Stainless steel tube polishing device for semiconductor

Abstract

The utility model relates to the technical field of polishing equipment, in particular to a stainless steel tube polishing device for semiconductors, which comprises a support frame, a polishing mechanism and a plurality of fixing mechanisms, the top of the support frame is fixedly connected with a fixing shell, one end of the inner bottom surface of the fixing shell is fixedly connected with a support plate, the top of the support plate is provided with a round hole, and the polishing mechanism is fixed inside the fixing shell. According to the stainless steel pipe polishing device, the polishing mechanism is arranged in the fixing shell, the stainless steel pipe can be conveniently supported and fixed through the multiple fixing mechanisms, the multiple fixing mechanisms can be alternately used, and therefore the situation that the fixing mechanisms affect polishing of the stainless steel pipe can be avoided; according to the stainless steel pipe polishing device, the polishing mechanism can polish stainless steel pipes of different sizes, then a second motor is started to make the polishing wheel make contact with the outer side walls or the inner side walls of the stainless steel pipes, a first motor is started to make the multiple polishing assemblies rotate, and therefore the inner side walls and the outer side walls of the stainless steel pipes are polished.

Description

TECHNICAL FIELD

[0001] The utility model relates to polishing equipment technical field, concretely is stainless steel pipe polishing device for semiconductor. BACKGROUND

[0002] Stainless steel pipe for semiconductor plays a very important role in the semiconductor industry, mainly used in conveying high-purity gas, liquid pipeline system, vacuum system and process equipment. Stainless steel pipe for semiconductor because of its excellent corrosion resistance, high strength and good processing performance, has been widely used in semiconductor equipment, and with the progress of technology and the development of industry, its market demand is also growing. The existing stainless steel pipe for semiconductor in production and manufacturing, will use polishing equipment to polish, but the existing polishing device can only polish the inner wall or outer wall of the stainless steel pipe, so that the polishing time of the stainless steel pipe is longer, and the polishing efficiency is low. SUMMARY

[0003] The utility model discloses a stainless steel pipe polishing device for semiconductor to solve the problem in the background art.

[0004] To achieve the above object, the utility model provides the following technical scheme:

[0005] Stainless steel pipe polishing device for semiconductor, including:

[0006] Support frame, the top of support frame is fixedly connected with fixed shell, one end of the inner bottom surface of fixed shell is fixedly connected with support plate, and the top of support plate is provided with round hole;

[0007] Polishing mechanism, fixed in the inside of fixed shell;

[0008] A plurality of fixed mechanisms are fixed in the inside of fixed shell.

[0009] Further, the polishing mechanism comprises:

[0010] Motor one, one end is fixedly connected with the inner side wall of fixed shell;

[0011] Round shell, one side of the middle position is fixedly connected with the output end of motor one, and the round shell is provided with a drive assembly;

[0012] Screw rod one is arranged on the other side of round shell, the outer side of screw rod one is screw connected with moving block one, and the top of moving block one is provided with limiting hole one;

[0013] Limiting rod one, one end is fixedly connected with the other side of round shell, and the limiting rod one is slidably connected with the inside of limiting hole one;

[0014] Screw rod two, set up in the other side of the round shell, the outer side of screw rod two is screwed and is connected with fixed block, and one end of screw rod two is provided with limit hole two;

[0015] Limiting rod two, one end is fixedly connected with the other side of the round shell, and the limiting rod two is slidably connected with the inside of the limit hole two;

[0016] The circular ring is arranged on the other side of the round shell, the inner side wall of the circular ring is uniformly fixedly connected with a plurality of connecting plates, and the plurality of connecting plates and the plurality of side walls of the moving block one are uniformly fixedly connected with polishing assemblies.

[0017] Preferably, the width of the moving block one is same as the width of the fixed block, and the width of the fixed block is same as the width of the circular ring.

[0018] Preferably, the drive assembly comprises a motor four, one end of the motor four is fixedly connected with an inner side wall of the round shell, the output end of the motor four is fixedly connected with a rotating rod, the outer side of the rotating rod is fixedly sleeved with a gear one, the outer side of the gear one is provided with two circular rods, the two ends of the two circular rods respectively pass through the side wall of the round shell and extend to the outer side of the round shell, and one end of the screw rod one and the screw rod two are respectively fixedly connected with the circular rod at the corresponding position, the outer sides of the two circular rods are fixedly sleeved with two gears two, and the two gears two are engaged with the gear one.

[0019] Preferably, the outer diameter of the screw rod one is same as the outer diameter of the screw rod two, and the outer diameter of the circular rod is same as the outer diameter of the screw rod one.

[0020] Preferably, the polishing assembly comprises a rectangular shell, the plurality of side walls of the moving block one and the plurality of connecting plates are respectively fixedly connected with the rectangular shell at the corresponding positions, one inner side wall of the rectangular shell is fixedly connected with a motor two, the output end of the motor two is fixedly connected with a screw rod three, the outer side of the screw rod three is screwed and connected with a rectangular block, the rectangular block is slidably connected with the inside of the rectangular shell, one end of the rectangular block is fixedly connected with a fixing seat, and a polishing wheel is rotatably connected in the inside of the fixing seat.

[0021] Further, the fixing mechanism comprises:

[0022] The top and bottom of the H-shaped plate are fixedly connected with the inner side walls of the fixing shell;

[0023] Two oil cylinders are respectively fixedly connected with the inner top surface and the inner bottom surface of the H-shaped plate;

[0024] Two fixed plates are respectively fixedly connected with the output ends of the two oil cylinders, and the two fixed plates are opposite to each other;

[0025] Two rubber pads are respectively fixedly connected with the sides adjacent to the two fixed plates.

[0026] Compared with the prior art, the utility model has the advantages that:

[0027] 1. The polishing mechanism is arranged in the inside of the fixed shell, and a plurality of fixing mechanisms are used to conveniently support and fix the stainless steel pipe, the plurality of fixing mechanisms can be used alternately, so that the polishing of the stainless steel pipe is not affected by the fixing mechanism, so that the polishing mechanism can polish the stainless steel pipe of different sizes, the motor two is started, the polishing wheel is in contact with the outer wall or the inner wall of the stainless steel pipe, the motor one is started, and the plurality of polishing assemblies are rotated to polish the inner wall and the outer wall of the stainless steel pipe, the motor four is started, so that the plurality of polishing assemblies move, and the polishing position of the stainless steel pipe is adjusted, so that the use is more convenient, and the practicability of the polishing device for the semiconductor stainless steel pipe is improved. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 It is the overall structure schematic diagram of the utility model;

[0029] Figure 2 It is the position relation schematic diagram of the fixed shell and the supporting plate in the utility model;

[0030] Figure 3 It is the polishing mechanism structure schematic diagram in the utility model;

[0031] Figure 4 It is the position relation schematic diagram of the fixed block and the ring in the utility model;

[0032] Figure 5 It is the moving block one structure schematic diagram in the utility model;

[0033] Figure 6 It is the position relation schematic diagram of the rectangular block and the fixed seat in the utility model;

[0034] Figure 7 It is the position relation schematic diagram of the circular shell and the motor four in the utility model;

[0035] Figure 8 It is the fixed mechanism structure schematic diagram in the utility model.

[0036] In the figure: 100, support frame; 110, fixed shell; 120, support plate; 121, round hole; 200, polishing mechanism; 210, motor one; 220, round shell; 230, screw one; 231, moving block one; 232, limiting hole one; 240, limiting rod one; 250, screw two; 251, fixed block; 252, limiting hole two; 260, limiting rod two; 270, circular ring; 271, connecting plate; 280, rectangular shell; 281, motor two; 282, screw three; 283, rectangular block; 284, fixed seat; 285, polishing wheel; 290, motor four; 291, rotating rod; 292, gear one; 293, round rod; 294, gear two; 300, fixing mechanism; 310, U-shaped plate; 320, oil cylinder; 330, fixed plate; 340, rubber pad. DETAILED DESCRIPTION

[0037] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0038] Please refer to Figures 1-8 In the embodiments of the present application, the semiconductor stainless steel pipe polishing device comprises a support frame 100, a polishing mechanism 200 and a plurality of fixing mechanisms 300. The top of the support frame 100 is fixedly connected with a fixed shell 110. One end of the inner bottom surface of the fixed shell 110 is fixedly connected with a support plate 120, and the top of the support plate 120 is provided with a round hole 121. The polishing mechanism 200 is fixed in the interior of the fixed shell 110. The plurality of fixing mechanisms 300 are all fixed in the interior of the fixed shell 110.

[0039] Specifically, the support plate 120 is used to facilitate the auxiliary support of the polishing mechanism 200, the plurality of fixing mechanisms 300 are used to facilitate the support and fixation of the stainless steel pipe, and the polishing mechanism 200 is used to facilitate the polishing of the inner side wall and the outer side wall of the stainless steel pipe. Moreover, the polishing mechanism 200 can be applied to stainless steel pipes of different sizes.

[0040] Embodiment one

[0041] As Figures 3-7As shown, in the embodiment, the polishing mechanism 200 comprises: a motor 210, a circular shell 220, a screw rod 230, a limiting rod 240, a screw rod 250, a limiting rod 260 and a circular ring 270, one end of the motor 210 is fixedly connected to an inner side wall of the fixed shell 110, an output end of the motor 210 is fixedly connected to a middle position of one side of the circular shell 220, a driving assembly is arranged on the circular shell 220 in a matched mode, the screw rod 230 is arranged on the other side of the circular shell 220, a moving block 231 is screw-coupled to the outer side of the screw rod 230, a limiting hole 232 is formed in the top of the moving block 231, one end of the limiting rod 240 is fixedly connected to the other side of the circular shell 220, the limiting rod 240 is slidably connected to the inside of the limiting hole 232, the screw rod 250 is arranged on the other side of the circular shell 220, a fixed block 251 is screw-coupled to the outer side of the screw rod 250, a limiting hole 252 is formed in one end of the screw rod 250, one end of the limiting rod 260 is fixedly connected to the other side of the circular shell 220, the limiting rod 260 is slidably connected to the inside of the limiting hole 252, the circular ring 270 is arranged on the other side of the circular shell 220, a plurality of connecting plates 271 are fixedly connected to the inner side wall of the circular ring 270, a plurality of polishing assemblies are fixedly connected to the plurality of side walls of the moving block 231 and the plurality of connecting plates 271, the width of the moving block 231 is the same as the width of the fixed block 251, and the width of the fixed block 251 is the same as the width of the circular ring 270, the driving assembly comprises a motor 290, one end of the motor 290 is fixedly connected to an inner side wall of the circular shell 220, a rotating rod 291 is fixedly connected to the output end of the motor 290, a gear 292 is fixedly sleeved to the outer side of the rotating rod 291, two circular rods 293 are arranged on the outer side of the gear 292, the two ends of the two circular rods 293 respectively pass through the side walls of the circular shell 220 and extend to the outside of the circular shell 220, one end of the screw rod 230 and one end of the screw rod 250 are fixedly connected to the corresponding positions of the circular rods 293, two gears 294 are fixedly sleeved to the outer sides of the two circular rods 293, the two gears 294 are meshed with the gear 292, the outer diameter of the screw rod 230 is the same as the outer diameter of the screw rod 250, the outer diameter of the circular rod 293 is the same as the outer diameter of the screw rod 230, the polishing assembly comprises a rectangular shell 280, the plurality of side walls of the moving block 231 and the plurality of connecting plates 271 are fixedly connected to the corresponding positions of the rectangular shell 280, a motor 281 is fixedly connected to an inner side wall of the rectangular shell 280, a screw rod 282 is fixedly connected to the output end of the motor 281, a rectangular block 283 is screw-coupled to the outer side of the screw rod 282, the rectangular block 283 is slidably connected to the inside of the rectangular shell 280, a fixed seat 284 is fixedly connected to one end of the rectangular block 283, a polishing wheel 285 is rotatably connected to the inside of the fixed seat 284.

[0042] In the embodiment, by placing the stainless steel pipe between the screw one 230 and the screw two 250, and by starting the motor two 281, the motor two 281 drives the screw three 282 to rotate, so that the rectangular block 283, the fixed seat 284 and the polishing wheel 285 move and move to the appropriate position, so that the polishing wheel 285 contacts the outer side wall or the inner side wall of the stainless steel pipe, and by starting the motor one 210, the motor one 210 drives the circular shell 220, the screw one 230, the limiting rod one 240, the screw two 250, the limiting rod two 260 and the plurality of polishing assemblies to rotate, so that the plurality of polishing assemblies are polished on the inner side wall and the outer side wall of the stainless steel pipe, and then by starting the motor four 290, the rotating rod 291 and the gear one 292 are rotated, and the gear one 292 is engaged with the two gear two 294, so that the two gear two 294 and the two circular rod 293 are rotated, so that the screw one 230 and the screw two 250 are rotated, and the limiting hole one 232 and the limiting rod one 240 are used in cooperation to limit the screw one 230, and the limiting hole two 252 and the limiting rod two 260 are used in cooperation to limit the fixed block 251, so that the moving block one 231, the circular ring 270, the plurality of connecting plates 271 and the plurality of polishing assemblies move, so as to adjust the polishing position of the stainless steel pipe, and the polishing assembly can adjust the position of the polishing wheel 285, so that the polishing mechanism 200 can polish the stainless steel pipe of different sizes, thereby improving the practicability of the semiconductor stainless steel pipe polishing device.

[0043] Embodiment two

[0044] On the basis of embodiment one, in order to be able to support and fix the stainless steel pipe alternately, avoid affecting the polishing of the stainless steel pipe.

[0045] As shown in Figure 8 In the embodiment, the fixing mechanism 300 comprises: two U-shaped plates 310, two oil cylinders 320, two fixed plates 330 and two rubber pads 340, the top and bottom of the U-shaped plate 310 are fixedly connected with the inner side wall of the fixed shell 110, the two oil cylinders 320 are fixedly connected with the inner top surface and the inner bottom surface of the U-shaped plate 310 respectively, the two fixed plates 330 are fixedly connected with the output ends of the two oil cylinders 320 respectively, the two fixed plates 330 are opposite, and the two rubber pads 340 are adhesively fixed with the sides adjacent to the two fixed plates 330 respectively.

[0046] In specific implementation, by starting the oil cylinder 320, the oil cylinder 320 pushes the fixed plate 330 and the rubber pad 340 to move, so that the rubber pad 340 is in extrusion contact with the outer side wall of the stainless steel pipe, and then the stainless steel pipe is clamped and fixed, and the plurality of fixing mechanisms 300 can be used alternately, so that the fixing mechanism 300 can avoid affecting the polishing of the stainless steel pipe.

[0047] It should be apparent to those skilled in the art that the present application is not limited to the details of the foregoing exemplary embodiments and that the present application can be implemented in other embodiments without departing from the spirit or essential characteristics of the present application. The present application should therefore be construed in all its aspects only as illustrative and not restrictive and the scope of the present application should only be determined by reference to the claims and not by reference to the above description. Any reference signs in the claims should not be construed as limiting the claims concerned.

[0048] Furthermore, it should be understood that although the present specification describes exemplary embodiments, the present specification does not necessarily describe only one independent technical solution in each embodiment, and the present specification is described in this manner only for the sake of clarity. Those skilled in the art should consider the present specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that those skilled in the art can understand.

Claims

1. A semiconductor stainless steel tube polishing device, characterized in that: include: A support frame (100), wherein the top of the support frame (100) is fixedly connected to a fixed shell (110), one end of the inner bottom surface of the fixed shell (110) is fixedly connected to a support plate (120), and a circular hole (121) is formed on the top of the support plate (120); A polishing mechanism (200) is fixed inside the fixed shell (110); A plurality of fixing mechanisms (300) are all fixed inside the fixing shell (110).

2. The semiconductor stainless steel tube polishing device according to claim 1, characterized in that: The polishing mechanism (200) comprises: Motor 1 (210), one end of which is fixedly connected to an inner side wall of the fixed shell (110); The circular shell (220) is fixedly connected to the output end of the motor (210) at the middle position of one side, and the circular shell (220) is equipped with a driving component; A screw rod (230) is provided on the other side of the circular shell (220), the outer side of the screw rod (230) is screwedly connected to a moving block (231), and a limiting hole (232) is provided on the top of the moving block (231); A limiting rod (240) has one end fixedly connected to the other side of the circular shell (220), and the limiting rod (240) is slidably connected to the inside of the limiting hole (232); The second screw rod (250) is arranged on the other side of the circular shell (220), the outer side of the second screw rod (250) is screwed and connected with a fixed block (251), and one end of the second screw rod (250) is provided with a second limiting hole (252); A second limiting rod (260), one end of which is fixedly connected to the other side of the circular shell (220), and the second limiting rod (260) is slidably connected to the interior of the second limiting hole (252); A circular ring (270) is arranged on the other side of the circular shell (220), and the inner side wall of the circular ring (270) is evenly fixed with multiple connecting plates (271), and the multiple connecting plates (271) and the multiple side walls of the moving block (231) are all fixed with grinding components.

3. The semiconductor stainless steel tube polishing device according to claim 2, characterized in that: The width of the movable block 1 (231) is the same as the width of the fixed block (251), and the width of the fixed block (251) is the same as the width of the circular ring (270).

4. The semiconductor stainless steel tube polishing device according to claim 2, characterized in that: The driving assembly includes a motor four (290), one end of the motor four (290) is fixedly connected to an inner wall of the circular shell (220), the output end of the motor four (290) is fixedly connected to a rotating rod (291), and the outer side of the rotating rod (291) is sleeved and fixed with a gear one (292), and the outer side of the gear one (292) is provided with two round rods (293), the two ends of the two round rods (293) respectively pass through the side wall of the circular shell (220) and extend to the outer side of the circular shell (220), and one end of the screw rod one (230) and the screw rod two (250) are respectively fixedly connected to the round rods (293) at corresponding positions, and the outer sides of the two round rods (293) are sleeved and fixed with a gear two (294), and the two gear twos (294) are meshed with the gear one (292).

5. The semiconductor stainless steel tube polishing device according to claim 4, characterized in that: The outer diameter of the screw rod 1 (230) is the same as the outer diameter of the screw rod 2 (250), and the outer diameter of the round rod (293) is the same as the outer diameter of the screw rod 1 (230).

6. The semiconductor stainless steel tube polishing device according to claim 2, characterized in that: The grinding assembly comprises a rectangular shell (280), a plurality of side walls and a plurality of connecting plates (271) of the movable block (231) are respectively fixedly connected to the rectangular shell (280) at corresponding positions, an inner side wall of the rectangular shell (280) is fixedly connected to the second motor (281), and the output end of the second motor (281) is fixedly connected to the third screw (282), the outer side of the third screw (282) is screwedly connected to the rectangular block (283), and the rectangular block (283) is slidably connected to the inside of the rectangular shell (280), one end of the rectangular block (283) is fixedly connected to the fixed seat (284), and the interior of the fixed seat (284) is rotatably connected to the grinding wheel (285).

7. The semiconductor stainless steel tube polishing device according to claim 1, characterized in that: The fixing mechanism (300) comprises: A shaped plate (310), the top and bottom of which are fixedly connected to the inner side wall of the fixed shell (110); Two oil cylinders (320) are respectively fixedly connected to the inner top surface and inner bottom surface of the molded plate (310); Two fixed plates (330) are respectively fixedly connected to the output ends of the two oil cylinders (320), and the two fixed plates (330) are opposite to each other; The two rubber pads (340) are respectively bonded and fixed to one side adjacent to the two fixing plates (330).

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