Rack for semiconductor test equipment

Abstract

The utility model discloses a rack for semiconductor testing equipment, which belongs to the technical field of semiconductor testing and comprises a transverse spacing adjusting mechanism, a lifting mechanism and a rotary clamping mechanism. The transverse distance adjusting mechanism comprises a gear, a pair of rack blocks and a mounting box; the gear is mounted in the center of the mounting box through a rotating shaft, rack parts of the pair of rack blocks are meshed with the two sides of the gear correspondingly, and the bottoms of the pair of rack blocks are slidably connected into sliding grooves in the bottom of the mounting box correspondingly; the lifting mechanism is vertically mounted above the rack block; the rotary clamping mechanism comprises a clamping plate and a pin shaft; the clamping plate is rotatably connected with the lifting mechanism through a rotating shaft, a plurality of first through holes are formed in the rotating joint of the rotating shaft and the clamping plate, a second through hole is formed in the side portion of the clamping plate, the second through hole corresponds to the first through hole in position, and the pin shaft penetrates through the second through hole and the first through hole at the same time to achieve rotation angle fixation; the purposes of flexibly adjusting the height and rotating the test angle can be achieved.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor testing, and in particular relates to a rack for semiconductor testing equipment. Background Art

[0002] With the rapid development of the semiconductor industry, test equipment plays a vital role in the semiconductor manufacturing process. Semiconductor test equipment is used throughout the manufacturing process to perform electrical, physical, and optical tests on chips, wafers, and packaged semiconductor devices. The precision and flexibility of this equipment have a significant impact on improving product quality and reducing manufacturing costs.

[0003] During semiconductor testing, test equipment is typically equipped with racks to house and secure various test instruments. However, existing semiconductor test equipment rack designs often lack flexibility and cannot be effectively adjusted to suit different testing environments and requirements. For example, some test environments require the rack height to be adjusted based on the test equipment specifications or the height of the workbench to ensure convenient operation and observation of test results. Furthermore, the detection angle of semiconductor test equipment needs to be flexibly adjusted to meet different testing requirements.

[0004] In view of the deficiencies in the prior art, the present invention provides a rack for semiconductor testing equipment, aiming to solve the above problems. Utility Model Content

[0005] The purpose of the utility model is to overcome the deficiencies in the prior art and provide a rack for semiconductor testing equipment that can flexibly adjust the height and rotate the test angle.

[0006] In order to achieve the above purpose, the present invention adopts the following technical solutions:

[0007] A rack for semiconductor testing equipment, comprising a lateral spacing adjustment mechanism, a lifting mechanism, and a rotating clamping mechanism;

[0008] The lateral spacing adjustment mechanism includes a gear, a pair of rack blocks and a mounting box; the gear is mounted at the center of the mounting box via a rotating shaft, the rack portions of the pair of rack blocks are respectively engaged with both sides of the gear, and the bottoms of the pair of rack blocks are respectively slidably connected to the slide grooves at the bottom of the mounting box;

[0009] The lifting mechanism is vertically installed above the rack block and is used to adjust the height of the rotating clamping mechanism;

[0010] The rotating clamping mechanism includes a pair of clamping plates and a pin shaft; a pair of clamping plates are respectively rotatably connected to the guide blocks in the lifting mechanism through rotating shafts, and a plurality of through holes 1 for adjusting the angle are provided at the rotating connection between the rotating shaft and the clamping plates, and a through hole 2 is provided on the side of the clamping plate, and the through hole 2 corresponds to the position of one of the through holes 1, and the pin shaft fixes the rotation angle by passing through the through hole 2 and one of the through holes 1 at the same time.

[0011] Preferably, the lateral spacing adjustment mechanism further includes a cover plate, which is arranged on the top of the installation box, and a motor 1 is provided on the cover plate, and the output end of the motor 1 is connected to the rotating shaft of the gear.

[0012] Preferably, the lateral spacing adjustment mechanism further comprises a telescopic rod, both ends of which are respectively connected to the side end of the edge portion of one rack block and the side end of the rack portion of the other rack block.

[0013] Preferably, the lifting mechanism includes a pair of side plates, a pair of lead screws, a pair of nuts, a pair of motors 2 and several guide rods; the side plates are vertically installed above the middle part of the rack block, the bottom ends of the lead screw and the guide rod are connected to the middle part of the rack block, the top ends of the lead screw and the guide rod are connected to the top of the side plates, and the bottom end of the lead screw is rotatably installed on the bearing seat through a bearing; the nut is threadedly connected to the lead screw, and a guide block is connected to the periphery of the nut, the guide block is movably connected to the guide rod, the motor 2 is installed on the top of the side plate, and the output end of the motor 2 is connected to the lead screw.

[0014] Preferably, the rotary clamping mechanism further includes an auxiliary handle and a rubber gasket; the auxiliary handle is mounted on the head of the pin; the rubber gasket is mounted on the inner side of the clamping plate to protect the semiconductor testing equipment from scratches or damage during the clamping process.

[0015] Preferably, the frame further comprises a plurality of self-locking universal wheels for free movement.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] 1. The present invention firstly realizes precise lateral spacing adjustment through the meshing of the gear and the rack block to adapt to semiconductor test equipment of different sizes; secondly, the height of the rotary clamping mechanism is adjusted through the lifting mechanism, so that the rack can adapt to test requirements of different heights; finally, the rotary shaft is connected to the lifting mechanism to provide a variety of test angle options, so that the rack can adapt to different test angle requirements; and the multiple through-holes 1 on the clamping plate and the through-holes 2 on the side cooperate with the pin shaft design so that the rotation angle can be fixed, thereby ensuring stability during the test process.

[0018] 2. The utility model firstly introduces self-locking universal wheels, so that the entire frame can be moved freely, which facilitates the movement of the frame between different test sites and improves the overall work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural diagram of the present utility model.

[0020] Figure 2 It is a top view of the present utility model.

[0021] Figure 3 It is a front view of the present utility model.

[0022] Figure 4 It is a left view of the present utility model.

[0023] Figure 5 It is a schematic cross-sectional structure diagram of the rotating mechanism of the utility model.

[0024] Figure 6 It is a schematic cross-sectional structure diagram of the through hole 1 and the through hole 2 of the rotating mechanism of the utility model.

[0025] in:

[0026] 1. Horizontal spacing adjustment mechanism;

[0027] 101, mounting box; 101a, chute; 102, gear; 103, rack block; 103a, rack portion; 103b, middle portion; 103c, side portion; 104, cover; 105, motor 1; 106, telescopic rod;

[0028] 2. Lifting mechanism;

[0029] 201, side plate; 202, lead screw; 203, nut; 204, motor 2; 205, guide rod; 206, guide block; 207, bearing seat;

[0030] 3. Rotating clamping mechanism;

[0031] 301, splint; 301a, through hole 1; 302, rotation axis; 302a, through hole 2; 303, pin; 303a, auxiliary handle; 304, rubber gasket;

[0032] 4. Self-locking universal wheel. DETAILED DESCRIPTION

[0033] The present invention will be further described below in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present invention and are not intended to limit the scope of protection of the present invention.

[0034] In the description of the present invention, it should be understood that the terms "center," "upper," "lower," "front," "back," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like, indicating positions or relationships, are based on the positions or relationships shown in the accompanying drawings and are intended solely to facilitate the description of the present invention and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, in the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0035] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0036] refer to Figures 1-6 ,This embodiment provides a semiconductor test equipment rack, a semiconductor test equipment rack, comprising a lateral spacing adjustment mechanism 1, a lifting mechanism 2 and a rotary clamping mechanism 3;

[0037] The lateral spacing adjustment mechanism 1 includes a gear 102, a pair of rack blocks 103, and a mounting box 101; the gear 102 is mounted at the center of the mounting box 101 via a rotating shaft, the rack portions 103a of the pair of rack blocks 103 are respectively engaged with the two sides of the gear 102, and the bottoms of the pair of rack blocks 103 are respectively slidably connected to the slide grooves 101a at the bottom of the mounting box 101;

[0038] Furthermore, the lateral spacing adjustment mechanism 1 also includes a cover plate 104, which is arranged on the top of the installation box 101, and a motor 105 is provided on the cover plate 104, and the output end of the motor 105 is connected to the rotating shaft of the gear 102.

[0039] It should be noted that the rack block 103 is divided into a rack portion 103a, a middle portion 103b and an edge portion 103c. The rack block 103 engages with the gear 102. Under the drive of the motor 105, a pair of rack blocks 103 move away from or closer to each other, thereby achieving the effect of adjusting the lateral spacing.

[0040] Furthermore, the lateral spacing adjustment mechanism 1 also includes a telescopic rod 106, the two ends of which are respectively connected to the side end of the edge 103c of one rack block 103 and the side end of the rack portion 103a of the other rack block 103; the two ends of the telescopic rod 106 are respectively connected to the two rack blocks 103, which may be used to assist in synchronously adjusting the positions of the two rack blocks 103.

[0041] It should be noted that, in this embodiment, the telescopic rods 106 are two movable rods that are socketed with each other, which will not be described in detail here.

[0042] The lifting mechanism 2 is vertically installed above the rack block 103 and is used to adjust the height of the rotating clamping mechanism 3;

[0043] Furthermore, the lifting mechanism 2 includes a pair of side plates 201, a pair of lead screws 202, a pair of nuts 203, a pair of motors 204 and a plurality of guide rods 205; the side plates 201 are vertically mounted above the middle portion 103b of the rack block 103, the bottom ends of the lead screws 202 and the guide rods 205 are connected to the upper portion of the middle portion 103b of the rack block 103, the top ends of the lead screws 202 and the guide rods 205 are connected to the top of the side plates 201, and The bottom end of the lead screw 202 is rotatably mounted on a bearing seat 207 through a bearing, and the bearing seat 207 is mounted above the middle portion 103b of the rack block 103; the nut 203 is threadedly connected to the lead screw 202, and a guide block 206 is connected to the periphery of the nut 203, and the guide block 206 is movably connected to the guide rod 205, and the motor 2 204 is mounted on the top of the side plate 201, and the output end of the motor 204 is connected to the lead screw 202.

[0044] It should be noted that, in this embodiment, a pair of side plates 201, a pair of lead screws 202, a pair of nuts 203, a pair of motors 204 and a number of guide rods 205 are all symmetrically arranged, and there are four guide rods 205. Every two guide rods 205 cooperate with a side plate 201, a lead screw 202, a nut 203 and a motor 2 204 to realize the lifting and lowering of the rotating mechanism.

[0045] The rotating clamping mechanism 3 includes a pair of clamping plates 301 and a pin 303; the pair of clamping plates 301 are rotatably connected to the guide blocks 206 in the lifting mechanism 2 through rotating shafts 302 respectively, and a plurality of through holes 301a for adjusting the angle are provided at the rotating connection between the rotating shaft 302 and the clamping plates 301, and a through hole 2 302a is provided on the side of the clamping plate 301, and the through hole 2 302a corresponds to the position of one of the through holes 1 301a, and the pin 303 fixes the rotation angle by passing through the through hole 2 302a and one of the through holes 1 301a at the same time.

[0046] It should be noted that when the pin 303 is used for fixing, the head of the pin 303 should be placed upwards to prevent the pin 303 from slipping if the head is placed downwards.

[0047] It should be noted that, in this embodiment, there are four through holes 301a, which correspond to rotation angles of 0 degrees (normal vertical state), 45 degrees, 90 degrees and 135 degrees respectively. These four angles are limited to within 180 degrees. During the actual test process, by rotating the rotating mechanism, multiple angles such as 0 degrees, 45 degrees, 90 degrees, 135 degrees, 180 degrees, 225 degrees, 270 degrees, and 315 degrees can be finally achieved, among which 45 degrees is a difference to achieve test angle adjustment.

[0048] Furthermore, the rotary clamping mechanism 3 also includes an auxiliary handle 303a and a rubber gasket 304; the auxiliary handle 303a is installed on the head of the pin shaft 303, and is used to facilitate the removal of the pin shaft 303 when adjusting the test angle; the rubber gasket 304 is installed on the inner side of the clamping plate 301, and is used to protect the semiconductor testing equipment and prevent scratches or damage during the clamping process.

[0049] In order to allow the entire rack to move freely and facilitate the movement of the rack between different test sites, this embodiment is also provided with a number of freely movable self-locking universal wheels 4, wherein the self-locking universal wheels 4 are provided with a total of 4, which are respectively connected to the bottom of the installation box 101 of the lateral spacing adjustment structure through connecting rods.

[0050] Working principle:

[0051] Lateral Spacing Adjustment Mechanism 1: Gear 102 is mounted in the center of mounting box 101 and driven to rotate by motor 105. A pair of rack blocks 103 mesh with gear 102. Sliding connections at the bottom of rack blocks 103 allow them to move within slots 101a at the bottom of mounting box 101. When motor 105 drives gear 102 to rotate, the gear's rotation is transmitted to rack blocks 103 through meshing, causing the pair of rack blocks 103 to move along slots 101a. The rotation of gear 102 in different directions allows the pair of rack blocks 103 to move away from or toward each other, achieving the purpose of lateral spacing adjustment.

[0052] Lifting mechanism 2: consists of side plates 201, screw 202, nut 203, motor 204 and guide rod 205; motor 204 drives screw 202 to rotate, and the rotation of screw 202 causes nut 203 to move up and down through thread transmission; nut 203 is connected to guide block 206, and then connected to rotary clamping mechanism 3, so the up and down movement of nut 203 drives the height adjustment of rotary clamping mechanism 3.

[0053] Rotating Clamping Mechanism 3: Clamping plate 301 is rotatably connected to guide block 206 of lifting mechanism 2 via rotating shaft 302, allowing it to rotate within a certain range of angles. Through-hole 1 301a in clamping plate 301 and through-hole 2 302a on the side are used to fix the rotation angle. Clamping plate 301's rotational position can be locked by simultaneously passing pins 303 through the corresponding through-holes.

[0054] During testing, first use the self-locking universal wheel 4 to move the frame to the appropriate test position, and then drive the gear 102 through motor 105 according to the size of the semiconductor device to be tested, and then drive the rack block 103 to move, adjust the lateral spacing, and ensure that the clamp 301 can adapt to semiconductor devices of different widths. Place the semiconductor device between the clamps 301 of the rotating clamping mechanism 3, and drive the screw 202 through motor 204 to make the nut 203 and the guide block 206 move up and down along the screw 202 to adjust the height of the rotating clamping mechanism 3 to adapt to semiconductor devices with different height testing requirements. Use the auxiliary handle on the rotating clamping mechanism 3 to adjust the opening and closing of the clamp 301 to ensure that the semiconductor device is firmly clamped. If necessary, adjust the angle of the clamp 301 through the through hole 1 301a on the rotating shaft 302 and the through hole 2 302a on the clamp to adapt to different testing requirements.

[0055] In summary, this design can not only adapt to the needs of workbenches or operators at different heights, but also improve the flexibility of equipment use through angle adjustment, thereby improving the efficiency and accuracy of semiconductor testing.

[0056] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A rack for semiconductor testing equipment, characterized in that: It comprises a lateral spacing adjustment mechanism (1), a lifting mechanism (2) and a rotating clamping mechanism (3); The lateral spacing adjustment mechanism (1) comprises a gear (102), a pair of rack blocks (103) and an installation box (101); the gear (102) is installed at the center of the installation box (101) via a rotating shaft, the rack portions (103a) of the pair of rack blocks (103) are respectively engaged with the two sides of the gear (102), and the bottoms of the pair of rack blocks (103) are respectively slidably connected to the sliding grooves (101a) at the bottom of the installation box (101); The lifting mechanism (2) is vertically installed above the rack block (103) and is used to adjust the height of the rotating clamping mechanism (3); The rotating clamping mechanism (3) comprises a pair of clamping plates (301) and a pin (303); the pair of clamping plates (301) are respectively connected to the guide block (206) in the lifting mechanism (2) through a rotating shaft (302); a plurality of through holes (301a) for adjusting the angle are provided at the rotation connection between the rotating shaft (302) and the clamping plates (301); a through hole (302a) is provided on the side of the clamping plate (301), and the position of the through hole (302a) corresponds to that of one of the through holes (301a); the pin (303) fixes the rotation angle by simultaneously passing through the through hole (302a) and one of the through holes (301a).

2. The semiconductor testing equipment rack according to claim 1, wherein: The transverse spacing adjustment mechanism (1) further comprises a cover plate (104), the cover plate (104) being arranged on the top of the installation box (101), and a motor 1 (105) being arranged on the cover plate (104), the output end of the motor 1 (105) being connected to the rotating shaft of the gear (102).

3. The semiconductor testing equipment rack according to claim 2, wherein: The transverse spacing adjustment mechanism (1) further comprises a telescopic rod (106), the two ends of which are respectively connected to the side ends of the edge portion (103c) of one rack block (103) and the side ends of the rack portion (103a) of the other rack block (103).

4. The semiconductor testing equipment rack according to claim 1, wherein: The lifting mechanism (2) comprises a pair of side plates (201), a pair of lead screws (202), a pair of nuts (203), a pair of motors (204) and a plurality of guide rods (205); the side plates (201) are vertically mounted above the middle portion (103b) of the rack block (103); the bottom ends of the lead screws (202) and the guide rods (205) are connected to the middle portion (103b) of the rack block (103); the top ends of the lead screws (202) and the guide rods (205) are connected to the top portion of the rack block (103); The nut (203) is connected to the top of the side plate (201), and the bottom end of the lead screw (202) is rotatably mounted on the bearing seat (207) through a bearing; the nut (203) is threadedly connected to the lead screw (202), and the periphery of the nut (203) is connected to a guide block (206), and the guide block (206) is movably connected to the guide rod (205); the second motor (204) is mounted on the top of the side plate (201), and the output end of the second motor (204) is connected to the lead screw (202).

5. The semiconductor testing equipment rack according to claim 1, wherein: The rotary clamping mechanism (3) further comprises an auxiliary handle (303a) and a rubber gasket (304); the auxiliary handle (303a) is mounted on the head of the pin (303), and the rubber gasket (304) is mounted on the inner side of the clamping plate (301).

6. The semiconductor testing equipment rack according to claim 1, wherein: It also includes a plurality of self-locking universal wheels (4) for free movement.

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