Low-temperature vacuum coating device

Abstract

The low-temperature vacuum coating device comprises a coating chamber and a sealing plate, driving motors are fixedly connected to the four sides of the coating chamber, rotating discs are fixedly connected to the output ends of the driving motors, electric push rods are fixedly connected to the sides, away from the driving motors, of the rotating discs, and connecting plates are fixedly connected to the output ends of the electric push rods; a first groove is formed in the connecting plate, operation grooves are formed in the positions, located on the two sides of the first groove, of the connecting plate, limiting rods are fixedly connected into the operation grooves, springs are connected to the limiting rods in a sleeving mode, and one ends of the springs make contact with the operation grooves; the electric push rods which are opposite in pairs are installed in the coating chamber and extend to drive the connecting plates and the contact wheels to be in close contact with the side edge of a coating material, so that the contact position can be changed, meanwhile, the rotating disc rotates to enable the coating material to be subjected to double-sided coating, and meanwhile, the opposite electric push rods extend and retract. The position, making contact with a coating material, of the contact wheel can be changed, the coating uniformity can be greatly improved, and the coating effect is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum coating machine technical field, concretely relates to a low temperature vacuum coating device. BACKGROUND

[0002] Low temperature vacuum coating machine is usually in vacuum environment, and the material is evaporated into atom or molecule by heating evaporation source, and the device is condensed into thin film on the substrate surface, and the low temperature vacuum coating device is mainly composed of vacuum chamber, evaporation source, substrate, low temperature refrigerator set, pumping system and control system, and clamp is also needed to support materials.

[0003] Low temperature vacuum coating device is usually suitable for coating of optical elements, semiconductor materials, plastics and polymer materials, biomedical materials, magnetic materials and precision mechanical parts and other materials, and the side of part of materials needs to be coated during coating (such as lenses and mirrors, silicon wafer and wafer), however, the clamp clamps the side of the material, which causes inconvenient coating adjustment.

[0004] According to the patent publication number CN214400687U, a low temperature vacuum coating device is described, which mainly sets a transmission rod, realizes the transmission of the transmission rod, and can adjust the distance between the driving turntable and the driven turntable, adjusts the height of the driving turntable through the transmission mechanism, so that the hanger can be taken out or installed more easily, and in the process of coating, part of the material is blocked by the clamp, which causes the inconvenience of coating the side of the material.

[0005] Therefore, a low temperature vacuum coating device is proposed to solve the problem of inconvenient coating of the side of the material caused by the clamp blocking part of the material during coating. Utility model content

[0006] The utility model solves the technical problem that part of the material is blocked by the clamp during coating, which causes the inconvenience of coating the side of the material, and therefore proposes a low temperature vacuum coating device.

[0007] The utility model discloses a technical scheme that solves technical problems is: a low temperature vacuum coating device, including the coating chamber and the sealing plate, the coating chamber four sides all are fixedly connected with drive motor, drive motor output fixedly connected with the rotating disc, the rotating disc is away from drive motor one side fixedly connected with electric push rod, electric push rod output fixedly connected with the link plate, the link plate is opened in the first recess, the link plate is located and is opened in the operation groove of first recess both sides, the operation groove is fixedly connected with the limit rod, the spring is sleeved on the limit rod, the spring one end and operation groove contact, the spring other end contact has the moving block, the moving block is rotatably connected with the contact wheel through the pivot, the contact wheel one side contact has the mat strip, the mat strip is fixedly connected in the recess of link plate, the moving block bottom center is provided with the temporary support disc.

[0008] As a preferred technical scheme of the utility model, the link plate one side rotatoryly inserts the support ball, the support ball and the coating chamber inner wall contact, through setting up the support ball, can reduce the friction of rotating disc rotation.

[0009] As a preferred technical scheme of the utility model, the coating chamber inner bottom side fixedly connected with electric telescopic handle, the electric telescopic handle upper end fixedly connected temporary support disc, through setting up electric telescopic handle drive temporary support disc moves up and down, can conveniently provide temporary support for material.

[0010] As a preferred technical scheme of the utility model, the temporary support disc upper end inserts four telescopic sleeves, the telescopic sleeve is located between eight contact wheels, through setting up telescopic sleeve, can make the coating material be in the state of suspension.

[0011] As a preferred technical scheme of the utility model, the contact wheel upper and lower sides all contact have the torsion spring, the torsion spring is sleeved on the pivot and the torsion spring upper end and moving block contact, through setting up torsion spring, increase the friction of material movement.

[0012] The utility model has the following advantages: through installing two two opposite electric push rod extension drive link plate and contact wheel in the coating chamber and closely contact the side of coating material, make contact can change position, rotating disc rotation can make coating material double-sided coating, and opposite electric push rod can make change contact wheel contact coating material's position, can greatly improve the uniformity of coating, improve the coating effect. ACCURACY OF DRAWINGS

[0013] Fig. 1 It is a low temperature vacuum coating device's overhead sectional structure schematic diagram of a preferred embodiment of the utility model;

[0014] Fig. 2It is a three-dimensional structure schematic view of the connection plate of the low-temperature vacuum coating device according to an optimal embodiment of the present utility model.

[0015] Fig. 3 It is a side view sectional structure schematic view of the low-temperature vacuum coating device according to an optimal embodiment of the present utility model.

[0016] The figure mark explanation: 1, coating chamber; 2, driving motor; 3, rotating disc; 4, electric push rod; 5, connection plate; 6, operation groove; 7, limiting rod; 8, spring; 9, moving block; 10, rotating shaft; 11, contact wheel; 12, pad strip; 13, temporary support disc; 14, support ball; 15, electric telescopic rod; 16, telescopic sleeve; 17, torsional spring. DETAILED DESCRIPTION

[0017] The present utility model will be further described below in combination with the drawings.

[0018] Please refer to the low-temperature vacuum coating device shown in the drawings. Figs. 1-3 The coating chamber 1 is fixedly connected with driving motors 2 on four sides, the output end of the driving motor 2 is fixedly connected with a rotating disc 3, the driving motor 2 can drive the rotating disc 3 to rotate, two opposite electric push rods 4 can realize the clamping of the coating material by the contact wheel 11 through extension, the electric push rod 4 is fixedly connected with the connection plate 5 at the side away from the driving motor 2 of the rotating disc 3, the connection plate 5 is provided with a first recess, operation grooves 6 are formed on both sides of the first recess, limiting rods 7 are fixedly connected in the operation grooves 6, springs 8 are sleeved on the limiting rods 7, one end of the spring 8 is in contact with the operation groove 6, the contact wheel 11 has a certain buffering effect by setting the operation groove 6 in cooperation with the limiting rod 7 and the moving block 9, the other end of the spring 8 is in contact with the moving block 9, the moving block 9 is rotatably connected with the contact wheel 11 through a rotating shaft 10, the pad strip 12 is in contact with one side of the contact wheel 11, the pad strip 12 is fixedly connected in the recess of the connection plate 5, the temporary support disc 13 is arranged at the center of the bottom end of the moving block 9, and the temporary support disc 13 provides temporary support for the coating material.

[0019] The inner wall of the coating chamber 1 is in contact with the support ball 14, the support ball 14 is rotatably embedded on the four sides of the connection plate 5 away from each other, and the support ball 14 is arranged to provide support for the rotation of the rotating disc 3 and reduce the friction between the rotating disc 3 and the inner wall of the coating chamber 1 during rotation.

[0020] The temporary support disc 13 is fixedly connected to the upper end of the electric telescopic rod 15, and the electric telescopic rod 15 is fixedly connected to the inner bottom side of the coating chamber 1.

[0021] The telescopic sleeves 16 are arranged between the eight contact wheels 11, and the four telescopic sleeves 16 are inserted into the temporary support disc 13.

[0022] The moving block 9 is in contact with the upper end of the torsional spring 17, the torsional spring 17 is sleeved on the rotating shaft 10, and the torsional spring 17 is in contact with the upper and lower sides of the contact wheel 11.

[0023] Working principle: first, the material to be coated is placed on the temporary support disc 13, then the relative two electric push rods 4 are stretched, and the connecting plate 5 is driven to move, then the contact wheel 11 contacts the material to be coated, at this time the spring 8 is contracted under the action of force, and the contact wheel 11 moves to one side of the rotating disc 3, until the contact wheel 11 contacts the pad strip 12, and the limiting effect is achieved, then the coating chamber 1 is closed, and coating is carried out, then the driving motor 2 drives the rotating disc 3 to rotate, which can drive the connecting plate 5 and the material to be coated to overturn, and the coating is realized, then the other two electric push rods 4 contact the side edge of the material to be coated through the connecting plate 5, and the side edge coating of the material to be coated is completed, the uniformity of the coating is improved, and the coating effect is improved.

[0024] The above is only the preferred embodiment of the present application, and it should be pointed out that, for ordinary skilled persons in the technical field, some improvements and refinements can be made without departing from the principle of the present application, and these improvements and refinements should also be regarded as the protection range of the present application.

[0025] Other parts not described in the present application are all prior art, and therefore will not be described here.

[0026] Finally, it should be pointed out that: the above embodiments are only used to illustrate the technical solutions of the present application, and are not limited thereto; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A low-temperature vacuum coating device, comprising a coating chamber (1) and a sealing plate, characterized in that: The coating chamber (1) is fixedly connected to a driving motor (2) on all four sides, the output end of the driving motor (2) is fixedly connected to a rotating disk (3), the rotating disk (3) is fixedly connected to a side away from the driving motor (2) with an electric push rod (4), the output end of the electric push rod (4) is fixedly connected to a connecting plate (5), a first groove is provided in the connecting plate (5), and operating grooves (6) are provided on both sides of the first groove, and a limited number of fixedly connected parts are provided in the operating groove (6). A positioning rod (7) is provided, wherein a spring (8) is sleeved on the positioning rod (7), wherein one end of the spring (8) contacts the operating groove (6), and the other end of the spring (8) contacts the moving block (9), and the moving block (9) is rotatably connected to a contact wheel (11) via a rotating shaft (10), and one side of the contact wheel (11) contacts a pad (12), and the pad (12) is fixedly connected to the groove of the connecting plate (5), and a temporary support plate (13) is provided at the center of the bottom end of the moving block (9).

2. The low-temperature vacuum coating device according to claim 1, characterized in that: A supporting ball (14) is rotatably embedded on one side of the connecting plate (5), and the supporting ball (14) contacts the inner wall of the coating chamber (1).

3. The low-temperature vacuum coating device according to claim 2, characterized in that: An electric telescopic rod (15) is fixedly connected to the bottom side of the coating chamber (1), and the upper end of the electric telescopic rod (15) is fixedly connected to a temporary support plate (13).

4. The low-temperature vacuum coating device according to claim 3, characterized in that: Four telescopic sleeves (16) are plugged into the upper end of the temporary support plate (13), and the telescopic sleeves (16) are located between the eight contact wheels (11).

5. The low-temperature vacuum coating device according to claim 4, characterized in that: The upper and lower sides of the contact wheel (11) are both in contact with torsion springs (17), the torsion springs (17) are sleeved on the rotating shaft (10), and the upper end of the torsion springs (17) is in contact with the moving block (9).

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