 12 can correspond to the first limiting groove 221 and be located in the first limiting groove 221 in the length direction L, and the position of the second fixing structure 13 can correspond to the second limiting groove 231 and be located in the second limiting groove 231 in the length direction L, thereby effectively limiting the first fixing structure 12, the second fixing structure 13 and the testing machine 300.

[0070] Please refer to Figures 1 to 4 、 Figure 7 , Figure 7 This is a schematic diagram of a locking mechanism and a locking mechanism provided in the embodiment of the present application. Figure 2 .

[0071] In one embodiment, the locking mechanism 20 also includes a first hinge seat 25 and a first locking member 26. The first hinge seat 25 and the first limiting member 22 are arranged along the width direction W. One end of the first locking member 26 is rotatably connected to the first hinge seat 25. The first locking member 26 is provided with a first locking groove 261 at one end close to the first hinge seat 25. The first locking member 26 can be rotated relative to the first hinge seat 25 so that the first locking groove 261 accommodates the first cam assembly 122 to limit the first cam assembly 122 and the testing machine 300.

[0072] The locking mechanism 20 also includes a second hinge seat 27 and a second locking member 28. The second hinge seat 27 and the second limiting member 23 are arranged along the width direction W. One end of the second locking member 28 is rotatably connected to the second hinge seat 27. The second locking member 28 is provided with a second locking groove 281 at one end close to the second hinge seat 27. The second locking member 28 can be rotated relative to the second hinge seat 27 so that the second locking groove 281 accommodates the second cam assembly 132 to limit the second cam assembly 132 and the testing machine 300.

[0073] Specifically, when the flipping device 400 flips the test machine 300 to above the probe station 200, the first locking member 26 can rotate around the first hinge seat 25 so that the first locking groove 261 can accommodate the first cam assembly 122, limiting the first cam assembly 122 from disengaging from the first limiting groove 221, thereby limiting the first cam assembly 122 and the first fixed structure 12; the second locking member 28 can rotate around the second hinge seat 27 so that the second locking groove 281 can accommodate the second cam assembly 132, limiting the second cam assembly 132 from disengaging from the second limiting groove 231, thereby limiting the second cam assembly 132 and the second fixed structure 13, thereby locking the test machine 300 above the probe station 200, further improving the stability of the test machine 300 located above the probe station 200. Figure 7 As shown, the locking mechanism 10 and the locking mechanism 20 are in a mutually locked state, the first cam assembly 122 is disposed in the first locking groove 261 , and the second cam assembly 132 is disposed in the second locking groove 281 .

[0074] When the test machine 300 needs to be separated from the probe station 200, the first locking member 26 can be rotated around the first hinge seat 25 so that the first cam assembly 122 is not located in the first locking groove 261. Similarly, the second locking member 28 can be rotated around the second hinge seat 27 so that the second cam assembly 132 is not located in the second locking groove 281, so that the locking mechanism 10 can be separated from the locking mechanism 20. Figure 4 shown.

[0075] For further information, please refer to Figures 1 to 4 、 Figure 7 In one embodiment, the locking mechanism 20 further includes a cylinder seat 291 and a driving cylinder 292. The cylinder seat 291 is arranged on the fixed base 21 and is spaced apart from the first hinge seat 25. One end of the driving cylinder 292 is rotatably connected to the cylinder seat 291, and the other end is rotatably connected to the end of the first locking member 26 away from the first hinge seat 25. The driving cylinder 292 is used to drive the first locking member 26 to move away from the end of the first hinge seat 25 so that the first locking member 26 rotates around the first hinge seat 25.

[0076] Specifically, when the driving cylinder 292 retracts, it drives the first locking member 26 to rotate clockwise around the first hinge seat 25, and the driving cylinder 292 rotates counterclockwise around the cylinder seat 291 to cooperate with the movement of the first locking member 26. When the driving cylinder 292 extends, it drives the first locking member 26 to rotate counterclockwise around the first hinge seat 25, and the driving cylinder 292 rotates clockwise around the cylinder seat 291 to cooperate with the movement of the first locking member 26.

[0077] The locking mechanism 20 further includes a connecting rod 293 , which rotatably connects the first locking member 26 and the second locking member 28 . The first locking member 26 drives the second locking member 28 to rotate synchronously through the connecting rod 293 .

[0078] While the driving cylinder 292 drives the first locking member 26 to rotate around the first hinge seat 25, it can also drive the second locking member 28 to rotate synchronously around the second hinge seat 27 through the connecting rod 293, so as to achieve synchronous locking or synchronous release of the first cam assembly 122 and the second cam assembly 132, thereby improving the locking and matching efficiency of the locking mechanism 20 and the locking mechanism 10.

[0079] Please refer to Figures 1 to 5 In one embodiment, the first cam assembly 122 includes a first cam member 1221 and a first spacer block 1222. The first cam member 1221 includes a first cam shaft, a first cam and a first nut. The first cam shaft passes through the first fixing bar 121. The first cam ring is arranged on the outer periphery of the first cam shaft and can rotate relative to the first cam shaft. The first nut is arranged at an end of the first cam shaft away from the first cam and locks the first cam to the first fixing bar 121. The first spacer block 1222 is arranged between the first fixing bar 121 and the first cam.

[0080] The first cam ring is provided on the outer periphery of the first cam shaft and can rotate relative to the first cam shaft. On the first hand, when the first cam moves into the first limiting groove 221, if the first cam interferes with the first limiting groove 221, the first cam will rotate to avoid the first cam and the first limiting groove 221 from interfering with each other and causing damage, etc.; on the second hand, when the first locking member 26 rotates around the first hinge seat 25 and interferes with the first cam, if the first cam interferes with the first locking groove 261, the first cam will rotate to avoid the first cam and the first locking groove 261 from interfering with each other and causing damage, etc.

[0081] The second cam assembly 132 includes a second cam member 1321 and a second spacer block 1322. The second cam member 1321 includes a second cam shaft, a second cam and a second nut. The second cam shaft passes through the second fixing bar 131. The second cam ring is arranged on the outer periphery of the second cam shaft and can rotate relative to the second cam shaft. The second nut is arranged at an end of the second cam shaft away from the second cam and locks the second cam on the second fixing bar 131. The second spacer block 1322 is arranged between the second fixing bar 131 and the second cam.

[0082] The second cam ring is provided on the outer periphery of the second cam shaft and can rotate relative to the second cam shaft. On the second aspect, when the second cam moves into the second limiting groove 231, if the second cam interferes with the second limiting groove 231, the second cam will rotate to avoid the second cam and the second limiting groove 231 from interfering with each other and causing damage. On the second aspect, when the second locking member 28 rotates around the second hinge seat 27 and interferes with the second cam, if the second cam interferes with the second locking groove 281, the second cam will rotate to avoid the second cam and the second locking groove 281 from interfering with each other and causing damage.

[0083] Please refer to Figures 1 to 4 、 Figure 7 In one embodiment, the diameter of the first locking groove 261 is greater than the diameter of the first cam, and the difference α between the diameter of the first locking groove 261 and the diameter of the first cam satisfies the range: 0.5mm≤α≤1mm.

[0084] The diameter of the first locking groove 261 is larger than the diameter of the first cam, which can prevent interference between the first locking groove 261 and the first cam, potentially damaging the first cam, when the first locking member 26 rotates about the first hinge seat 25. Optionally, the difference α between the diameter of the first locking groove 261 and the diameter of the first cam can be 0.5 mm, 0.6 mm, 0.7 mm, 0.8 mm, 0.9 mm, 1 mm, or other values ​​within a range of 0.5 mm to 1 mm.

[0085] The diameter of the second locking groove 281 is greater than the diameter of the second cam, and a difference α between the diameter of the second locking groove 281 and the diameter of the second cam satisfies the range: 0.5 mm ≤ α ≤ 1 mm.

[0086] The diameter of the second locking groove 281 is larger than the diameter of the second cam, which can prevent interference between the second locking groove 281 and the second cam, potentially damaging the second cam, when the second locking member 28 rotates about the second hinge seat 27. Optionally, the difference α between the diameter of the second locking groove 281 and the diameter of the second cam can be 0.5 mm, 0.6 mm, 0.7 mm, 0.8 mm, 0.9 mm, 1 mm, or other values ​​within a range of 0.5 mm to 1 mm.

[0087] It should be noted that, in one embodiment, the driving cylinder 292 and the light sensor 24 are both electrically connected to the controller. When the light sensor 24 detects the first cam assembly 122 or the second cam assembly 132, the driving cylinder 292 will drive the first locking member 26 and the second locking member 28 to rotate and lock the first cam assembly 122 and the second cam assembly 132. This can avoid the first locking member 26 and the second locking member 28 from being locked when the first cam assembly 122 and the second cam assembly 132 do not enter the first limiting groove 221 and the second limiting groove 231, and avoid the first cam assembly 122 and the second cam assembly 132 from interfering with the first locking member 26 and the second locking member 28 to cause damage and other problems.

[0088] Please refer to Figures 1 to 4 The present application provides a wafer detection system 1000, which includes the probe station 200, the test machine 300, the flipping device 400 and the self-locking device 100. The flipping device 400 is used to flip the test machine 300 onto the probe station 200, and the self-locking device 100 is used to lock the test machine 300 onto the probe station 200.

[0089] In the wafer detection system 1000 provided in the present application, the locking mechanism 10 is arranged on the test machine 300, and the locking mechanism 10 includes a connected fixing plate 11 and a first fixing structure 12, the fixing plate 11 is fixed on the test machine 300, and the first fixing structure 12 is fixed on the fixing plate 11, the locking mechanism 20 is arranged on the probe station 200 or on a rack adjacent to the probe station 200, the locking mechanism 20 includes a fixed base 21 and a first limiter 22, the fixed base 21 is arranged on the probe station 200 or on a rack adjacent to the probe station 200 On the rack adjacent to the platform 200, the first limiting member 22 is arranged on the fixed base 21, and the first limiting member 22 is provided with a first limiting groove 221. The first limiting groove 221 is used to abut and limit the first fixed structure 12 to limit the test machine 300, thereby effectively fixing the test machine 300 on the probe platform 200, avoiding the heavy weight of the test machine 300 from shaking when it is located on the probe platform 200, improving the stability of the test machine 300, and thereby improving the safety performance of the wafer detection system 1000.

[0090] Mentioning "embodiments" and "implementation methods" in this application means that the specific features, structures or characteristics described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrases in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described in this application can be combined with other embodiments. In addition, it should be understood that the features, structures or characteristics described in the various embodiments of the present application can be arbitrarily combined to form another embodiment that does not deviate from the spirit and scope of the technical solution of the present application, unless there is a contradiction between them.

[0091] The above is part of the implementation methods of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present application. These improvements and modifications are also considered to be within the scope of protection of the present application.

Claims

1. A self-locking device for a testing machine, characterized in that: Used to lock the test machine to the probe table, the self-locking device includes: A locking mechanism, the locking mechanism being provided on the testing machine, the locking mechanism comprising a connected fixing plate and a first fixing structure, the fixing plate being fixed on the testing machine, and the first fixing structure being fixed on the fixing plate; A locking mechanism, wherein the locking mechanism is arranged on the probe station or on a rack adjacent to the probe station, the locking mechanism includes a fixed base and a first limiting member, the fixed base is arranged on the probe station or on a rack adjacent to the probe station, the first limiting member is arranged on the fixed base, and a first limiting groove is provided on the first limiting member, the first limiting groove is used to abut and limit the first fixed structure to limit the testing machine.

2. The self-locking device according to claim 1, characterized in that: The locking mechanism further includes a second fixing structure, the second fixing structure is fixed to the fixing plate, and the second fixing structure and the first fixing structure are spaced apart at two ends of the fixing plate; The locking mechanism also includes a second limiting member, which is arranged on the fixed base and is spaced apart from the first limiting member at both ends of the fixed base. The second limiting member is provided with a second limiting groove, and the second limiting groove is used to abut and limit the second fixed structure to limit the testing machine.

3. The self-locking device according to claim 2, characterized in that: The locking mechanism also includes an electrically connected light sensor and a controller. The light sensor is arranged on the first limiting member. The light sensor passes through the first limiting groove and emits detection light into the first limiting groove. The light sensor is used to detect the first fixed structure and generate a detection signal to the controller. The controller is used to control the testing machine to stop moving according to the detection signal.

4. The self-locking device according to claim 2, characterized in that: The first fixing structure includes a first fixing bar and a first cam assembly, the first fixing bar is connected to the fixing plate, the first cam assembly is arranged on a side of the first fixing bar away from the fixing plate, the shape of the first cam assembly corresponds to the shape of the first limiting groove, the first cam assembly is arranged in the first limiting groove and abuts against the groove wall of the first limiting groove; The second fixing structure includes a second fixing bar and a second cam assembly, the second fixing bar is connected to the fixing plate, the second cam assembly is arranged on the side of the second fixing bar away from the fixing plate, the shape of the second cam assembly corresponds to the shape of the second limiting groove, and the second cam assembly is arranged in the second limiting groove and abuts against the groove wall of the second limiting groove.

5. The self-locking device according to claim 4, characterized in that: The first fixing bar is provided with a plurality of first waist-shaped holes. When the test machine is placed on the probe table, the first waist-shaped holes extend in the height direction. The fixing plate is provided with a plurality of first fixing holes. A plurality of first fixing members pass through the first waist-shaped holes and are fixed in the first fixing holes. The first fixing bar can move relative to the fixing plate in the height direction. The second fixing bar is provided with a plurality of second waist-shaped holes. When the testing machine is placed on the probe table, the second waist-shaped holes extend along the height direction. The fixing plate is provided with a plurality of second fixing holes. A plurality of second fixing members pass through the second waist-shaped holes and are fixed in the second fixing holes. The second fixing bar can move along the height direction relative to the fixing plate.

6. The self-locking device according to claim 4, characterized in that: The fixing plate is provided with a plurality of third waist-shaped holes, and the third waist-shaped holes extend along the length direction. The testing machine is provided with a plurality of third fixing holes, and a plurality of third fixing members pass through the third waist-shaped holes and are fixed in the third fixing holes. The fixing plate can move along the length direction relative to the testing machine.

7. The self-locking device according to claim 4, characterized in that: The locking mechanism further includes a first hinge seat and a first locking member, wherein the first hinge seat and the first limiting member are arranged along the width direction, one end of the first locking member is rotatably connected to the first hinge seat, and an end of the first locking member close to the first hinge seat is provided with a first locking groove, and the first locking member can be rotated relative to the first hinge seat so that the first locking groove accommodates the first cam assembly, thereby limiting the first cam assembly and the testing machine; The locking mechanism also includes a second hinge seat and a second locking member. The second hinge seat and the second limiting member are arranged along the width direction. One end of the second locking member is rotatably connected to the second hinge seat. The second locking member is provided with a second locking groove at one end close to the second hinge seat. The second locking member can be rotated relative to the second hinge seat so that the second locking groove can accommodate the second cam assembly to limit the second cam assembly and the testing machine.

8. The self-locking device according to claim 7, characterized in that: The locking mechanism also includes a cylinder seat and a driving cylinder. The cylinder seat is arranged on the fixed base and is spaced apart from the first hinge seat. One end of the driving cylinder is rotatably connected to the cylinder seat, and the other end is rotatably connected to the end of the first locking member away from the first hinge seat. The driving cylinder is used to drive the first locking member to move away from the end of the first hinge seat so that the first locking member rotates around the first hinge seat.

9. The self-locking device according to claim 8, characterized in that: The locking mechanism further includes a connecting rod, which rotatably connects the first locking member and the second locking member, and the first locking member drives the second locking member to rotate synchronously through the connecting rod.

10. The self-locking device according to claim 7, characterized in that: The first cam assembly includes a first cam member and a first spacer block. The first cam member includes a first camshaft, a first cam, and a first nut. The first camshaft passes through the first fixing bar. The first cam ring is disposed on the outer circumference of the first camshaft and is rotatable relative to the first camshaft. The first nut is disposed at an end of the first camshaft away from the first cam and locks the first cam to the first fixing bar. The first spacer block is disposed between the first fixing bar and the first cam. The second cam assembly includes a second cam member and a second spacer block. The second cam member includes a second camshaft, a second cam and a second nut. The second camshaft passes through the second fixing bar. The second cam ring is arranged on the outer circumference of the second camshaft and can rotate relative to the second camshaft. The second nut is arranged at an end of the second camshaft away from the second cam and locks the second cam on the second fixing bar. The second spacer block is arranged between the second fixing bar and the second cam.

11. The self-locking device according to claim 10, characterized in that: The diameter of the first locking groove is greater than the diameter of the first cam, and the difference α between the diameter of the first locking groove and the diameter of the first cam satisfies the range: 0.5 mm ≤ α ≤ 1 mm; A diameter of the second locking groove is greater than a diameter of the second cam, and a difference α between the diameter of the second locking groove and the diameter of the second cam satisfies the range: 0.5 mm ≤ α ≤ 1 mm.

12. A wafer inspection system, characterized in that: The wafer detection system includes a probe station, a test machine, a flipping device and a self-locking device according to any one of claims 1 to 11, wherein the flipping device is used to flip the test machine onto the probe station, and the self-locking device is used to lock the test machine onto the probe station.

Images