Negative pressure tail gas recovery system for anhydrous hydrogen fluoride production

Abstract

A negative pressure tail gas recovery system for anhydrous hydrogen fluoride production comprises a buffer tank, a water inlet pipe is arranged at the top of the buffer tank, a water outlet pipe is arranged at the bottom of the buffer tank, a circulating pipe is arranged on the water outlet pipe, one end of the circulating pipe is connected to the water outlet pipe, and the other end extends to be connected with the top of the buffer tank; a venturi tube and a booster pump are arranged on the circulating tube, a negative pressure exhaust tube is arranged on the venturi tube, and the negative pressure exhaust tube is connected to a tail gas tube in the anhydrous hydrogen fluoride production system. By adopting the structure, the tail gas treatment device is used for solving the problems that equipment is easy to damage, the cost investment is high and the pressure control is unstable in the tail gas treatment in the existing anhydrous hydrogen fluoride production system.

Description

Technical Field

[0001] The utility model relates to the technical field of distillation equipment, in particular to a negative pressure tail gas recovery system for anhydrous hydrogen fluoride production. Background Art

[0002] Anhydrous Hydrofluoric Acid (AHF), an important chemical raw material, is widely used in the electronics, photovoltaic, and pharmaceutical industries. However, its extremely low boiling point, high volatility, and strong corrosiveness pose significant challenges to its production and transportation.

[0003] Traditionally, anhydrous hydrogen fluoride production processes utilize equipment such as fans, absorption towers, and PPH ducts to treat the resulting exhaust. However, these traditional methods suffer from issues such as easily damaged equipment, high costs, and unstable pressure control, severely impacting production efficiency and product quality. Summary of the Invention

[0004] The technical problem to be solved by the utility model is to provide a negative pressure tail gas recovery system for anhydrous hydrogen fluoride production, which is used to solve the problems of easy damage of equipment, high cost investment and unstable pressure control in tail gas treatment in existing anhydrous hydrogen fluoride production systems.

[0005] In order to solve the above technical problems, the technical solution adopted by the utility model is: a negative pressure tail gas recovery system for anhydrous hydrogen fluoride production, comprising a buffer tank, a water inlet pipe is provided at the top of the buffer tank, a water outlet pipe is provided at the bottom, a circulation pipe is provided on the water outlet pipe, one end of the circulation pipe is connected to the water outlet pipe, and the other end extends to be connected to the top of the buffer tank;

[0006] The circulation pipe is provided with a venturi tube and a booster pump, the venturi tube is provided with a negative pressure exhaust pipe, and the negative pressure exhaust pipe is connected to the tail gas pipe in the anhydrous hydrogen fluoride production system.

[0007] In a preferred solution, a pressure gauge is provided on the negative pressure exhaust pipe, which is connected to a controller. The controller is also connected to a booster pump. The booster pump controls the operating power of the booster pump in real time according to the pressure signal in the negative pressure exhaust pipe fed back by the pressure gauge.

[0008] In a preferred solution, the water outlet pipe is further provided with a drainage pipe, the drainage pipe is provided with a drainage pump, the drainage pipe extends to the purification tank, and the outer wall of the purification tank is covered with a heating jacket.

[0009] In a preferred solution, one end of the liquid discharge pipe close to the buffer tank is connected to a tee provided on the circulation pipe.

[0010] In a preferred embodiment, a solution output pipe is provided at the bottom of the purification tank, a water vapor output pipe is provided at the top of the purification tank, an inclined pipe section is provided on the water vapor output pipe, the inclined pipe section is inclined downward and inserted into the side wall of the buffer tank, and a condenser is provided on the inclined pipe section.

[0011] The negative pressure tail gas recovery system for anhydrous hydrogen fluoride production provided by the present invention has the following beneficial effects by adopting the above structure:

[0012] (1) The combination of a venturi tube and a booster pump can provide stable negative pressure conditions to ensure exhaust gas recovery efficiency;

[0013] (2) The hydrogen fluoride solution produced by repeated adsorption can be purified by the purification tank to obtain a high-purity hydrogen fluoride solution and recover the water portion, thereby realizing the recovery of the hydrogen fluoride component in the tail gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0016] In the figure: buffer tank 1, water inlet pipe 101, water outlet pipe 102, circulation pipe 2, venturi tube 3, negative pressure exhaust pipe 4, booster pump 5, pressure gauge 6, controller 7, discharge pipe 8, discharge pump 9, purification tank 10, heating jacket 11, solution output pipe 12, water vapor output pipe 13, inclined pipe section 131, condenser 14. DETAILED DESCRIPTION

[0017] like Figure 1 A negative pressure tail gas recovery system for anhydrous hydrogen fluoride production includes a buffer tank 1, a water inlet pipe 101 is provided at the top of the buffer tank 1, a water outlet pipe 102 is provided at the bottom, a circulation pipe 2 is provided on the water outlet pipe 102, one end of the circulation pipe 2 is connected to the water outlet pipe 102, and the other end extends to connect to the top of the buffer tank 1;

[0018] The circulation pipe 2 is provided with a venturi tube 3 and a booster pump 5 , and the venturi tube 3 is provided with a negative pressure exhaust pipe 4 , which is connected to the tail gas pipe in the anhydrous hydrogen fluoride production system.

[0019] In the preferred solution, a pressure gauge 6 is provided on the negative pressure exhaust pipe 4, and the pressure gauge 6 is connected to the controller 7. The controller 7 is also connected to the booster pump 5. The booster pump 5 controls the operating power of the booster pump 5 in real time according to the pressure signal in the negative pressure exhaust pipe 4 fed back by the pressure gauge 6.

[0020] In the preferred scheme, the water outlet pipe 102 is further provided with a liquid discharge pipe 8, the liquid discharge pipe 8 is provided with a liquid discharge pump 9, the liquid discharge pipe 8 extends to a purification tank 10, and the outer wall of the purification tank 10 is provided with a heating jacket 11.

[0021] In the preferred scheme, the liquid discharge pipe 8 is connected to the three-way pipe provided on the circulating pipe 2 at the end close to the buffer tank 1.

[0022] In the preferred scheme, the bottom of the purification tank 10 is provided with a solution output pipe 12, the top of the purification tank 10 is provided with a water vapor output pipe 13, the water vapor output pipe 13 is provided with a section of inclined pipe section 131, the inclined pipe section 131 is inclined downward and inserted into the side wall of the buffer tank 1, and the inclined pipe section 131 is provided with a condenser 14.

[0023] The negative pressure tail gas recovery system for anhydrous hydrogen fluoride production disclosed in the new type is used for recovering tail gas during the production of anhydrous hydrogen fluoride:

[0024] The buffer tank 1 is added with water through the water inlet pipe 101 in advance, the liquid level is controlled below the output end of the water vapor output pipe 13, the three-way pipe below the water outlet pipe 102 is adjusted to make the circulating pipe 2 communicate with the buffer tank 1, then the circulating pump 5 is started to circulate the water in the buffer tank 1, the water flow enters the circulating pipe 2, is pressurized by the circulating pump 5, and then passes through the Venturi tube 3, in the Venturi tube 3, the water flow speed is further increased, based on Bernoulli's law, a negative pressure is formed in the negative pressure suction pipe 4 to absorb the tail gas, the tail gas flows into the buffer tank 1 with the water flow, and the continuously circulating water flow forms a hydrogen fluoride solution in the buffer tank 1.

[0025] After a period of time, the concentration of the hydrogen fluoride solution in the buffer tank 1 rises, after stopping the tail gas adsorption operation, the three-way pipe is adjusted again to make the liquid discharge pipe 8, the purification tank 10, and the water vapor output pipe 13 communicate with the buffer tank 1, the hydrogen fluoride solution is driven into the purification tank 10 by the liquid discharge pump 9, after the solution in the buffer tank 1 is completely input into the purification tank 10, the three-way pipe is adjusted to close the water outlet pipe 102, under the action of the heating jacket 11, water vapor evaporates and enters the water vapor output pipe 13, the hydrogen fluoride solution is directly discharged by the solution output pipe 12 after the concentration purification is completed, and the water vapor entering the water vapor output pipe 13 forms a recovery into the buffer tank 1 after passing through the condenser 14 of the inclined pipe section 131, and the buffer tank 1 is replenished with water through the water inlet pipe 101 again for the next operation.

Claims

1. A negative pressure tail gas recovery system for anhydrous hydrogen fluoride production, comprising a buffer tank (1), a water inlet pipe (101) being provided at the top of the buffer tank (1), and a water outlet pipe (102) being provided at the bottom thereof, characterized in that: A circulation pipe (2) is provided on the water outlet pipe (102), one end of the circulation pipe (2) is connected to the water outlet pipe (102), and the other end extends to be connected to the top of the buffer tank (1); The circulation pipe (2) is provided with a venturi tube (3) and a booster pump (5), and the venturi tube (3) is provided with a negative pressure exhaust pipe (4), which is connected to the tail gas pipe in the anhydrous hydrogen fluoride production system.

2. The negative pressure tail gas recovery system for anhydrous hydrogen fluoride production according to claim 1, characterized in that: The negative pressure exhaust pipe (4) is provided with a pressure gauge (6), which is connected to a controller (7). The controller (7) is also connected to a booster pump (5). The booster pump (5) controls the operating power of the booster pump (5) in real time according to the pressure signal in the negative pressure exhaust pipe (4) fed back by the pressure gauge (6).

3. The negative pressure tail gas recovery system for anhydrous hydrogen fluoride production according to claim 1, characterized in that: The water outlet pipe (102) is further provided with a drainage pipe (8), the drainage pipe (8) is provided with a drainage pump (9), and the drainage pipe (8) extends to the purification tank (10). The outer wall of the purification tank (10) is covered with a heating jacket (11).

4. The negative pressure tail gas recovery system for anhydrous hydrogen fluoride production according to claim 3, characterized in that: One end of the liquid discharge pipe (8) close to the buffer tank (1) is connected to a tee provided on the circulation pipe (2).

5. The negative pressure tail gas recovery system for anhydrous hydrogen fluoride production according to claim 3, characterized in that: A solution output pipe (12) is provided at the bottom of the purification tank (10), and a water vapor output pipe (13) is provided at the top of the purification tank (10). An inclined pipe section (131) is provided on the water vapor output pipe (13). The inclined pipe section (131) is inserted obliquely downward to the side wall of the buffer tank (1), and a condenser (14) is provided on the inclined pipe section (131).

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