Novel anti-splashing evaporation boat

Abstract

The utility model discloses a novel anti-splashing evaporation boat which comprises a bottom conductive heating layer, a middle insulating layer and a top wetting layer, an evaporation groove is formed in the surface of the insulating layer, and the wetting layer covers the surface of the evaporation groove. The evaporation groove of the insulating layer is divided into a melting area with high position, low resistance and low heat and an evaporation area with high resistance, high heat and low position, and the melting area and the evaporation area are connected through a smooth slope. The three-layer and two-area structure is adopted, all functions do not influence one another, and the three-layer design avoids electric conduction of metal films, so that the stability of the evaporation rate and the evaporation efficiency are improved, corrosion of metal liquid to the evaporation boat is greatly reduced, the service life of the evaporation boat is prolonged, melting and gasification are carried out in different areas, low-temperature aluminum wires are effectively prevented from being directly fed into a hot area, and the production cost is reduced. Therefore, the splashing phenomenon is effectively restrained, the wetting layer is beneficial to uniform spreading of the metal liquid, evaporation coating is more uniform, and the coating quality is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum coating equipment field especially relates to a novel anti - splash evaporation boat. BACKGROUND

[0002] The working principle of the vacuum evaporation coating equipment is that the evaporation coating material is heated by an evaporator under vacuum condition to make it vaporize, and the vapor particle flow is directly shot to the substrate to form a solid thin film on the substrate. The traditional evaporation boat conducts electricity and generates heat, heats the metal, and makes the metal melt from solid to liquid and then evaporate into gas. However, when the evaporation amount is large, the wire conveying speed becomes fast, and the heat of the evaporation boat is also large. In a short time, the metal needs to be melted and vaporized, so that the vaporization of the metal is not uniform, and the splashing phenomenon occurs. The single structure of the traditional evaporation boat makes the current flow through the liquid metal, which changes the overall resistance, affects the stability of the evaporation rate and the evaporation efficiency, and is corroded by the metal liquid, which reduces the service life of the evaporation boat and increases the use cost. Due to the process requirements of composite current collector and other requirements, the coating thickness is thicker, and the evaporation amount is larger, but the splashing phenomenon is more serious, which affects the coating quality.

[0003] In the CN221235647U patent, the melting zone and the evaporation zone are separated, but the current can still pass through the metal liquid, which still affects the evaporation efficiency and stability. In the CN221297037U patent, the evaporation boat is wrapped with a high-temperature resistant ceramic insulation layer to avoid the current passing through the metal liquid, but the melting zone and the evaporation zone are not separated, and the wetting property of the high-temperature resistant ceramic insulation layer to the metal liquid is not good, which still causes splashing.

[0004] Therefore, it is necessary to design a new evaporation boat that effectively suppresses the splashing phenomenon, increases the evaporation efficiency and stability. UTILITY MODEL CONTENTS

[0005] In view of the above problems, the utility model provides a new anti-splashing evaporation boat that effectively suppresses the splashing phenomenon and improves the coating quality.

[0006] To solve the above technical problems, the utility model adopts the following technical scheme: a new anti-splashing evaporation boat, which comprises a bottom conductive heating layer, a middle insulation layer and a top wetting layer, the insulation layer is provided with an evaporation groove on the surface, the wetting layer covers the surface of the evaporation groove, the evaporation groove of the insulation layer is divided into a melting zone with high position, low resistance and low heat, and an evaporation zone with high resistance, high heat and low position, and the melting zone and the evaporation zone are connected by a gentle slope.

[0007] Further, the conductive heating layer is connected with the positive and negative electrodes of the evaporation source on both sides.

[0008] Further, the melting zone is the wire feeding side.

[0009] Further, the included angle between the slope between the melting zone and the evaporation zone and the horizontal plane is less than 8°.

[0010] From the above description of the structure of the utility model, compared with the prior art, the utility model has the following advantages:

[0011] The three-layer two-zone structure does not affect each function, the three-layer design avoids metal film material conduction, thereby improving the stability of evaporation rate and evaporation efficiency, greatly reducing the corrosion of metal liquid to the evaporation boat, improving the service life of the evaporation boat, melting and gasification are carried out in different zones, thereby effectively preventing the direct feeding of low-temperature aluminum wire into the hot zone, effectively inhibiting the splashing phenomenon, the wet layer helps the metal liquid to spread uniformly, making the evaporation coating more uniform, and improving the coating quality. BRIEF DESCRIPTION OF DRAWINGS

[0012] The accompanying drawings, which form a part of this application, are included to provide a further understanding of the application, and are incorporated herein for explanation. The schematic embodiments of the utility model and the description thereof are used to explain the utility model, and do not constitute an improper limitation on the utility model. In the drawings:

[0013] Figure 1 It is a top view structure schematic diagram of the utility model;

[0014] Figure 2 It is Figure 1 It is a sectional view structure schematic diagram of A-A;

[0015] Figure 3 It is a three-dimensional structure schematic diagram of the utility model. DETAILED DESCRIPTION

[0016] In order to make the purpose, technical scheme and advantages of the utility model more clear and explicit, the utility model is further described in detail below by combining with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the utility model, and do not limit the utility model.

[0017] EMBODIMENT

[0018] Reference Figures 1-3 A novel anti-splashing evaporation boat, comprising a bottom conductive heating layer 1, a middle insulating layer 2 and a top wet layer 3, the surface of the insulating layer 2 is provided with an evaporation groove 6, the surface of the evaporation groove 6 is covered by the wet layer 3, the evaporation groove 6 of the insulating layer is divided into a melting zone 4 with high position, low resistance and low heat and an evaporation zone 5 with high resistance, high heat and low position, the melting zone 4 is the wire feeding side, the melting zone 4 and the evaporation zone 5 are connected through a gentle slope, and the included angle between the slope between the melting zone and the evaporation zone and the horizontal plane is less than 8°.

[0019] During installation, the conductive heating layer 1 is connected with the positive and negative poles of the evaporation source respectively, the conductive heating layer 1 generates heat when electrified to heat the insulating layer 2 and the wetting layer 3, the insulating layer 2 blocks the current and the metal liquid; the wetting layer 3 has good wettability to the metal liquid, which helps the metal liquid to spread and evaporate uniformly; the melting area 4 has high resistance, low heat and low position, the solid metal wire is melted first, and the metal liquid flows into the evaporation area 5 with high resistance and high heat and low position along the slope and is heated to be gasified.

[0020] The three-layer two-area structure does not affect each function, the three-layer design avoids the metal film material conduction, thereby improving the stability of the evaporation rate and the evaporation efficiency, greatly reducing the corrosion of the metal liquid to the evaporation boat, improving the service life of the evaporation boat, melting and gasification are divided into areas, the low-temperature aluminum wire is effectively avoided from being directly sent into the hot area, thereby effectively inhibiting the splashing phenomenon, the wetting layer helps the metal liquid to spread uniformly, the evaporation plating is more uniform, and the plating quality is improved.

[0021] The above only describes the preferred embodiments of the utility model, and does not limit the utility model, any modification, equivalent replacement and improvement within the spirit and principle of the utility model should be included in the protection scope of the utility model.

Claims

1. A novel anti-splash evaporation boat, comprising a bottom conductive heating layer (1), a middle insulating layer (2) and a top wetting layer (3), characterized in that: An evaporation groove (6) is provided on the surface of the insulating layer (2), and the wet layer (3) covers the surface of the evaporation groove (6). The evaporation groove (6) of the insulating layer is divided into a melting zone (4) with a high position, low resistance, and low heat, and an evaporation zone (5) with high resistance, high heat, and a low position. The melting zone (4) and the evaporation zone (5) are connected by a gentle slope.

2. The novel anti-splash evaporation boat according to claim 1, characterized in that: Both sides of the conductive heating layer (1) are connected to the positive and negative electrodes of the evaporation source respectively.

3. The novel anti-splash evaporation boat according to claim 1, characterized in that: The melting zone (4) is the wire feeding side.

4. The novel anti-splash evaporation boat according to claim 1, characterized in that: The angle between the slope between the melting zone (4) and the evaporation zone (5) and the horizontal plane is less than 8°.

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