Single crystal weighing device of crystal furnace

Abstract

The utility model discloses a single crystal weighing device for a crystal furnace, which is used for measuring the weight of crystal growth change in a weighing chamber in the seeding process of a seed rod, and comprises a motor assembly which is arranged in the weighing chamber and is detachably connected with the weighing chamber, and the working end of the motor assembly is detachably connected with the seed rod. The weighing assembly is located above the motor assembly, detachably connected with the weighing chamber and used for measuring the weight of the crystal in the working process of the motor assembly. The supporting assembly is arranged in the weighing chamber, located between the motor assembly and the weighing assembly and detachably connected with the motor assembly and the weighing assembly. The supporting assembly supports the motor assembly and the weighing assembly, the motor assembly works to drive the seed rod to rotate, seed crystals located at the tail of the seed rod start seeding, and along with crystal growth, the weighing assembly senses the change of the weight of the crystals above the motor assembly, so that the crystals are conveniently controlled to grow in a fixed diameter according to the change of the weight of the crystals.

Description

Technical Field

[0001] The utility model relates to the technical field of crystal furnace single crystal weighing, in particular to a crystal furnace single crystal weighing device. Background Art

[0002] A crystal furnace is a precision high-tech equipment used for crystal growth. It is mainly used in the fields of electronics and communications technology and plays a vital role in multiple industries.

[0003] Most weighing devices in the existing technology are only involved in measuring the weight of the remaining material in the crucible at the end of the crystal, such as the crystal growth equipment and the method of using the crystal growth equipment disclosed in the Chinese utility model patent application No. CN202211442776.X, which include: a lifting unit, including a crucible table arranged in the crystal furnace; a hydraulic drive station, connected to the lifting unit, for driving the lifting unit to move up and down; a micro-motion interval is preset in the crystal furnace, and the crucible table can drive the crucible to move up and down in the micro-motion interval when the pulling unit reaches the outside of the crystal furnace, and can drive the crucible to move up and down in the area below the micro-motion interval when the pulling unit is extended into the crystal furnace. The application of this patent can only measure the actual weight after the growth process is completed, and it is difficult to control the crystal to maintain a fixed diameter growth during growth.

[0004] Therefore, it is difficult to control the growth of crystals to maintain a fixed diameter by changing the weight of the crystals in the prior art. Utility Model Content

[0005] In order to solve the above technical problems, the utility model provides a single crystal weighing device for a crystal furnace, which detects the weight changes during the crystal growth process by combining a motor component, a weighing component and a support component.

[0006] In order to achieve the above object, the present invention is implemented through the following technical solutions:

[0007] A single crystal weighing device for a crystal furnace is used to measure the weight of the crystal growing in a weighing chamber during the seeding process of a seed crystal rod, comprising:

[0008] The motor assembly is arranged in the weighing chamber and is detachably connected to the weighing chamber, and a working end thereof is detachably connected to the seed crystal rod.

[0009] The weighing assembly is located above the motor assembly and is detachably connected to the weighing chamber. It is used to measure the weight of the crystal during the operation of the motor assembly.

[0010] The support assembly is arranged in the weighing chamber, located between the motor assembly and the weighing assembly, and is detachably connected to the motor assembly and the weighing assembly respectively.

[0011] Compared with the prior art, the utility model has the following advantages:

[0012] The weighing device is composed of a motor assembly, a weighing assembly and a supporting assembly, the supporting assembly supports the motor assembly and the weighing assembly, the motor assembly drives the seed crystal rod to rotate, the seed crystal at the tail of the seed crystal rod starts to induce crystal, and the weighing assembly senses the change of the weight of the crystal above the motor assembly, so that the crystal can be controlled to keep a fixed diameter growth through the change of the weight of the crystal.

[0013] Further preferably, the motor assembly comprises:

[0014] The servo motor is arranged on the supporting assembly, located in the middle of the weighing chamber, detachably connected with the supporting assembly, and the working end of the servo motor is connected with the seed crystal rod through the shaft coupling.

[0015] The bearing seat is arranged at the lower part of the weighing chamber, and is sleeved in the weighing chamber, and the working end of the seed crystal rod passes through the bearing seat.

[0016] The gland is arranged on the bearing seat, the bottom surface of the gland is pressed and connected with the bearing seat through the round nut, the inside of the gland is sleeved with the seed crystal rod, and the gland is used for fastening the seed crystal rod and the bearing seat.

[0017] By adopting the above technical scheme, the seed crystal rod is installed in the weighing chamber through the gland and the bearing seat, and is connected with the servo motor through the shaft coupling, so that the seed crystal rod can rotate in the weighing chamber.

[0018] Further preferably, the bearing seat is provided with:

[0019] The first pressing ring is located at the lower part of the bearing seat and is sleeved on the seed crystal rod, and is connected with the end of the bearing seat away from the gland.

[0020] The second pressing ring is arranged in the bearing seat close to the gland, is sleeved on the seed crystal rod, is located between the seed crystal rod and the bearing seat, and is connected with the bearing seat.

[0021] The first bearing is located at the lower part of the second pressing ring and is installed in the bearing seat and sleeved with the seed crystal rod.

[0022] The second bearing is located on the first pressing ring and is connected with the seed crystal rod and the bearing seat.

[0023] The spacer sleeve is sleeved on the seed crystal rod and is located between the first bearing and the second bearing, and a gap exists between the spacer sleeve and the inner wall of the bearing seat.

[0024] By adopting the above technical scheme, the first pressing ring and the second bearing, and the second pressing ring and the second bearing are respectively arranged at the lower part and the upper part of the bearing seat, the seed crystal rod is well limited in the bearing seat, and the seed crystal rod can stably rotate in the bearing seat.

[0025] Further preferably, the weighing assembly comprises:

[0026] A cover plate is arranged on the top surface of the weighing chamber and detachably connected with the weighing chamber, and a plug is mounted on the top of the cover plate.

[0027] A mounting plate is arranged in the weighing chamber and opposite to the cover plate, and detachably connected with the cover plate and the top of the weighing chamber through bolts.

[0028] A sensor is arranged below the mounting plate in the weighing chamber and detachably connected with the mounting plate at the top.

[0029] A bottom plate is arranged in the weighing chamber below the sensor, detachably connected with the bottom of the sensor at the top surface and detachably connected with the support assembly at the bottom surface, and used for assisting the sensor in measuring the changing weight during the crystal growth.

[0030] The cover plate, the mounting plate and the bottom plate are used to mount the sensor in the weighing chamber, so that the sensor can detect the changing weight of the crystal during the crystal growth.

[0031] Further, the support assembly comprises:

[0032] A support seat is arranged in the weighing chamber, the top of which is connected with the bottom plate, and a gap exists between the outer wall of the support seat and the inner wall of the weighing chamber, a servo motor is mounted on the support seat, and a bearing is arranged on the other side of the support seat.

[0033] A support column is arranged on the support seat, one end of which is detachably connected with the support seat and the other end of which is connected with the bearing seat, and used for assisting the support seat in supporting the servo motor on the bearing seat.

[0034] The support seat and the support column are used to mount the servo motor in the weighing chamber, so that the sensor can detect the weight above the servo motor, and the support column supports and connects the support seat and the bearing seat.

[0035] Further, the sensor is a weighing sensor.

[0036] The above technical solution can accurately sense the weight during the crystal growth and facilitate the control of the crystal growth with a fixed diameter.

[0037] Further, the tail of the seed crystal rod is provided with a seed crystal.

[0038] The above technical solution can realize the seeding at the tail of the seed crystal rod.

[0039] Further, the plug is an aviation plug.

[0040] The above technical solution transmits the weight signal sensed by the weighing sensor to an external control system, so that the crystal growth with a fixed diameter can be controlled through the weight change. BRIEF DESCRIPTION OF DRAWINGS

[0041] Figure 1 It is a sectional structure schematic view of the embodiment.

[0042] Figure 2 It is a structure schematic view of the motor assembly, the weighing assembly and the support assembly in the embodiment.

[0043] Reference signs: 1-seed crystal rod; 2-weighing chamber; 3-motor assembly; 30-round nut; 31-servo motor; 32-coupling; 33-pressing cover; 34-first pressing ring; 35-second pressing ring; 36-first bearing; 37-second bearing; 38-bearing seat; 39-separation sleeve; 4-weighing assembly; 41-cover plate; 42-weighing sensor; 43-bottom plate; 44-mounting plate; 45-plug; 5-support assembly; 51-support seat; 52-support column. DETAILED DESCRIPTION

[0044] The following will be combined with the accompanying Figures 1-2 The utility model is further introduced in detail.

[0045] A crystal furnace single crystal weighing device, as Figure 1 shown, is used for measuring the weight of crystal growth change of seed crystal rod 1 during seeding in the weighing chamber 2, comprising:

[0046] The motor assembly 3 is arranged in the weighing chamber 2 and detachably connected with the weighing chamber 2, and the working end is detachably connected with the seed crystal rod 1.

[0047] The weighing assembly 4 is located above the motor assembly 3 and detachably connected with the weighing chamber 2, and is used for measuring the weight of the crystal during the working process of the motor assembly 3.

[0048] The support assembly 5 is arranged in the weighing chamber 2 and located between the motor assembly 3 and the weighing assembly 4, and is detachably connected with the motor assembly 3 and the weighing assembly 4 respectively, and is used for supporting the weighing assembly 4 on the motor assembly through the support connection, and plays a supporting role on the weighing assembly in the weighing chamber 2.

[0049] The weighing device composed of the motor assembly 3, the weighing assembly 4 and the support assembly 5, the support assembly 5 supports the motor assembly 3 and the weighing assembly 4, the motor assembly 3 drives the seed crystal rod 1 to rotate, the seed crystal at the tail of the seed crystal rod 1 starts seeding, with the growth of the crystal, the weighing assembly 4 senses the change of the weight of the crystal above the motor assembly 3, so as to control the crystal to keep fixed diameter growth through the change of the weight of the crystal.

[0050] Specifically, as Figure 1 and Figure 2 shown, the motor assembly 3 in the embodiment comprises:

[0051] The servo motor 31 is arranged on the support assembly 5, located in the middle of the weighing chamber 2, detachably connected with the support assembly 5, and the working end is connected with the seed crystal rod 1 through the coupling 32.

[0052] The bearing seat 38 is arranged at the lower part of the weighing chamber 2, sleeved in the weighing chamber 2, and the working end of the seed crystal rod 1 passes through the bearing seat 38.

[0053] The gland 33 is arranged on the bearing seat 38, the bottom surface is pressed with the bearing seat 38 through the round nut 30, the inside is sleeved with the seed crystal rod 1, and the seed crystal rod 1 is used for fastening the bearing seat 38.

[0054] The seed crystal rod 1 is installed in the weighing chamber 2 through the gland 33 and the bearing seat 38, and is connected with the servo motor 31 through the coupling 32, so that the seed crystal rod 1 rotates in the weighing chamber 2.

[0055] Specifically, as shown in Figure 1 and Figure 2 , the bearing seat 38 in the embodiment is respectively provided with:

[0056] The first pressing ring 34 is located at the lower part of the bearing seat 38, sleeved on the seed crystal rod 1, and connected with the end of the bearing seat 38 away from the gland 33.

[0057] The second pressing ring 35 is arranged in the bearing seat 38 close to the gland 33, sleeved on the seed crystal rod 1, located between the seed crystal rod 1 and the bearing seat 38, and connected with the bearing seat 38.

[0058] The first bearing 36 is located at the lower part of the second pressing ring 35, installed in the bearing seat 38, and sleeved with the seed crystal rod 1.

[0059] The second bearing 37 is located on the first pressing ring 34, and is connected with the seed crystal rod 1 and the bearing seat 38.

[0060] The spacer sleeve 39 is sleeved on the seed crystal rod 1, located between the first bearing 36 and the second bearing 37, and there is a gap between the inner wall of the bearing seat 38.

[0061] The first pressing ring 34 and the second bearing 37, the second pressing ring 35 and the second bearing 37 are respectively arranged at the lower part and the upper part of the bearing seat 38, which well limits the seed crystal rod 1 in the bearing seat 38, so that the seed crystal rod 1 can stably rotate in the bearing seat 38.

[0062] Specifically, as shown in Figure 1 and Figure 2 , the weighing assembly 4 in the embodiment comprises:

[0063] The cover plate 41 is arranged on the top surface of the weighing chamber 2, detachably connected with the weighing chamber 2, and the plug 45 is installed on the top.

[0064] The mounting plate 44 is arranged in the weighing chamber 2 and is opposite the position of the cover plate 41. The cover plate 41, the top of the weighing chamber 2 and the mounting plate 44 are connected by bolts.

[0065] The sensor is arranged below the mounting plate 44 in the weighing chamber 2 and is detachably connected to the top of the mounting plate 44.

[0066] The bottom plate 43 is arranged below the sensor in the weighing chamber 2 and is detachably connected to the bottom of the sensor and the support assembly 5, and is used to assist the sensor in measuring the changing weight during the crystal growth process.

[0067] The cover plate 41, the mounting plate 44 and the bottom plate 43 mount the sensor in the weighing chamber 2, so that the sensor can detect the changing weight of the crystal during the crystal growth process in real time.

[0068] Specifically, as shown in Figure 1 and Figure 2 , the support assembly 5 in this embodiment includes:

[0069] The support seat 51 is arranged in the weighing chamber 2, the top of which is connected to the bottom plate 43, and a gap exists between the outer wall of the support seat 51 and the inner wall of the weighing chamber 2. The servo motor 31 is mounted on the support seat 51, and the bearing is located on the other side of the support seat 51.

[0070] The support column 52 is arranged on the support seat 51, one end of which is detachably connected to the support seat 51, and the other end is connected to the bearing seat 38, which is used to assist the support seat 51 in supporting the servo motor 31 on the bearing seat 38.

[0071] The support seat 51 and the support column 52 mount the servo motor 31 in the weighing chamber 2, so that the sensor can detect the weight above the servo motor 31. The support column 52 supports the support seat 51 and the bearing seat 38.

[0072] Specifically, as shown in Figure 1 and Figure 2 , the sensor in this embodiment is a weighing sensor 42, which can accurately sense the weight during the crystal growth process and facilitate the control of the crystal to maintain a fixed diameter growth.

[0073] Specifically, as shown in Figure 1 and Figure 2 , the tail of the seed crystal rod 1 in this embodiment is provided with a seed crystal, so that the seed crystal rod 1 can be used to guide the crystal.

[0074] Specifically, as shown in Figure 1 and Figure 2 , the plug 45 in this embodiment is an aviation plug 45, which transmits the weight signal sensed by the weighing sensor 42 to an external control system, so that the crystal can be controlled to maintain a fixed diameter growth through the change of the weight.

[0075] Please combine Figures 1-2 The installation process and working principle of this embodiment are described in detail as follows:

[0076] Installation Process

[0077] Install the first pressure ring 34, second bearing 37, spacer 39, first bearing 36, and second pressure ring 35 onto the seed crystal rod 1 in order and tighten them with round nuts 30. Install the installed seed crystal rod 1 into the bearing seat 38. Fasten the support column 52 and the bearing seat 38 with hexagon socket bolts. Install the servo motor 31 on the support seat 51 and fasten them together with screws. Install the support seat 51 on the support column 52 and tighten them with nuts.

[0078] Use screws to connect and fasten the weighing sensor 42 to the mounting plate 44 and the bottom plate 43; use screws to connect and fasten the cover plate 41 to the mounting plate 44, use screws to connect and fasten the installed sensor to the bottom plate 43 and the support base 51, and use screws to connect and fasten the aviation plug 45 to the cover plate 41, and electrically connect it to the sensor. It should be noted that the electrical connection between the aviation plug 45 and the sensor belongs to the existing conventional technology and is not in Figure 1 、 Figure 2 In the embodiment, the assembled components are loaded into the weighing chamber 2.

[0079] The working principle of the weighing device is: after the motor is started, it drives the seed crystal rod 1 to rotate. When the seed crystal at the tail of the seed crystal rod 1 begins to seed, the crystal grows randomly. The weighing sensor 42 measures the change in crystal weight, which is convenient for controlling the crystal to maintain a fixed diameter growth through the change in crystal weight.

[0080] This specific embodiment is merely an explanation of the utility model and is not a limitation of the utility model. After reading this specification, those skilled in the art may make non-creative modifications to this embodiment as needed, but as long as they are within the scope of protection of the utility model, they are protected by patent law.

Claims

1. A single crystal weighing device for a crystal furnace, used for measuring the weight of a crystal growing in a weighing chamber (2) during the seeding process of a seed crystal rod (1), characterized in that: include: A motor assembly (3) is disposed in the weighing chamber (2) and is detachably connected to the weighing chamber (2), and a working end thereof is detachably connected to the seed crystal rod (1); a weighing assembly (4), located above the motor assembly (3), detachably connected to the weighing chamber (2), and used to measure the weight of the crystal during the operation of the motor assembly (3); The support assembly (5) is arranged in the weighing chamber (2), located between the motor assembly (3) and the weighing assembly (4), and is detachably connected to the motor assembly (3) and the weighing assembly (4).

2. The crystal furnace single crystal weighing device according to claim 1, characterized in that: The motor assembly (3) comprises: A servo motor (31) is provided on the support assembly (5), is located in the middle of the weighing chamber (2), is detachably connected to the support assembly (5), and has a working end connected to the seed crystal rod (1) via a coupling (32); A bearing seat (38) is arranged at the lower part of the weighing chamber (2) and is sleeved in the weighing chamber (2), and the working end of the seed crystal rod (1) passes through the bearing seat (38); A pressure cover (33) is arranged on the bearing seat (38), and its bottom surface is press-fitted to the bearing seat (38) through a round nut (30), and its interior is sleeved with the seed crystal rod (1) for fastening the seed crystal rod (1) and the bearing seat (38).

3. The crystal furnace single crystal weighing device according to claim 2, characterized in that: The bearing seat (38) is provided with: A first pressure ring (34) is located at the lower part of the bearing seat (38), is sleeved on the seed crystal rod (1), and is cooperatively connected with the end of the bearing seat (38) away from the pressure cover (33); A second pressure ring (35) is provided in the bearing seat (38) close to the pressure cover (33), sleeved on the seed crystal rod (1), located between the seed crystal rod (1) and the bearing seat (38), and cooperatively connected to the bearing seat (38); A first bearing (36) is located at the lower part of the second pressure ring (35), is installed in the bearing seat (38), and is sleeved with the seed crystal rod (1); A second bearing (37) is located on the first pressure ring (34) and is connected to the seed crystal rod (1) and the bearing seat (38); The spacer (39) is sleeved on the seed crystal rod (1), located between the first bearing (36) and the second bearing (37), and has a gap between the spacer and the inner wall of the bearing seat (38).

4. The crystal furnace single crystal weighing device according to claim 2, characterized in that: The weighing assembly (4) comprises: a cover plate (41), arranged on the top surface of the weighing chamber (2), detachably connected to the weighing chamber (2), and having a plug (45) installed on the top thereof; A mounting plate (44) is disposed in the weighing chamber (2), opposite to the cover plate (41), and connected to the cover plate (41) and the top of the weighing chamber (2) by bolts; A sensor (42) is disposed below the mounting plate (44) and located in the weighing chamber (2), with its top being detachably connected to the mounting plate (44); A bottom plate (43) is provided in the weighing chamber (2) and below the sensor (42), with a top surface detachably connected to the bottom of the sensor (42) and a bottom surface detachably connected to the support assembly (5), and is used to assist the sensor (42) in measuring the weight change during the crystal growth process.

5. The crystal furnace single crystal weighing device according to claim 4, characterized in that: The support assembly (5) comprises: A support seat (51) is arranged in the weighing chamber (2), the top of which is connected to the bottom plate (43), and there is a gap between the outer wall and the inner wall of the weighing chamber (2), the servo motor (31) is installed on the support seat (51), and the bearing seat (38) is located on the other side of the support seat (51); A support column (52) is provided on the support seat (51), one end of which is detachably connected to the support seat (51) and the other end of which is connected to the bearing seat (38), and is used to assist the support seat (51) in supporting the servo motor (31) on the bearing seat (38).

6. The crystal furnace single crystal weighing device according to claim 4, characterized in that: The sensor is a weighing sensor (42).

7. The crystal furnace single crystal weighing device according to claim 5, characterized in that: The tail of the seed crystal rod (1) is equipped with a seed crystal.

8. The crystal furnace single crystal weighing device according to claim 5, characterized in that: The plug (45) is an aviation plug.

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