Cleaning box

Abstract

The utility model provides a cleaning box, and relates to the technical field of silicon wafer cleaning, and the cleaning box comprises a containing part which is provided with a placement surface, and the placement surface is used for placing at least one object to be cleaned; the permeation part is arranged on the placement face and provided with a channel for fluid to pass through so as to filter fluid attached to the placement face and the to-be-cleaned object. According to user requirements, a single to-be-cleaned object placed on the placement surface can be placed in the cleaning pool to be cleaned, a plurality of to-be-cleaned objects placed on the placement surface can also be placed in the cleaning pool to be cleaned at the same time, and after cleaning, fluid attached to the to-be-cleaned objects and fluid attached to the placement surface can be used for cleaning the to-be-cleaned objects and the to-be-cleaned objects. Under the action of gravity, the water is filtered out through a channel of the permeation part, so that the technical problems in the prior art are effectively solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to silicon wafer cleaning technical field especially is related to a cleaning box. BACKGROUND

[0002] Wafer refers to the silicon wafer used to make silicon semiconductor circuit, and its raw material is silicon, high-purity polycrystalline silicon is dissolved and then doped into silicon crystal seed, and then slowly pulled out to form cylindrical monocrystalline silicon, after grinding, polishing and slicing, silicon crystal rod forms silicon wafer, that is wafer.

[0003] At present, when the silicon wafer is cleaned, only single piece cleaning can be carried out, and then the cleaning efficiency of the silicon wafer is too low.

[0004] Therefore, the above technical problems need to be further solved. UTILITY MODEL CONTENT

[0005] The utility model aims at providing a cleaning box to alleviate the technical problems in the above related technologies.

[0006] The utility model provides a cleaning box, which comprises:

[0007] The holding part has a placing surface for placing at least one object to be cleaned.

[0008] The penetration part is arranged on the placing surface and has a channel for fluid to pass through, so as to filter out the fluid attached to the placing surface and the object to be cleaned.

[0009] The purpose of the present application and the technical problems thereof can also be achieved by the following technical measures.

[0010] Optionally, the cleaning box described above further comprises:

[0011] The support part is connected with the holding part.

[0012] Optionally, the cleaning box described above, wherein the holding part comprises:

[0013] A plurality of bearing plates are stacked and arranged in a vertical direction and are connected with the support part in sequence, the side of each bearing plate away from the ground forms the placing surface, the placing surface of each bearing plate is used for placing at least one object to be cleaned, and the penetration part is arranged on the placing surface of each bearing plate.

[0014] Optionally, the cleaning box described above, wherein the holding part comprises:

[0015] A bearing plate, the bearing plate is connected with the support part, a side of the bearing plate away from the ground forms the placing surface, the placing surface is used for placing at least one of the objects to be cleaned, the placing surface of the bearing plate is provided with the permeation part.

[0016] Optionally, the cleaning box as claimed in the preceding aspect, wherein the permeation part comprises:

[0017] A plurality of permeation openings are arranged on each of the placing surfaces, the permeation openings penetrate the bearing plate along the direction of gravity to communicate both sides of the placing surface.

[0018] Optionally, the cleaning box as claimed in the preceding aspect, wherein the permeation part further comprises:

[0019] At least one flow guide channel, the flow guide channel is sunken along the direction of gravity from the placing surface, the flow guide channel extends parallel to the placing surface and communicates to the outside of the placing surface.

[0020] Optionally, the cleaning box as claimed in the preceding aspect, wherein the flow guide channel is provided with a plurality of spaced permeation openings.

[0021] Optionally, the cleaning box as claimed in the preceding aspect, wherein the bearing plate is provided with a first connecting lug and a second connecting lug at both ends along any radial direction, and the support part is connected with the connecting lugs.

[0022] Optionally, the cleaning box as claimed in the preceding aspect, wherein the support part comprises:

[0023] A first vertical rod and a second vertical rod, the first vertical rod and the second vertical rod extend parallel to each other and perpendicular to the ground, the first vertical rod penetrates into the first connecting lug, and the second vertical rod penetrates into the second connecting lug.

[0024] A handle, two ends of the handle are respectively detachably connected with one end of the first vertical rod and the second vertical rod penetrating out of the first connecting lug and the second connecting lug.

[0025] Optionally, the cleaning box as claimed in the preceding aspect, wherein the handle comprises:

[0026] A cross rod, a first end of the cross rod is connected with the first vertical rod in a plug-in manner, a second end of the cross rod is connected with the second vertical rod in a plug-in manner, and the cross rod is located above the containing part.

[0027] By means of the above technical solution, the cleaning box of the present application has at least the following advantages:

[0028] The cleaning box provided by the embodiment of the application can place a single to-be-cleaned object on the placement surface into the cleaning pool for cleaning according to the user demand, and can also place multiple to-be-cleaned objects on the placement surface into the cleaning pool for cleaning at the same time, and the fluid attached to the to-be-cleaned objects and the fluid attached to the placement surface are filtered through the channel of the penetration part under the action of gravity, thereby effectively solving the technical problems in the prior art. BRIEF DESCRIPTION OF DRAWINGS

[0029] In order to more clearly illustrate the technical scheme in the specific embodiment of the application or the related art, the drawings needed to be used in the specific embodiment or the related art description will be briefly introduced as follows. Obviously, the drawings in the following description are some embodiments of the application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0030] Figure 1 The structure diagram of the cleaning box provided by the embodiment of the application is shown in the figure.

[0031] Figure 2 The exploded structure diagram of the cleaning box provided by the embodiment of the application is shown in the figure.

[0032] Figure 3 The structure diagram of the first perspective view of the bearing plate of the cleaning box provided by the embodiment of the application is shown in the figure.

[0033] Figure 4 The structure diagram of the second perspective view of the bearing plate of the cleaning box provided by the embodiment of the application is shown in the figure.

[0034] Icon:

[0035] 1, bearing plate; 2, penetration part; 21, penetration opening; 22, flow guide channel; 3, support part; 31, first vertical rod; 32, second vertical rod; 33, horizontal rod; 4, first connecting lug; 5, second connecting lug. DETAILED DESCRIPTION

[0036] The technical scheme of the application will be described in detail below with reference to the drawings. Obviously, the described embodiments are some embodiments of the application, rather than all the embodiments. Based on the embodiments in the application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the application.

[0037] In the description of the utility model, it needs to explain, the term "center", "upper", "lower", "left", "right", "vertical", "horizontal", "internal", "external" and so on indicate the orientation or position relation based on the orientation or position relation shown in the drawing, only for the convenience of describing the utility model and simplifying the description, and not indicate or imply that the device or element indicated must have a particular orientation, a particular orientation and operation, therefore, it cannot be understood as a limitation on the utility model. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0038] In the description of the utility model, it needs to explain, unless otherwise specified and limited, the terms "mounting", "connecting", "connection" should be understood broadly, for example, it can be fixed connection, or detachable connection, or integrally connected; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through intermediate medium, it can be the communication inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0039] Embodiment

[0040] As Figure 1 - Figure 4 The utility model discloses an embodiment proposes the cleaning box, including: the department of containing and permeation department 2;

[0041] The department of containing has the surface of arrangement, and the surface of arrangement is used for placing at least one to be cleaned object;

[0042] The permeation department 2 is arranged on the surface of arrangement, and the permeation department 2 has the passage for fluid to pass through, to filter out the fluid attached on the surface of arrangement and the to be cleaned object.

[0043] Specifically, the department of containing has the function of bearing and containing. The department of containing can be a groove with an opening, the to be cleaned object is placed in the groove through the opening, one or even multiple to be cleaned objects can be placed in the groove, and the to be cleaned object can be placed in a flat manner or in a stacked manner. The department of containing can also be a separate plate or a structure with a flat surface capable of bearing objects. One or even multiple to be cleaned objects can be placed in a flat manner or in a stacked manner. The department of containing can also be a multi-layer structure, each layer can hold one or even multiple to be cleaned objects, and the to be cleaned object can be placed in a flat manner or in a stacked manner. The surface of arrangement is used for bearing objects to support the placed objects (to be cleaned objects).

[0044] The permeable portion 2 is used to filter out the fluid (liquid, that is, cleaning liquid) used to clean the object to be cleaned. The permeable portion 2 is arranged on the placement surface, and the object to be cleaned is placed on the placement surface. After the object to be cleaned is cleaned, the holding portion is stationary. Under the action of gravity, the fluid attached to the object to be cleaned will flow along the surrounding side of the object to be cleaned, and will separate from the object to be cleaned and fall onto the placement surface. The fluid attached to the placement surface and the fluid fallen onto the placement surface will flow into the channel to achieve the effect of filtering out the fluid attached to the placement surface and the object to be cleaned.

[0045] It should be noted that the object to be cleaned is a wafer, which refers to a silicon wafer used to make silicon semiconductor circuits. Its original material is silicon. High-purity polysilicon is dissolved and then doped with silicon crystal seeds, which are then slowly pulled out to form cylindrical single-crystal silicon. The silicon crystal rod is ground, polished, and sliced ​​to form a silicon wafer, which is a wafer. The cleaning methods of wafers mainly include physical cleaning and chemical cleaning. Physical cleaning mainly relies on mechanical methods, such as using a brush for mechanical cleaning, or using ultrasonic vibrations to generate tiny bubbles, and using the shock wave when the bubbles burst to blow away the pollution and particles on the wafer. Physical cleaning methods also include using ice particles and aerosols for purging. This method is suitable for removing larger contamination particles. The cleaning box of this application is a device required for ultrasonic cleaning of wafers.

[0046] In addition, the user can place the container containing the items to be cleaned into the cleaning tank (ultrasonic cleaning) by hanging a wire, holding it or using a push rod. After cleaning, the container can be removed from the cleaning tank in the same way. The specific method of ultrasonic cleaning is known to technicians and will not be described in detail here.

[0047] The cleaning box provided by the embodiment of the present invention can, according to user needs, not only place a single object to be cleaned placed on the placement surface into the cleaning tank for cleaning, but also place multiple objects to be cleaned placed on the placement surface into the cleaning tank for cleaning at the same time. After cleaning, the fluid attached to the object to be cleaned and the fluid attached to the placement surface are filtered out through the channel of the permeable part 2 under the action of gravity, which effectively solves the technical problems existing in the prior art.

[0048] like Figure 1 - Figure 2 As shown, in a specific implementation, it also includes: a support portion 3;

[0049] The supporting portion 3 is connected to the containing portion.

[0050] Specifically, the support part 3 is used to connect the container part. The user can hang the support part 3 through a hanging line and place the container part into the cleaning pool, or place the container part into the cleaning pool through a rod body component (a top rod or a rod with a hook), or hold the support part 3 to place the container part into the cleaning pool.

[0051] As shown in the specific implementation, the containing part comprises a plurality of bearing plates 1 stacked and arranged in a vertical direction. Figure 1 Figure 4 The plurality of bearing plates 1 are sequentially connected with the support part 3, and each bearing plate 1 forms the placement surface on the side away from the ground. At least one of the objects to be cleaned is placed on the placement surface of each bearing plate 1, and the penetration part 2 is arranged on the placement surface of each bearing plate 1.

[0052] The plurality of bearing plates 1 are sequentially connected with the support part 3, and each bearing plate 1 forms the placement surface on the side away from the ground. At least one of the objects to be cleaned is placed on the placement surface of each bearing plate 1, and the penetration part 2 is arranged on the placement surface of each bearing plate 1.

[0053] Specifically, the present application provides a first containing part, that is, the containing part comprises a plurality of bearing plates 1.

[0054] The plurality of bearing plates 1 are stacked and arranged in a vertical direction, and the plurality of bearing plates 1 are sequentially connected with the support part 3. The vertical direction is a direction perpendicular to the ground. The adjacent bearing plates 1 have a spacing. This structure design can facilitate the placement of at least one object to be cleaned on the placement surface of the bearing plate 1 at different layers. The skilled person can select how many objects to be cleaned are placed on each placement surface according to actual needs, such as: one or even multiple objects to be cleaned can be placed on the placement surface of the bearing plate 1, and the placement mode can adopt a flat placement mode or a stacking mode. In this embodiment, one object to be cleaned is preferably placed on each placement surface. The spacing between adjacent bearing plates 1 can be the same or different, and the skilled person can select according to actual needs. In this embodiment, the spacing distance between adjacent bearing plates 1 is preferably the same spacing distance.

[0055] In the specific implementation, the containing part comprises one bearing plate 1.

[0056] The bearing plate 1 is connected with the support part 3, and the side of the bearing plate 1 away from the ground forms the placement surface. At least one of the objects to be cleaned is placed on the placement surface, and the penetration part 2 is arranged on the placement surface of the bearing plate 1.

[0057] Specifically, the present application provides a second containing part, that is, the containing part comprises one bearing plate 1.

[0058] The placement surface of the bearing plate 1 can place at least one object to be cleaned. The skilled person can select how many objects to be cleaned are placed on the placement surface according to actual needs, such as: one or even multiple objects to be cleaned can be placed on the placement surface of the bearing plate 1, and the placement mode can adopt a flat placement mode or a stacking mode. In this embodiment, the placement surface of the bearing plate 1 can place one or more objects to be cleaned.

[0059] ​As Figure 1 As Figure 4 shown in the two embodiments of the holding part described above, it should be noted that the shape of the carrier plate 1 can be regular or irregular, such as circular, rectangular, etc. The shape of the carrier plate 1 in this application is preferably circular. Each carrier plate 1 is large enough to place one or even multiple objects to be cleaned on the placement surface of the carrier plate 1, which can be placed in a flat manner or in a stacked manner.

[0060] As Figure 1 As Figure 4 shown, in order to improve the stability of the placement of the objects to be cleaned on the placement surface of the carrier plate 1 in the two embodiments of the holding part described above, a circular groove is provided on the side of the carrier plate 1 away from the ground, the shape of the cross section of the circular groove in the horizontal direction is adapted to the shape of the cross section of the object to be cleaned placed on the placement surface in the horizontal direction, and the groove bottom of the circular groove forms the placement surface. The object to be cleaned can be placed on the groove bottom (placement surface) of the circular groove through the groove opening of the circular groove. The design of the circular groove can limit the movement of the object to be cleaned on the placement surface, thereby affecting the cleaning effect of the device on the object to be cleaned in cooperation with the ultrasonic wave.

[0061] Each carrier plate 1 can be connected to the support part 3 in a detachable manner or in a fixed connection manner, such as bolt connection, welding, plug-in connection, clamping or bonding.

[0062] As Figure 1 As Figure 4 shown, in a specific implementation, the penetration part 2 includes a plurality of penetration openings 21.

[0063] The plurality of penetration openings 21 are arranged on each placement surface with a spacing, and the penetration openings 21 penetrate the carrier plate 1 in the direction of gravity to communicate both sides of the placement surface.

[0064] Specifically, the penetration part 2 includes a plurality of penetration openings 21, and the adjacent penetration openings 21 have a spacing. The skilled person can select the distance between the adjacent penetration openings 21 according to the actual needs. In this application, a plurality of penetration openings 21 are uniformly distributed on each placement surface, and the spacing distance between each adjacent penetration opening 21 is the same.

[0065] The penetration openings 21 penetrate the corresponding carrier plate 1 to communicate both sides of the placement surface (the side of each carrier plate 1 opposite to the ground is the lower surface, and the side of each carrier plate 1 away from the ground is the upper surface). This structure design can facilitate the penetration openings 21 to have the effect of filtering the fluid.

[0066] A plurality of penetration openings 21 are arranged on the placement surface (the groove bottom) and penetrate through the corresponding bearing plate 1 to communicate both sides of the placement surface. The following is an example to illustrate the first embodiment of the holding part:

[0067] Each groove bottom is placed with a to-be-cleaned object. After the to-be-cleaned object is cleaned, the holding part is static, and under the action of gravity, the fluid attached to the to-be-cleaned object will flow along the circumferential side of the to-be-cleaned object and fall off the to-be-cleaned object to the placement surface. The fluid attached to the placement surface and the fluid falling onto the placement surface will enter the penetration openings 21, and through layer-by-layer falling, the fluid will finally fall off the entire holding part, thereby achieving the effect of filtering the fluid attached to the placement surface and the to-be-cleaned object.

[0068] The shape of the cross section of the penetration opening 21 in the horizontal direction can be a regular shape or an irregular shape, which can be selected by those skilled in the art according to actual needs, and the present application is not limited. In the present application, the shape of the cross section of the penetration opening 21 in the horizontal direction is preferably circular. In addition, the horizontal direction is the direction parallel to the ground.

[0069] As shown in Figure 1 - Figure 3 In a specific implementation, the penetration part 2 further comprises at least one flow guide channel 22.

[0070] The flow guide channel 22 is sunken by the placement surface in the direction of gravity, and the flow guide channel 22 extends parallel to the placement surface and communicates to the outside of the placement surface.

[0071] Specifically, the penetration part 2 of the present application further comprises a flow guide channel 22. The arrangement of the flow guide channel 22 not only has the effect of discharging fluid (fluid attached to the placement surface and fluid attached to the to-be-cleaned object), but also has the effect of reducing the impact force on the to-be-cleaned object (after the bearing plate 1 with the to-be-cleaned object is placed into the fluid, the fluid will pass through the penetration opening 21 to give the to-be-cleaned object an impact force, which easily causes the to-be-cleaned object to be lifted away from the circular groove). Since the liquid inlet direction of the flow guide channel 22 after entering the cleaning pool is different from the liquid inlet direction of the penetration opening 21, the impact force of the penetration opening 21 on the to-be-cleaned object is reduced, so that the to-be-cleaned object can be stably placed on the bearing plate 1 during immersion in the cleaning pool.

[0072] The number of flow guide channels 22 can be determined according to actual needs. In the present application, the number of flow guide channels 22 is preferably two. The two flow guide channels 22 are cross-distributed on the placement surface, and the intersection of the two flow guide channels 22 coincides with the center of the placement surface (the groove bottom).

[0073] When the carrying plate 1 with the objects to be cleaned enters the fluid, the fluid will give an impact force to the objects to be cleaned through the penetration openings 21 on the carrying plate 1, but under the action of the flow guide channels 22, the flow guide channels 22 will reduce the supporting effect of the impact force on the objects to be cleaned, thereby avoiding the impact force from lifting the objects to be cleaned away from the circular grooves, so as to affect the cleaning effect of the device on the objects to be cleaned in cooperation with the ultrasonic waves. In addition, the flow guide channels 22 also have the effect of discharging fluid (the flow guide channels 22 are recessed along the direction of gravity from the placement surface, and the flow guide channels 22 extend in parallel with the placement surface and are communicated to the outside of the placement surface), which can further enhance the effect of the device in filtering the fluid attached to the placement surface and the objects to be cleaned.

[0074] As shown in Figure 1 - Figure 3 In specific implementation, a plurality of penetration openings 21 are arranged in the flow guide channels 22.

[0075] Specifically, the design of this structure can further enhance the effect of the flow guide channels 22 in reducing the impact force while improving the effect of the device in filtering the fluid attached to the placement surface and the objects to be cleaned.

[0076] As shown in Figure 1 - Figure 4 In specific implementation, the carrying plate 1 is provided with a first connecting lug 4 and a second connecting lug 5 at both ends along any radial direction, and the support part 3 is connected with the connecting lugs.

[0077] Specifically, each carrying plate 1 is fixedly connected or detachably connected between the first connecting lug 4 and the second connecting lug 5 and the support part 3. The first connecting lug 4 and the second connecting lug 5 can be connected with the carrying plate 1, or can be spaced apart by other devices. The connection mode can be detachable or fixedly connected, such as bolt connection, plug-in connection, clamping connection, welding or bonding, etc. In order to improve the stability of the connection between the carrying plate 1 and the support part 3, the carrying plate 1, the first connecting lug 4 and the second connecting lug 5 are preferably integrally formed by one-piece casting in this application.

[0078] As shown in Figure 1 - Figure 2 In specific implementation, the support part 3 includes a first vertical rod 31, a second vertical rod 32 and a handle.

[0079] The first vertical rod 31 and the second vertical rod 32 extend in parallel with each other and are perpendicular to the ground. The first vertical rod 31 penetrates into the first connecting lug 4, and the second vertical rod 32 penetrates into the second connecting lug 5.

[0080] A handle, two ends of the handle are respectively detachably connected with one end of the first connecting lug 4 and the second connecting lug 5 through which the first vertical rod 31 and the second vertical rod 32 pass.

[0081] Specifically, the support part 3 in the present application is preferably used to place the containing part in a cleaning tank (ultrasonic cleaning) by hand. The present application provides an embodiment of a handheld support part 3, that is, the support part 3 comprises a vertical rod, a second vertical rod 32 and a handle.

[0082] The first vertical rod 31 and the second vertical rod 32 are parallel to each other and perpendicular to the ground. The first vertical rod 31 is inserted into the first connecting lug 4 of the bearing plate 1 and detachably connected with the first connecting lug 4 through a bolt, and the second vertical rod 32 is inserted into the second connecting lug 5 of the bearing plate 1 and detachably connected with the second connecting lug 5 through a bolt. This structure design can facilitate the user to maintain the device later.

[0083] The handle is connected with the first vertical rod 31 and the second vertical rod 32, and the handle is used for the user to hold by hand so as to facilitate the user to place the containing part containing the objects to be cleaned in a cleaning tank (ultrasonic cleaning).

[0084] In a specific implementation, the handle comprises:

[0085] A horizontal rod 33, a first end of the horizontal rod 33 is connected with the first vertical rod 31 in a plug-in manner, a second end of the horizontal rod 33 is connected with the second vertical rod 32 in a plug-in manner, and the horizontal rod 33 is located above the containing part.

[0086] Specifically, as shown in Figure 1 - Figure 2 The present application provides a first handheld embodiment, that is, the handle comprises a horizontal rod 33. The horizontal rod 33 is a straight rod body, which is in the shape of a Chinese character, a first end of the horizontal rod 33 is plugged into the first vertical rod 31 and fixed through a bolt, and a second end of the horizontal rod 33 is plugged into the second vertical rod 32 and fixed through a bolt. This structure design can facilitate the user to maintain the device later, and the part of the horizontal rod 33 between the first vertical rod 31 and the second vertical rod 32 can be used for the user to hold by hand.

[0087] The second portable embodiment is provided, that is, the portable device comprises a U-shaped rod. The first end of the U-shaped rod is rotatably connected to the middle part of the first vertical rod 31, the second end of the U-shaped rod is rotatably connected to the middle part of the second vertical rod 32, and the U-shaped rod can rotate on the first vertical rod 31 and the second vertical rod 32 and can reciprocatingly rotate around the whole circumference of the container, the first vertical rod 31 and the second vertical rod 32. The structure design can make the device more flexible when being held by hand, and the user can also save the strength required during cleaning according to the principle of lever. The first end of the U-shaped rod and the first vertical rod 31 are connected through the cooperation of the bearing and the shaft to realize the effect of rotatable connection, and the second end of the U-shaped rod and the second vertical rod 32 are connected through the cooperation of the bearing and the shaft to realize the effect of rotatable connection.

[0088] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A cleaning cassette characterized by, The washing box comprises: a containing part having a placing surface for placing at least one object to be cleaned; a penetrating part provided on the placing surface, the penetrating part having a channel for fluid to pass through so as to filter the fluid attached to the placing surface and the object to be cleaned; a supporting part connected with the containing part; the containing part comprises: a plurality of bearing plates stacked in a vertical direction and arranged at intervals, sequentially connected with the supporting part, each bearing plate forming the placing surface on a side away from the ground, the placing surface of each bearing plate being used for placing at least one object to be cleaned, and the penetrating part being provided on the placing surface of each bearing plate.

2. The cleaning cassette of claim 1, wherein, the containing part comprises: one bearing plate connected with the supporting part, the bearing plate forming the placing surface on a side away from the ground, the placing surface being used for placing at least one object to be cleaned, and the penetrating part being provided on the placing surface of the bearing plate.

3. The cleaning cassette of any one of claims 1-2, wherein, the penetrating part comprises: a plurality of penetrating openings arranged at intervals on each placing surface, the penetrating openings penetrating the bearing plate in a direction of gravity so as to communicate both sides of the placing surface.

4. The cleaning cassette of claim 3, wherein, the penetrating part further comprises: at least one flow guide channel, the flow guide channel being sunken from the placing surface in the direction of gravity, the flow guide channel extending parallel to the placing surface and communicating to the outside of the placing surface.

5. The washing box according to claim 4, wherein a plurality of penetrating openings arranged at intervals are provided in the flow guide channel.

6. The washing box according to any one of claims 1-2, wherein first and second connecting ears are provided on both ends of the bearing plate in any radial direction, and the supporting part is connected with the connecting ears.

7. The cleaning cassette of claim 6, wherein, the supporting part comprises: first and second vertical rods, the first and second vertical rods extending in parallel to each other and perpendicularly to the ground, the first vertical rod penetrating into the first connecting ear, and the second vertical rod penetrating into the second connecting ear; a handle, two ends of the handle being detachably connected with the ends of the first and second vertical rods penetrating out of the first and second connecting ears.

8. The cleaning cassette of claim 7, wherein, the handle comprises: a horizontal rod, a first end of the horizontal rod being connected with the first vertical rod by plug-in connection, a second end of the horizontal rod being connected with the second vertical rod by plug-in connection, and the horizontal rod being located above the containing part.

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