Heating stage

Abstract

The embodiment of the utility model provides a heating stage which comprises a heating stage body, a heating stage cover and a heating stage supporting pipe, the heating stage cover at least covers partial area of the bottom of the heating stage body, the heating stage supporting pipe is connected with the heating stage cover, the heating stage further comprises an armored heater, the armored heater comprises a heating section and a conductive section, the heating section is arranged at the bottom of the heating stage body, and the conductive section is arranged at the bottom of the heating stage body. The conductive section extends into the heating stage supporting pipe, and at least part of the conductive section is bent to form a bent part. At least part of the conductive section of the armored heater is bent to form the bent part, when the cold end of the armored heater needs to be coated with resin, pulling force can be applied to the conductive section, the bent part can be stretched to deform, and the cold end of the armored heater moves to the outside of the heating stage supporting pipe; and after coating is completed, under the action of the restoring force of the bending part, the cold end of the armored heater returns to the interior of the heating stage supporting pipe, and later installation operation is facilitated.

Description

TECHNICAL FIELD

[0001] The present specification relates to the technical field of semiconductor processing, in particular to a hot plate. BACKGROUND

[0002] In the production process of the hot plate, generally, the armored heater is first bent into a predetermined target embedded in the hot plate main body, the hot plate cover and the hot plate main body are pressed together and the middle is filled with solder, the hot plate support pipe and the hot plate cover are pressed together and the middle is filled with solder, and then the whole is vacuum brazed. Since the resin cannot withstand the high temperature environment of vacuum brazing, it is necessary to apply insulating resin material to the cold end of the armored heater after welding is completed. Since the resin is applied in the later production, the cold end of the armored heater protrudes from the hot plate support pipe to facilitate resin application, resulting in many inconveniences in later installation. SUMMARY

[0003] Therefore, the present specification provides a hot plate. By bending at least part of the conductive section of the armored heater to form a bent portion, when it is necessary to apply resin to the cold end of the armored heater, a pulling force is applied to the conductive section, the bent portion is stretched to deform, the cold end of the armored heater is moved to the outside of the hot plate support pipe, and thus the resin application to the cold end of the armored heater is facilitated. When the application is completed, the cold end of the armored heater returns to the inside of the hot plate support pipe under the action of the restoring force of the bent portion, and thus the later installation operation is facilitated.

[0004] The present specification provides the following technical solutions: a hot plate, comprising a hot plate main body, a hot plate cover, and a hot plate support pipe, the hot plate cover at least covers part of the bottom of the hot plate main body, the hot plate support pipe is connected between the hot plate cover, the hot plate further comprises an armored heater, the armored heater comprises a heating section and a conductive section, the heating section is arranged at the bottom of the hot plate main body, the conductive section extends into the hot plate support pipe, and the conductive section is at least partially bent to form a bent portion.

[0005] Preferably, when the conductive section is subjected to a force, the bent portion is stretched so that at least part of the conductive section can extend to the outside of the hot plate support pipe.

[0006] Preferably, the length of the bent portion is not less than one fifth of the length of the hot plate support pipe.

[0007] Preferably, the bent portion is spring-shaped.

[0008] Preferably, the hot plate further comprises a power connector, and the conductive section is electrically connected to the power connector.

[0009] Preferably, the hot stage further comprises a power supply support, the power supply connector is mounted on the power supply support, and the power supply support is mounted on the hot stage support tube away from the hot stage.

[0010] Preferably, a through hole is formed in the center of the hot stage cover for the armored heater to pass through.

[0011] Preferably, a receiving groove is formed in the bottom of the hot stage body, the receiving groove is spiral-shaped, and the heating section is arranged in the receiving groove.

[0012] Preferably, the armored heater comprises a sleeve, an insulating heat-conducting filler, an electric heating wire, and a wire, the electric heating wire is arranged inside the sleeve, the insulating heat-conducting filler is filled in the sleeve, the wire is electrically connected with the electric heating wire, and the wire extends to the outside of the sleeve.

[0013] Preferably, the filler comprises magnesium oxide ceramic beads.

[0014] Compared with the prior art, the above at least one technical solution adopted by the embodiments of the present application can achieve the beneficial effects at least including:

[0015] By at least partially bending the conductive section of the armored heater to form a bending part, when it is necessary to coat resin on the cold end of the armored heater, a pulling force can be applied to the conductive section, the bending part can be stretched to deform, so that the cold end of the armored heater moves to the outside of the hot stage support tube, thereby facilitating the resin coating of the cold end of the armored heater. When the coating is completed, under the action of the restoring force of the bending part, the cold end of the armored heater returns to the inside of the hot stage support tube, thereby facilitating the subsequent installation operation. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed in the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0017] Figure 1 is a structural schematic diagram of a hot stage provided by the present application;

[0018] Figure 2 is a bottom view of a hot stage body of the hot stage provided by the present application;

[0019] Figure 3 is a structural schematic diagram of an armored heater of the hot stage provided by the present application.

[0020] In the figure, 1, hot stage main body; 2, hot stage cover; 3, hot stage support tube; 4, armored heater; 41, heating section; 42, conductive section; 421, bending part; 43, sleeve; 44, heating wire; 45, wire; 46, insulating heat-conductive filler; 5, power supply connector; 6, power supply support; 7, through hole; 8, accommodating groove. DETAILED DESCRIPTION

[0021] The embodiments of the present application will be described in detail below with reference to the drawings.

[0022] The above and other aspects of the present application will become more apparent by describing in detail the embodiments thereof with reference to the attached drawings in which:

[0023] It is to be understood that the foregoing description is that of certain examples of the application and that numerous changes in the details of construction and the combination and arrangement of parts can be made by those skilled in the art without departing from the scope of the application.

[0024] It is also to be understood that the following description is only illustrative of the aspects of the application and that no limitation of the scope of the application is intended to be implied by whatever can be described in the specification as the preferred, ideal, or even example aspects.

[0025] In addition, in the following description, specific details are set forth to provide a thorough understanding of examples. However, one skilled in the relevant art will recognize that the aspects can be practiced without one or more of the specific details, or with other methods, components, materials, and so forth.

[0026] Noun explanation, vacuum brazing: two parts are pressed together, and the solder is filled in the middle, and then placed in a vacuum furnace for heating. Under high temperature and high pressure, the two parts are welded together by the action of the solder.

[0027] The technical solutions provided by the embodiments of the present application are described below with reference to the drawings.

[0028] As Figure 1 shown, a hot stage includes a hot stage body 1, a hot stage cover 2, and a hot stage support tube 3, the hot stage cover 2 at least covers the bottom part of the hot stage body 1, the hot stage support tube 3 is connected between the hot stage cover 2, the hot stage further includes an armored heater 4, the armored heater 4 includes a heating section 41 and a conductive section 42, the heating section 41 is arranged at the bottom of the hot stage body 1, the conductive section 42 extends into the hot stage support tube 3, and the conductive section 42 is at least partially bent to form a bending part 421.

[0029] By bending the conductive section 42 of the armored heater 4 to form the bending part 421, when it is necessary to coat the cold end of the armored heater 4 (i.e. the end of the conductive section 42) with resin, a pulling force can be applied to the outer end of the conductive section 42, the bending part 421 can be stretched to deform, so that the cold end of the armored heater 4 moves to the outside of the hot stage support tube 3, thereby facilitating the resin coating of the cold end of the armored heater 4, and when the coating is completed, the cold end of the armored heater 4 returns to the inside of the hot stage support tube 3 under the action of the restoring force of the bending part 421, thereby facilitating the later installation operation.

[0030] The specific manufacturing steps of the hot stage are as follows: first, bend the armored heater 4 into a predetermined target embedded in the hot stage body 1, press the hot stage cover 2 and the hot stage body 1 together and fill the solder in the middle, press the hot stage support tube 3 and the hot stage cover 2 together and fill the solder in the middle, then perform vacuum brazing as a whole, since the resin cannot withstand the high-temperature environment of vacuum brazing, it is necessary to apply insulating resin material after the welding is completed. Since the resin is applied in the later production, the conductive section 42 of the armored heater 4 is locally bent, so that the cold end of the armored heater 4 can be pulled out of the hot stage support tube 3 when the insulating resin is applied, thereby facilitating the resin coating.

[0031] As Figure 1 shown, in some embodiments, when the conductive section 42 is subjected to a force, the bending part 421 is stretched to enable the conductive section 42 to at least partially extend to the outside of the hot stage support tube 3, when it is necessary to coat the cold end of the armored heater 4 with resin, the conductive section 42 can be pulled away from the hot stage support tube 3, the bending part 421 deforms after being subjected to a pulling force, ensuring that the cold end of the armored heater 4 can move to the outside of the hot stage support tube 3, thereby facilitating the resin coating.

[0032] AsFigure 1 As shown in some embodiments, the length of the bending part 421 is not less than one fifth of the length of the hot table support tube 3. By setting the length of the bending part 421 to be greater than one fifth of the length of the hot table support tube 3, it is ensured that the cold end of the armored heater 4 can be pulled out to the outside of the hot table support tube 3.

[0033] As shown in some embodiments, the bending part 421 is spring-shaped. By setting the bending part 421 to be spring-shaped, the bending part 421 has a good elastic deformation range, so that the cold end of the armored heater 4 can be pulled out to the outside of the hot table support tube 3. At the same time, the spring shape has good restoring force, so that the cold end of the armored heater 4 after the completion of the resin coating can return to the inside of the hot table support tube 3. Figure 1 As shown in some embodiments, the bending part 421 is spring-shaped. By setting the bending part 421 to be spring-shaped, the bending part 421 has a good elastic deformation range, so that the cold end of the armored heater 4 can be pulled out to the outside of the hot table support tube 3. At the same time, the spring shape has good restoring force, so that the cold end of the armored heater 4 after the completion of the resin coating can return to the inside of the hot table support tube 3.

[0034] Figure 1 As shown in some embodiments, the hot table further comprises a power connector 5, and the conductive section 42 is electrically connected with the power connector 5. By setting the power connector 5, the power connector 5 is directly connected with the conductive section 42 of the armored heater 4, and the armored heater 4 can be powered through the power connector 5.

[0035] As shown in some embodiments, the hot table further comprises a power support 6, and the power connector 5 is installed on the power support 6. The power support 6 is installed on the end of the hot table support tube 3 away from the hot table. By setting the power support 6, the power connector 5 is installed on the power support 6 through screws, and the power support 6 is installed on the bottom end of the hot table support tube 3 through screws. The conductive section 42 is inside the hot table support tube 3. Figure 1 As shown in some embodiments, the hot table cover 2 is provided with a through hole 7 in the center for the armored heater 4 to pass through. By setting the through hole 7 in the center of the hot table cover 2, the conductive section 42 of the armored heater 4 enters the inside of the hot table support tube 3 after passing through the through hole 7.

[0036] Figure 1 As shown in some embodiments, the hot table body 1 is provided with a containing groove 8 at the bottom, and the containing groove 8 is spiral-shaped. The heating section 41 is arranged in the containing groove 8. By setting the spiral containing groove 8 at the bottom of the hot table body 1, the heating section 41 is inside the containing groove 8, which ensures uniform heating of the hot table body 1.

[0037] As shown in some embodiments, the hot table body 1 is provided with a containing groove 8 at the bottom, and the containing groove 8 is spiral-shaped. The heating section 41 is arranged in the containing groove 8. By setting the spiral containing groove 8 at the bottom of the hot table body 1, the heating section 41 is inside the containing groove 8, which ensures uniform heating of the hot table body 1. Figures 1-2 As shown in some embodiments, the hot table body 1 is provided with a containing groove 8 at the bottom, and the containing groove 8 is spiral-shaped. The heating section 41 is arranged in the containing groove 8. By setting the spiral containing groove 8 at the bottom of the hot table body 1, the heating section 41 is inside the containing groove 8, which ensures uniform heating of the hot table body 1.

[0038] Figure 3 ​​​As shown, in some embodiments, the armored heater 4 comprises a sleeve 43, an insulating and heat-conducting filler 46, an electric heating wire 44 arranged inside the sleeve 43, and a wire 45 electrically connected between the electric heating wire 44 and extending outside the sleeve 43. The armored heater 4 is made by welding the metal wire 45 and the electric heating wire 44 together, then sleeving with magnesium oxide ceramic beads, then penetrating into the armored sleeve 43, and finally stretching the armored sleeve 43. Since the armored sleeve 43 will squeeze the magnesium oxide ceramic beads during the stretching process, the magnesium oxide ceramic beads will be crushed and filled in the armored sleeve 43, thereby playing the functions of insulation and heat conduction.

[0039] It should be noted that the part with the electric heating wire 44 forms the heating section 41, and the part with the wire 45 forms the conductive section 42.

[0040] In some embodiments, the insulating and heat-conducting filler comprises magnesium oxide ceramic beads, which have good insulation and heat conduction functions, and can ensure the heat of the electric heating wire 44 to be transferred to the hot table body 1. The material of the armored sleeve 43 is stainless steel.

[0041] The same or similar parts among the various embodiments in the specification can be referred to each other, and each embodiment focuses on the difference from other embodiments. In particular, for the method embodiments described later, since they are corresponding to the system, the description is relatively simple, and the relevant parts can be referred to the part of the system embodiment.

[0042] The above is merely a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art can easily think of changes or replacements within the technical range disclosed in the present application, which should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A heating platform, comprising a heating platform body, a heating platform cover, and a heating platform support tube, wherein the heating platform cover at least covers a portion of the bottom area of ​​the heating platform body, and the heating platform support tube is connected to the heating platform cover, characterized in that: The heating platform further includes an armored heater, which includes a heating section and a conductive section. The heating section is arranged at the bottom of the heating platform body, and the conductive section extends into the heating platform support tube. The conductive section is at least partially bent to form a bent portion.

2. The hot stage according to claim 1, wherein When the conductive segment is subjected to force, the bent portion is stretched, so that at least a portion of the conductive segment can extend outside the heating platform support tube.

3. The hot stage according to claim 2, wherein: The length of the bent portion is not less than one fifth of the length of the heating platform support tube.

4. The hot stage according to claim 3, wherein: The bending portion is spring-shaped.

5. The hot stage according to claim 1, wherein The heating platform further includes a power connector, and the conductive segment is electrically connected to the power connector.

6. The hot stage according to claim 5, wherein: The heating platform further includes a power supply support member, the power supply connector is mounted on the power supply support member, and the power supply support member is mounted on one end of the heating platform support tube away from the heating platform.

7. The hot stage according to claim 1, wherein: A through hole for the armored heater to pass through is opened at the center of the hot stage cover.

8. The hot stage according to claim 1, wherein: A receiving groove is provided at the bottom of the heating platform body. The receiving groove is spiral-shaped, and the heating section is arranged in the receiving groove.

9. The hot stage according to claim 1, wherein The armored heater includes a sleeve, an insulating thermally conductive filler, a heating wire and a conductive wire. The heating wire is arranged inside the sleeve, the insulating thermally conductive filler is filled in the sleeve, the conductive wire is electrically connected to the heating wire, and the conductive wire extends to the outside of the sleeve.

10. The hot stage according to claim 9, wherein: The filler includes magnesium oxide ceramic beads.

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